• The Journal of the Acoustical Society of Korea
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• v.39 no.6
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• pp.568-575
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• 2020

Ultrasound has been widely used in various industrial fields. One of challenging application areas is cooling microelectronics. Ultrasonic cooling systems can work with air, argon (Ar) and nitrogen (N₂) instead of conventional refrigerant such as freon gas, which can cause global warming. Furthermore, ultrasonic systems do not have moving parts, thus high durability can be obtained. So it is necessary to develop ultrasonic cooling systems due to environmental issues and durability points. In this paper, the design and fabrication processes are explained. When designing the system, a feasibility test was performed with a prototype cooler. Based on the result, finite element analysis with ANSYS software was performed. The predicted anti-resonance frequency for a piezoelectric actuator was 34.8 kHz, which was in good agreement with the experimental result of 34.6 kHz with 0.6% error. In addition, the predicted anti-resonance frequency for the ultrasonic waveguide was 39.4 kHz, which also agreed well with the experimental value of 39.8 kHz with 1.0% error. Based on these results, the developed ultrasonic waveguide might be applicable in microchip cooling.