• Title/Summary/Keyword: 다층 구조물

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PMMA와 TRT전사을 이용한 그래핀의 전기적 특성 비교

  • Min, Jeong-Hong;U, Jeong-Min;Lee, Dong-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.285-286
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    • 2012
  • 육각형 구조를 지닌 2차원의 물질인 그래핀은 우수한 전도도와 투과율로 투명전극의 신소재로 각광 받고 있다. 특히, 그래핀은 현재 투명전극으로 가장 많이 사용되고 있는 Indium Tin Oxide(ITO)로는 구현하기 힘든 Flexible display의 어플리케이션으로 사용하기 위한 목적으로 많은 기술 개발이 이루어지고 있다. 이러한 그래핀의 응용은 가장 먼저 그래핀의 생산이 안정적이고 원활히 이루어질 때 실질적으로 가능할 것이다. 하지만, 탄소로 이루어진 그래핀의 성장은 제한된 기판 위에서만 가능하기 때문에 성장이 이루어진 그래핀을 다른 기판에 전사시켜야하는 문제점이 있다. 그래핀 전사방법에는 직접전사, PMMA 전사, TRT 전사, 금속전사, 망전사, PDMS 전사 등 다양한 방법이 있다. 이 중에서 현재 가장 많이 사용되고 있는 전사방법으로는 직접전사, PMMA 전사, TRT 전사 방법이 있다. 직접전사의 경우 니켈위에 성장된 다층의 그래핀을 전사시킬 때 많이 사용되는 방법으로 니켈 에천트에 전사 시킬 그래핀을 띄워 니켈을 녹인 후 원하는 기판을 이용하여 전사하는 간단한 방법이다. 직접전사는 전사가 이루어진 후 그래핀에 남는 결함이 거의 존재 하지 않는 장점이 있지만 문제점은 단일층의 그래핀의 경우 니켈 에천트위에서 잘 보이지 않을 뿐 아니라 에천트에서 기판으로 전사할 때 너무 얇은 막으로 인해 다 찢어져버린다는 것이다. 이를 해결하기 위해 사용되는 전사 방법으로 TRT를 이용하여 구리위에 성장된 그래핀을 상온 시에는 점성을 가진 테이프를 이용해 부치고 구리에 천트에 구리를 녹인 후 원하는 기판위에 놓고 열을 가해 그래핀을 전사하는 방법이 있다. TRT 전사방법은 얇은 막의 그래핀을 찢어지지 않도록 지지해주어 대면적 기판위에도 전사 할 수 있는 장점이 있지만 전사 후 그래핀에 남아 있는 잔여물들이 많고(그림 1. (b)), 테이프를 이용한다는 점에서 그래핀의 얇은 막이 손상될 수 있는 단점이 있다. 그렇기 때문에 본 연구에서는 직접전사와 TRT전사의 문제점들인 전사 후 잔여물와 그래핀 단일층의 손상을 최소화할 수 있는 방법으로 PMMA전사를 가장 적합한 전사방법이라는 것을 라만 분석, 면 저항측정, 그래핀을 이용한 LED제작을 통해서 살펴 보았다. 먼저 라만 분석을 이용해 TRT전사 후 상당히 많은 빈 공간이 생김을 확인할 수 있었으며, 결과적으로 면 저항이 약 $1.5k{\Omega}$~$3M{\Omega}$까지 PMMA의 약 0.9~1.2 $k{\Omega}$와 비교했을 때 큰 차이가 있음을 확인할 수 있었다. 또한, 이후 각각의 전사방법으로 얻은 그래핀을 LED의 스프레딩 층으로 제작한 결과에서도 TRT전사방법보다 PMMA전사방법의 결과가 좋음을 알 수 있었다(그림 2).

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The Pad Recovery as a function of Diamond Shape on Diamond Disk for Metal CMP (Metal CMP 용 컨디셔너 디스크 표면에 존재하는 다이아몬드의 형상이 미치는 패드 회복력 변화)

  • Kim, Kyu-Chae;Kang, Young-Jae;Yu, Young-Sam;Park, Jin-Goo;Won, Young-Man;Oh, Kwang-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.3 s.40
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    • pp.47-51
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    • 2006
  • Recently, CMP (Chemical Mechanical Polishing) is one of very important processing in semiconductor technology because of large integration and application of design role. CMP is a planarization process of wafer surface using the chemical and mechanical reactions. One of the most important components of the CMP system is the polishing pad. During the CMP process, the pad itself becomes smoother and glazing. Therefore it is necessary to have a pad conditioning process to refresh the pad surface, to remove slurry debris and to supply the fresh slurry on the surface. A conditioning disk is used during the pad conditioning. There are diamonds on the surface of diamond disk to remove slurry debris and to polish pad surface slightly, so density, shape and size of diamond are very important factors. In this study, we characterized diamond disk with 9 kinds of sample.

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Study on deposition condition of epitaxial $Y_2O_3$ buffer layer deposited on textured metal substrates for $YBa_2Cu_3O_7$ coated conductors (YBCO Coated Conductor를 위한 texture된 금속 기판위의 epitaxial $Y_2O_3$ 완충층 증착 조건에 관한 연구)

  • Shin, K.C.;Ko, R.K.;Park, Y.M.;Chung, J.K.;Shi, Dongqi;Choi, S.J.;Song, K.J.;Park, C.;Son, Y.G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.565-568
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    • 2003
  • 2세대 초전도 선재로 알려져 있는 $YBa_2Cu_3O_{7-\delta}$ coated conductor는 금속모재/완충층/초전도층/보호층의 구조를 가진다. 2개 이상의 산화물 다층 박막으로 이루어진 완충층은 금속기판의 집합조직을 초전도층까지 전달하는 역할, 금속기판의 금속이 초전도층으로 확산되어 초전도층의 전기적 특성을 열화시키는 것을 막아주는 확산장벽으로의 역할 등을 수행한다. 1차 완충층은 금속기판의 집합조직을 유지하여야하며, 금속기판의 산화를 방지하면서 증착 되어야 한다. coated conductor 제조를 위한 첫 단계로 Pulsed Laser Deposition법을 이용하여 cube texture된 Ni 기판 위에 $Y_2O_3$ 박막을 증착 하였다. 최적의 증착 조건을 찾기 위해 증착 챔버의 산소 및 $H_2/Ar$ 혼합가스 분압과 기판온도를 변화시키면서 증착 하였다. $Y_2O_3$층의 (100) 집합조직은 기판온도 $600{\sim}700^{\circ}C$와 산소 분압 $0.01{\sim}0.1mTorr$에서 증착된 Y2O3 박막에서 금속기판과 유사한 집합조직을 얻을 수 있었다. 최적의 증착 조건에서 $Y_2O_3$ (222) ${\Phi}-scan$의 full width at half maximum (fwhm)이 $11^{\circ}$이고 (400) ${\omega}-scan$ fwhm은 $6^{\circ}$이었다.

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Racking Property of Light-framed Shear Wall with Hold-down Connector (홀드다운을 적용한 경골목조 벽체의 전단성능)

  • Lee, In-Chan;Park, Chun-Young;Lee, Jun-Jae
    • Journal of the Korean Wood Science and Technology
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    • v.36 no.4
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    • pp.26-36
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    • 2008
  • As the height of the light-framed building increases, the lateral load and overturn-moment are increased and the possibility of the building overturn becomes larger. Because the shear wall resists lateral load in light-framed building, the reinforcement of shear wall is required. In order to reinforce the light-framed shear wall, using lag screw fastener type (B-HD) and using bolt type (S-HD) hold-down connectors were applied for test. And domestic larch lumbers, $38{\times}140mm$ and $89{\times}140mm$, KS 2nd grade, were used for the stud. The North American OSB panels were used for sheathing panel. Static loads, load speed 6 mm/min, were applied on top of the wall. As a result, shear strength of the wall that using hold-down connector was improved sufficiently. And when applying the S-HD type hold-down connector, stud should be reinforced against weakening by drilled hole. As increasing the number of lag screw, the number of bolt and the product allowable strength, the strength of shear wall that using hold-down connector was also increased. When applying hold-down connector to light-framed building using 38 mm stud, it must be reinforced by enlarging the thickness of stud like as 38 mm doubled column.

Fabrication and Property Evaluation of Tubular Segmented-in-Series Solid Oxide Fuel Cell (SOFC) (세그먼트 관형 SOFC의 제작 및 특성 평가)

  • Yun, Ui-Jin;Lee, Jong-Won;Lee, Seung-Bok;Lim, Tak-Hyoung;Park, Seok-Joo;Song, Rak-Hyun;Shin, Dong-Ryul;Han, Kyoo-Seung
    • Korean Chemical Engineering Research
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    • v.50 no.3
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    • pp.562-566
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    • 2012
  • A novel design of tubular segmented-in-series(SIS) solid oxide fuel cell (SOFC) sub module was presented in this paper. The tubular ceramic support was fabricated by the extrusion technique. The NiO-YSZ anode and the yttria-stabilized zirconia (YSZ) electrolyte were deposited onto the ceramic support by dip coating method. After sintering at $1350^{\circ}C$ for 5 h, a dense and crack-free YSZ film was successfully fabricated. Also, the multi-layered cathode composed of LSM-YSZ composite, LSM and LSCF were coated onto the sintered ceramic support by dip coating method and sintered at $1150^{\circ}C$. The performance of the tubular SIS SOFC cell and sub module electrically connected by the Ag-glass interconnect was measured and analysed with different fuel flow and operating temperature.

Stabilizing Soil Moisture and Indoor Air Quality Purification in a Wall-typed Botanical Biofiltration System Controlled by Humidifying Cycle (가습 주기에 따른 벽면형 식물바이오필터의 토양 수분 안정화 및 실내공기질 정화)

  • Lee, Chang Hee;Choi, Bom;Chun, Man Young
    • Horticultural Science & Technology
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    • v.33 no.4
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    • pp.605-617
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    • 2015
  • The ultimate goal of this research is to develop a botanical biofiltration system that combines a green interior, biofiltering, and automatic irrigation to purify indoor air pollutants according to indoor space and the size of biofilter. This study was performed to compare the stability of air flow characteristics and removal efficiency (RE) of fine dust within a wall-typed (vertical) botanical biofilter depending on humidifying cycle and to investigate RE of volatile organic compounds (VOCs) by the biofilter. The biofilter used in this experiment was designed as an integral form of water metering pump, water tank, blower, humidifier, and multi-level planting space in order to be suitable for indoor space utilization. As a result, relative humidity, air temperature, and soil moisture content (SMC) within the biofilter showed stable values regardless of three different humidifying cycles operated by the metering pump. In particular, SMCs were consistently maintained in the range of 27.1-29.7% during all humidifying cycles; moreover, a humidifying cycle of operating for 15 min and pausing for 45 min showed the best horizontal linear regression (y = 0.0008x + 29.09) on SMC ($29.0{\pm}0.2%$) during 120 hour. REs for number of fine dust (PM10) and ultra-fine dust (PM2.5) particles passed through the biofilter were in the range of 82.7-89.7% and 65.4-73.0%, respectively. RE for weight of PM10 passed through the biofilter was in the range of 58.1-78.9%, depending on humidifying cycle. REs of xylene, ethyl benzene, total VOCs (TVOCs), and toluene passed through the biofilter were in the range of 71.3-75.5%, while REs of benzene and formaldehyde (HCHO) passed through the biofilter were 39.7% and 44.9%, respectively. Hence, it was confirmed that the wall-typed botanical biofilter suitable for indoor plants was very effective for indoor air purification.

Development of Anode-supported Planar SOFC with Large Area by tape Casting Method (테입캐스팅을 이용한 대면적 (100 cm2) 연료극 지지체식 평판형 고체산화물 연료전지의 개발)

  • Yu, Seung-Ho;Song, Keun-Suk;Song, Hee-Jung;Kim, Jong-Hee;Song, Rak-Hyun;Jung, Doo-Hwan;Peck, Dong-Hyun;Shin, Dong-Ryul
    • Journal of the Korean Electrochemical Society
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    • v.6 no.1
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    • pp.41-47
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    • 2003
  • For the development of low temperature anode-supported planar solid oxide fuel cell, the planar anode supports with the thickness of 0.8 to 1 mm and the area of 25, 100 and $150\;cm^2$ were fabricated by the tape casting method. The strength, porosity, gas permeability and electrical conductivity of the planar anode support were measured. The porosity of anode supports sintered at $1400^{\circ}C$ and then reduced in$H_2$ atmosphere was increased from $45.8\%\;to\;53.9\%$. The electrical conductivity of the anode support was $900 S/cm\;at\; 850^{\circ}C$ and its gas permeability was 6l/min at 1 atm in air atmosphere. The electrolyte layer and cathode layer were fabricated by slurry dip coating method and then had examined the thickness of $10{\mu}m$ and the gas permeability of 2.5 ml/min at 3 atm in air atmosphere. As preliminary experiment, cathode multi-layered structure consists of LSM-YSZ/LSM/LSCF. At single cell test using the electrolyte layer with thickness of 20 to $30{\mu}m$, we achieved $300\;mA/cm^2$ and 0.6V at $750^{\circ}C$

Growth Evaluation of 10 Cultivars of Creeping Bentgrass in Salt Affected Environment (염해지에서 크리핑벤트그래스 10개 품종의 생육 비교)

  • Kim, Jun-Beom;Yang, Geun-Mo;Choi, Joon-Soo
    • Asian Journal of Turfgrass Science
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    • v.22 no.2
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    • pp.149-160
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    • 2008
  • This study was carried out to examine the growth performance of 10 cultivars of creeping bentgrass under salt injury in Seo-san reclaimed area. Turfgrass performance studies included 10 creeping bentgrass cultivars (T-1, L-93, Penn A1, Pennlinks II, Seaside II, Declaration, Penn A4, Crenshaw, Dominant, and Penncross). Ten creeping bentgrass cultivars were grown on a USGA recommended research green. Plots were seeded on May 31, 2006 at the rate of $7\;g{\cdot}m^{-1}$. Electric conductivities of irrigation water (ECw) and soil (ECe) were ranged from 0.28 to $3.3\;d\;S{\cdot}m^{-1}$ and from 0.25 to $3.5\;d\;S{\cdot}m^{-1}$ respectively. Leaf color, turf quality, coverage rate, and growth rate were checked under the salty condition in reclaimed land for 2 year. Creeping bentgrass cultivars of T-1, Penn links, and Crenshaw presented dark green color and Penn A1, Declaration showed lighter green color. Penn A1, Penn A4 and L-93 exhibited the highest overall turfgrass quality. Average visual coverage was 75.3% after eleven weeks after seeding. Dominant, L-93, and Penn A1 resulted in higher visual coverage compared to the other cultivars. There was no difference in density among cultivars at 1 year after establishment. However, Declaration, Penn A1, T-1, and L-93 showed higher density compared to the other cultivars at 2 years after seeding. Creeping bentgrass showed different quality, density and color in salty soil (ECe: $0.25-3.5\;d\;S{\cdot}m^{-1}$) and from application of salty irrigation water (ECw: $0.28-3.3\;d\;S{\cdot}m^{-1}$) conditions. These results will be useful where selecting green cultivars for the golf courses in reclaimed land area.