• 제목/요약/키워드: 몰리브덴 팁 전계방출 소자

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몰리브덴 팁 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅효과 (Fabrication of Mo-tip Field Emitter Array and Diamond-like Carbon Coating Effects)

  • 주병권;정재훈;김훈;이상조;이윤희;차균현;오명환
    • 한국전기전자재료학회논문지
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    • 제11권7호
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    • pp.508-516
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    • 1998
  • Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.

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몰리브덴 팁 전계 방출 표시 소자의 프릿 실링에 있어서 분위기 기체가 전계 방출 성능에 미치는 영향 (Influence of Ambient Gases on Field Emission Performance in the Frit-sealing Process of Mo-tip Field Emission Display)

  • 주병권;김훈;정재훈;김봉철;정성재;이남양;이윤희;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권7호
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    • pp.525-529
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    • 1999
  • The influence of ambient gases on field emission performance of Mo-field emitter array(FEA) in the frit-sealing step of field emission display(FED) packaging process was investigated. Mo-tip FEA was mounted on the glass substrate having a surrounded frit(Ferro FX11-137) and fired at $415^{\circ}C$ in the ambient gases of air, $N_2$ and Ar. The Ar gas was proved to be most proper ambient among the used gases through evaluating the turn-on voltage and field emission current of the fired Mo-tip FEA devices. It was confirmed that the Mo surface fired in Ar ambient was less oxidized when compared with another ones annealed in air and Ar ambient by the AFM, XPS, AES and SIMS analysis. Finally, the 3.5 inch-sized Mo-tip FED, which was packaged using frit-sealing process in the Ar ambient, was proposed.

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몰리브덴 팁 전계 방출 소자에 있어서 크롬 게이트 전극 구조의 개선 (Improvement of Geometrical Structure of Cr-Gate Electrode in Mo-tip Field Emitter Array)

  • 주병권;김훈;서상원;이윤희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권10호
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    • pp.532-535
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    • 2001
  • The sputtering condition of Cr thin film was established in order to get Cr gate electrode having a vertical wall structure for Mo-tip FEA. In case of Mo-tip FEA which had a vertically-etched Cr gate electrode, the field enhancement factor, was relatively increased and so the field emission performance in terms of turn-on voltage, emission current and trans-conductance could be improved when compared with the devices having a tapered gate wall.

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낮은 수소 함유량을 갖는 유사 다이아몬드 박막의 몰리브덴 팁 전계 방출 소자 응용 (Application of Low-hydrogenated Diamond-like Carbon Film to Mo-tip Field Emitter Array)

  • 주병권;정재훈;김훈;이윤희;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권2호
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    • pp.76-79
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    • 1999
  • Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity.

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변형된 게이트 절연막 구조를 갖는 몰리브덴 팁 전계 방출 소자 (Mo-tip Field Emitter Array having Modified Gate Insulator Geometry)

  • 주병권;김훈;이남양
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권1호
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    • pp.59-63
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    • 2000
  • For the Mo-tip field emitter array, the method by which the geometrical structure of the gate insulator wall could be modified in order to improve field emission properties(turn-on voltage and gate leakage current). The device having a gate insulator of complex shape, which means the combined geometrical structure with round shape made by wet etching and vertical shape made by dry etching processes, was fabricated and the field emission properties of the three kinds of devices were compared. As a result, the electric field applied to tip apex could be increased and gate leakage current could be decreased by employing the gate insulator having geometrical wall structure of mixed shape. Finally, the obtained empirical results were analyzed by simulation of electric field distribution at/near the tip apex and gate insulator using SNU-FEAT simulator.

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몰리브덴 팁 전계 방출 소자를 이용한 CRT의 냉음극 전자총의 제조 및 특성 평가 (Fabrication and Characterization of Cold Cathode Electron-gun of CRT using Mo-tip Field Emitter Array)

  • 주병권;김훈;서상원;박종원;이윤희;김남수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권8호
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    • pp.409-413
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    • 2001
  • In the electron-gun of CRT, the Mo-tip FEA was employed as cold cathode in order to replace the conventional thermal cathode. The Mo-tip FEA was designed and fabricated according to CRT specification and mounted on the electron-gun. It was known that fabricated cold cathode electron-gun showed better performance in terms of maximum emission current and switch-on time when compared with the ones of thermal cathode electron-gun, but some geometrical structures in the inside of electron-gun must be changed to reduce the gate leakage current. Finally, the potential applicability was guaranteed by means of operating the 19 inch-sized LG-color CRT using the fabricated cold cathode electron-gun.

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