• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.146-146
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• 2015

한국기초과학지원연구원(KBSI)에 설치되어 있는 SEM-EBSD 및 TKD와 NanoMEGAS 사의 TEM-ASTAR를 이용하여 마이크로미터에서 나노미터까지의 결정립방위와 상분석에 대한 연구를 수행하고 분석함으로써 제조공정에서의 오류 및 최적화된 공정조건을 제공한다.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.217-221
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• 2001

Poly-Si/SiO$_2$/Si의 하부기판구조 위에 Co금속을 E-beam evaporation 방식으로 증착하고 급속 열처리 방식을 통해 inkjet 프린터헤드의 heater로 사용 할 수 있는 코발트실리사이드를 형성하였다. RTA로 열처리 온도와 시간을 변수로하여 코발트실리사이드의 가장 안정적 결정상 및 성분분포를 찾고 이렇게 제작된 박막의 면저항과 표면특성을 통해 고온에서 사용 할 수 있는지를 연구하였다. 박막을 발열체(400~$600^{\circ}C$)로 사용하기 위해서는 발열체가 외부배선과의 접촉 저항보다 커야하고 저항이 고온에서 크게 변하면 안 된다. 코발트 실리사이드는 80$0^{\circ}C$ 20sec에서 발열체로 사용하기에 적당한 특성을 보였다. 그러나 실리사이드반응이 RTA에서 40$0^{\circ}C$ 20sec에서 형성되기 시작하지만 열처리 온도를 높일수록 박막의 면저항과 상변화가 일어남으로 발열체로 사용 할 수 없고, 90$0^{\circ}C$ 20sec 이상에서는 표면의 거칠어짐으로 인해 면저항이 증가하는 현상을 보여 역시 발열체로 사용 할 수 없음을 알 수 있었다.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.163-170
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• 2006

By removing sacrificial layer through ashing process, movable MEMS structure on substrate can be fabricated in surface micromachining. However, MEMS structure includes, during the ashing process, the warping or buckling effects due to stress gradient along the vertical direction of thin film. In this study, we presented method for counteracting the unwanted deflection of MEMS structure and designed using character of deposit process to overcome limited design conditions. Unit cell patterns were designed with character of deposit shape, and their final shapes were adopted using Finite Element Method. Finally, RF MEMS switch was fabricated by surface micro machining as test vehicles. We checked out that alleviation effect for deformation of switch improved by 35%.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.1
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• pp.55-59
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• 2022

In this paper, we compared the electric field and absorptance of nano particles in nanostructures by amplifying the electric field around the nanoparticles through plasmon resonance and comparing the structure that can increase the absorptance with the nanostructure by using the Finite Different Time Domain (FDTD) simulation. In addition, the width of the nanostructure was adjusted to 240 nm ~ 300 nm, and the light absorptance rate was higher as the gap between the particles was short. In addition, a study was conducted on the formation of nanoparticles and nanostructures on the surface through UV imprint. In order to form particles in the structure, the nano particles were first arranged in the mold used for the fabrication of the structure using spray coating, and then fabricated through UV imprinting. The nanostructure and particles were formed together by scanning electron microscopy.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.2
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• pp.171-178
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• 2014

In this study, the apparent contact angle on the hydrophilic/hydrophobic surfaces with micropillars was studied. The previous researches showed that the Wenzel equation and the Cassie-Baxter equation were thermodynamically derived for the rough hydrophilic/hydrophobic surfaces and generally referenced on the field of wetting phenomena. For the verification of both equations, the apparent contact angle on the hydrophilic/hydrophobic surfaces with micro-pillars was measured. In the comparison between the measured and estimated apparent contact angles with the equations, the differences between the apparent contact angles were analyzed. Conclusively, the available range and limitation of theoretical equations were investigated and further researches about the apparent contact angle on the rough surfaces were proposed.

• Composites Research
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• v.22 no.3
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• pp.55-59
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• 2009

Microstrip antennas are low profile, are conformable to planar and nonplanar surfaces, are simple and inexpensive to manufacture, mechanically robust when mounted on rigid surfaces and are compatible with MMIC(Monolithic microwave integrated circuit) designs; they have been used in diverse communication systems. The rectangular microstrip patch antenna is designed for a central frequency of 12.5 GHz, and the final product is a $4{\times}1$ array antenna with curvature radius of 200 mm. The microstrip antenna is embedded in a sandwich structure which consists of skin and core material. After impact, the performance of damaged antenna is estimated by measuring the return loss and radiation pattern. The antenna performance was not affected by this impact damage.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.2
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• pp.55-58
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• 2019

Surface plasmon effect was considered importantly because of the enhancement of optical signals. It is important to detect weak optical signal in neuroscience and bio technology due to detect weaker image or signal. The height of silver can change the optical characteristic of plasmonic nano structure including transmittance and reflectance. In this paper, the optical characteristic of plasmonic nano structure were confirmed by the FDTD analysis method depending on the silver height and it was confirmed that energy was concentrated at the center of nano structure, and high far-field gain and current density in particular wavelength coule be obtained.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.49-49
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• 1999

리튬 이차 전지를 박막화함으로써 개발된 고상의 마이크로 박막전지는 임의의 크기 및 형태로의 제작이 가능하며 액체전해질을 사용하지 않기 때문에 작동 중 열 또는 기체 생성물이 생기지 않아 높은 안정성을 갖으며 광범위한 사용 온도 범위를 가진다. 위와 같은 장점으로 인하여 충전 가능한 고상의 박막형 리튬 이차 전지는 점진적으로 그 사용 범위가 크게 확대될 것으로 판단된다. 즉, 초소형 전자, 전기 소자는 물론이며 조만간 실현될 스마트 카드, 셀루러폰 및 PCS와 같은 개인용 휴대 통신장비의 전력 공급계로의 응용이 가능할 것이다. 특히 장수명, 고에너지 밀도를 갖는 초소형의 전지를 필요로 하는 microelectronics, MEMS등에 이용될 수 있는 이차전지에 대한 요구가 점점 가시화 됨에 따라 박막공정을 이용한 이차전지개발기술이 요구되고 있으며, 박막제조기술을 이용한 고상의 박막형 및 전지에 관한 연구가 증가하고 있다. 본 연구에서는 박막형 리튬 이차전지의 Cathode 물질로써 비정질의 산화바나듐 박막을 반응성 스퍼터링에 의하여 상온에서 증착하였다. 박막형 이차전지의 여러 가지 Cathode 물질중 산화바나듐은 다른 물질들과는 달리 비정질 형태로 매우 우수한 충방전 특성을 나타낸다. 이런 특성으로 인해 다소 전지자체의 성능은 낮지만 저전력 저전압을 필요로 하는 초소형 전자 소자와 혼성되어 이용할 수 있는 잠재성이 매우 높은 물질이다. 바나듐 타겟의 경우 타겟 표면의 ageing에 따라 증착되는 박막의 특성이 매우 달라지게 되므로 presputtering의 시간을 변화시키면서 실험하였다. 또한 스퍼터링 중의 산소의 분압도 타겟의 ageing에 많은 영향을 주므로 실험 변수로 산소분압을 변화시키면서 실험하였다. 증착된 산화바나듐 박막의 표면은 scanning electron microscopy로 분석하였으며 구조 분석은 X-선 회절분석, X-ray photoelectron spectroscopy 그리고Auger electron spectroscope로 하였다. 증착된 산화바나듐 박막의 전기화학적 특성을 분석하기 위하여 리튬 메탈을 anode로 하고 EC:DMC=1:1, 1M LiPF6 액체 전해질을 사용한 Half-Cell를 구성하여 200회 이상의 정전류 충 방전 시험을 행하였다. Half-Cell test 결과 박막의 결정성과 표면상태에 따라 매우 다른 전지 특성을 나타내었다.

• Composites Research
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• v.29 no.4
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• pp.151-155
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• 2016

Graphene has been a valuable candidate for use as electrodes for supercapacitors. In order to improve the surface area of graphene, three-dimensional graphene was synthesized on porous Ni nanostructure using thermal chemical vapor deposition and microwave plasma chemical vapor deposition. The structural and chemical characterization of synthesized graphene was performed by scanning electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. It was confirmed that three-dimensional and high-crystalline multilayer graphene onto various substrates was synthesized successfully.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.2
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• pp.33-37
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• 2003

The new textured surface epitaxial base(TSEB) cell as a high efficiency Si solar cell was fabricated and its eletro-optical characteristics were investigated. The fabricated device showed the open circuit voltage of 0.62 V, the short circuit current of 40 mA, the fill factor of 0.7, and the efficiency of 16% under the incident light of AM-1 100 mW/$cm^2$. The TSEB cell proposed in this paper has the structural superiority in the fabrication of high efficiency solar cell due to the carrier drift transport in the optical absorption region and the formation of back surface field by $P^-/P^+$ epitaxial base, and the low emitter series resistance by insertion of $n^+$ buried contact.