• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1537-1540
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• 2003

MEMS technology with micro scale is complete system utilized as the sensor. micro electro device. The metallization of MEMS is very important to transfer the power operating the sensor and signal induced from sensor part. But in the MEMS structures local stress concentration and deformation is often happened by geometrical shape and different constraint on the metallization. Therefore. this paper studies the effect of supporting type and thickness ratio about thin film thickness of the substrate thickness for the residual stress variation caused by thermal load in the multi-layer thin film. Specimens were made from materials such as Al, Au and Cu and uniform thermal load was applied, repeatedly. The residual stress was measured by FEA and nano-indentation using AFM. Generally, the specimen made of Al induced the large residual stress and the 1st layer made of Al reduced the residual stress about half percent than 2nd layer. Specimen made of Cu and Au being the lower thermal expansion coefficient induce the minimum residual stress. Similarly the lowest indentation length was measured in the Au_Cu specimen by nano-indentation.

• 한국정밀공학회지
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• 제22권10호
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• pp.195-201
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• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• 대한기계학회논문집A
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• 제28권5호
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• pp.532-538
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• 2004

MEMS technology applying to the sensors and micro-electro devices is complete system. These microsystems are made by variable processes. Especially, the mentallization process has very important functions to transfer the power operating the sensor and signal induced from sensor part. But in the structures of MEMS the local stress concentration and deformation are often yielded by an irregular geometrical shape and different constraint. Therefore, this paper studies the effect of supporting type and thickness ratio about thin film of the substrate on the residual stress variation when the thermal loads is applied to the multi-layer thin film fabricated by metallization process. Specimens were made from several materials such as Al, Au and Cu. Then, uniform thermal load was applied, repeatedly. The residual stress was measured by FE Analysis and nano-indentation method using AFM. Generally, the specimen made of Al induced the larger residual stress than that of made of other materials. Specimen made of Cu and Au having the low thermal expansion coefficient induces the minimum residual stress. Similarly, the lowest indentation length was measured by nano-indentation method in the Si/Au/Cu specimen. Particularly, clusters are created in the specimen made of Cu by thermal load and the indentation length became increasingly large by cluster formation.

• 대한기계학회논문집B
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• 제26권4호
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• pp.524-530
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• 2002

Micro electric spark discharge device was fabricated on a FOTURAN glass wafer using MEMS processing technique and its performance of electron discharge and subsequent formation of ignition kernel were tested. Micro electric spark device is an essential subsystem of a power MEMS that has been under development in this laboratories. In a combustion chamber of sub millimeter scale depth, spark electrodes are formed by electroplating Ni on a base plate of FOTURAN glass wafer. Optimization of spark voltage and spark gap is crucial for stable ignition and endurance of the electrodes. Namely, wider spark gaps insures stable ignition but requires higher ignition voltage to overcome the spark barrier. Also, electron discharge across larger voltage tends to erode the electrodes limiting the endurance of the overall system. In the present study, the discharge characteristics of the proptotype ignition device was measured in terms of electric quantities such as voltage and currant with spark gap and end shape as parameters. Discharge voltage shows a little decrease in width of less than 50㎛ and increases with electrode gap size. Reliability test shows no severe damage over 10$\^$6/ times of discharge test resulting in satisfactory performance for application to proposed power MEMS devices.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.497-502
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• 2002

This paper describes a design methodology of a tri-axial silicon-based farce sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum farce range of 5 N and a minimum force range of 0.1N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1029-1032
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• 2002

This paper describes a design of a tactile sensor, which can measure three components force and temperature due to thermal conductive. The bio-mimetic tactile sensor, alternative to human's finger, is comprised of four micro force sensors and four thermal sensors, and its size being 10mm$\times$10mm. Each micro force sensor has a square membrane, and its force range is 0.1N - 5N in the three-axis directions. On the other hand, the thermal sensor for temperature measurement has a heater and four temperature sensor elements. The thermal sensor is designed to keep the temperature. $36.5^{\circ}C$, constant, like human skin, and measure the temperature $0^{\circ}C$ to $50^{\circ}C$. The MEMS technology is applied to fabricate the sensing element of the tactile sensor.

• 융복합기술연구소 논문집
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• 제1권1호
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• pp.48-51
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• 2011

Transdermal drug delivery device is a method of drug delivery through the skin. Skin has a very large area, so it is attractive route to drug delivery. When drug delivery through the skin, microneedle has a advantage that painless, constant drug deliver and penetration efficient; nevertheless the cost is expensive because fabrication process need a particular equipment and not suitable in mass production. This study shows microneedle fabrication process using convergence of general MEMS process and dicing process that can make 3-D sharp microneedle tip and this fabrication process suitable for mass production.

• 대한기계학회논문집B
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• 제34권6호
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• pp.579-586
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• 2010

MEMS 기술의 향상과 함께 $\mu$-TAS(Micro Total Analysis System)가 개발 되어 의료 및 생물학 분야가 급속하게 성장했다. $\mu$-TAS의 한 분야로 Chip 위에서 소량의 sample과 반응물을 가지고 혼합공정과 분석공정이 이루어지는 LOC(Lab on a chip)에 관한 연구는 활발하게 연구되어진다. LOC는 마이크로 펌프 와 마이크로 믹서와 같은 microfluidic 장치들로 구성된다. Microfluidic 시스템의 유동이 층류 유동이므로 유체상태의 반응물들을 효율적으로 혼합하고 공급하는 것이 어렵다. 본 논문은 이송 및 혼합이 동시에 이루어지는 MHD micropump의 설계와 제작에 관해 제시하였다. 최종 개선사양은 상용 CFD 프로그램의 해석결과를 통하여 결정하였다.

• 한국항공우주학회지
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• 제46권4호
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• pp.315-323
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• 2018

캔 위성은 음료수 캔 크기로 위성의 전반적인 시스템을 모사할 수 있어 교육프로그램 일환으로서 큰 각광을 받고 있으며, 국내에서는 2012년도부터 매년 캔 위성 경연대회가 개최되고 있다. 본 논문에서 제안된 캔 위성은 2015년도 국내 캔 위성 경연대회에 출전한 P.P.T CanSat으로 태양에너지 무선전송시스템 및 피에조, 풍력 에너지 하베스팅 시스템을 통해 생성된 전력으로 LED 점멸 및 MEMS기반의 센서 모듈을 자가 구동하는 것을 임무목표로 한다. 본 논문에서는 상기 캔 위성의 시스템 설계 및 주요 임무 탑재체 기능검증 시험, 비행시험, 실패원인 분석 및 재시험에 대해 기술하였다.

• Childhood Kidney Diseases
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• 제13권2호
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• pp.170-175
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• 2009

목적 : 국소성 분절성 사구체 경화증 환아들은 어떤 종류의 약물치료에도 잘 반응하지 않고 점차 말기 신부전으로 진행되는 경우가 많다. 본 연구는 미세 변화형 신증후군과 국소성 분절성 사구체 경화증 사이의 단백질 발현의 차이를 알아보고자 시행하였다. 방법 : 미세 변화형 신증후군과 국소성 분절성 사구체 경화증의 신장 조직 샘플로부터 단백질을 추출하였다. 추출한 단백질들에 대해 2차원 전기영동 시스템을 이용하여 개개의 단백체로 분리한 후 실버 염색을 하였다. 분리한 단백질은 MASCOT Peptide Mass Fingerprint 프로그램을 이용하여 동정하였다. 결과 : 미세변화형 신증후군과 국소성 분절성 사구체 경화증의 신장 조직에서 서로 상반된 발현 양상을 보여주었다. 이중 가장 크고 두드러지게 발현되는 부위를 잘라내어 단백질 분석을 시행한 결과 국소성 분절성 사구체 경화증에서만 glutathione S-transferase P1-1 단백질이 발현 되었다. 결론 : 상기 결과는 비록 국소성 분절성 사구체 경화증의 병태생리를 알기 위한 기초연구였으나 본 연구에서 밝혀진 glutathione S-transferase P1-1 은 향후 질병의 기전을 밝히는데 있어서 중요한 소견으로서 향후 지속적인 연구가 필요할 것으로 사료된다.