• Title/Summary/Keyword: 마이크로소자

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Thermal Dewetting Process를 이용한 비주기 서브파장 구조물의 제작방법

  • Lee, Jong-Heon;Song, Yeong-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.346.1-346.1
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    • 2016
  • 본 연구에서는 열처리(Thermal Dewetting Process)와 빗각 증착(Oblique angle deposition)을 이용하여 비주기 서브파장 구조물을 마이크로 렌즈 형태의 유리 기판 상부에 제작하였다. 먼저 $2{\times}2cm2$ 크기의 유리 기판에 기존 리소그래피 공정으로 원기둥 형태의 감광액을 형성한다. 이후 Hot-plate로 $180^{\circ}C$에서 90초간 열을 가해 지름이 $20{\mu}m$인 반구형태로 변형시킨 뒤 반응성이온식각 공정을 진행하여 마이크로 렌즈를 제작한다. 렌즈의 표면에 나방 눈 구조를 형성하기 위해 전자빔 증착으로 15nm의 은 박막을 쌓은 뒤 $500^{\circ}C$에서 1분간 열처리 공정을 진행하였다. 열이 가해졌을 때 은 박막은 표면자유에너지를 최소화하기 위해 나노 크기의 덩어리진 입자 형태로 변화한다. 여기서 형성되는 나노입자의 크기가 렌즈 표면 중심에서 가장자리로 갈수록 작아진다는 것을 주사전자현미경을 통해 확인하였다. 증착 각도가 증가할수록 열처리 공정 후의 은 나노입자의 크기가 점점 작아진다는 것을 검증하기 위해 은 박막의 증착 각도를 $0^{\circ}$, $35^{\circ}$, $55^{\circ}$, $70^{\circ}$로 증착 후 열처리 공정을 진행하여 확인하였다. 비스듬하게 증착되어 형성된 박막은 다공형태로 낮은 밀도를 가지는데 이는 박막 두께 감소를 일으킨다. 따라서 증착 각도가 증가할수록 열처리 공정 후의 은 나노입자의 크기는 점점 작아진다. 이후 은 나노입자를 마스크로 하여 다시 반응성이온식각 공정을 진행하였으며 식각 후 나머지 은 나노입자들은 HNO3용액에서 1분간 처리하여 제거하였다. 제작된 구조물의 평균 직경과 크기는 각각 ~220nm 및 ~250nm인 것으로 확인하였다. 위와 같은 공정을 통해 다양한 크기를 가진 비주기 서브파장 구조물을 제작할 수 있다. 구조물의 주기가 파장 길이보다 짧을 경우 분산이 최소화되며 넓은 파장 대역에서 무반사 효과를 얻을 수 있다. 이 공정은 마스크를 통한 리소그래피의 한계를 극복할 수 있으며 여러 곡면형 표면에 적용가능한 장점이 있다. 또한 프리즘, 렌즈, 광섬유와 같은 광소자의 광투과율을 향상시키는데 이용될 수 있다.

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Ultra-thin aluminum thin films deposited by DC magnetron sputtering for the applications in flexible transparent electrodes (DC 마그네트론 스퍼터링법으로 증착된 초박형 Al 박막의 투명전극 적용성 연구)

  • Kim, Daekyun;Choi, Dooho
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.2
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    • pp.19-23
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    • 2018
  • In this study, the feasibility of Al-based transparent electrodes for optoelectronic devices was investigated. Al thin films having thickness in the range of 3-12 nm were deposited on glass substrates, and sheet resistance was measured for films thicker than 7 nm and the values continue to decrease with increasing film thickness. The grain size in the films was found to increase with increasing grain size. 85% visible light transmittance was measured at the thickness of 3 nm, and decreased to 50% and 60% when the film thickness reaches 4 nm and 5 nm, respectively. The results of this study can be used in the applications of oxide/metal/oxide type transparent electrodes.

Aluminum based ZnO/Al/ZnO flexible Transparent Electrodes Fabricated by Magnetron sputtering (스퍼터링 증착법을 이용한 ZnO/Al/ZnO 구조의 유연투명전극 연구)

  • Bang, GeumHyuck;Choi, Dooho
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.2
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    • pp.31-34
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    • 2018
  • In this study, the feasibility of ZnO/Al/ZnO flexible transparent electrodes for future flexible optoelectronic devices was investigated. All depositions were performed on PET substrates. The thicknesses of the top and bottom ZnO layers were 5-70 nm and 2.5-20 nm, respectively. The highest visible light transmittance was recorded when the thicknesses of the top and bottom ZnO layers 30 nm and 2.5 nm, respectively. 62% optical transmittance (at the wavelength of 400 nm) and sheet resistance of $19{\Omega}/{\Box}$ were measured. After repetitive bending test at a curvature radius of 5 mm, the transmittance and sheet resistance did not change.

Microstrip Antenna for ISM Band using L-Shaped feeding structure (L형 급전구조를 이용한 ISM대역용 마이크로스트립 안테나 설계)

  • Park, Chang-Hyun;Kim, Pyoung-Gug;Kim, Kab-Ki
    • Proceedings of the Korean Institute of Intelligent Systems Conference
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    • 2007.04a
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    • pp.440-443
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    • 2007
  • In this paper, microstrip antenna is designed for industrial-scientific-medical(ISM)band of S-Band. We proposed that radiation element of antenna, which is rectangle patch shape. The feeding structure used L-shaped structure. Center frequency and -l0dB bandwidth are investigated by change of length and width in patch plane. And maximum gain, front to back ratio and 3dB beam width is presented by simulation radiation pattern of antenna in frequency ISM Band. The center frequency is 2.45GHz, band width is $2.314{\sim}2.577GHz$ with 263MHz(11%). And the antenna maximum gain is 9.3dBi, 3dB beam width E-plane is $52.5^{\circ}$, H-plane is $64.7^{\circ}$.

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Realization of Power Amplifier Using a Harmonic Rejection Circuit (고조파 제거 회로를 갖는 전력 증폭기 설계에 관한 연구)

  • Song, Byoung-Jin;Kim, Jae-Hyun;Go, Min-Ho;Park, Hyo-Dal
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.18 no.7
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    • pp.710-716
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    • 2007
  • In this paper, I study on the realization of 900 MHz 1 W power amplifier using a harmonic rejection circuit. The proposed harmonic rejection circuit has improved the harmonic rejection characteristic and overcoming the problems related with frequency reproducibility on the microstrip line. The proposed power amplifier, fabricated by the type of hybrid with the epoxy PCB, was composed of driver stage and power amplifier stage with harmonic rejection circuit. The fabricated power amplifier shows -24 dBc and -30 dBc of harmonic rejection characteristic at 2nd and 3rd harmonic compared with that is not used, respectively and it could be replace the filter located between an output stage and an antenna.

20 GHz Pulse Sampling Oscilloscope Based on Electro-Optic Technique (광-전자파 기반 20 GHz급 펄스 샘플링 오실로스코프)

  • Lee, Dong-Joon;Kang, No-Weon;Lee, Joo-Gwang;Kang, Tae-Weon
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.22 no.10
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    • pp.927-933
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    • 2011
  • This paper presents an optical sampling technique which can be used to overcome the limited bandwidth of a commercial electronic sampling oscilloscope for pulsed signal measurement. Employing an ultrafast laser with 0.1 ps pulse duration, 20 GHz electromagnetic pulses were generated through a fast photodiode. These pulses were transmitted through a microstrip line and sampled with an optically triggered electro-optic system. Two sampled 20 GHz pulses - measured independently over the transmission line with a non-contacting electro-optic method and conventional electronic one through a coaxial cable - were compared.

A Reconfigurable Circularly Polarized Microstrip Antenna on a Cross-Shape Slotted Ground (십자형 접지면 슬롯을 이용한 재구성 가능한 원형 편파 마이크로스트립 안테나)

  • Yoon, Won-Sang;Han, Sang-Min;Lee, Dong-Hyo;Lee, Kyoung-Joo;Pyo, Seong-Min;Kim, Young-Sik
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.21 no.1
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    • pp.46-52
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    • 2010
  • A compact circular microstrip patch antenna with a switchable circular polarization(CP) is proposed at 2.4 GHz. An unequal cross-shaped slot on a ground plane is utilized as a perturbation. By switching pin diodes mounted on the slot, the CP sense of each antenna can be simply switched from left-handed(LH) CP to right-handed(RH) CP vice versa. Since the perturbation can be made on the ground plane and no bias circuit is required on the patch side, the bias circuit has not effect on the main beam radiation. From the experimental results, the impedance bandwidth and CP bandwidth of the proposed antenna have shown up to 150 MHz and 35 MHz, respectively. The peak gain of the proposed antenna is 1.7 dBi for both CP senses.

Design of Cavity-Backed Microstrip Dipole Array Antennas with Enhanced Front-to-Back Ratio (전후방비가 개선된 Cavity-Backed 마이크로스트립 다이폴 배열 안테나 설계)

  • You, Dong-Gyun;Jeon, Jung-Ik;Lee, Hyoung-Ki;Choi, Hak-Keun
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.1
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    • pp.37-44
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    • 2009
  • In this paper, a TRS band(Trunked Radio System: $806{\sim}866\;MHz$) array antenna has a good front-to-back ratio characteristics for the mobile communication base station is proposed. The proposed array antenna is composed of the $5{\times}3$ radiated elements which are the microstrip dipole antennas with the cavity-backed reflector. For the validity of the proposed antenna, the $5{\times}3$ array antenna is designed, fabricated, and its radiation characteristics are measured. As a result of measurements, the antenna gain is over 13.3 dBi and the front-to-back ratio is over 40 dB at the useable frequency band. We confirm that the designed antenna can be used as the mobile communication base station antenna with the excellent back lobe characteristics.

Design of a Micro-strip Patch Array Antenna using CRLH Transmission Line Power Divider Supporting Infinite Wavelength (무한파장 전파특성을 갖는 CRLH 전송선로 전력 분배기를 이용한 마이크로스트립 패치 배열 안테나의 설계)

  • Kim, Jung-hyung;Lee, Hong-min
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.3 no.2
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    • pp.39-45
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    • 2010
  • In this paper, an equally spaced $3{\times}2$ microstrip patch array antenna based on the fundamental infinite wavelength supported by the composite right/left-handed (CRLH) transmission line (TL) is proposed. The proposed CRLH TL unit cell consists of an inter-digit capacitor to realize left-handed (LH) series capacitance and non-symmetric shunt meander line with a shorted via to realize LH shunt inductance. At the infinite wavelength frequency of 2.09 GHz a 6-port series power divider consisting of a 19 unit cells shows a maximum magnitude difference of 0.73 dB and a $0.52^{\circ}$ maximum phase difference between output ports. The measured resonant frequency and maximum gain of the fabricated array antenna is 2.09 GHz and 10.98 dBi, respectively.

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Investigation on Guided Wave Dispersion Characteristics for Metal Thin Films (금속 박막의 유도초음파 분산 특성 연구)

  • Kim, Miso;Cho, Seung Hyun;Jang, Gang-Won;Lee, Seung-Seok;Park, Ik-Keun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.34 no.3
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    • pp.233-240
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    • 2014
  • In this study, we investigated the dispersion characteristics of guided waves in thin films. Dispersion curves are essential for understanding not only the behavior of ultrasonic waves, but also the mechanical properties of thin films. Matrix techniques are presented for modeling ultrasonic waves in multilayered structures before being used to calculate the dispersion curves for Al-steel and Al-composite specimens. When compared with the dispersion curves obtained using the commercial program (Disperse), the dispersion curves generated from the transfer matrix method show its validity. These developed methods are used to obtain dispersion curves for Al thin films deposited on a Si substrate. The resulting dispersion curves enable observation of both dispersive and non-dispersive behavior for the guided waves, depending on the thickness of the thin films.