• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.149-150
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• 2006

We describe a novel method of scanning probe nanofabrication using a AFM(atomic force microscopy) tip with assistance of Femtosecond laser pulses to enhance fabrication capability. Illumination of the AFM tip with ultra-short light pulses induces a strong electric field between the tip and the metal surface, which allows removing metal atoms from the surface by means of field evaporation. Quantum simulation reveals that the field evaporation is triggered even en air when the induced electric field reaches the level of a few volts per angstrom, which is low enough to avoid unwanted thermal damages on most metal surfaces. For experimental validation, a Ti: sapphire Femtosecond pulse laser with 10 fs pulse duration at 800 nm center wavelength was used with a tip coated with gold to fabricate nanostructures on a thin film gold surface. Experimental results demonstrate that fine structures with critical dimensions less than ${\sim}10nm$ can be successfully made with precise control of the repetition rate of Femtosecond laser pulses.

• Journal of the Korean Society of Visualization
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• v.8 no.1
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• pp.46-52
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• 2010

In the present study, we employed the confocal laser scanning microscopy (CLSM) system to visualize the blood flow field with $1{\times}1{\mu}m^2$ spatial resolution. Based on the confocal microscopic image of red blood cells (RBCs), we performed the velocity vector field measurement and evaluated characteristics of cell migration from the cell depleted layer thickness calculation. The rat and mouse's blood were supplied into a micro glass tubes in vitro. The line scanning rate of confocal microscopy was 15 kHz for a $500{\times}500$ pixels image. As a result, the red blood cell itself can be used as a tracer directly without any kind of invasive tracer particle to get the velocity vector field of blood flow by performing particle image velocimetry (PIV) technique.

• Applied Microscopy
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• v.37 no.3
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• pp.199-208
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• 2007

We have made an optical device to study the wave optics phenomena, such as image and diffraction pattern, constructive and destructive interference, by direct operation of laser beam and optical lenses. It consists of laser beam, goniometer, objective lens, intermediate lens, projection lens, CCD system, and computing system. As a result of the performance test, we were able to magnify samples up to 44 times with the resolution of about $5{\mu}m$. It is expected to help EM users understanding more easily principles of transmission electron microscopy (TEM).

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.12 s.255
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• pp.1611-1617
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• 2006

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nano-metrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.229.1-229.1
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• 2015

생체 시료인 세포나 조직을 분석을 위해 임의로 파괴하거나 훼손하지 않은 본래의 상태에서 세포에 존재하는 다양한 생체분자 물질의 질량과 조성을 분석하고 영상화할 수 있는 대기압 표면 질량분석 이미징 기술을 개발했다. 생체 시료의 표면을 질량 분석을 하기 위해서는 대기압 분위기에서 시료에 열적 손상이 없는 조건으로 시편의 이온화 및 탈착 과정이 이루어지게 하기 위해 저온 대기압 탈착/이온화원으로 저온대기압 플라즈마 젯과 펨토초 적외선 레이저를 결합하여 대기압 이온화원을 제작하였다. 기존에 잘 알려진 저온 대기압 플라즈마 젯 소자는 유리관에 방전기체를 흘려주고 전극에 고전압을 인가하는 방식으로 제작했으며, 또 다른 대기압 이온화원으로서 근적외선 대역의 고출력 펨토초 레이저 빔을 현미경용 대물렌즈로 집속하여 생체시료에 조사시켰다. 수백 나노미터에서 수 마이크로미터 수준으로 빔을 집속할 수 있는 펨토초 레이저는 금나노로드의 도움으로 생체 시료를 매우 작은 수준으로 탈착하는 데 주로 사용하며, 수십 마이크로미터에서 수 밀리미터 정도의 크기를 가지는 저온 대기압 플라즈마 젯은 탈착된 물질을 이온화시키는데 사용하여, 이 두 가지 이온화원을 결합하여 이온화원으로 사용한다. 시료에서 발생한 이온을 질량분석기 입구까지 잘 끌고 갈 수 있도록 이온 전달관을 설계하고 보조펌프를 장착 사용한다. 이렇게 자체 개발한 대기압 이온화원을 상용 질량분석기기와 결합하여 대기압 분위기에서 시료의 표면을 질량분석할 수 있는 시스템과 측정 기술을 개발했다. 현미경 스테이지에 정밀 2-D 자동 스캐닝 스테이지를 장착하여 질량분석 정보에 공간 정보를 더할 수 있는 질량분석 이미징 기술 방법을 개발하여 생체 시편의 질량분석 이미징을 얻었다. 수분을 포함하는 생채시료로부터 단백질, 지질, 대사물질을 직접 분리하여 분석하는 이 새로운 질량분석법은 기존의 분석법에 비해 훨씬 더 많은 생체분자 정보를 얻을 수 있으며 공간정보를 더해 영상화할 수 있는 큰 장점이 있다. 대기압 표면 질량분석 기술은 생체시료를 파괴해서 용액화할 필요도 없으며, 진공 챔버에 넣기 위해 필요한 복잡한 전처리 과정 단계를 간략화 할 수 있으며 최종적으로는 살아있는 세포나 생체 조직도 정량 분석이 가능하여 생명과학 및 의료진단 분야에서 응용할 수 있는 분야는 무궁무진할 것이다.

• Journal of Advanced Marine Engineering and Technology
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• v.36 no.1
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• pp.78-84
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• 2012

Mold may experience deterioration of molding quality as the abrasion of mold occurring due to friction between mold and molded product works as allowance in the course of press process. Therefore, to improve the wear-resistance of mold, methods like nitriding, carburizing, flame and induction surface hardening treatment etc have been applied. However, as such methods are accompanied by problems like shape limitation or product deformation etc, laser surface treatment technology is under review as surface treatment method that can solve such problems. Therefore, in this study, mold material cast iron was surface-treated by using high power diode laser. In previous report 1 and report 2, the heat treatment characteristics were compared by the differences of die materials and shapes, then this paper observed microstructure by using optical microscope and scanning electronic microscope to analyze the structural difference of hardened zone, interface area and base metal after heat treatment. And the structural condition was grasped through EDS. As a result of microstructure, hardened zone showed formation of acicular martensite.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.5
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• pp.871-876
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• 2019

We fabricated concave optical fiber tips using hydrofluoric acid solution and photothermal effect induced by $1.55{\mu}m$ wavelength laser applied to an optical fiber. The radius of curvature of the concave optical fiber tips fabricated with different applied laser power, etching time, and concentration of hydrofluoric acid was measured with an optical microscope. Then, we analyzed how the radius of curvature changes for those three variables. In addition, the reliability of the measurement method using a microscope was verified through a free spectral range(FSR) and a scanning electron microscope(SEM). Through this paper, the radius of curvature can be adjusted by the variables of the fabrication process of concave optical fiber tips; thus, it is overcoming the limitations of conventional optical fiber etching methods using hydrofluoric acid solutions.

• Laser Solutions
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• v.14 no.4
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• pp.21-27
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• 2011

In this work, we have studied on time-resolved transient reflective image of single crystalline Si surface after single-shot fs-laser irradiation with varying the laser fluence under two different laser spot sizes. The temporal profiles of transient reflectivity changes as well as its maximum values at the early delay time were found to be strongly dependent on both the laser beam spot size and laser fluence. We have interpreted the dependence of transient reflectivity changes on the laser spot size in terms of a relaxation of the generated free carriers to the bulk silicon, which should be interacted with the plasma.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.25.1-25.1
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• 2009

Pattern 웨이퍼 상의 오염입자 제거는 반도체 산업의 주된 과제 중 하나이다. Pattern의 선폭이 좁아짐에 따라 Pattern에 손상을 가하지 않고 오염입자를 제거 하는 것은 더욱 어려워지고 있다. 그뿐만 아니라 기존 습식세정 공정에서의 화학액에 의한 환경오염 및 박막의 손실도 문제가 되기 시작했다. 이러한 문제를 해결하기 위해 기존 세정공정에서 화학액의 농도를 낮추고 Megasonic 등을 이용하여 세정력을 보완하는 방법들이 연구되고 있다. 하지만 습식세정의 경우 강한 화학작용으로 인한 표면 손상 및 물 반점의 문제는 여전히 이슈가 되고 있다. 이러한 단점을 극복하기 위하여 건식 세정법이 제시되고 있으며 이 중 레이저 충격파는 레이저를 집속시켜 발생된 충격파를 이용하여 입자를 제거하기 때문에 국부적인 세정이 가능하며 세정력 조절이 가능하여 손상이 세정을 할 수 있다. 그러나 Pattern의 구조에 의해 전되는 세정력의 차이가 발생하고 Trench 내부의 오염입자제거 문제점이 발생할 수 있다. 시편은 Si STI Pattern을 100 nm PSL Particle (Red Fluorescence, Duke Scientific, USA) 을 50ppm 농도로 희석시킨 IPA에 dipping 하여 오염시킨 후 N2 Gas를 이용하여 건조하여 준비하였다. 그리고 레이저 충격파 세정 시스템은 최대 에너지 1.8 J까지 가능한 레이저를 발생하는 1,064 nm Nd:YAG 레이저를 이용하여 실험하였다. 레이져 충격파 실험은 충격파와 시편사이의 거리, gap distance와 에너지를 변환하여 세정효율을 관찰하였다. 세정효율은 세정 전후의 입자 감소량을 현광현미경 (LV-150, Nikon, Japan)를 이용하여 측정하였다. 그 결과, Trench 내부의 오염입자의 경우 Trench 밖의 오염입자에 비해 세정효율이 떨어지는 것으로 나타났으나 시편과 레이저 초점과의 거리가 가까워짐에 따라 Trench 내부의 오염입자에 대한 세정 효율을 증가시킬 수 있었다.

• The korean journal of orthodontics
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• v.39 no.4
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• pp.213-224
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• 2009

Objective: The aim of this study was to find out whether Er:YAG laser can aid in debonding ceramic brackets, and to see what kind of method will be the most appropriate for debonding. Methods: One hundred and ninety teeth, monocrystalline brackets ($MISO^{TM}$, HT, Ansan-Si, Korea), polycrystalline brackets ($Transcend^{TM}$ series 6000, 3M Untek, Monrovia, CA, USA) and the KEY Laser3 (KavoDental, Biberach, Germany) were used. Experimental groups were classified according to the type of ceramic brackets, and the amount of laser energy (0, 140, 300, 450, 600 mJ). After applying laser on the bracket at two points at 1 pulse each, the shear bond strength was measured. The effect of heat caused by laser was measured at the enamel beneath the bracket and pulp chamber. After measuring the shear bond strength, adhesive residue was evaluated and enamel surface was investigated using SEM. Results: All ceramic bracket groups showed a significant decrease in shear bond strength as the laser energy increased. The greatest average temperature change was $3.78^{\circ}C$ on the enamel beneath the bracket and $0.9^{\circ}C$ on the pulp chamber. Through SEM, crater shape holes caused by the laser was seen on the enamel and adhesive surfaces. Conclusions: If laser is applied on ceramic brackets for debonding, 300 - 450 mJ of laser energy will be safe and efficient for monocrystalline brackets ($MISO^{TM}$), and about 450 mJ for polycrystalline brackets ($Transcend^{TM}$ series 6000).