• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2007.06a
• /
• pp.775-776
• /
• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.33-34
• /
• 2011

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.325-325
• /
• 2008

스크린 프린팅에 의한 압전 후막은 MEMS 공정을 이용하여 마이크로 펌프, 마이크로 벨브, 마이크로 센서, 마이크로 로봇 등 여러 초소형 기계부품에 응용되고 있으며, Sol-Gel, PLD를 이용해 증착된 막 등에 비해 수십${\mu}m$의 비교적 두꺼운 막을 형성시킬 수 있는 장점을 가지고 있다. 그러나 실리콘 기판을 사용하여 스크린 프린팅으로 형성된 압전 후막의 경우, 공정상 바인더를 연소시키는 과정을 거치게 되므로, 밀집된(Dense) 구조를 가지는 막을 만들기가 어렵다. 이로 인해 스크린 프린팅에 의한 후막은 전기적 특성 및 기계적 특성이 떨어지는 경향이 있다. 본 연구에서는 스크린 프린팅에 의한 압전 후막의 밀집된 구조 및 특성을 향상시키기 위해 0.01Pb$(Mg_{1/2}W_{1/2})$O3-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3$의 powder와 Attrition 밀링 처리된 powder를 비율별로 혼합하여 입자의 크기를 변화시켜 막의 충진 밀도를 향상시켰으며, 열처리 효과를 극대화시키기 위해 RTA(Rapidly Thermal Annealing)를 통해 열처리 하였다. Attrition 밀링에 의한 파우더를 각각 비율별로 100%, 50%, 25%로 혼합하여 만든 압전 세라믹 페이스트는 P-type(100)Si Wafer sample 위에 $1{\mu}m$의 하부전극용($1100^{\circ}C$) Ag 전극을 screen print하여 소결했다. 그리고 다시 전극이 형성된 Si wafer 위에 스크린 프린팅하고, 건조 한 후 RTA로 300초 동안 열처리 한 결과 밀집된 구조를 가지는 압전 후막을 제작 수 있었다.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.18 no.3
• /
• pp.261-269
• /
• 2009

Micro end-milling process is applied to fabricate precision mechanical parts cost-effectively. It is a complex and time-consuming job to select optimal process conditions with high productivity and quality. To improve the productivity and quality of precision mechanical parts, micro end-mill wear and cutting force characteristics should be studied carefully. In this paper, high speed machining experiments are studied to construct the optimum process design as well as the mathematical modeling of tool wear and cutting force related to cutting parameters in micro ball end-milling processes. Cutting force and wear characteristics under various cutting conditions are investigated through the condition monitoring system and the design of experiment. In order to construct the cutting database, mathematical models for the flank wear and cutting force gradient are derived from the response surface method. Optimal milling conditions are extracted from the developed experimental models.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.1 s.178
• /
• pp.64-71
• /
• 2006

Ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. Also, the method of micro-grooving using micro endmill is used widely owing to many merit, but has problems of precision and quality of products due to tool wear and tool fracture. This investigation deals with state monitoring using acoustic emission(AE) signal in the micro-grooving. Characteristic evaluation of AE raw signal, AE hit and frequency analysis for condition monitoring is presented. Also, the feature extraction of AE signal directly related to machining process is executed. Then, the distinctive micro endmill state according to the each tool condition is classified by the fuzzy C-means algorithm.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.17 no.3
• /
• pp.1-6
• /
• 2018

Micro prism pattern is applying in order to get increase of luminance, control the light, and so forth especially in optics and display industry. Most patterns are fabricated by lithography, planning, and EDM, but they have limitations on the productivity or the unit cost of produce. However, ultra precision mold is one of the processes able to replace it, and assure high productivity required by industries. In this investigation, micro prismatic end-milling is suggested in order to fabricate the pattern effectively. Micro prism pattern having $100{\mu}m$ of pitch and height was machined on STD-11. After machining, the flank and boundary wear on micro end mill were measured and analyzed, as well as burr formation and dimensional accuracy of fabricated pattern were evaluated. Thus the optimal cutting conditions were derived.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.4 no.4
• /
• pp.7-13
• /
• 2005

In the case of fabricating micro pole structures such as column, square-pole and gear shaft by the micro end-milling process, it can be useful in the fields of industry, for example, micro parts, electrode for electrical discharge machining and micro mold for injection molding. In this study, machining factors and the process were analyzed. Machining experiments of various micro pole configurations were performed. Analysis of the change and effect of the cutting force according to the machining conditions was carried out. An analytical study of the deformation of the micro pole caused cutting conditions and cutting force through the finite element method and ANSYS program was carried out. As a result, this research presented a method of fabricating the column pole of below $100{\mu}m$ diameter with high aspect ratio by using micro end-milling process, and based on that, a method of fabricating a variety of applicable structures. Also the minimum size of the pole capable of fabricating through theory and experiment were demonstrated.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.20 no.1
• /
• pp.101-107
• /
• 2011

Analytical solution of micro-scale milling process is presented in order to suggest available machining conditions. The size effect should be considered to determine cutting characteristics in micro-scale cutting. The feed per tooth is the most dominant cutting parameter related to the size effect in micro-scale milling process. In order to determine the feed per tooth at which chips can be formed, the finite element method is used. The finite element method is employed by utilizing the Johnson-Cook (JC) model as a constitutive model of work material flow stress. Machining experiments are performed to validate the simulation results by using a micro-machining stage. The validation is conducted by observing cutting force signals from a cutting tool and the conditions of the machined surface of the workpiece.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.16 no.5
• /
• pp.77-83
• /
• 2007

The study on damaged layer is necessary for machinability improvement in micro machining. The damaged layer in metal cutting is derived from plastic deformation and transformation of metal structure. The damaged layer affects micro mold life and micro machine parts. In this study, the damaged layer of micro machined surface of copper is evaluated according to various machining condition. The damaged layer structure and metallurgical characteristics are measured by optical microscope, and evaluated by cutting forces and surface roughness. The scale of this damaged layer depends on cutting process parameters and machining environments. By experimental results, depth of damaged layer was increased with increasing of cutting depth, also the damaged layer is less occurred in down-milling compared to up-milling during micro endmilling operation.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.598-603
• /
• 2005

Recently, the advanced industries using micro parts are rapidly growing. The appearance of ultra-precision feed mechanism and the development of control system make it possible to process parts in sub millimeter scale by mechanical methods. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. So, micro stairs have been trying to cut by using high revolution air turbine spindle and micro-endmill, and studying for magnitude of cutting force. This investigation deals removal characteristics of burr generated by micro endmilling process. Also, decreasing of burr is significant problem in making smooth and precise parts in micro endmilling. In micro endmilling, the material removal rate(MRR) and cutting forces are very small. This paper presents an investigation on the machining characteristics for micro stairs by using ultrahigh-speed air turbine spindle in machining.