• Korean Journal of Materials Research
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• v.7 no.2
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• pp.102-106
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• 1997

Micro gas sensors including thin film catal) tic type require stress-free memhrancs for etch stop of Si anisotropic etching and sublayer of sensing elements hecause stress is one of the main factors affecting breakdown of thin membranes. This paper reports the effects of deposition conditions on stress and refractive index of $SiN_{x}/SiO_{x}/(NON)$ films deposited by low pressure c11ernic;rl vapor deposition(L, t'CVI)) 2nd reactve sputtering. In the case of I.PCVI1, the stresses of $SiN_{x}$ and NON films arc $7.6{\times}10^{8}dyne/cm^2$ and $3.3{\times}10^{8}dyne/cm^2$, respectibely, and the refractive indices are 3.05 and 152, respectively. In the cxse oi the sputtered SiN, , compressi\e stress decreased in magnitude and then turned to tensility as increasing proc, ess pressure by lmtorr to 30mtorr and cicreasmg applied power density by $2.74W/cm^2$ to $1.10W/cm^2$. The hest value of film stress obt;~ined under condition of lOmtorr and $1.37W/cm^2$ in this' experiment was $1.2{\times}10^{9}dyne/cm^2$ cnnipressive. The refr~ict~ve index decreased from 2 05 to 1 89 as decreasing applied power density by lnitorr to 3Orntorr and increasing process pressure hy $2.74W/cm^2$ to $1.10W/cm^2$. Stresses of films deposited by both LPCVL) and sputtering decreased as incre;lsing temperature and showed plastic behavior as decreasing temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.311-311
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• 2016

최근 고성능 디스플레이 개발이 요구되면서 기존 비정질 실리콘(a-Si)을 대체할 산화물 반도체에 대한 연구 관심이 급증하고 있다. 여러 종류의 산화물 반도체 중 a-IGZO (amorphous indium-gallium-zinc oxide)가 높은 전계효과 이동도, 저온 공정, 넓은 밴드갭으로 인한 투명성 등의 장점을 가지며 가장 연구가 활발하게 보고되고 있다. 기존에는 SG(단일 게이트) TFT가 주로 제작 되었지만 본 연구에서는 DG(이중 게이트) 구조를 적용하여 고성능의 a-IGZO 기반 박막 트랜지스터(TFT)를 구현하였다. SG mode에서는 하나의 게이트가 채널 전체 영역을 제어하지만, double gate mode에서는 상, 하부 두 개의 게이트가 동시에 채널 영역을 제어하기 때문에 채널층의 형성이 빠르게 이루어지고, 이는 TFT 스위칭 속도를 향상시킨다. 또한, 상호 모듈레이션 효과로 인해 S.S(subthreshold swing)값이 낮아질 뿐만 아니라, 상(TG), 하부 게이트(BG) 절연막의 계면 산란 현상이 줄어들기 때문에 이동도가 향상되고 누설전류 감소 및 안정성이 향상되는 효과를 얻을 수 있다. Dual gate mode로 동작을 시키면, TG(BG)에는 일정한 positive(or negative)전압을 인가하면서 BG(TG)에 전압을 가해주게 된다. 이 때, 소자의 채널층은 depletion(or enhancement) mode로 동작하여 다른 전기적인 특성에는 영향을 미치지 않으면서 문턱 전압을 쉽게 조절 할 수 있는 장점도 있다. 제작된 소자는 p-type bulk silicon 위에 thermal SiO2 산화막이 100 nm 형성된 기판을 사용하였다. 표준 RCA 클리닝을 진행한 후 BG 형성을 위해 150 nm 두께의 ITO를 증착하고, BG 절연막으로 두께의 SiO2를 300 nm 증착하였다. 이 후, 채널층 형성을 위하여 50 nm 두께의 a-IGZO를 증착하였고, 소스/드레인(S/D) 전극은 BG와 동일한 조건으로 ITO 100 nm를 증착하였다. TG 절연막은 BG 절연막과 동일한 조건에서 SiO2를 50 nm 증착하였다. TG는 S/D 증착 조건과 동일한 조건에서, 150 nm 두께로 증착 하였다. 전극 물질과, 절연막 물질은 모두 RF magnetron sputter를 이용하여 증착되었고, 또한 모든 patterning 과정은 표준 photolithography, wet etching, lift-off 공정을 통하여 이루어졌다. 후속 열처리 공정으로 퍼니스에서 질소 가스 분위기, $300^{\circ}C$ 온도에서 30 분 동안 진행하였다. 결과적으로 $9.06cm2/V{\cdot}s$, 255.7 mV/dec, $1.8{\times}106$의 전계효과 이동도, S.S, on-off ratio값을 갖는 SG와 비교하여 double gate mode에서는 $51.3cm2/V{\cdot}s$, 110.7 mV/dec, $3.2{\times}108$의 값을 나타내며 훌륭한 전기적 특성을 보였고, dual gate mode에서는 약 5.22의 coupling ratio를 나타내었다. 따라서 산화물 반도체 a-IGZO TFT의 이중게이트 구조는 우수한 전기적 특성을 나타내며 차세대 디스플레이 시장에서 훌륭한 역할을 할 것으로 기대된다.

• Applied Chemistry for Engineering
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• v.24 no.5
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• pp.443-455
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• 2013

Electrochemical studies on charge transfer reactions across the interface between two immiscible electrolyte solutions (ITIES) have greatly attracted researcher's attentions due to their wide applicability in research fields such as ion sensing and biosensing, modeling of biomembranes, pharmacokinetics, phase-transfer catalysis, fuel generation and solar energy conversion. In particular, there have been extensive efforts made on developing sensing platforms for ionic species and biomolecules via gelifying one of the liquid phases to improve mechanical stability in addition to creating microscale interfaces to reduce ohmic loss. In this review, we will mainly discuss on the basic principles, applications and future aspects of various sensing platforms utilizing ion transfer reactions across the ITIES. The ITIES is classified into four types : (i) a conventional liquid/liquid interface, (ii) a micropipette supported liquid/liquid interface, (iii) a single microhole or an array of microholes supported liquid/ liquid interface on a thin polymer film, and (iv) a microhole array liquid/liquid interface on a silicon membrane. Research efforts on developing ion selective sensors for water pollutants as well as biomolecule sensors will be highlighted based on the use of direct and assisted ion transfer reactions across these different ITIES configurations.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.45 no.5
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• pp.40-45
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• 2008

In this paper, a microstrip linear tapered slot antenna is designed. A tapered slot antenna(TSA) has many advantages such as low profile, low weight, easy fabrication, and compatibility with monolithic microwave integrated circuits(MMIC). In addition, it has demonstrated multi octave bandwidth, moderately high gain, and symmetrical E- and H-plane beam patterns. A feed network is implemented with transition between a microstrip and a slot line for the microstrip linear tapered slot antenna. The transition is consist of two sides. One side has a microstrip line, the other side has a slot line. The dimensions of the microstrip and slot line are ${\lambda}_m/4$ and ${\lambda}_s/4$ at the center of the cross section of the microstrip and slot line. In order to get broad bandwidth antenna characteristics, the tapered length is chosen as $4{\lambda}_o$ and termination width is chosen as $1.75{\lambda}_o$. Experimental results show that the microstrip tapered slot antenna has symmetrical E- and H-plane beam patterns with around 5GHz of bandwidth at center frequency of 5.0GHz.

• Journal of the Korean Vacuum Society
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• v.22 no.1
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• pp.1-6
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• 2013

In this paper, to develop linear source for evaporating $600{\times}1,200mm$ size of large area CIGS absorber layer, we simulated linear thermal source and obtained ${\pm}5%$ thickness uniformity with various nozzle sizes and regular nozzle distance. Flux density was confirmed linear source length. Using this linear source, we tested thickness uniformity of Copper, Indium single layer which was obtained Cu ${\pm}5%$ and In ${\pm}5%$ thickness uniformity. And then CIGS absorber layers were evaporated with In-line single-stage co-evaporation. Large area CIGS absorber layers were confirmed composition uniformity of $$Cu{\leq_-}5%$$, $$In{\leq_-}7%$$, $$Ga{\leq_-}4%$$, $$Se{\leq_-}3%$$ with 600 mm width by XRF. Uniform shape of CIGS absorber layers was confirmed by SEM. XRD showed peaks which indicate chalcopyrite structure of CIGS absorber layers. Thus, developed linear source is suitable for evaporating CIGS absorber layer.

• Applied Chemistry for Engineering
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• v.28 no.5
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• pp.506-512
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• 2017

The transfer reaction characteristics of tetracycline (TC) across a polarized water/1,2-dichloroethane (1,2-DCE) interface was studied via controlling both pH and ionic strength of the aqueous phase in conjunction with cyclic and differential pulse voltammetries. Formal transfer potential values of differently charged TC ionic species at the water/1,2-DCE interface were measured as a function of pH values of the aqueous solution, which led to establishing an ionic partition diagram for TC. As a result, we could identify which TC ionic species are more dominant in the aqueous or organic phase. Thermodynamic properties including the formal transfer potential, partition coefficient and Gibbs transfer energy of TC ionic species at the water/1,2-DCE interface were also estimated. In order to construct an electrochemical sensor for TC, a single microhole supported water/polyvinylchloride-2-nitrophenyloctylether (PVC-NPOE) gel interface was fabricated. A well-defined voltammetric response associated with the TC ion transfer process was achieved at pH 4.0 similar to that of using the water/1,2-DCE interface. Also the measured current increased proportionally with respect to the TC concentration. A $5{\mu}M$ of TC in pH 4.0 buffer solution with a dynamic range from $5{\mu}M$ to $30{\mu}M$ TC concentration could be analyzed when using differential pulse stripping voltammetry.

• KSBB Journal
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• v.10 no.5
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• pp.589-597
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• 1995

Protein-bound polysaccahrides(PBP) were isolated, purified, and characterized from the sawdust media after harvesting the fruit body of Flammulina velutipes. The yield of the crude PBP(Fr.CA) extracted from the sawdust media, was 0.367% relative to the original sawdust media. The total sugar and protein contents of Fr.CA were 19.8% and 23.8% respectively. Using the membrane filtration, the fraction of which the molecular weight is over 300 kDa(Fr.A) was isolated from the Fr.CA and the yield was 44.6% relative to the Fr.CA. This result indicates that high molecular PBP is the dominant components of the Fr.CA. The Fr.A was separated into three fractions (Fr.A-1, Fr.A-2 and Fr.A-3) whose yields are 5.8%, 8.5% and 13.2% respectively. These fractions were further purified using gel filtration, obtaining a single peak in each fraction that considered as pure PBP Among them, the yield of Fr.A-1-${\alpha}$ was 20.9% relative to the Fr.A-1, and the molecular weight was 800 kDa. Monosaccharide components such as glucose, galactose, mannose, xylose and fucose could be detected all fractions by a HPLC analysis. Especially in the Fr.A-1-${\alpha}$ fraction, the content of glucose and galactose appeared to be high.

• Korean Journal of Optics and Photonics
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• v.17 no.5
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• pp.461-468
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• 2006

Optical characteristics in polymer films of MEH-PPV/DFPP blends were for the first time investigated. DFPP (N, N'-diperfluorophenyl-3,4,9,10-perylenetetracarboxylic diimide) used here was a novel n-type polymer, which had good stability in air and solubility in common solvents. For a 1:9 DFPP:MEH-PPV blend, highly efficient quenching of photoluminescence (PL) was observed. In addition, the photocurrent responses of these MEH-PPV/DFPP photovoltaic cells were measured. When the light intensity was $50mW/cm^2$, short-circuit photocurrent densities were two times higher than those of single layer MEH-PPV devices.

• Applied Chemistry for Engineering
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• v.30 no.4
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• pp.499-503
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• 2019

Characteristics of solar cells employing a lattice matched GaInP/GaAs quantum well (QW) structure in a single N-AlGaInP/p-InGaP heterojunction (HJ) were investigated and compared to those of solar cells without QW structure. The epitaxial layers were grown on a p-GaAs substrate with $6^{\circ}$ off the (100) plane toward the <111>A. The heterojunction of solar cell consisted of a 400 nm N-AlGaInP, a 590 nm p-GaInP and 14 periods of a 10 nm GaInP/5 nm GaAs for QW structure and a 800 nm p-GaInP for the HJ structure (control cell). The solar cells were characterized after the anti-reflection coating. The short-circuit current density for $1{\times}1mm^2$ area was $9.61mA/cm^2$ for the solar cell with QW structure while $7.06mA/cm^2$ for HJ control cells. Secondary ion mass spectrometry and external quantum efficiency results suggested that the significant enhancement of $J_{sc}$ and EQE was caused by the suppression of recombination by QW structure.

• Membrane Journal
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• v.33 no.4
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• pp.149-157
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• 2023

Covalent organic frameworks (COFs) have shown promise in various applications, including molecular separation, dye separation, gas separation, filtration, and desalination. Integrating COFs into membranes enhances permeability, selectivity, and stability, improving separation processes. Combining COFs with single-walled carbon nanotubes (SWCNT) creates nanocomposite membranes with high permeability and stability, ideal for dye separation. Incorporating COFs into polyamide (PA) membranes improves permeability and selectivity through a synthetic interfacial strategy. Three-dimensional COF fillers in mixed-matrix membranes (MMMs) enhance CO₂/CH₄ separation, making them suitable for biogas upgrading. All-nanoporous composite (ANC) membranes, which combine COFs and metal-organic framework (MOF) membranes, overcome permeance-selectivity trade-offs, significantly improving gas permeance. Computational simulations using hypothetical COFs (hypoCOFs) demonstrate superior CO₂ selectivity and working capacity relevant for CO₂ separation and H₂ purification. COFs integrated into thin-film composite (TFC) and polysulfonamide (PSA) membranes enhance rejection performance for organic contaminants, salt contaminants, and heavy metal ions, improving separation capabilities. TpPa-SO₃H/PAN covalent organic framework membranes (COFMs) exhibited superior desalination performance compared to traditional polyamide membranes by utilizing charged groups to enable efficient desalination through electrostatic repulsion, suggesting their potential for ionic and molecular separations. These findings highlight COFs' potential in membrane technology for enhanced separation processes by improving permeability, selectivity, and stability. In this review, COF applied for the separation process is discussed.