• Title/Summary/Keyword: 레이저 표면처리

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Image Technique of Surface Defects by Using Photoacoustic Signal Processing (광음향 신호처리를 이용한 표면결함의 영상 기술)

  • Yi, Chong-Ho;Jun, Kye-Suk
    • The Journal of the Acoustical Society of Korea
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    • v.13 no.6
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    • pp.45-49
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    • 1994
  • In this paper, photoacoustic image processing system was constructed by using 2W CW $CO_{2}$ laser of $10.6{\mu}m$ wavelength and PZT 5A acoustic transducer. Stainless steel of 5mm thickness was used as a sample in experiment. Three line cracks of $50{\mu}m$ in each width and depth were made by using plasma on the surface of the sample. Also, each gap among their lines was $200{\mu}m$ and $300{\mu}m$ in width. In the scan range of $2.2mm\times2mm$ including surface defects, a good image of $50{\mu}m$ resolution had been shown when modulation frequency of CW laser was 100Hz.

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Study on the surface contamination cleaning of device used in semiconductor processing by using Excimer laser (엑시머 레이저를 이용한 반도체 공정 부품 표면 세정 처리에 관한 연구)

  • 남기중;홍윤석;우미혜;이성풍;이종명
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.54-55
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    • 2003
  • 지금까지 반도체 장비 부품 세정을 위한 기존의 세정 방법중 가장 널리 사용되는 화학적 세정 방법은 다량의 유해 화학물질의 발생 및 후처리 문제, 비용문제, 열악한 작업 환경등과 같은 많은 문제를 노출시키고 있다. 이에 최근의 기술은 습식 세정에서 건식세정 방식으로의 기술 전이가 빠르게 이루어지고 있으며, 특히 레이저 광에 의한 건식 세정 기술은 다양한 오염 물질을 하나의 레이저 광원으로 제거할수 있으며, 기존의 습식 방법과 비교해 환경 친화적 청정 기술이고, 다른 건식 세정 기술인 드라이 아이스 및 플라즈마 세정 방법과 비교해 이동용으로 제작이 가능해 반도체 및 평판 디스플레이 생산공정에서 부품을 분리하지 않고 쉽게 세정을 하기 때문에 반도체 생산 현장에서 in-situ 세정으로 시간적, 경제적 이점이 대단히 크다. (중략)

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Development of a Laser-Generated Ultrasonic Inspection System by Using Adaptive Error Correction and Dynamic Stabilizer (적응적 에러 보정과 다이나믹 안정기를 이용한 레이저 유도 초음파 검사 시스템 개발)

  • Park, Seung-Kyu;Baik, Sung-Hoon;Park, Moon-Cheol;Lim, Chang-Hwan;Ra, Sung-Woong
    • Journal of the Korean Society for Nondestructive Testing
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    • v.25 no.5
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    • pp.391-399
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    • 2005
  • Laser-generated ultrasonic inspection system is a non-contact scanning inspection device with high spatial resolution and wide bandwidth. The amplitude of laser-generated ultrasound is varied according to the energy of pulse laser and the surface conditions of an object where the CW measuring laser beam is pointing. In this paper, we correct the generating errors by measuring the energy of pulse laser beam and correct the measuring errors by extracting the gain information of laser interferometer at each time. h dynamic stabilizer is developed to stably scan on the surface of an object for an laser-generated ultrasonic inspection system. The developed system generates ultrasound after adaptively finding the maximum gain time of an laser interferometer and processes the signal in real time after digitization with high speed. In this paper, we describe hardware configuration and control algorithm to build a stable laser-generated ultrasonic inspection system. Also, we confirmed through experiments that the proposed correction method for the generating errors and measuring errors is effective to improve the performance of a system.

InGaN/GaN LED 구조의 Bowing 및 광전특성 개선 연구

  • Lee, Gwan-Jae;Kim, Jin-Su;Lee, Cheol-Ro;Lee, Jin-Hong;Im, Jae-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.192.2-192.2
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    • 2015
  • 본 논문에서는 사파이어 기판 표면에 레이저 처리를 통해 격자 구조(레이저 격자 구조)를 제작하고 InGaN/GaN 발광다이오드(Light-Emitting Diodes, LED) 박막을 성장 한 시료에서 Bowing 특성 변화를 논의한다. 그리고 Bowing 정도에 따른 InGaN/GaN LED의 광학 및 전기적 특성을 Photoluminescence (PL)와 Electroluminescence (EL) Mapping 법을 이용하여 상호 비교 분석하였다. 2-인치 사파이어 기판 상에 레이저 격자 구조의 간격은 1 mm (GS1-LED), 2 mm (GS2-LED), 3 mm (GS3-LED) 로 제작하였으며, 격자 구조가 없는 LED를 기준 시료(C-LED)로 사용하였다. GS1-LED, GS2-LED, GS3-LED의 Bowing 정도는 C-LED 대비 각각 8%, 7.6%, 6.4% 감소하였다. PL Mapping 결과, GS-LED의 발광 파장의 분포 균일도가 C-LED 보다 개선되는 것을 확인하였고, 파장이 C-LED 대비 단파장으로 이동하였다. 또한, GS-LED시료의 PL 강도는 C-LED보다 증가하였고, 특히 GS2-LED의 PL 강도는 C-LED 대비 6.9% 증가 하였다. EL mapping 결과, GS-LED 발광 파장의 분포 균일도는 PL 결과와 유사하게 측정되었으며, 2인치 기판 전체 면적에 대한 GS-LED의 주요 동작전압 및 출력 전력 수율이 C-LED대비 현저히 개선되었다. 사파이어 기판 표면에 제작한 레이저 격자 구조에 따른 InGaN/GaN LED의 광학적, 전기적 특성을 Bowing의 개선과 응력 완화 현상으로 논의 할 예정이다.

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Characteristics of Surface Hardening by Laser Power Control in Real Time of Spheroidal Graphite Cast Iron (실시간 출력 제어를 통한 구상흑연 주철의 레이저 표면경화 특성)

  • Kim, Jongdo;Song, Mookeun
    • Laser Solutions
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    • v.18 no.2
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    • pp.1-4
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    • 2015
  • This study is related to the surface hardening treatment to spheroidal graphite cast iron for die by using high power diode laser. Laser device used in this experiment is capable of real-time laser power control. This is because the infrared temperature sensor (two color pyrometer) attached to the optical system measures the surface temperature of specimen and adjusts the laser power in real time. The surface treatment was carried out with the change of heat treatment temperature at the beam travel speed 3 mm/sec. Hardened width and depth was measured and hardened zone was analyzed by micro vickers hardness test in order to research the optimum condition of heat treatment. The changes in microstructure of the hardened zone also was examined. As a result of hardness measurement and observations on microstructure of hardened zone, hardness increased over three times as compared with base metal because the martensite was formed on the matrix structure.

레이저 계측

  • 조두진
    • 전기의세계
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    • v.42 no.6
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    • pp.26-31
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    • 1993
  • 레이저 계측의 광범위한 분야에서 홀로그래픽 간섭법과 전자스펙클무늬 간섭법을 중심적으로 살펴보았다. 이 방법들은 거친 표면을 갖는 다양한 물제에 대해 간섭적 방법에서 가능한 정밀도로 측정 할 수 있으므로 매우 폭넓은 응용가능성을 가지고 있고 지금도 새로운 아이디어들이 제시되고 있다. 특히 ESPI는 CCD카메라의 발전과 영상처리기술의 발전에 따라 피파괴검사 분야에서 중심적인 역할을 할 것으로 전망된다. 그러나 국내에서는 이제까지 이러한 첨단계측법들이 산업기술분야에서 별로 활용되지 못하고 있는 실정으로 가까운 장래에 큰 역할을 할 것으로 기대해 본다.

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Experimental study for removing silver sulfide from silver objects by Nd:YAG laser cleaning (은제품의 황화은 부식층 제거를 위한 Nd:YAG 레이저클리닝 실험 연구)

  • Lee, Hyeyoun;Cho, Namchul
    • Journal of Conservation Science
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    • v.30 no.1
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    • pp.95-101
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    • 2014
  • Silver objects tarnish with black from reaction with sulfurous acid or hydrogen sulfide of atmospheric. Blackening of silver objects results from formation of silver sulfide($Ag_2O$) on the surface. Silver sulfide usually is usually removed by conservation treatment. There are several cleaning methods such as chemical, electrochemical and micro-abrasion cleaning, but all of them consume silver. This study investigated the safe and effective parameter of laser cleaning by test on silver coupons. Laser cleaning is a selective process for the removal of specific substances. At first, laser cleaning applied to plain silver coupons, which were not corroded, to find out the safe range of laser energy density. From results, plain silver coupons were not changed at 1064nm below $4.00J/cm^2$ and at 532nm below $2.39J/cm^2$. The corrosion layer(silver sulfide) of artifical corroded silver coupons was removed at 1064nm with $2.39J/cm^2$ by 5~10 pulses and at 532nm with $1.19J/cm^2$ by 5~10 pulses. The removal thickness of corrosion layer was about 13-25nm per a laser pulse using AES analysis. In addition, laser cleaning tested the tarnish silver rings based on the results of silver coupons. As a result of test, the black surface were clean successfully and gave luster of silver, which showed the application possibility of laser cleaning for silver objects.

A study on the laser surface hardening of SM 45C steel (SM 45C강의 레이저 표면경화처리에 관한 연구)

  • 나석주;김성도;이건이;김태균
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.11 no.1
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    • pp.53-62
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    • 1987
  • High power lasers provide a controllable and precise energy source in surface transformation hardening. A careful control of the process is needed in order that the surface layer of the material reaches the austenizing temperature, but that it does not melt. In order to achieve this the results of theoretical and experimental studies on the laser surface hardening of a medium carbon steel are described. A two-dimensional computer program, which can be used generally for the determination of transient temperature distributions in welding and heat treatment, was established on the basis of the finite element method. For the confirmation of the accuracy of the numerical analysis, a medium carbon steel (SM 45C) of 5mm thickness was heat-treated with a 1kW CW CO$_{2}$ laser machine, while the traverse speed and the distance from the focal point (defocused distance) were varied. Experimental and numerical results showed a similar tendency in correlations between the hardened zone shape and the process parameters. With increasing beam spot diameter the width and depth of the hardened zone increased for relatively small beam spot diameters, but decreased rapidly after reaching the maximum value, while with increasing traverse speed the width and depth of the hardened zone decreased monotonously. Too small beam spot diameters are to be avoided, since the surface melting would lower the surface hardness and produce an uneven surface which may be unacceptable because of the possible requirement for subsequent machining. It could be observed that for a given traverse speed and laser power input there exists a optimal range of the beam spot diameter, which produce a large width of the hardened zone but no melting on the surface.

Joining Characteristics of Corrugated Polymer Surface by Laser (표면 요철 처리 된 광경화성수지의 레이저 접합 특성)

  • Yoon, Sung Chul;Choi, Hae-Woon
    • Laser Solutions
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    • v.18 no.4
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    • pp.6-11
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    • 2015
  • Specially designed and 3D printed samples were prepared and joined by a diode laser source. To increase the strength of joining and reliability of samples, the surface was patterned by using a 3D printer. The joining surface was prepared as hemispherical shape with no-patterns, 0.5mm pitch, 0.75mm pitch and 1mm pitch. The optical properties of samples were measured by using an integrated sphere where classical Kubelka-Munk theory and modified Richard-Mudgetts theory for the analysis applied. Scanning speed was set at 500mm/min and laser power was varied between 9 and 10watts for the preliminary joining characteristic analysis.

A Study on Fabrication of Hydrophobic Modification on the Surface of Copper using 355nm-Pulsed Laser (355nm 펄스 레이저를 이용한 구리 표면의 소수성 개질에 관한 연구)

  • Yun, Dan Hee;Kang, Bo Seok;Park, Jun Han;Gwak, Cheng Yeol;Shin, Bo Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.23 no.4
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    • pp.101-105
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    • 2016
  • Recently, the hydrophobic surface has been attracted because of the excellent opto-physical properties. Various processing methods such as chemical, mechanical, photolithographic and laser processing are competitively introduced for fabrication of hydrophobic surface of polymer, metal and ceramics. In this paper, we fabricated the hydrophobic surface of copper metal by simple method which irradiated 355 nm UV-pulsed laser in order to shape microgrooves and increased surface roughness through oxidation process at room temperature. Finally the contact angle is dramatically increased by maximum $45^{\circ}$, as a result of oxidation which simply created nanostructures on the microstructures without expensive chemical process.