• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.231-238
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• 2002

미세 절삭에 의한 마이크로 형상가공 및 이를 이용한 미세금형 가공기술개발을 위하여 절삭 공구를 이용한 기계적 미세 가공법에 대한 고찰과 더불어 shaping, end-milling, drilling 등의 가공이 가능한 기계적 미세 가공시스템을 구성하고 이를 이용한 미세 치형 그루브와 미세 격벽 등 미세 형상 구조의 금형 개발을 위한 가공실험을 수행하였다. 본 실험에서는 먼저 shaping 방식으로 세 종류의 다이아몬드 바이트를 사용하여 알루미늄, PMMA, Nickel, 황동 등의 소재에 pitch $150{\mu}m$, 높이 $8{\mu}m$ 내외의 미세 치형의 금형 코어를 가공하였고, 다음으로 Z축에 air spindle을 설치하여 $\phi0.2mm$의 end-mill(WC)을 사용하여 황동 소재에 깊이 $200{\mu}m$, 폭 $200{\mu}m,\;100{\mu}m,\;50{\mu}m,\;30{\mu}m$의 두께 변화를 주어 미세 격벽에 대한 가공실험을 하였다. 미세 구멍가공실험으로는 drilling 전용장비를 구성하여 $\phi0.6\~0.15mm$의 drill공구로 SM45C와 세라믹$(Si_3N_4-BN)$ 소재에 스텝이송방식에 의한 미세 구멍 가공 실험을 실시하였다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.253-259
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• 2002

Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

• Transactions of Materials Processing
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• v.21 no.8
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• pp.499-505
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• 2012

The fuel cell is a very promising power generation system combining the benefits of extremely low emissions, high efficiency, ease of maintenance and durability. In order to promote the commercialization of fuel cells, a flexible forming process, in which a hyper-elastic rubber is adopted as a medium to transmit forming pressure, is suggested as an efficient and cost effective manufacturing method for fuel cell bipolar plates. In this study, the ability of this flexible forming process to produce the micro channel arrays on metallic bipolar plates was first demonstrated experimentally. Then, a finite element (FE) model was built and validated through comparisons between simulated and experimental results. The effects of key process parameters on the forming performance such as applied load and punch velocity were investigated. As a result, appropriate process parameter values allowing high dimensional accuracy without failure were suggested.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.295-298
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• 2005

This paper is concerned with the precision material property measurement of a micro metal thin foil that is used in MEMS technology. Since these MEMS components require great precision and accuracy, evaluation of reliability such as the lift cycle endurance test, impact test, and residual stress test is necessary for these components. However, in practice, real reliability tests are not easy to perform due to consideration of various factors. Rather than actual testing, it would be much easier to evaluate the reliability of components by the analytical approach. Although the analytical method is utilized by software tools, it is obviously necessary to acquire fundamental properties of materials through real test methods. In this paper, the oriented mechanical properties of aluminum thin foil are measured by nano scale material property measurement system.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.56-59
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• 2009

Roll forming process is one of important metal processing technology because the process is simple and economical. These days, roll forming process is tried to be employed in manufacturing the circuit board, barrier ribs and solar cell plate for productivity. However, it is difficult to apply to the forming of micro scale or sub-micro scale pattern. In this study, the roll forming processing for the micro scale is designed and analyzed. In this study, the forming of micro pattern for solar cell plate by incremental roll forming process is analyzed. The solar cell plate may have thousands of patterns, and the analysis of forming considering all the patterns is impossible due to the computational costs. In this study, analyses are carried out for various numbers of patterns and the results are compared. It is shown that the analyses results with four row patterns and twelve row patterns are same. So, it is considered that the analysis can be carried out for only four rows of pattern for the design of incremental roll forming process.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.60-63
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• 2009

Manufacturing technologies of micro spur gear and micro mold by micro PIM were studied with stainless steel feedstock. For molding of gears, micro mold with gear cavity of 1.2 mm in diameter was produced by wire EDM. The proper injection pressure was selected to 70bar by observation and measuring of shapes and shrinkage of gears before/after sintering. For fabrication of micro mold, a tiny polymer gear was produced by injection into the mold. Then, 316L feedstock was again injected/compressed on the polymer gear and debinded together with polymer gear followed by sintering. As a result, another metal mold with gear cavity reduced to about 20% was fabricated and through repetition of this process chain, micro gear mold with cavity about below 800 um was finally obtained. In reduction of size by injection/compression molding, height of gear tooth was shrunk more and the effort for decrease of roughness of micro cavity were carried out ultrasonic polishing and as a result, the roughness in cavity decreased from 3-4 um to about 200 nm.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.10a
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• pp.100-103
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• 2007

A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

• Journal of the Microelectronics and Packaging Society
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• v.3 no.2
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• pp.39-50
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• 1996

본 연구에선 주어진 조성의 알루미나 green sheet에 대하여 텅스텐의 입경 및 산화 물의 조성을 변화시키므로써 수축률을 제어하여 camber를최소화하여 결합강도를 최대로 하 는 텅스텐 페스트조성을 찾아내는 것을 목적으로 하였다. 본 실험에서 사용한 텅스텐 분말 의 입경은 0.35$\mu$m, 0.6$\mu$m, 0.72$\mu$m, $1.5\mu$m, 1.9$\mu$m, 3.2$\mu$m이며 frit는 Al2O3, MgO, SiO2 와 Al2O3, CaO, SiO2를 사용하여 각각의 조성에 따라 함량을 변화시키며 실험하였다. 소성 은 154$0^{\circ}C$로 습윤 수소분위기에서 시행하였으며 사용된 알루미나 green sheet의 알루미나 중심 입경은 2.8$\mu$m이었다. 분석은 주사전자 현미경으로 미세구조를 관찰하였고 EPMA Line Profile로 원소 분석을 하였으며 잔류응력을 측정하기 위하여 XRD분석을 하였다. Frit 을 함유하지 않은 경우 텅스텐 분말의 입경이 1.9$\mu$mdlfEo 최대 접합 강도를 나타내었다. Frit을 함유한 경우 Mgo계 frit조성에서는 MgO/Al2O3/SiO3=1/1/1일 때 CaO계 frot 조성에 서는 CaO/Al2O3/SiO2=1/2/1일 때 최대 접합 강도를 나타내었다. Frit 함량을 변화시킨 경우 MgO계는 10wt%함유하였을 때 CaO 계는 5wt%함유하였을 때 최대 접합강도를 나타내었 다. Frit 함량을 변화시킨 경우 MgO계는 10wt%함유하였을 때, CaOr계는 5wt%함유하였을 때 최대 접합강도를 나타내었다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.471-474
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• 2005

This study investigates the nano/microstructure, the aging response, and the mechanical/tribological properties of the eutectic regions in rheoformed A356 alloy-T5 parts using nano/micro-indentation and mechanical scratching, combined with optical microscopy and atomic force microscope (AFM). Most eutectic Si crystals in the A356 alloy showed a modified morphology as fine-fibers. The loading curve for the eutectic region was more irregular than that of the primary Al region due to the presence of various particles of varying strength. The aging responses of the eutectic regions in the rheoformed A356 alloys aged at $150^{\circ}C$ for different times (0, 2, 4, 8, 10, 16, 24, 36, and 72 h) were investigated. Both Victors hardness $(H_v)$ and indentation $(H_{IT})$ test results showed a similar trend of aging curves, and the peak was obtained at the same aging time of 10 h. A remarkable size-dependence of the tests was found.