• 한국산학기술학회논문지
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• 제13권4호
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• pp.1453-1459
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• 2012

본 연구에서는 보이스코일 모터와 압전 구동기를 동일 축으로 배치함으로써 초정밀 위치결정뿐만 아니라 동특성을 개선할 수 있도록 하는 듀얼 스테이지를 다룬다. 듀얼 스테이지는 모델링이 엉성할 경우 오히려 나쁜 동특성을 보이는 단점이 있다. 이 논문은 본드그래프를 이용하여 듀얼 스테이지를 모델링하고 동적 상태방정식을 본드그래프에서 유도하였다. 또한 동특성을 향상시키기 위한 보상기의 설계 예시를 보이고 있으며, 시뮬레이션을 통해 검증하였다.

• 한국정밀공학회지
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• 제24권2호
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• pp.86-94
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• 2007

In this paper, a dual stage servo mechanism has been developed for image tracking system to improve control performances such as small rise time, small overshoot, small settling time, small stabilization error etc. A secondary stage, a platform, actuated by a pair of electro-magnets is mounted on a conventional elevation gimbal. In this mechanism, the gimbal provides large range but slow motion and the platform provides small range but fast positioning. A sliding mode control is applied to the platform positioning to attain robust performances and stability in the presence of the disturbance related to dynamic coupling of the gimbal and the platform. Results from experiments illustrate that the suggested dual stage mechanism controlled by the sliding mode control is effective in improving responses and attenuating the disturbance response related with dynamic coupling.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.483-484
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• 2006

• 한국정밀공학회지
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• 제25권7호
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.45-46
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• 2006

In this paper, a dual stage servo mechanism has been developed for image tracking system to improve transient control performances such as small rise time, small overshoot, small settling time, etc. A secondary stage, a platform, actuated by a pair of electro-magnets is mounted on a conventional elevation gimbal. In this mechanism, the gimbal provides large range but slow motion and the platform provides small range but fast positioning. A sliding mode control is applied to the platform positioning to attain robust performances and stability in the presence of the disturbance related to dynamic coupling of the gimbal and the platform. Results from experiments illustrate that the suggested dual stage mechanism controlled by the sliding mode control is effective in improving transient responses and attenuating the disturbance related with dynamic coupling.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2012년도 전력전자학술대회 논문집
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• pp.341-342
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• 2012

이 논문에서는 모듈 통합형 태양광 전력조절기 시스템을 간소화하기 위해서 인버터 스테이지 DSP에서 도통률을 결정하여 지그비를 이용한 무선방식으로 전송하고 이를 모듈에서 직접 PWM으로 변환하여 전력조절기를 제어하는 직접 PWM 제어방식을 제안하였다. 각 모듈의 전압, 전류를 지그비 모듈을 통하여 일정 간격으로 샘플링하여 그 값을 인버터 스테이지 DSP에 보내주고 MPPT 동작을 통하여 최대전력점에 해당하는 시비율을 컨버터에 다시 지그비 모듈을 통하여 무선으로 보내주는, 전압제어루프를 사용하지 않는 직접 PWM을 이용하여 부스트 컨버터를 제어하는 방법을 사용하였다. 제안하는 방식을 증명하기 위하여 50W 태양광 전력조절기, 듀얼 솔라 PV시뮬레이터 그리고 지그비 모듈을 사용하여 그 타당성을 입증하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.69-70
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.445-446
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• 한국생산제조학회지
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• 제25권1호
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.