• Title/Summary/Keyword: 마이크로소자

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Mechanical and Optical Characteristics of Transparent Stretchable Hybrid Substrate using PDMS and Ecoflex Material (PDMS-Ecoflex 하이브리드 소재를 이용한 투명 신축성 기판의 기계적 및 광학적 특성)

  • Lee, Won Jae;Park, So-Yeon;Nam, Hyun Jin;Choa, Sung-Hoon
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.4
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    • pp.129-135
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    • 2018
  • In the stretchable electronic devices, the stretchable substrate is a very essential material which determines the stretchability, performances and durability of the stretchable electronic devices. In particular, the current stretchable materials have hysteresis making difficult to used as sensors and other electronic devices. In this study, we developed a PDMS-Ecoflex hybrid stretchable substrate mixed with PDMS and Ecoflex material in order to increase stretchability and improve hysteresis characteristics. Mechanical behavior of the hybrid substrate was evaluated using a tensile test, and optical transmittance of the hybrid substrate was also measured. As the content of Ecoflex increases, the PDMS-Ecoflex hybrid substrate becomes more flexible, and the elastic modulus decreases. In addition, the PDMS substrate failed a tensile strain of 270%, while the PDMS-Ecoflex hybrid substrate did not fail even at 500% strain indicating excellent stretchability. In the repeated tensile test, the hybrid substrate with 2:1 mixing ratio of PDMS and Ecoflex showed hysteresis. On the other hand, in the case of the hybrid substrate with the mixing ratio of 1:1, hysteresis did not occur at a strain of 50% and 100%. Hence, we developed a stretchable substrate with over 150% stretchability and no hysteresis characteristics. The optical transmittance of the Ecoflex substrate was 68.6%, whereas the transmittances of the hybrid substrate with mixing ratio of 2:1 and 1:1 were 78.6% and 75.4%, respectively. These results indicate that the PDMS-Ecoflex hybrid substrate is a potential candidate for a transparent stretchable substrate.

Evaluation of 12nm Ti Layer for Low Temperature Cu-Cu Bonding (저온 Cu-Cu본딩을 위한 12nm 티타늄 박막 특성 분석)

  • Park, Seungmin;Kim, Yoonho;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.3
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    • pp.9-15
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    • 2021
  • Miniaturization of semiconductor devices has recently faced a physical limitation. To overcome this, 3D packaging in which semiconductor devices are vertically stacked has been actively developed. 3D packaging requires three unit processes of TSV, wafer grinding, and bonding, and among these, copper bonding is becoming very important for high performance and fine-pitch in 3D packaging. In this study, the effects of Ti nanolayer on the antioxidation of copper surface and low-temperature Cu bonding was investigated. The diffusion rate of Ti into Cu is faster than Cu into Ti in the temperature ranging from room temperature to 200℃, which shows that the titanium nanolayer can be effective for low-temperature copper bonding. The 12nm-thick titanium layer was uniformly deposited on the copper surface, and the surface roughness (Rq) was lowered from 4.1 nm to 3.2 nm. Cu bonding using Ti nanolayer was carried out at 200℃ for 1 hour, and then annealing at the same temperature and time. The average shear strength measured after bonding was 13.2 MPa.

Metal-organic Chemical Vapor Deposition of Uniform Transition Metal Dichalcogenides Single Layers and Heterostructures (유기금속화학기상증착법을 이용한 전이금속 칼코게나이드 단일층 및 이종구조 성장)

  • Jang, Suhee;Shin, Jae Hyeok;Park, Won Il
    • Journal of the Microelectronics and Packaging Society
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    • v.27 no.4
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    • pp.119-125
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    • 2020
  • Transition metal dichalcogenides (TMDCs), two-dimensional atomic layered materials with direct bandgap in the range of 1.1-2.1 eV, have attracted a lot of research interest due to their high response to light and capability to build new types of artificial heterostructures. However, the large-area synthesis of high-quality and uniform TMDC films with vertical-stacked heterostructure still remains challenge. In this study, we have developed a metal-organic chemical vapor deposition (MOCVD) system for TMDCs and conducted a systematic study on the growth of single-layer TMDCs and their heterostructures. In particular, using a bubbler-type organometallic compound sources, the concentration and flow rate of each source can be precisely controlled to obtain uniformly single-layered MoS2 and WS2 films over the centimeter scale. In addition, the MoS2/WS2 vertical heterostructure was achieved by growing WS2 film directly on the MoS2 film, as confirmed by electron microscopy, UV-visible spectrophotometer, Raman spectroscopy, and photoluminescence spectroscopy.

Recent Progress of Ti3Ci2Tix MXene Electrode Based Self-Healing Application (Ti3Ci2Tix MXene 기반 전극 소재의 자가 치유 적용 기술 개발 동향)

  • Jun Sang Choi;Seung-Boo Jung;Jong-Woong Kim
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.3
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    • pp.20-34
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    • 2023
  • Single or multi-layered two-dimensional (2D) materials, with thicknesses in the order of a few nanometers, have garnered substantial attention across diverse research domains owing to their distinct properties, including electrical conductivity, flexibility, and optical transparency. These materials are frequently subjected to repetitive mechanical actions in applications like electronic skin (E-Skin) and smart textiles. Moreover, they are often exposed to external factors like temperature, humidity, and pressure, which can lead to a deterioration in component durability and lifespan. Consequently, significant research efforts are directed towards developing self-healing properties in these components. Notably, recent investigations have revealed promising outcomes in the field of self-healing composite materials, with Ti3Ci2Tix MXene being a prominent component among the myriad of available 2D materials. In this paper, we aim to introduce various synthesis methods and characteristics of Ti3Ci2Tix MXene, followed by an exploration of self-healing application technologies based on Ti3Ci2Tix MXene.

Reliability of Cu Interconnect under Compressive Fatigue Deformation Varying Interfacial Adhesion Treatment (유연소자용 기판과의 접착 특성에 따른 구리 배선의 압축 피로 거동 및 신뢰성)

  • Min Ju Kim;Jeong A Heo;Jun Hyeok Hyun;So-Yeon Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.4
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    • pp.105-111
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    • 2023
  • Electronic devices have been evolved to be mechanically flexible that can be endured repetitive deformation. This evolution emphasizes the importance of long-term reliability in metal wiring connecting electronic components, especially under bending fatigue in compressed environments. This study investigated methods to enhance adhesion between copper (Cu) and polyimide (PI) substrates, aiming to improve the reliability of copper wiring under such conditions. We applied oxygen plasma treatment and introduced a chromium (Cr) adhesion layer to the polyimide substrate. Our findings revealed that these adhesion enhancement methods significantly affect compression fatigue behavior. Notably, the chromium adhesion layer, while showing weaker fatigue characteristics at 1.5% strain, demonstrated superior performance at 2.0% strain with no delamination, outperforming other methods. These results offer valuable insights for improving the reliability of flexible electronic devices, including reducing crack occurrence and enhancing fatigue resistance in their typical usage environments.

Electrical Properties of Two-dimensional Electron Gas at the Interface of LaAlO3/SrTiO3 by a Solution-based Process (용액 공정을 통해 제조된 LaAlO3/SrTiO3 계면에서의 이차원 전자 가스의 전기적 특성)

  • Kyunghee Ryu;Sanghyeok Ryou;Hyeonji Cho;Hyunsoo Ahn;Jong Hoon Jung;Hyungwoo Lee;Jung-Woo Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.31 no.1
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    • pp.43-48
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    • 2024
  • The discovery of a two-dimensional electron gas (2DEG) at the interface of LaAlO3 (LAO) and SrTiO3 (STO) substrates has sparked significant interest, providing a foundation for cutting-edge research in electronic devices based on complex oxide heterostructures. However, conventional methods for producing LAO thin films, typically employing techniques like pulsed laser deposition (PLD) within physical vapor deposition (PVD), are associated with high costs and challenges in precisely controlling the La and Al composition within LAO. In this study, we adopted a cost-effective alternative approach-solution-based processing-to fabricate LAO thin films and investigated their electrical properties. By adjusting the concentration of the precursor solution, we varied the thickness of LAO films from 2 to 65 nm and determined the sheet resistance and carrier density for each thickness. After vacuum annealing, the sheet resistance of the conductive channel ranged from 0.015 to 0.020 Ω·s-1, indicating that electron conduction occurs not only at the LAO/STO interface but also into the STO bulk region, consistent with previous studies. These findings demonstrate the successful formation and control of 2DEG through solution-based processing, offering the potential to reduce process costs and broaden the scope of applications in electronic device manufacturing.

An optical true time delay for 10 GHz linear phased array antennas composed of optical 2×2 MEMS switches and fiber delay lines (광 2×2 MEMS 스위치와 광섬유 지연선로를 이용한 10 GHz 선형 위상배열 안테나용 광 실시간 지연선로)

  • 이백송;신종덕;김부균
    • Korean Journal of Optics and Photonics
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    • v.14 no.4
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    • pp.466-472
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    • 2003
  • In this paper, we proposed an optical true time-delay (TTD) feeder system for phased array antennas (PAAs). The system possesses high-speed beam scan capability since, in this scheme, different lengths of fiber delay-lines are selected by optical 2${\times}$2 MEMS switches at high speed. An optical TTD capable of beam scanning in one of eight different directions has been built for 10 GHz linear PAA systems. Experimental results on time delay measurements show that the maximum time delay error is less than 0.2 ps corresponding to a scan angle error of less than 0.84o. We have also designed a 10 GHz linear PAA composed of eight micro-strip patch antenna elements driven by the proposed TTD, and the radiation patterns of this PAA have been analyzed by simulation.

Analysis of Characteristics for Strip Line with a Ferrite Material using Spectral-Domain Method (주파수 영역법을 이용한 페라이트 물질이 포함된 스트립 선로 특성 해석)

  • 박진수;양승인
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.10 no.4
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    • pp.498-505
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    • 1999
  • The ferrite device that has nonreciprocal characteristics has been used as various microwave components. In this paper, the spectral-domain method was used to analyze the characteristics of structure(strip line on multilayer structure with ferrite material) for which no paper has been published yet. It is assumed that an external dc magnetic field is applied perpendicular to the ground conductor. The propagation constant is calculated for each parameter and frequency. Also we considered convergence by increasing the number of basis functions and verified the numerical analysis results. From the results, we could confirm that as the thicknesses of YIG is increased, the cutoff region is widened and the propagation constant is decreased at the frequency of upper cutoff region. For a larger applied dc magnetic field, the frequency of cutoff region is found to be increased. Also the simulation results for strip line show that the cutoff region is widened and the propagation constant is larger than that of microstrip line.

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Design of Dual-Band Power Amplifier for the RFID Frequency-Band (RFID 대역에서 동작하는 이중 대역 전력증폭기 설계)

  • Kim, Jae-Hyun;Hwang, Sun-Gook;Park, Hyo-Dal
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.25 no.3
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    • pp.376-379
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    • 2014
  • In this paper, we designed more improving a dual-band power amplifier than the transceiver of RFID reader that operates at 910 MHz and 2.45 GHz. A dual-band power amplifier has two circuits. One matching circuit is composed lumped element in the band of 910 MHz. The other matching circuit using distributed element in the high band of 2.45 GHz. So, this dual-band power amplifier works as Band Rejection Filter in the band of 910 MHz but in the high band of 2.45 GHz works as Band Pass Filter. Therefore, this is composed a microstrip transmission line. A power amplifier is showed gains of 8 dB output power at 910 MHz and 1.5 dB output power at 2.45 GHz. If input power is 10 dBm, both of bands output 20 dBm.

Tolerance design of position accuracy of optical components for micro optical system (마이크로 광 시스템 구현을 위한 광학 부품의 위치 정밀도 허용오차 설계)

  • 이재영;황병철;박헌용;박세근;이승걸;오범환;이일항;최두선
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.7
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    • pp.13-20
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    • 2004
  • In order to set up the design of micro optical bench, optical coupling efficiencies of two sets of test benches are calculated. Simple linear connections of incoming and outgoing optical fibers with and without ball lenses are designed. Positional errors that are possible in actual fabrication processes we considered in the calculations and their tolerances are determined from -3 ㏈ conditions. For a simple fiber-to-fiber connection, the lateral misalignment should be limited to 2.7 um and tilt error 5.8o. In case of the fiber-to-fiber with ball lens, the working distance between fibers can be extended over 60 um. The optical coupling efficiency depends strongly on the positional errors of ball lenses along the optical axis, and it is also found that the lateral and vertical positional errors should be considered simultaneously in order to keep the high coupling efficiency.