• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.13 no.7
• /
• pp.612-616
• /
• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

• Journal of Sensor Science and Technology
• /
• v.6 no.5
• /
• pp.400-406
• /
• 1997

The electrical and physical characteristics of aluminum oxide and Pt thin films on it, deposited by reactive sputtering and DC magnetron sputtering, respectively, were analyzed with increasing annealing temperature($400{\sim}800^{\circ}C$) by four point probe, SEM and XRD. Under $600^{\circ}C$ of annealing temperature, aluminum oxide had the properties of improving Pt adhesion to $SiO_{2}$ and insulation without chemical reaction to Pt thin films and the resistivity of Pt thin films was improved. But these properties of aluminum oxide and Pt thin films on it were degraded over $700^{\circ}C$ of annealing temperature because aluminum oxide was changed into metal aluminum and then reacted to Pt thin films deposited on it. The thermal characteristics of Pt micro heater were analyzed with Pt-RTD integrated on the same substrate. In the analysis of properties of Pt micro heater, active area was smaller size, Pt micro heater had better thermal characteristics. The temperature of Pt micro heater with active area, $200{\mu}m{\times}200{\mu}m$ was up to $400^{\circ}C$ with 1.5watts of the heating power.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.07a
• /
• pp.569-572
• /
• 2000

This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10$\mu\textrm{m}$ thick silicon membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD(Resistance Thermometer Device)on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280$^{\circ}C$ at input Power 0.9 W; for the SOI membrane with 10 trenches, it is 580$^{\circ}C$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro thermal sensors and actuators.

• Journal of the Korea Institute of Building Construction
• /
• v.16 no.1
• /
• pp.25-34
• /
• 2016

From 1990's, a study on the development of exothermic concrete, a concrete which electro-conductive material is mixed, has been proceeded. However, due to the difficulty of exothermic reproducibility of concrete specimen, the study has been unable to continuously carried out. Accordingly, this study was focused on developing an exothermic concrete for the purpose of snow-melting material. Cement paste and mortar specimens mixed with graphite, conductive metal powder and chemical admixture were made. The evaluation of exothermic performance and reproducibility was conducted under $-2^{\circ}C$ of low temperature. In addition, micro-chemical analysis was carried out to investigate a cause of exothermic reproducibility. As a test result, the specimen mixed with graphite and superplasticizer with air entrained showed the best exothermic performance and reproducibility. Through micro-chemical analysis, it is judged that polymer or methacrylic acid (MAA), the contents inside the superplasticizer with air entrained, gave exothermic reproducibility by generating the electrochemical reaction with graphite.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.11 no.11
• /
• pp.996-1000
• /
• 1998

This paper describes the characteristics of Pt microheater using aluminum oxide films as medium layer and its application to flow sensors. Pt microheater have heating temperature of $390^{\circ}C$ at heating power of 1.2 W. Output voltages of flow sensors which were fabricated by integrating sensing-part with heating-part increase as gas flow rate and its conductivity increase. At $O_2$ flow rate of 2000 sccm, heating power of 0.8 W, output voltage of flow sensor is 101 mV under bridge-applied voltage of 5 V.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1996.05a
• /
• pp.110-110
• /
• 1996

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.13 no.6
• /
• pp.509-513
• /
• 2000

The physical and electrical characteristics of MgO and Pt thin-films on it deposited by reactive sputtering and rf magnetron sputtering respectively were analyzed with annealing temperature and time by four point probe SEM and XRD. Under annealing conditions of 100$0^{\circ}C$ and 2 hr, MgO thin-film had the properties of improving Pt adhesion to SiO$_2$and insulation without chemical reaction to Pt thin-film and the sheet resistivity and the resistivity of Pt thin-film deposited on it were 0.1288 Ω/ and 12.88 $\mu$$\Omega$.cm respectively. We made Pt resistance pattern on SiO$_2$/Si substrate by life-off method and fabricated Pt thin-film type microheater for thermal microsensors by Pt-wire Pt-paste and SOG(spin-on-glass). In the temperature range of 25~40$0^{\circ}C$ we estimated TCR(temperature coefficient of resistance) and resistance ratio of thin-film type Pt-RTD(resistance thermometer device). We obtained TCR value of 3927 ppm/$^{\circ}C$ close to the bulk Pt value. Resistance values were varied linearly within the range of the measurement temperature. The thermal characteristics of fabricated thin-films type Pt micorheater were analyzed with Pt-RTD integrated on the same substrate. The heating temperature of Pt microheater could be up to 40$0^{\circ}C$ with 1.5 watts of the heating power.

• Fire Science and Engineering
• /
• v.12 no.2
• /
• pp.61-68
• /
• 1998

According to the results for the thermodynamic stability of feed-stuff dust, there are little change of initiation temperature of heat generation and heating value for used particle size. But initiation temperature of heat generation decreased with high heating rate whereas decomposition heat increased with particle size. Using the supporting gas, O2, initiation temperature of heat generation decreased remarkably than using the inert gas, N2, and heating value increased as twenty times under the same condition. When the ignition energy is given from the outside, used fine particle which can float in the air easily reacted tremendously with oxygen. Average maximum explosion pressure was 6.88 Kgf/$\textrm{cm}^2$ for 80/100 mesh.

• Electrical & Electronic Materials
• /
• v.6 no.4
• /
• pp.311-317
• /
• 1993

발열체 소자에 있어서 발열체의 방사스펙트럼과 피가열체의 흡수스펙트럼을 일치시키는 문제는 효과적인 가열을 위하여 매우 중요한 연구과제이다. 본 연구는 재료의 합성기술과 열처리기술을 이용하여 PTC 서머스터의 R-T특성은 그대로 유지시키면서 원적외선 방사특성을 증대시키기 위한 것이다. 이를 위하여 BaTiO$_{3}$+1.67Al$_{2}$O$_{3}$+3.75SiO$_{2}$+1.25TiO$_{2}$을 기본조성으로 하고 여기에 첨가제로서 Sb$_{2}$O$_{3}$와 MnO$_{2}$를 선정하여 이의 첨가량과 소결온도 그리고 소결온도구배를 파라메터로한 시편을 제작하였으며 각 시편의 IR특성과 R-T특성등을 측정 검토한 결과 파장 4.5-14.5[.mu.m]범위에서 방사율 0.8이상의 고효율 원적외선 방사특성을 얻었다.

• Transactions of the KSME C: Technology and Education
• /
• v.1 no.2
• /
• pp.179-186
• /
• 2013

Far-infrared radiation therapies are becoming more popular for blood circulation disorders, cardiovascular disease, skin diseases, inhibit cancer cell, etc replacing conventional operations. In this research, thermal characteristics of heating part in panel radiators, which is effective on the blood circulation disorders were experimentally analyzed. The heating line supplies heat energy to insulation coatings with heat flux of $150mW/m^2$ in normal status and as a result the coatings reached 20% of the heating line temperature. In other words, the insulation itself could increase surface temperature of heating plates by 20% and raise thermal time constant promote blood circulation effect. We also found that space arrangement of the heating lines was an important factor in designing heating parts and both coefficient of heat conduction and density of the heating plate should be also considered for superimpose of thermal diffusion.