• Journal of Sensor Science and Technology
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• v.9 no.5
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• pp.334-340
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• 2000

This paper presents the fabrication of a micro electromagnetic flow sensor for the liquid flow rate measurement. The micro electromagnetic flow sensor has some advantages such as a simple structure, no heat generation, a rapid response and no pressure loss. The principle of the micro electromagnetic flow sensor is based on Faraday's law. If conductive fluid passes through a magnetic field, the electromotive force is generated and detected by two electrodes on the wall of the flow channel. The flow sensor consists of two permanent magnets and a silicon flow channel with two electrodes. The dimension of the flow sensor is $9\;mm\;{\times}\;9\;mm\;{\times}\;1\;mm$. The micro flow channel is mainly fabricated by anisotropic etching of two silicon wafers, and the detection electrodes are fabricated by metal evaporation process. The characteristic of the fabricated flow sensor is obtained experimentally. When the flow rates of water with the conductance of $100-200\;{\mu}S/cm$ are 9.1 ml/min and 62 ml/min, the generated electromotive forces are $261\;{\mu}V$ and 7.3 mV, respectively.

• 전기의세계
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• v.41 no.2
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• pp.31-39
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• 1992

고도의 시스템 기술이 요구되는 현대 산업사회에서 자동제어 기술의 핵이 되는 센서기술의 발전없이는 균형잡힌 산업성장이 이루어질 수 없으며 기술선진국으로의 도약도 기대할 수 없다. 우리나라에서는 다른 분야에 비해 센서기술은 많이 낙후되어 있으며 특히 유속센서에 대한 연구는 거의 이루어지지 않고 있다. 그런데, 유속 및 유량 측정은 산업 계측중에서 중요한 분야중의 하나이며 최근에는 에너지 절약 기술이나 각종 첨단 기술에서의 수요가 급격히 증가하고 있다. 그리고 유속 및 유량의 정확한 측정은 에너지 절약의 측면에서도 중요하다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.17-20
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• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD's and micro-heaters on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, The MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures. In investigating output characteristics of the fabricated micro-flowsensors, the output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000 seem/min, heating power of 1.2W.

• 전기의세계
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• v.42 no.10
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• pp.25-31
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• 1993

마이크로 장치에 관한 연구를 통하여 개발될 설계 및 제자 기술들은 차후 마이크로 펌프외에도 여러가지 마이크로 센서나 기계요소를 제작하는 데 유효 적절하게 사용될 수 있는 기술들로서, 국내에서도 마이크로머시닝 기반 기술의 노우하우가 축적되어야 한다. 마이크로 펌프는 미세 유량 제어장치, 미생물 조작 장치 등의 제작을 가능하게 하여 고정밀을 요하는 측정 계기와 장치, 치료기구 등에의 응용성이 다양하다. 이로 인하여 공학 및 과학, 의학 분야의 발전에 공헌이 크리라 기대된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.343-346
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• 2000

This paper presents the characteristics of low consumption, high-response time hot-film type micro-flowsensors with SOI(Si-on-insulator) and trench structures. Output voltages increased due to increase of heat-loss from sensor to external. Compared with no-trench on the SOI structure, the micro-flowsensors with trench structures have properties of high output voltage and low consume power. Output voltage of micro-flowsensors with SOI and trench structures was 250 mV at $N_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time was about 85 msec when input flow was step-input.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.8
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.7
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• pp.612-616
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• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

• Journal of Sensor Science and Technology
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• v.6 no.1
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• pp.72-80
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• 1997

One of the concerns in micro fluidic valve designs is that of reverse direction leakage. This paper designs and fabricates a new fluidic valve to achieve zero leakage. The design uses flapper and nozzle elements. In the forward direction the working fluid pushes the flapper upward to allow flow. In the reverse direction, the flapper pushes against the orifice seat, and thus, no flow can be generated, unless the flapper or nozzle element breaks. The nozzle element fabrication involves fabricating an orifice by wet etching of (100) wafer, The flapper element fabrication involves $20{\mu}m$ deep patterning of the negative image of the flapper, followed by wet etching from backside. Flow experiments were conducted with DI water as the working fluid, and the results are compared to analytical predictions. The results show that the developed flapper-nozzle valve achieves a true diodic flow characteristic.

• Proceedings of the KAIS Fall Conference
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• 2000.10a
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• pp.113-113
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• 2000

LPG 및 석유류는 온도에 따라서 유량의 변화가 LPG의 경우는 ±0.23%/℃, 무연은 ±0.11%/℃, 등유는 ±0.10%/℃, 경유의 경우는 ±0.09%/℃로 특히 LPG의 경우가 그 변화가 심하므로 정확한 충전량을 계량하는 것이 중요하다. 이는 공정거래 확립의 차원에서 공급자와 소비자 입장에서 반드시 요구되는 사항이다. 이를 위해 본 논문에서는 LPG 충전기의 충전제어 및 자동 온도 보정의 알고리즘을 개발하고 이를 프로그래밍한 후 온도센서와 16-bit 마이크로프로세서(intel 80C196)로 자동 온도 보정이 가능한 LPG 충전기의 충전제어 시스템을 설계 및 제작하였다. 설계 제작된 시스템은 프로세서부, I/O 입ㆍ출력부, VFD(vacuum fluorescent display) 디스플레이 구동부로 구성된다. 충전제어 동작은 LPG 유량계의 encoder로부터의 유량(유속)신호와 기차 보정값 및 15℃를 기준으로 한 온도 센서부의 온도 보정값을 입력받아 솔레노이드 밸브를 제어하여 충전을 제어하게 된다. 온도 보정은 80C196 프로세서의 내부 10-bit A/D 변환기를 사용하여 0.5℃ 분해능으로 온도제어를 할 수 있다. VFD 디스플레이는 유량, 금액, 단가가 표시되며 그 값을 누적시켜 일계, 월계를 알 수 있게 하였다. 그 외에 시스템 진단기능 및 컴퓨터통신, POS 통신이 가능하도록 하였다. 제작된 시스템을 LPG 충전기에 실장하여 시험한 결과 목표한 정확도로 유량이 제어됨을 알 수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.11
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• pp.996-1000
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• 1998

This paper describes the characteristics of Pt microheater using aluminum oxide films as medium layer and its application to flow sensors. Pt microheater have heating temperature of $390^{\circ}C$ at heating power of 1.2 W. Output voltages of flow sensors which were fabricated by integrating sensing-part with heating-part increase as gas flow rate and its conductivity increase. At $O_2$ flow rate of 2000 sccm, heating power of 0.8 W, output voltage of flow sensor is 101 mV under bridge-applied voltage of 5 V.