• Title/Summary/Keyword: 리소그래피용

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A Study on the design and fabrication of Pluggable Lens for Optical PCB Interconnection (광 PCB 접속용 플러거블 렌즈의 설계 및 제작 연구)

  • Kim, Jung Hoon;Lee, Tae Ho;Kim, Dong Min;Jeong, Myung Yung
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.1
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    • pp.25-29
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    • 2014
  • In this study, an optical PCB was proposed which can overcome the limitations of the conventional PCB, and a new structure with pluggable lens was considered for a high-efficient passive alignment. The structure was a lens-added optical waveguide for the improvement of misalignment between the lens and the waveguide in the alignment. Also, as it had a barrier-type structure to prevent the surface damage of the lens by desorption, the high-efficient passive alignment can be realized. The structure was designed by optimizing the simulation and the fabrication process of the pluggable lens structure was conducted using the repetitive photolithography and the thermal reflow. The optical waveguide with the lens-integrated pluggable interconnection was fabricated by the imprint process using the polydimethylsiloxane(PDMS) replica mold. Therefore, we confirmed the possibility of pluggable lens-added optical waveguide structure fabrication for high-efficient passive alignment.

Detection Property of Red Blood Cell-Magnetic Beads Using Micro Coil-Channeland GMR-SV Device (마이크로 코일-채널과 GMR-SV 소자를 이용한 적혈구-자성비드 검출 특성연구)

  • Park, Ji-Soo;Kim, Nu-Ri;Jung, Hyun-Jun;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.25 no.1
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    • pp.16-21
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    • 2015
  • The micro device, coil, and channel for the biosensor integrated with the GMR-SV device based on the antiferromagnetic IrMn layer was fabricated by the light lithography process. When RBCs coupled with several magnetic beads with a diameter of $1{\mu}m$ passed on the micro channel, the movement of $RBC+{\mu}Beads$ is controlled by the electrical AC input signal. The $RBC+{\mu}Beads$ having a micro-magnetic field captured above the GMR-SV device is changed as the output signals for detection status. From these results, the GMR-SV device having the width magnitude of a few micron size can be applied as the biosensor for the analysis of a new magnetic property as the membrane's deformation of RBC coupled to magnetic beads.

Fabrication and Characterization of Dissolving Microneedles Containing Lecithin for Transdermal Drug Delivery (레시틴이 함유된 경피 약물전달용 용해성 마이크로니들의 제작과 특성)

  • Choi, Won-Ho;Kim, Bumsang
    • Korean Chemical Engineering Research
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    • v.59 no.3
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    • pp.429-434
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    • 2021
  • The feasibility of lecithin as a material for dissolving microneedles to improve skin permeability of drugs and the effect of the composition of lecithin on the mechanical strength, solubility, and skin permeability of rhodamine B (RhB) of the dissolving microneedles were investigated. Dissolving microneedles with needles of uniform shape and size were fabricated with the mold made using the laser-writing technique, simpler and more efficient method compared to the photolithography method, the conventional method to fabricate the microneedle mold. The composition of lecithin in the microneedle affected the mechanical strength and solubility of the needle thus, the mechanical strength of the needle increased as the composition of lecithin in the needle increased, resulting in improving the skin permeability of RhB contained in the microneedles. When comparing the microneedles containing same composition of amylopectin (AP), the skin permeability of RhB of the microneedles containing lecithin was higher. These results indicate that lecithin can be used as a material for dissolving microneedles and the skin permeability of the microneedle could be controlled by changing the composition of lecithin.

A Convergence Study on the 5-axis Machining Technology using the DICOM Image of the Humerus Bone (위팔뼈 의료용 디지털 영상 및 통신 표준 영상을 이용한 5축 가공기술의 융합적 연구)

  • Yoon, Jae-Ho;Ji, Tae-Jeong;Yoon, Joon;Kim, Hyeong-Gyun
    • Journal of the Korea Convergence Society
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    • v.8 no.11
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    • pp.115-121
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    • 2017
  • The present study aimed to obtain basic knowledge of a customized artificial joint based on the convergence research of Digital Imaging and Communications in Medicine(DICOM) and 5-axis machining technology. In the case of the research method, three-dimensional modeling was generated based on the medical image of the humerus bone, and the shape was machined using a chemical wood material. Then, the anatomical characteristics and the modeling machining computation times were compared. The results showed that the Stereolithography (STL) modeling required twice more time for semi-finishing and 10 times more time for finishing compared to the Initial Graphics Exchange Specification(IGES) modeling. For the 5-axis machining humerus bone, the anatomical structures of the anatomic neck, greater tubercle, lesser tubercle, and intertubercular groove were similar to those in the three-dimensional medical image. In the future, the convergence machining technology, where 5-axis machining of various structures(e.g., the surgical neck undercut of the humerus bone) is performed as described above, can be efficiently applied to the manufacture of a customized joint that pursues the precise model of a human body.

Distribution of Magnetic Field Depending on the Current in the μ-turn Coil to Capture Red Blood Cells (적혈구 포획용 미크론 크기 코일에 흐르는 전류의 크기에 따른 자기장 분포 특성)

  • Lee, Won-Hyung;Chung, Hyun-Jun;Kim, Nu-Ri;Park, Ji-Soo;Lee, Sang-Suk;Rhee, Jang-Roh
    • Journal of the Korean Magnetics Society
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    • v.25 no.5
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    • pp.162-168
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    • 2015
  • The ${\mu}$-turn coil having a width of ${\mu}m$ on the GMR-SV (giant magnetoresistance-spin valve) device based on the antiferromagnetic IrMn layer was fabricated by using the optical lithography process. In the case of GMR-SV film and GMR-SV device, the magnetoresistance ratios and the magnetic sensitivities are 4.4%, 2.0%/Oe and 1.6 %, 0.1%/Oe, respectively. In the y-z plane the distribution of magnetic field of GMR-SV device and $10{\mu}$-turns coil which put under the several magnetic bead(MB)s with a diameter of $1{\mu}m$ attached to RBC (red blood cell) was analyzed by the computer simulation using the finite element method. When the AC currents of 20 kHz from 0.1 mA to 10.0 mA flow to the 10 turns ${\mu}$-coil, the magnetic field at the position of $z=0{\mu}m$ at the center of coil was calculated from $30.1{\mu}T$ to $3060{\mu}T$ in proportion to the current. The magnetic field at the position of $z=10{\mu}m$ was decreased to one-sixth of that of $z=0{\mu}m$. It was confirmed that the $10{\mu}$-turn coil having enough magnitude of magnetic field for the capture of RBC is possible to use as a biosensor for the detection of magnetic beads attached to RBC.

Development of Schottky Diode for THz Applications using Heterogeneous Resist Patterning (이종 레지스트 패터닝을 이용한 테라헤르츠용 쇼트키 다이오드 개발)

  • Han, Min;Choi, Seok-Gyu;Lee, Sang-Jin;Baek, Tae-Jong;Ko, Dong-Sik;Kim, Jung-Il;Kim, Geun-Ju;Jeon, Seok-Gy;Yoon, Jin-Seob;Rhee, Jin-Koo
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.49 no.8
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    • pp.47-54
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    • 2012
  • In this paper, we have fabricated the Schottky diode for THz applications by heterogeneous resist patterning method. The Schottky diode was developed using electron beam lithography and photolithography to connect the anode and the anode pad for a simple process. The measured performance of developed Schottky diode are $11.2{\Omega}$ of series resistance, 25.96 fF of junction capacitance, 1.25 of ideality factor and 547.6 GHz of cut-off frequency.

A Study on the Imprinting Process for an Optical Interconnection of PLC Device (광소자의 광 정렬 및 연결 구조 구현용 임프린트 공정 연구)

  • Kim, Young Sub;Cho, Sang Uk;Kang, Ho Ju;Jeong, Myung Yung
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.12
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    • pp.1376-1381
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    • 2012
  • Optical devices are used extensively in the field of information network. Increasing demand for optical device, optical interconnection has been a important issue for commercialization. However many problems exist in the interconnection between optical device and optical fiber, and in the case of the multi-channel, problems of the optical alignment and optical array arise. For solving the alignment and array problem of optical device and the optical fiber, we fabricated fiber alignment and array by using imprint technology. Achieved higher precision of optical fiber alignment and array due to fabricating using imprint technology. The silicon stamp with different depth was fabricated using the conventional photolithography. Using the silicon stamp, a nickel stamp was fabricated by electroforming process. We conducted imprint process using the nickel stamp with different depth. The optical alignment and array by fabricating the patterns of optical device and fiber alignment and array using imprint process, and achieved higher precision of decreasing the dimensional error of the patterns by optimization of process. The fabricated optical interconnection of PLC device was measured 3.9 dB and 4.2 dB, lower than criteria specified by international standard.

Study on the Array type antenna of 1.8GHz (1.8GHz 대역용 배열 구조 안테나 연구)

  • Park, Yong-Wook
    • The Journal of the Korea institute of electronic communication sciences
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    • v.11 no.10
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    • pp.929-934
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    • 2016
  • In this paper, we studied the design and fabrication of array antenna at around 1.8 GHz band. To improve of frequency properties of antenna, single feed microstrip patch antenna was simulated by HFSS(High Frequency Structure Simulator). A $1{\times}2$ array antenna of 1.8 GHz for LTE band was designed and fabricated by photolithography on an FR4 substrate (dielectric constant of 4.4 and thickness of 0.8 mm). The fabricated antenna was analyzed by network analyzer. The measured results agree well with the simulations, which confirmed the validity of this study. The fabricated $1{\times}2$ array antenna showed a center frequency, the minimum return loss and impedance were 1.82GHz, -30.5dB, and $49.6{\Omega}$ respectively.

Study on the CPWG Antenna of 1.8GHz (1.8GHz 대역용 CPWG 안테나 연구)

  • Park, Yong Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.2
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    • pp.259-264
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    • 2016
  • In this study, the properties of a patch antenna fed by a coplanar waveguide with ground (CPWG) and design method were studied. The antenna was impedance-matched to the CPWG feedline by adjusting the width, length, and position of the patch. To improve the frequency properties of the CPWG type antenna, patch length, patch width, patch position, and ground distance were simulated using HFSS (High Frequency Structure Simulator) simulation program. A CPWG antenna of 1.8 GHz for LTE band was designed and fabricated by photolithography on an FR4 substrate (dielectric constant of 4.4 and thickness of 0.8 mm). The fabricated antenna was analyzed using a network analyzer. The measured results agree well with the simulations, which confirmed the validity of this study. The fabricated CPWG antenna showed a center frequency, minimum return loss and -10dB bandwidth of 1.8GHz, -32.1dB, 22MHz and $50.2{\Omega}$ respectively. The proposed antenna is expected to be applicable to the LTE band.

Evaluation of Machining Characteristics and Performance Analysis of Air-Lubricated Dynamic Bearing (공기동압베어링의 성능 해석 및 가공특성 평가)

  • Baek, Seung-Yub;Kim, Kwang-Lae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.12
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    • pp.5412-5419
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    • 2011
  • The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.