• Title/Summary/Keyword: 마이크로빔

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Development of Geometric Error Measurement System for Machine tool Guideways Using Laser-Photo Diode (레이저 및 광전소자를 이용한 공작기계 가이드 운동오차 측정시스템 개발)

  • 박희재
    • Journal of the KSME
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    • v.34 no.3
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    • pp.168-176
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    • 1994
  • 축 이송운동의 오차를 측정할 수 있는 광전소자 측정시스템이 구현되었으며, 결론은 다음과 같다. 1) 광전소자와 레이저광원을 이용하여 축이송시에 발생하는 5개의 운동오차를 동시에 검출하는 측정방법이 개발되었으며, 이때의 정밀도는 마이크로미터오더이다. 2)광전소자에 대한 2차원 칼리브레이션이 수행되었으며, 비선형성을 고려할 때 더욱 정밀한 측 정값을 얻을 수 있었다. 3) 레이저간섭기 등에 의해서 측정이 어려운 롤(roll)오차의 측정방법이 구현되었으며, 이때 빔 분리기의 오차를 칼리브레이션할 때, 정밀한 측정값이 얻어질 수 있었다. 4)광전소자측정시스템을 마이크로 컴퓨터와 연계함으로써, 종래의 측정방법보다 매우 빠르며, 정밀한 측정시스템이 구현되었다.

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Generation of colloidal periodic structure by using optical tweezers (광집게를 이용한 콜로이드 주기 구조의 형성)

  • 김현익;임강빈;주인제;오차환;송석호;김필수
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.16-17
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    • 2003
  • 수 십 ∼ 수 마이크로 크기의 미세 입자에 강하게 집속된 빔을 산란시키게 되면 입자들은 운동량의 변화에 따라 광의 초점부근에서 포획되는 힘을 받게 된다. 이런 힘은 scattering force와 gradient force로 구분할 수 있고, Optical tweezers는 광의 gradient force를 이용하여 미세입자를 포획하고 조작하는 기술이다. 광에 의해 물리적인 접촉 없이 입자를 포획할 수 있다는 사실로부터 optical tweezers는 생물학을 비롯한 많은 분야에서 유용한 도구로 사용되어지고 있다. (중략)

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A Cylindrical Hybrid Antenna for Shaping Complex Beam Patterns (복합 빔 패턴 형성을 위한 원통형 하이브리드 안테나)

  • Eom, Soon-Young;Jung, Young-Bae;Jeon, Soon-Ick;Kim, Chang-Joo
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.18 no.11
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    • pp.1279-1290
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    • 2007
  • In this paper, a cylindrical hybrid antenna which is spatially fed by an off-set linear feed array is described to form complex beam patterns. The linear feed array consists of twelve micro-strip patch elements and forms a flat-topped beam pattern with a beam-width of $90^{\circ}$ in the horizontal plane. The vertical curve on the cylindrical reflector with the linear feed array is shaped in order to form a cosecant beam pattern within the range of $-5^{\circ}$ to $-25^{\circ}$ in the vertical plane. To form complex beam patterns, the hybrid antenna with cylindrical reflector aperture of $140{\times}50\;cm$ was designed and fabricated to be operated within the IMT 2000 service band, and also electrical performances of the antenna were measured and analyzed.

Design and Performance Prediction of μN Level MEMS Thrust Measurement System of Piezoresistance Method (압저항 방식의 μN급 MEMS 추력 측정 시스템 설계 및 성능 예측)

  • Ryu, Youngsuk;Lee, Jongkwang
    • Journal of the Korean Society of Propulsion Engineers
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    • v.22 no.6
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    • pp.111-117
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    • 2018
  • In this study, an MEMS thrust measurement system was designed and a study on the performance prediction of system was performed to evaluate the performance of micro thruster. Thrust measurement system consists of beam, membrane, and piezoresistive sensor. An FEM analysis was carried out to verify the stability of the system, confirm the stress variation at the beam, and position the piezoresistive sensor. The stability of the designed system was verified by comparing the yield strength of the material with the maximum stress. The piezoresistive sensor was designed to be 20% of the length of the beam to obtain a high gauge factor. The size of the membrane and the beam of the reference model were designed to be $15mm{\times}15mm$, and $500{\mu}m{\times}500{\mu}m$, respectively.

The Design and Construction of the Nuclear Microprobe (핵 마이크로프로브 설계 및 제작)

  • Woo, Hyung-Ju;Kim, Jun-Gon;Choi, Han-Woo;Hong, Wan;Kim, Young-Seok;Lee, Jin-Ho;Kim, Ki-Dong;Yang, Tae-Gun
    • Journal of the Korean Vacuum Society
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    • v.10 no.3
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    • pp.380-386
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    • 2001
  • A nuclear microprobe system with adjustable precision object slits and a magnetic quadrupole doublet was designed by the beam optics simulation using a first order matrix formalism, and installed in a $30^{\circ}$ beam line connected with KIGAM 1.7 MV Tandem VDG Accelerator. Demagnification factors for x and y axis are calculated to be 25 and 4.9, respectively, and a minimum beam spot side is expected to be about 5 $\mu\textrm{m}$ for 3 MeV proton beams with a current of about 1 nA. A multi-purpose octagonal target chamber has been built to facilitate MeV ion-beam analytical techniques of PIXE, RBS, ERDA, and ion beam micro-machining. It contains X-ray and particle detectors, a zoom microscope, a Faraday cup, a 4-axis sample manipulator and a high vacuum pumping system. The system performance of the nuclear microprobe is now being tested, and automatic manipulator control and data acquisition system will be installed for routine applications of micro ion-beam analytical techniques.

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Developement of Planar Active Array Antenna System for Radar (평면형 능동 위상 배열 레이더용 안테나 시스템 개발)

  • Chon, Sang-Mi;Na, Hyung-Gi;Kim, Soo-Bum;Lee, Jeong-Won;Kim, Dong-Yoon;Kim, Seon-Joo;Ahn, Chang-Soo;Lee, Chang-Hee
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.12
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    • pp.1340-1350
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    • 2009
  • The design and implementation of planar Active Phased Array Antenna System are described in this paper. This Antenna system operates at X-band with its bandwidth 10 % and dual polarization is realized using dual slot feeding microstrip patch antenna and SPDT(Single Pole Double Through) switch. Array Structure is $16\times16$ triangular lattice structure and each array is composed of TR(Transmit & Receive) module with more than 40 dBm power. Each TR module includes digital attenuator and phase shifter so that antenna beam can be electronically steered over a scan angle$({\pm}60^{\circ})$. Measurement of antenna pattern is conducted using a near field chamber and the results coincide with the expected beam pattern. From these results, it can be convinced that this antenna can be used with control of beam steering and beam shaping.

Development of Microlens Array for Maskless Lithography Application (Maskless lithography 응용을 위한 마이크로렌즈 어레이 개발)

  • Nam, Min-Woo;Oh, Hae-Kwan;Kim, Geun-Young;Seo, Hyun-Woo;Wei, Chang-Hyun;Song, Yo-Tak;Yang, Sang-Sik;Lee, Kee-Keun
    • Journal of the Microelectronics and Packaging Society
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    • v.16 no.4
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    • pp.33-39
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    • 2009
  • A microlens array (MLA) was developed based on the wet-etched quartz substrate and coating of UV adhesive on the substrate for maskless lithography application. The developed MLA has the focal length of ${\sim}45\;{\mu}m$ and the spot size of ${\sim}1\;{\mu}m$. The spot size of the focused beam passing through the MLA was detected by CCD camera, and its intensity was monitored by beam profiler. Uniform spots with nearly identical intensities were observed on the focal plane when a beam passes through the fabricated MLA. The focal length was varied depending on thickness of the coated UV adhesive. The thicker the thickness of the UV adhesive was, the shorter the focal length of the MLA was. With a general mask aligner, UV beam focusing was tested onto photoresist (PR). The beams were well focused onto PR when UV passes through the MLA. Depending on the variable distances from the MLA, beam sizes onto PR were controlled. Even at high temperature for a long time, the performances of the MLA were not changed.

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A Study on Rectangular-Ring Patch Active Antenna with Dual Polarization Diversity (이중편파 다이버시티 특성을 갖는 사각 링 구조의 능동형 패치 안테나에 관한 연구)

  • Yun, Gi-Ho
    • Journal of IKEEE
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    • v.13 no.3
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    • pp.72-79
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    • 2009
  • This paper describes a compact microstrip active antenna with dual polarization. The antenna, receiving both a left-hand circularly polarized wave and a right-hand circularly polarized wave, has a function of polarization diversity. A square-shaped empty room is located on the inside of the microstrip radiator so that the size has been reduced. And slots are added around feeding point to improve input matching. Also, amplifier and switching circuitry are placed at the empty room to increase antenna gain and to select one of the circular polarizations, respectively. The proposed antenna has been applied to GPS(global positioning system). The measurement results show that it has 10dB-impedance bandwidth, 3dB axial bandwidth of about 50MHz, 3dB beamwidth of 90degree, and gain of 13dBi, respectively, for RHCP. Also, it has 3dB axial bandwidth of about 50MHz, 3dB beamwidth of 84 degree, and gain of 12dBi, respectively, for LHCP.

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Researches on Microstrip Reflectarray Antennas (마이크로스트립 리플렉트어레이 안테나에 관한 연구)

  • Yoon, Young Joong
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.26 no.11
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    • pp.937-950
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    • 2015
  • Microstrip reflectarray is an antenna which controls its radiation pattern with a number of reflective elements. Conventionally, the reflectarray has been researched to replace curved reflector antennas. In this paper, design theories of reflectarray is briefly introduced, and research trends of high gain and broadband reflectarrays are reviewed. To improve the gain of the reflectarrays, it is required that the reflection phase errors on the reflectarray surface be minimized. For this purpose, sufficiently wide reflection phase range and low phase sensitivity should be realized with the designed element. For bandwidth improvement, the reflection phase of the element should be linear with the frequency variation. In this paper, various researches to improve the reflection phase characteristics of the element for high gain and broadband reflectarrays, such as multi-layer and single-layer multi-resonant structures, are reviewed. Also, dual-reflectarray configuration for compact antenna design is reviewed. Finally, various applications of reflectarrays such as contoured beam, near-field focusing, and RCS reduction are reviewed.