• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.241-241
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• 2016

반도체 선폭이 20 nm급까지 감소함에 따라 기존에 수율에 문제를 끼치던 공정 외부 유입 입자뿐만 아니라, 공정 도중에 발생하는 수~수십 나노의 작은 입자도 수율에 악영향을 끼치게 되었다. 이에 따라 저압, 극청정 조건에서 진행되는 공정 중 발생하는 입자를 실시간으로 모니터링 할 수 있는 장비에 대한 수요가 발생하고 있다. Particle beam mass spectrometer (PBMS)는 이러한 요구사항을 만족할 수 있는 장비로 100 mtorr의 공정 조건에서 5 nm 이상의 입자의 직경별 수농도를 측정할 수 있는 장비이다. PBMS로 입자의 수농도를 측정하기 위해서는 PBMS 전단에서 입자를 중앙으로 집속할 필요가 있다. 공기역학렌즈는 PBMS 전단에서 입자를 집속시키기 위해 일반적으로 널리 사용되고 있는 장비로 여러 개의 오리피스로 이루어져 있다. 공기역학렌즈를 지나는 수송 유체와 입자는 이러한 연속 오리피스를 거치면서 팽창과 수축을 반복하며, 관성력의 차이로 인해 입자가 중앙으로 집속된다. 그러나 기존 공기역학렌즈는 고정된 직경의 오리피스를 사용하기 때문에 설계된 공정조건 이외에는 입자의 집속효율이 감소한다는 단점을 지닌다. 따라서 공정조건이 바뀔 경우 공기역학렌즈를 교체해야 되며, 진공이라는 환경하에서 이러한 교체는 많은 시간과 노력을 요구로 한다. 본 연구에서는 이러한 공기역학렌즈의 문제점을 해결하기 위해 다양한 공정조건에서 교체 없이 사용할 수 있는 새로운 형태의 직경 가변형 공기역학렌즈인 조리개형 공기역학렌즈를 제안하였다. 기존 연구를 통해 조리개형 공기 역학 렌즈가 다양한 압력 범위 내에서 나노입자를 성공적으로 집속할 수 있음을 보였지만, 장비를 상용화하기 위해서는 사용자가 좀 더 쉽게 렌즈직경을 결정 할 수 있어야 한다. 이에 본 연구에서는 조리개형 렌즈의 중공 직경에 따른 입자 집속 특성을 평가하였으며, 최종적으로 압력과 집속하고자 하는 직경에 따라 렌즈 중공 직경을 결정할 수 있게 해주는 데이터 베이스를 제작하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.279.2-279.2
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• 2014

반도체 선폭이 20 nm급까지 감소함에 따라 기존에 수율에 문제를 끼치던 공정 외부 유입 입자뿐만 아니라, 공정 도중에 발생하는 수~수십 나노의 작은 입자도 수율에 악영향을 끼치게 되었다. 이에 따라 저압, 극청정 조건에서 진행되는 공정 중 발생하는 입자를 실시간으로 모니터링 할 수 있는 장비에 대한 수요가 발생하고 있다. Particle beam mass spectrometer (PBMS)는 이러한 요구사항을 만족할 수 있는 장비로 100 mtorr의 공정 조건에서 5 nm 이상의 입자의 직경별 수농도를 측정할 수 있는 장비이다. PBMS로 입자의 수농도를 측정하기 위해서는 PBMS 전단에서 입자를 중앙으로 집속할 필요가 있다. 공기역학렌즈는 PBMS 전단에서 입자를 집속시키기 위해 일반적으로 널리 사용되고 있는 장비로 여러 개의 오리피스로 이루어져 있다. 공기역학렌즈를 지나는 수송 유체와 입자는 이러한 연속 오리피스를 거치면서 팽창과 수축을 반복하며, 관성력의 차이로 인해 입자가 중앙으로 집속된다. 그러나 기존 공기역학렌즈는 고정된 직경의 오리피스를 사용하기 때문에 설계된 공정조건 이외에는 입자의 집속효율이 감소한다는 단점을 지닌다. 따라서 공정조건이 바뀔 경우 공기역학렌즈를 교체해야 되며, 진공이라는 환경하에서 이러한 교체는 많은 시간과 노력을 요구로 한다. 본 연구에서는 이러한 공기역학렌즈의 문제점을 해결하기 위해 다양한 공정조건에서 교체 없이 사용할 수 있는 새로운 형태의 공기역학렌즈인 조기래형 공기역학렌즈를 제안하였다. 각각의 오리피스가 중공의 직경을 변경할 수 있는 구조인 조리개의 형태로 설계되어 있어, 공정조건에 따라 중공의 직경을 변경함으로써 입자의 집속을 결정하는 요소인 Stokes number를 조절 할 수 있다. 이러한 조리개형 공기 역학 렌즈의 성능을 평가하기 위해 수치해석적인 방법을 이용하였다. 공기 역학 렌즈 전단의 압력을 0.1~10 torr까지 변화시켜가며 다양한 공정조건에서 오리피스의 직경만을 변경하여 입자 집속 가능 여부를 판단하였으며, 조리개 형태의 구조상 발생할 수 있는 leak로 인한 입자 집속 효율의 변화도 평가하였다.

• Journal of Korean Ophthalmic Optics Society
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• v.9 no.1
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• pp.145-159
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• 2004

A mathematical model and its computer solution program were proposed to analyze the motion of contact lenses which are being subject to lid-blinking. The equation was derived by incorporating an acceleration induced lid's force exerting on the contact lens, the viscous damping resistance in the tear layer beneath the lens and the sliding frictional force between the lid and the contact lens surface into the formulation of differential equation describing the vibration. The model predicts the time-dependent displacement from the equilibrium postion during/after the blinking. During the blinking, as the time for the completion of one cycle of blinking decreases the off-the-equilibrium displacement of contact lens increases while the decrease of diameter in the contact cause the opposite effect. It is found that lid pressure exerting on the lens cause an insignificant lens displacement from the equilibrium position. After blinking the frequency of damped oscillation of contact lens decreases as the diameter of lens increases, due to the incresed surface while the reduced blinking time does not cause a significant frequency change. This is because that driving force for the contact lens movement posterior to blinking is the capillary-induced force not the lid force.

• Korean Journal of Optics and Photonics
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• v.5 no.2
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• pp.298-303
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• 1994

Microlens arrays are fabricated by melting "islands" of thick photoresist on a glass substrate. Microlenses with diameters $25\mu\textrm{m}$, $50\mu\textrm{m}$, $100\mu\textrm{m}$are made. Their surface profiles are obtained by a scanning electron microscope and a mechanical surface profilometer. The wavefront of the microlenses is measured by phase-shifting techniques using a Mach-Zehnder-like configuration. Thereby wavefront errors, focal lengths. point spread functions are obtained. The microlens with the diameter of $100\mu\textrm{m}$ has focal length of $164\mu\textrm{m}$ and spot diameter is less than $5\mu\textrm{m}$..

• Journal of Korean Ophthalmic Optics Society
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• v.18 no.2
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• pp.107-115
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• 2013

Purpose: This study was conducted to investigate the change of soft contact lens parameters after eyeliner deposition and compare the cleaning efficiency and the recovery rate of lens parameters by different cleaning methods. Methods: The eyeliner was deposited on three types of soft contact lenses made of different materials for 1 hour, 4 hours and 6 hours and those lenses were washed by the eyeglasses ultrasonic cleaning and by hands. The changes in visible light transmittance, diameter and surface of those lenses were compared before and after cleaning of the lens. Results: The visible light transmittance of soft contact lenses decreased along with the deposition time of eyeliner. The patterns of the eyeliner deposition on soft contact lens appeared differently depending on the physical properties of the lens material. Thus, the largest eyeliner deposition was found on narafilcon A lens. The diameters of hilafilcon B and etafilcon A lenses were decreased, however, the diameter of narafilcon A lens was increased. The cleaning efficiency of the eyeliner deposition was greater with the multipurpose solution by hands than with the eyeglasses ultrasonic cleaner. However, the recovery of lens parameters such as the lens diameter, visible light transmittance and lens surface due to the eyeliner deposition to its original state was limited. Conclusions: From these results, it is suggested to minimize eye makeup when wearing soft contact lens. Furthermore, the reduced wearing time and shorter cycle of lens replacement may be needed by considering a change of lens parameter when the repeat eye makeup is applied.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1478-1479
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• 2008

본 논문에서는 PDMS 프레폴리머의 전기유체분사를 이용하여 마이크로렌즈를 제작했다. 전기유체분사 시스템에서 인가전압과 기판 온도의 두 가지 변수를 변화시키면서 제작한 PDMS 마이크로렌즈의 특징을 파악하였으며, 인가전압이 증가함에 따라 마이크로렌즈의 직경이 작아지고, 기판 온도가 증가함에 따라 마이크로렌즈의 직경이 작아지고 접촉각이 커지는 것을 확인하였다. 제작된 PDMS 마이크로렌즈의 특성을 평가하기 위하여 가우시안 빔 투과 실험을 하였다. 측정된 초점거리는 계산된 초점거리와 5 mm 차이가 났으며, 렌즈를 투과된 가우시안 빔은 초점에서 최대의 파워밀도와 최소의 유효반경을 가지는 것으로 측정되었다.

• Journal of the Korea Convergence Society
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• v.9 no.8
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• pp.117-125
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• 2018

Aims of this study was to investigate on the actual condition of contact lens wearing after corneal refractive surgery, base curves and diameters of lenses on sale, and to confirm movement of lens and wear patterns when wearing of lenses in the modified cornea. After surgery, 16.5% of the respondents had experience wearing contact lenses. Also, the mostly distributed contact lenses had B.C. 8.6mm and DIA.14.0mm. The corneas of 24 eye after corneal refractive surgery were flat, the lenses moved towards inferior and temporal when wearing the lens. After corneal refractive surgery, contact lens wear may feel uncomfortable may require the detailed description and sophisticated fitting due to the limited type of contact lens. It is thought that convergence will be necessary in the industry and clinical study of contact lenses.

• Journal of Korean Ophthalmic Optics Society
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• v.8 no.2
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• pp.57-63
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• 2003

To investigate the RMS SD(Root Mean Square Spot Diameter) in a back focal plane as the front surface power, the center thickness, and the refraction index vary, we use programs which are Cove V and LOSA 2.0, and consider a spectacle lens with back vertex power of -4.00D and diameter of 70 mm. We also consider the front surface power varied from 0.00 to 10.00D, the center thickness varied from 1.1 to 2.0 mm, and the indices which are $n_d$ = 1.498, 1.523, 1.586, and 1.660, respectively. As the front surface power increases the RMS SD in the back focal plane increase rapidly. When the refraction index increases, the RMS SD in the back focal plane decrease and the variation of RMS SD in the back focal plane decreases as the front surface power increases. When the center thickness of spectacle lens increases, the RMS SD in the back focal plane is constant and the edge thickness of that increases. We know from these results that the image in the back focal plane of a spherical spectacle lens improves as the front surface power increases and the refraction index decreases.

• Journal of Korean Ophthalmic Optics Society
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• v.17 no.4
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• pp.381-388
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• 2012

Purpose: In this study, the changes in the shape of silicone hydrogel lenses, dryness of lens and objective/ subjective symptoms that could be induced by repeating dryness of lens and objective/subjective symptoms were investigated. Methods: After drying and rehydrating of silicone hydrogel lenses with different lens material and thickness for 4 times, their overall diameters and base curves were compared. Subjective symptoms, non-invasive tear break-up time (NIBUTs) and blinking rate were evaluated after wearing dehydrated silicone hydrogel lens. Results: Overall diameter and base curve increased in all tested silicone hydrogel lenses by repeating dryness and rehydration. The degree of change in over all diameter and base curve were variable on the material. There were irregular change of lens parameters in thicker lens. When the subjects wore silicone hydrogel lenses after drying and rehydrating, their NIBUTs were decreased and blink rates were increased regardless of lens material or thickness. In addition, repetitive drying of silicone hydrogel lenses affected the lens fitting. Therefore, subjective symptoms such as itching, pain, irritation, foreign body sensation, dryness tended to be increased. Conclusions: The results obtained from the study may suggest to develop durable silicone hydrogel contact lenses against dry environment since the changes in parameters of silicone hydrogel lens and the subjective discomfort were observed after repetitive drying and rehydration.

• Journal of Korean Ophthalmic Optics Society
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• v.14 no.3
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• pp.17-27
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• 2009

Purpose: This review article was written to determine the effects of parameters characterizing a hard contact lens (RGP included), such as BCs, diameters, edge angles, on the time interval for tight fitted lens to return to the equilibrium when it was decentered from blinking. Methods: A mathematical formulation was established to relate or calculate the restoring forces and thickness of lacrimal layer beneath the cornea with the various lens parameters when the tight fitted lens was decentered from blinking. Based on this formulation the differential equations and their numerical solution program were set up to describe the time dependence of the lens on the position and to estimate the time for the lens's return to the equilibrium after blink. Results: It is found that the time interval for the tight fitted lens to return to the equilibrium decreases as either the BC decreases or the diameter increases because both the reduction in BC and increase in diameter result in the increase in the lacrimal layer thickness between the lens and cornea increase which yielded the lowering of the viscous friction in the lens motion. As the edge angle of tight fitted lens increases the time for recentering decreases due to the increase in restoring force without change in lacrimal thickness beneath the lens. In the case of flat fitted hard lens (RGP included), the lacrimal layer thickness under the lens increases as either BC or diameter increases which results in reduction in viscous friction so that the time for the lens's return to the equilibrium were to decrease. The edge angle of flat fitted lens does not affect the lens motion. Conclusions: The effect of BCs on the lens motion (time to approach the equilibrium) was concluded to be significant with both tight and flat fitted lens where its results are contrary with each other. The edge angle of lens only affects the motion in tight fitted lenses.