• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.3
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• pp.472-477
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• 2003

A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.

• The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.4 no.3
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• pp.59-65
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• 1990

전력 전자 공학의 발달에 의해 영구자석 동기전동기의 운전 분야가 대단히 진보되고 있음이 최근 논문을 통해서 보고 되고 있다. 영구자석 동기전송기는 크기와 중량의 감소, 저관성, 고효율 등의 장점이 있어 각종 분야의 응용에 유리하다. 본 연구는 마이크로프로세서와 전압원 인버터를 사용한 자기제어현 영구자석 동기전송기의 구동장치를 제안한다. 영구자석 동기전동기의 운전 회전자 위치를 정확히 검출하여 회전자 속도와 운전주파수를 동기화 시킴으로서 자기제어를 가능하게 한다. 고 분해능의 인크리멘탈 엔코더를 사용하여 영구자석 동기전동기에 적합한 자기제어형 PWM인버터 설계를 가능하게 하였다. 저속 영역에서 토오크 리플을 감소시키기 위해 펄스 수를 제어하였다.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.81-87
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• 2012

This paper focuses on three-dimensional measurement system of micro balls on micro Ball-Grid-Array(BGA) packages in-line. Most of visual inspection system still suffers from sophisticate reflection characteristics of micro balls. For accurate shape measurement of them, a specially designed visual sensor system is proposed under the sensing principle of phase shifting moire interferometry. The system consists of a pattern projection system with four projection subsystems and an imaging system. In the projection system, four subsystems have spatially different projection directions to make target objects experience the pattern illuminations with different incident directions. For the phase shifting, each grating pattern of subsystem is regularly moved by PZT actuator. To remove specular noise and shadow area of BGA balls efficiently, a compact multiple-pattern projection and imaging system is implemented and tested. Especially, a sensor fusion algorithm to integrate four information sets, acquired from multiple projections, into one is proposed with the basis of Bayesian sensor fusion theory. To see how the proposed system works, a series of experiments is performed and the results are analyzed in detail.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.23 no.10
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• pp.45-51
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• 2009

The single phase buck-boost DC-AC inverter generates an alternating output voltage as the differential voltage of two DC-DC individual buck-boost converters. Two converters are driven with DC-biased and $180[^{\circ}]$ phase-shifted sinusoidal references. The peak value of the inverter alternating output voltage does not depend on the direct input voltage. In this paper, single phase buck-boost DC-AC inverter is designed and implemented on a prototype with digital controller using a microcontroller.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1797-1805
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• 2012

In this paper, Power LED(Light Emitting Diodes) is studied to driver as a new lighting system in the spotlight, replacing a large existing lighting system with fluorescent and incandescent lighting. To take advantage a variety of DC power as the boost DC-DC converter design specifications through the inductor L and capacitor C through PSPICE to calculate the best estimate of the value. Converter's switching frequency is 50[kHz], the first Duty Rate was made to increase gradually depending on the value of the detection were, 10[%] in the output voltage. As a result, the simulated Boost Power LED driver characteristics is in comparison with the design specifications, 5[%] or less as the error was approximated. So, when input 15[V] were offered, a stable output 24[V] were obtained, and Dimming Control through the adjustment of brightness and current consumption were obtained to possible result.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.12 no.2
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• pp.62-68
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• 1998

In this paper, we proposed the design of the intelligent traffic control system by using multiprocessor architecture. The inter-processor communication of the architecture is implemented by sharing the serial communication channel. In comparing the conventional traffic control system using single processor architecture, the proposed system uses multiple processors controlling the sub systems such as the signal lights, traffic measurement unit, auxiliary signal lights and peripherals. The main processor controls the communication among the processors and the communication protocol link to the central control center at remote site. The proposed architecture reduces the load and simplifies the program of each processor and enables the real time processing of the add-on features of intelligent traffic control systems. The architecture is implemented and the common channel inter-processor communications and the real time operation is experimented .experimented .

• Journal of the Korean Society for Precision Engineering
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• v.27 no.10
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• pp.84-92
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• 2010

In this study a numerical analysis has been conducted for the flow characteristics and pumping performance of a piezoelectric-based micropump with electromagnetic resistance exerted on electrically conducting fluid. Here, electromagnetic resistance is alternately applied at the inlet and outlet with alternately applied magnetic fields in association with the reciprocal membrane motion of the piezoelectric-based micropump. A model of Prescribed Deformation is used for the description of the membrane motion. The internal flow characteristics and pumping performance are investigated with the variation of magnetic flux density, tube size, displacement of membrane and the frequency of the membrane. It turns out that the current micropump has a wide range of pumping flow rate compared with diffuser-nozzle based micropumps.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.130-130
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• 2010

마이크로웨이브를 소스로 사용하는 상압 공정 장치는 비교적 저렴한 비용과 구동의 용이성 때문에 널리 사용되고 있다. 이러한 상압 마이크로웨이브 장치는 에너지 전달 방식에 따라 도파관을 사용하는 TIA (Torch Inject Axial)방식과 동축선을 사용하는 MPT (Microwave plasma torch)로 구분할 수 있다. 이 중 TIA 방식은 동축선에 비해 에너지 전달 용량이 큰 도파관을 사용하기 때문에 대용량 처리가 가능하다. TIA 방식에서 형성된 플라즈마의 조절과 처리 효율의 증가는 형성되는 각각의 스트리머 채널의 조절에 의해 결정된다. 방전기 내부에서 스트리머 채널은 인가된 전기장의 방향으로 성장하게 되며 전기장 현상을 조절함으로써 스트리머 채널의 조절이 가능하다. 내부에 인가되는 전기장은 마그네트론에 의해 인가되는 전기장, 스트리머 채널간의 유도 전기장, 열적 팽창효과에 의한 스트리머 헤드 형상 변화에 의한 전기장으로 구분될 수 있다. 이 때 각각의 항들의 조절을 위해 생성된 플라즈마의 온도, 밀도 등의 범위를 측정할 필요가 있으며 광학적인 방법을 통해 플라즈마의 온도, 밀도를 측정하였다. 이 결과를 토대로 도파관의 형상, 방전 기체의 유량, 방전 기체의 조성을 통해 각각 전기장의 조절이 가능하였다. 각 변수의 조절을 통해 방전기 내부에서 플라즈마 헤드 성장에 대해 알 수 있었고 끝이 열린 TIA 구조에서 발생하는 플라즈마 수렴 현상을 설명할 수 있었다.

• Journal of IKEEE
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• v.2 no.2 s.3
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• pp.299-308
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• 1998

In this paper, reliable switched reluctance motor(SRM) drive system and 4-rule based fuzzy logic modifier(FLM) of the conventional PI controller are presented. The i80C196KC, low-cost one-chip microcontroller is used for designing SRM drive controller which include the speed controller and the starting sequence. The fuzzy logic modifier which exhibits a stabilizing effects on the closed-loop system, has good robustness regarding the improperly tuned PI controller. The simulation and experimental results are performed to verify the capability of proposed control method on 6/4 salient type SRM.