• Title/Summary/Keyword: 디지털미러시스템

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Development of a LDI System for the Maskless Exposure Process and Energy Intensity Analysis of Single Laser Beam (Maskless 노광공정을 위한 LDI(Laser Direct Imaging) 시스템 개발 및 단일 레이저 빔 에너지 분포 분석)

  • Lee, Soo-Jin;Kim, Jong-Su;Shin, Bong-Cheol;Kim, Dong-Woo;Cho, Meyong-Woo
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.6
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    • pp.834-840
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    • 2010
  • Photo lithography process is very important technology to fabricate highly integrated micro patterns with high precision for semiconductor and display industries. Up to now, mask type lithography process has been generally used for this purpose; however, it is not efficient for small quantity and/or frequently changing products. Therefore, in order to obtain higher productivity and lower manufacturing cost, the mask type lithography process should be replaced. In this study, a maskless lithography system using the DMD(Digital Micromirror Device) is developed, and the exposure condition and optical properties are analyzed and simulated for a single beam case. From the proposed experimental conditions, required exposure experiments were preformed, and the results were investigated. As a results, 10${\mu}m$ spots can be generated at optimal focal length.

The Mirror-based real-time dynamic projection mapping design and dynamic object detection system research (미러 방식의 실시간 동적 프로젝션 매핑 설계 및 동적 사물 검출 시스템 연구)

  • Soe-Young Ahn;Bum-Suk Seo;Sung Dae Hong
    • Journal of Internet of Things and Convergence
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    • v.10 no.2
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    • pp.85-91
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    • 2024
  • In this paper, we studied projection mapping, which is being utilized as a digital canvas beyond space and time for theme parks, mega events, and exhibition performances. Since the existing projection technology used for fixed objects has the limitation that it is difficult to map moving objects in terms of utilization, it is urgent to develop a technology that can track and map moving objects and a real-time dynamic projection mapping system based on dynamically moving objects so that it can respond to various markets such as performances, exhibitions, and theme parks. In this paper, we propose a system that can track real-time objects in real time and eliminate the delay phenomenon by developing hardware and performing high-speed image processing. Specifically, we develop a real-time object image analysis and projection focusing control unit, an integrated operating system for a real-time object tracking system, and an image processing library for projection mapping. This research is expected to have a wide range of applications in the technology-intensive industry that utilizes real-time vision machine-based detection technology, as well as in the industry where cutting-edge science and technology are converged and produced.

Design of Over-sampled Channelized DRFM Structure in order to Remove Interference and Prevent Spurious Signal (간섭 제거 및 스퓨리어스 방지를 위한 오버샘플링 된 채널화 DRFM 구조 설계)

  • Kim, Yo-Han;Hong, Sang-Guen;Seo, Seung-Hun;Jo, Jung-Hun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.26 no.8
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    • pp.1213-1221
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    • 2022
  • In Electronic Warfare, the need to develop a jamming system that protects our location information from enemy radar is constantly increasing. The jamming system normally uses wide-band DRFM(Digital Radio Frequency Memory) that processes the entire bandwidth at once. However, it is difficult to jam if there is a CW(Continuous Wave) interference signal in the band. Recently, instead of wide-band signal processing, a structure using a filter bank that divides the entire band into several sub-bands and processes each sub-band independently has been proposed. Although it is possible to handle interference signal through the filter bank structure, spurious signal occurs when the signal is received at a boundary frequency between sub-bands. Spurious signal makes a output power of jamming signal distributed, resulting in lower JSR(Jamming to Signal Ratio) and less jamming effect. This paper proposes an over-sampled channelized DRFM structure that enables interference response and prevents spurious signal for sub-band boundary frequency input.