• Title/Summary/Keyword: 마이크로렌즈 어레이

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Design and fabrication of wafer scale microlens array for image sensor using UV-imprinting (UV 임프린팅을 이용한 이미지 센서용 웨이퍼 스케일 마이크로렌즈 어레이 설계 및 제작)

  • Kim, Ho-Kwan;Kim, Seok-Min;Lim, Ji-Seok;Kang, Shin-Ill
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.100-103
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    • 2007
  • A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

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Performance Prediction for Plenoptic Microscopy Under Numerical Aperture Unmatching Conditions (수치 구경 불일치 플렌옵틱 현미경 성능 예측 방안 연구)

  • Ha Neul Yeon;Chan Lee;Seok Gi Han;Jun Ho Lee
    • Korean Journal of Optics and Photonics
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    • v.35 no.1
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    • pp.9-17
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    • 2024
  • A plenoptic optical system for microscopy comprises an objective lens, tube lens, microlens array (MLA), and an image sensor. Numerical aperture (NA) matching between the tube lens and MLA is used for optimal performance. This paper extends performance predictions from NA matching to unmatching cases and introduces a computational technique for plenoptic configurations using optical analysis software. Validation by fabricating and experimenting with two sample systems at 10× and 20× magnifications resulted in predicted spatial resolutions of 12.5 ㎛ and 6.2 ㎛ and depth of field (DOF) values of 530 ㎛ and 88 ㎛, respectively. The simulation showed resolutions of 11.5 ㎛ and 5.8 ㎛, with DOF values of 510 ㎛ and 70 ㎛, while experiments confirmed predictions with resolutions of 11.1 ㎛ and 5.8 ㎛ and DOF values of 470 ㎛ and 70 ㎛. Both formula-based prediction and simulations yielded similar results to experiments that were suitable for system design. However, regarding DOF values, simulations were closer to experimental values in accuracy, recommending reliance on simulation-based predictions before fabrication.

Nano Aperture Microprobe Array produced by FIB process for Integrated Optical Recording Read

  • 임동수;오종근;김영주
    • 정보저장시스템학회:학술대회논문집
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    • 2005.10a
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    • pp.81-82
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    • 2005
  • 새로운 고 용량 광 저장 시스템 개발을 위하여 초 미세 개구를 가지는 마이크로 프로브 어레이시스템 완성을 목표로 연구를 진행하였다. 효율적인 초 미세 개구 생성을 위해 기존의 제작된 마이크로 프로브 위에 FIB 공정을 이용하여 40nm 크기를 가지는 어퍼쳐를 만들었다. 나노 어퍼쳐를 가지는 마이크로 프로브 어레이는 곧 마이크로 렌즈와 VCSEL 과 일체화된 광 기록 헤드시스템으로 준비될 예정이다. 멤스 공정을 이용한 이 시스템은 향후 높은 저장 용량과 빠른 전송속도를 달성할 수 있는 차세대 광정보저장기기에 적용 가능한 새로운 광 픽업 시스템을 발전시킬 수 있을 것으로 생각된다.

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A Study on the Machining Characteristics for Micro Lens Array Mold (마이크로 렌즈 어레이 금형의 가공특성에 관한 연구)

  • 정재엽;이동주;홍성민;제태진;이응숙
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2002.10a
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    • pp.370-375
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    • 2002
  • Recently, the interest on micro optical parts has increased rapidly with the development of technology related to microsystems. Among the optical parts, micro lens is one of the most broadly used micro parts. To mass-produce the micro lenses, it is very effective to use the mold insert and injection molding process. There are many methods to fabricate the mold insert for micro lenses: electroforming, etching, mechanical micromachining and so on. In this study, we fabricated the mold insert for micro lenses using a micro ball endmill to apply mechanical micromaching method and analyzed the effect of main process parameters such as spindle speed, feed rate, dwell time on the processed surface. Then, using fabricated the mold insert we fabricated the micro lenses through injection molding process.

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Development of Optical Head Unit for Nano Optical Probe Array (나노 광 프로브 어레이 구현을 위한 광학 헤드 유닛 개발)

  • Kim H.;Lim J.;Kim S.;Han J.;Kang S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.09a
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    • pp.29-34
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    • 2005
  • A optical head unit for nano optical probe away was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

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A Study on the Manufacturing Characteristics for Micro Spherical Lens Mold of Soft Materials (연질재료의 마이크로 구형렌즈금형 가공특성에 관한 연구)

  • 홍성민;이동주;제태진;최두선;이응숙
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1466-1469
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    • 2004
  • Micro spherical lens mold processing method based on mechanical one completes a spherical shape by setting a diamond tool of hundreds $\mu$m radius on spins with high speed and then using Z-axis vertical feeding motion like the fabrication of micro drilling. In this method, we can see unprocessed parts shaped like cylinder and cone and check increasing chatter marks and burrs by setting errors of the central axis of rotation on the edge of the tool. That is why this method doesn't suit for the optical lens mold. In this paper presents unprocessed parts are disappeared and chatter marks and burrs are decreased from centre of the lens after using Run-out measuring and setting system on run-out occurred from setting tool. Also the fabrication characteristics of 6:4 Brass, A1601, PMMA are compared and analyzed, establishing the optimum machining condition on each material.

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