Characteristics of Hydrogenated Amoruhous Carbon (a-C:H) Thin Films Grown by Close Field UnBalanced Magnetron Sputtering method (비대칭 마그네트론 스퍼터링법으로 성장된 a-C:H 의 물리적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07b
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- pp.908-912
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- 2003