• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2006.11a
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• pp.251-254
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• 2006

Micro thruster is a key technology in the micro/nano satellite. MSPT has been attracted attention as a one of possible solution for micro thruster MSPT as a systems four components. It is composed of nozzle, igniter, combustion chamber and propellant. This paper surveys varioud MSPTs which have been reported. The model of MSPT arrays for total impulse of 1 mNs is proposed. Combustion chamber is designed and fabricated.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.5
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• pp.547-550
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• 2011

We have developed a laser-based needle-free liquid drug-injection device. A laser beam is focused inside the liquid contained in the rubber chamber of a micro-scale. The focused laser beam causes explosive bubble growth, and the sudden volume increase in a sealed chamber drives a microjet of liquid drug through the micronozzle. The exit diameter of a nozzle is less than 100 ${\mu}m$, and we verify that the injected microjet is fast enough to penetrate soft human tissue. In the experiment, the microjet penetrated a 5% gelatin-water solution that replicates the human thrombus and pork-fat tissue.

• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.116-118
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• 2005

열공압 방식으로 동작하는 마이크로 펌프와 밸브가 집적된 (polydimethylsiloxane)PDMS 미 세 유체 시스템을 제작하였다. 본 실험에서 제안한 미세 유체 시스템은 PDMS 마이크로 채널, PDMS membrane, 열공압 챔버, indium tin oxide(ITO) 히터로 구성되어 있다. 마이크로 펌프의 경우 가해주는 펄스 전압의 변화를 통해 유속을 최적화 하였고 마이크로 밸브의 경우 가해주는 직류 전압을 변화시켜 유체의 흐름을 제어할 수 있었다. 미세 유체 시스템의 최적화된 조건은 마이크로 펌프의 경우 duty 4%와 주파수 4Hz에서 최대 pumping rate을 나타냈고 그때의 pumping rate 68nl/min이었다. 마이크로 밸브의 유체를 closing 전력은 450mW이었다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.10
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• pp.1264-1270
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• 2004

In this paper research on micro solid propellant thruster is reported. Micro solid propellant thruster has four basic components; micro combustion chamber, micro nozzle, solid propellant and micro igniter. In this research igniter, solid propellant and combustion chamber are focused. Micro igniter was fabricated through typical micromachining and the effect of geometry was evaluated. The characteristic of solid propellant was investigated to observe burning characteristic and to obtain burning velocity. Change of thrust force and the amount of energy loss following scale down at micro combustion chamber were estimated by numerical simulation based on empirical data and through the calculation normalized specific impulses were compared to figure out the efficiency of combustion chamber.

• Journal of Sensor Science and Technology
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• v.10 no.4
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• pp.232-238
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• 2001

We fabricated micro-pump using stereolithography technology. The pump was fabricated using PZT for its drive and used non-movable valve of diffuser/nozzle concept. Size of the pump chamber is, $14mm{\psi}$, narrow hole of diffuser/nozzle is $0.5mm{\psi}$ and wide hole $1mm{\psi}$ and chamber depth is 1.2mm, respectively. We confirmed its operation at frequency 100Hz, supply voltage $90{\sim}250Vp-p$. As the result of the pump working measurement, when ethanol is used, the pressure head difference between inlet and outlet of the pump is about 53mm in the frequency of 100Hz, 200V of Vp-p.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.5
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• pp.637-645
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• 2009

The main purpose of this study lies on the improvement of micro dilution tunnel based on the typical porous tube type chamber. The characteristics of flow and temperature fields for steady state has been obtained by numerical analysis using FLUENT. Three different geometrical variations of the porous tube; a) increase of thickness at center, b) step increase of thickness at center and downstream, c) tapered increase of thickness, have been proposed. Accordingly results are obtained and compared in terms of penetration velocity and velocity ratio to therrmophoretic velocity for improvement against particulate deposition inside the tube. The penetration velocity and velocity ratio distributions in the upstream portion and portion of impinging of dilution air are apparently shown to be improved for the case of the step and tapered change of porous tube. The tapered change of tube thickness addition are shown to be the most effective among three geometrical changes. In addition, the considerable improvement against deposition are shown that its thickness should be at least 2mm.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.1
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• pp.7-13
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• 2008

In this paper, the pumping performance of a piezoelectric valveless micropump is simulated with a commercial finite element analysis software, COMSOL Multiphysics. The micropump developed in the previous work is composed of a 4-layer lightweight piezo-composite actuator (LIPCA), a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, structural domain and fluid domain are coupled in the simulation. Water flow rates are numerically predicted for geometric parameters of the micropump. Based on this study, the micropump is optimally designed to obtain its highest pumping performance.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.7
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• pp.605-612
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• 2016

A numerical analysis was performed on the effect of the design parameters of a bubble jet type microactuator on its liquid flow characteristics. The numerical models included the ink flow from the reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of the refilling process. Because the bubble behavior is a very important parameter for the overall actuator performance, the bubble growth and collapse phenomena in an open pool were simulated in the present study. The drop ejection and refill process were numerically predicted for various geometries of the nozzle, chamber, and restrictor of the bubble jet microactuator. The numerical results from varying the design parameters can help with predicting the performance and optimizing the design of a microactuator.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.131.2-131.2
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• 2015

마이크로웨이브를 이용한 플라즈마는 효율적인 전자가열이 가능하며, 낮은 이온에너지를 가지는 고밀도 플라즈마를 생성시킬 수 있다는 장점이 있다. 최근 산화물 반도체 및 대화면 디스플레이 장치내 소자의 보호막 증착용으로 저온 PECVD (Plasma Enhanced Chemical Vapor Deposition) 공정 및 장치의 필요성에 따라 마이크로웨이브를 이용한 PECVD 장치가 주목 받고 있다. 본 연구에서는 실리콘 나이트라이드 공정 장치 개발을 위한 2차원 시뮬레이션 모델을 완성하였다. Global modeling을 이용하여 확보한 Chemical reaction data에 대한 검증을 하였다. Maxwell's equation, continuity equation, electromagnetic wave equation 등을 이용하여 Microwave의 파워 및 압력에 따른 전자 밀도, 전자 온도등의 플라즈마 변수의 변화를 관찰하였다. 또한 Navier Stokes equation을 추가하여 챔버 내의 Gas flow의 흐름을 고려한 시뮬레이션을 진행하여 분석하였다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.5
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• pp.72-78
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• 2005

We conducted the performance test of micronozzle having nozzle throat diameter of 1.0, 0.5, 0.25 mm in an ambient pressure. We used N2 gas as a cold gas propellant. We varied chamber pressure from 2 to 20 bar and measured the thrust and mass flow rate. Through the test, we concluded that viscous losses were increased with decreasing chamber pressure. We found that micronozzle performance was higher than orifice performance through thrust comparison.