• Journal of the Korean Society for Precision Engineering
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• v.14 no.9
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• pp.68-79
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• 1997

A six DOF fine manipulator based on magnetic levitation is developed. Since most of magnetic levitation system are inherently unstable, a proposed magnetically levitated fine manipulator is implemented by use of an antagonistic structure to increase stability. From mathematical modeling and experiment, the equations of motion are derived. In addition, a six DOF sensing system is implemented by use of three 2-axis PSD sensors. A model reference-$H_{\infty}$ controller is applied to the system for the position control, In application of the fine manipulator, a wafer probing system is proposed to identify nonfunctional circuts. The probing system requires compliance to avoid destruction of DUT(device under test). A feedfor- ward-PD controllers are presented by the terms of the position accuracy, the settling time and the force accuracy.y.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.5 s.98
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• pp.58-65
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• 1999

A magnetic levitation system requires a robustness to overcome a dynamic instability due to disturbances. In this paper a robust controller for a magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts: a model reference controller and an $H_{\infty}$ controller. First, the model reference control stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the $H_{\infty}$ control minimizes errors generated from the model reference control due to noise and disturbance since the $H_{\infty}$ control is a kind of robust control. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion. it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.700-703
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• 1997

A robust controller for a 6 DOF magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts : a model reference controller (MRC) and a H$_{\infty}$ controller (HIC). First, the MRC stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the HIC minimizes errors generated from the MRC due to noise and disturbance since the HIC is a kind of robust controller. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion, it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller..