Effect of high-temperature annealing on the microstructure of laterally crystallized polycrystalline Si films and the characteristics of thin film transistor (고온열처리가 측면결정화시킨 다결정 실리콘 박막의 미세구조와 박막트랜지스터 특성에 미치는 영향)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2003.11a
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- pp.70-70
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- 2003