• Title/Summary/Keyword: 마이크로빔

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Development of an electron source using carbon nanotube field emittes for a high-brightness X-ray tube (탄소나노튜브를 이용한 고휘도 X-선원용 전자빔원 개발)

  • Kim, Seon-Kyu;Heo, Sung-Hwan;Cho, Sung-Oh
    • Journal of the Korean Vacuum Society
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    • v.14 no.4
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    • pp.252-257
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    • 2005
  • A high-brightness electron beam source for a microfocus X-ray tube has been fabricated using a carbon-nanotube (CNT) field emitter. The electron source consists of cathode that includes a CNT field emitter, a beam-extracting grid, and an anode that accelerates that electron beam. The microfocus X-ray tube requires an electron beam with the diameter of less than 5 $\mu$m and beam current of higher than 30 $\mu$A at the position of the X-ray target. To satisfy the requirements, the geometries of the field emitter tips and the electrodes of the gun was optimized by calculating the electron trajectories and beam spatial profile with EGUN code. The CNT tips were fabricated with successive steps: a tungsten wire with the diameter of 200 $\mu$m was chemically etched and was subsequently coated with CNTs by chemical vapor deposition. The experiments of electron emission at the fabricated CNT tips were performed. The design characteristics and basic experimental results of the electron source are reported.

The Emission and Characteristics Measurement of Electron Beam and Basis Construction for Education Usage (전자빔 인출 및 빔 계측과 교육 활용을 위한 기반구축)

  • Lee, Dong-Hoon
    • Journal of IKEEE
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    • v.11 no.4
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    • pp.257-264
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    • 2007
  • The MM22 microtron has used as a cancer therapy machine from Nov. 1986 to Feb. 2006. This machine was moved and installed to a radiation research center to use as an education and research tool from treatment machine because of aging of MM22 microtron. In this paper, for extracting the electron beam from microtron, operation principle of the microtron, system characteristics of each module, and pulse structures were reviewed. The beam extraction and measurement were performed after measuring pulses of each major module and extraction trials in the beam line. After finishing the movement of MM22 microtron, the 30mA target current in the case of 10 MV X-ray beam was extracted and the beam flatness of radiation distribution was acquired within 3% error ratio after 100 MU was irradiated on X-omatV Film at SSD 100 cm and field size $10{\times}10cm^2$. As a result, the microtron movement and new installation was performed with success.

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Beam Steering Antenna Using Microstrip Patch with U-Slot for Wearable Fabric Applications (의복용 U-슬롯을 갖는 빔 조향 마이크로스트립 안테나)

  • Ha, Sang-Jun;Jung, Chang-Won
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.22 no.8
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    • pp.754-760
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    • 2011
  • Reconfigurable beam steering using microstrippatch antenna with U-slot is proposed for wearable fabric applications. The proposed antenna is manufactured on a fabric substrate, and designed to steer the beam directions at the operation frequency of 6.0 GHz. The U-shaped slot and the indirect feeding-techniques are utilized in designing the proposed antenna. By the configuration of two artificial switches($S_0$, $S_1$, $S_2$) in between the indirect feed and the antenna patch, the antenna has three beam directions. The maximum beam directions are steerable in the yz-plane(${\theta}=0^{\circ}$, $30^{\circ}$, $331^{\circ}$), and the overall HPBW is $115^{\circ}$. The measured peak gains are 6.11~6.69 dBi.

Study on super-hydrophobic electro-spray micro thruster and measurement of micro scale thrust (초소수성 전기 분무 마이크로 추진 장치 및 마이크로 추력 측정)

  • Lee, Young-Jong;Yoo, Yong-Hoon;Tran, Si Bui Quang;Kim, Sang-Hoon;Park, Bae-Ho;Buyn, Do-Young
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.37 no.2
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    • pp.175-180
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    • 2009
  • In this article, we fabricated polytetrafluoroethylene(PTFE) nozzle treated by ion beam, in order to fabricate polymer based electrospray micro thruster with super hydrophobic nozzle. To obtain the super hydrophobic surface, PTFE surface is treated by argon and oxygen plasma treatment process. The optimal condition is investigated argon and oxygen flow rate as well as the paalied energy level for the treatment process. Fabricated nozzle was evaluated by measuring contact angle, and the surface morphology was examined by using scanning electron microscope(SEM) and atomic force microscope(AFM). We observe that jetting becomes more stable and repeatable on the treated nozzle. And to evaluate performance of fabricated nozzle, we measure micro scale thrust using a cantilever and a nozzle treated by ion beam laser displacement sensor.

Design of X-ray Target for a CNT-based High-brightness Microfocus X-ray Tube (탄소나노튜브를 이용한 고휘도 마이크로빔 X-선원 발생부 설계)

  • Ihsan Aamir;Kim Seon Kyu;Heo Seong Hwan;Cho Sung Oh
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.103-109
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    • 2006
  • A target for a high-brightness microfocus x-ray tube, which is based on carbon nanotubes (CNT) as electron source, is designed. The x-ray tube has the following specifications: brightness of $1\times10^{11}phs/s.mm^2. mrad^2$, spot size $\~5{\mu}m$, and average x-ray energy of $20\~40 keV$. In order to meet the specifications, the design parameters of the target, such as configuration, material, thickness of the target as well as the required beam current, were optimized using computer code MCNPX. The design parameters were determined from the calculation of both x-ray spectrum and intensity distribution for a transmission type configuration. For the thin transmission type target to withstand vacuum pressure and localized thermal loading, the structural stability and temperature distribution were also considered. The material of the target was selected as molybdenum(Mo) and the optimized thickness was $7.2{\mu}m$ to be backed by $150{\mu}m$ beryllium (Be). In addition, the calculations revealed that the maximum temperature of the transmission target can be maintained within the limits of stable operation.

Design of a 1 × 2 Array Microstrip Antenna for Active Beam Compensation at X-band (X-밴드 능동적 빔 보상 1 × 2 배열 마이크로스트립 안테나 설계)

  • Choi, Yoon-Seon;Woo, Jong-Myung
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.15 no.2
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    • pp.111-118
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    • 2016
  • This paper presents an X-band (9.375 GHz) $1{\times}2$ array microstrip antenna which is capable of active beam compensation for installation of an unmanned aerial vehicle (UAV). First of all, a basic $1{\times}2$ array microstrip antenna incorporated with wilkinson power divider was designed and performance of the array antenna was verified. Next, to verify beam steering performance of the designed array microstrip antenna, we fabricated a phase shifter, and the wilkinson power divider as module structure and measured characteristics of beam steering according to phase shifting. The main lobe is 0.6 dBi at $0^{\circ}$, and the side lobe decreased 18.8 dB. The reliable radiation pattern was achieved. Finally, an active beam steering microstrip array antenna attached with the phase shifter and the power divider on the back side of the antenna was designed and fabricated to install wing of UAV for compactness. The maximum gain is 0.1 dBi. Therefore, we obtained a basic antenna technology for compensating beam error according to wing deformation of an UAV installed array antennas.

Enhancement of adhesion between Cu thin film and Polyimide modified by ion assisted reaction (이온보조 반응법에 의하여 표면처리된 Polyimide (PI) 표면과 구리박막의 접착력 향상)

  • 석진우
    • Journal of the Microelectronics and Packaging Society
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    • v.4 no.1
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    • pp.19-30
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    • 1997
  • 고분자 Polyimide (PI) film 표면을 반응성 가스 분위기에서 1KeV의 에너지를 가지 는 여러 종류의 이온빔으로 조사하여 표면을 개질하였다. PI표면의 친수성과 표면에너지를 측정하기 위해 접촉각 측정기를 사용하였으며 개질 된 표면의 화학적 변화를 측정하기 위해 X-ray photoelectron spectroscopy (XPS)를 사용하였다. 표면 개질을 위한 이온조사량은 5 $\times$1014 -1$\times$1017 ions/cm2이며 반응가스는 0-8scm까지 변화시켰다. 아르곤 이온빔으로 표면 개질시에는 67。에서 40。까지 감소하였고 표면에너지는 46 dyne/cm에서 64dyne/cm까지 증가하였다. 산소를 6sccm 주입하면서 산소 이온빔으로 표면 개질시 물과의 접촉각은 67。 에서 최대 12。까지 감소하였으며 표면에너지는 46dyne/cm에서 72dyne/cm까지 증가하였고 이때의 이온조사량은 5$\times$1014 -1$\times$1017 ions/cm2 이였다. 여러 종류의 반응성 가스와 이온을 사용하여 개질하여 본 결과 산소분위기에서 산소 이온을 이용하여 개질 하였을 때 접촉각이 8。인 표면을 얻을수 있었다, 산소분위기에서 아르곤 이온빔으로 1$\times$1017 ions/cm2 의 이온 조사량으로 개질 된 Pi 시료를 대기 중에 보관하였을 때에는 110시간 후 65。로 증가하였고 물속에서 보관하였을 때에는 46。로 증가하였다. 그러나 산소 이온빔에 산소분위기에서 개 질 된 시료의 경우 물속에 보관할 경우 접촉강의 증가없이 일정한 값을 나타내었다. 이온조 사로 개질된 시료의 화학적 변화를 확인하기 위하여 XPS 사용하였다. 표면 개질 전의 PI 시료와 산소 분위기에서 1$\times$1017 ions/cm2의 아르곤 이온빔으로 개질한 XPS peak 결과로 보아 Cls의 spectra를 보면 C-C, C-N 그리고 C=O의 결합들은 intensity가 감소하였고 C-O 의 intensity는 증가하였다. Nls peak로 보아 imide N 성분은 이온빔의 조사로 인하여 감소 하였고 C-O의 intensity는 증가하였다. Nls peakk로 보아 imide N성분은 이온빔의조사로 감소하였고 Ols peak로 보아 C-O는 증가하였고 C=O는 약간의 감소가 나타났다. 또한 이온 보조 반응법을 이용하여 처리한 시료의 경우 접착력이 증가하는데 이는 주로 C-O 결합의 산소와 Cu와의 상호작요에 의한 것임을 알수 있었다.

Surface Modification of Polyimide by Stationary Plasma thruster-type lasma Source : Correlations with Ahesion (SPT-type Plasma 발생장치를 이용한 폴리이미드의 표면개질과 접착력의 관계)

  • ;Ermakov Yu. A.
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2003.11a
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    • pp.181-184
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    • 2003
  • Low Energy High flux Plasma Source인 Stationary Plasma thruster (SPT)를 이용하여 폴리이미드의 표면개질 후 접촉각과 표면에너지의 변화를 조사하고 접착력과의 관계를 조사하였다. 이온에너지는 180 eV - 200 eV, 이온전류 밀도는 수백 ${\mu}A/cm^2$, 이온선량은 $5\times10^{15}/cm^2$부터, $10\times^{18}/cm^2$$Ar^+,\;N_2^+,\;O_2^+$를 이온 주입시켰다. 표면 처리된 폴리이미드에 대한 접촉각 변화는 dual contact anglemeter로 증류수와 에틸렌글리콜을 이용하여 측정하였고, 표면에너지의 변화량을 구하였다. 접촉각의 변화는 아르곤 이온의 경우는 최저 $35^{\circ}$, 질소와 산소의 경우 $1\times10^{17}/cm^2$에서 각각 $14^{\circ},\;10^{\circ}$정도의 전촉각을 보였으며, $5\times10^{17}/cm^2$이상에서는 측정하기 불가능하였다. 산소 이온빔으로 처리된 PI의 표면을 x-ray photoelectron spectroscopy를 통하여 측정하여본 결과, 친수성기가 많이 형성되었음을 확인할 수 있었다. 접촉각 측정으르부터 PI의 표변에너지는 42.1 mN/m에서 아르곤 이온빔의 처리 시 65.2 mN/m로 산소 이온빔의 처리 시 81.2 mN/m로 각각 1.5배, 1.9배 정도 증대하였다. 산소 이온빔으로 처리된 PI 표면위에 스퍼터링으로 300 nm 정도의 clad layer 형성 후 $20{\mu}m$ 정도의 구리 전기 도금막을 형성하여, peel 강도를 측정한 결과 0.79 kg/cm의 강도를 얻을 수 있었다.

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An Aperture-coupled Microstrip Shaped-beam Array Antenna for the PCS Basestation (개구 결합 구조를 갖는 PCS 기지국용 마이크로스트립 정형 빔 배열 안테나)

  • Yeo, Un Sik;Kim, Gwang Jo;Gang, Seung Taek;Kim, Hyeong Dong
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.8 no.6
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    • pp.636-636
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    • 1997
  • This paper presents the design and fabrication of a shaped-beam array antenna which will be used for a PCS basestation using structure that is coupled to a microstrip line by an aperture on the intervening ground plane. The shaped-beam pattern is obtained by an antenna synthesis method. An array antenna considering the mutual coupling between array elements(patches) and a feeding network are designed by CAD tools. The feeding network is designed by using the Wilkinson power divider to obtain the optimized shaped-beam. The designed results are compared with the measured data.