• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.236-236
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• 2013

비냉각 적외선 검출기는 산업용 군사용으로 최근 각광을 받고 있다. 이는 주야간 빛이 없는 곳에서도 사물의 열을 감지할 수 있어 인체감지 및 보안감시, 에너지 절감 등에 응용될 수 있는 핵심부품이다. 비냉각 적외선 검출기로는 재료의 저항의 변화를 감지하는 마이크로볼로미터형이 가장 많이 사용된다. 감지재료로는 비정질 실리콘(a-Si)과 산화바나듐(VOx)이 가장 많이 사용된다. VOx 박막은 일반적으로 RF sputtering 방법으로 증착이 되며, 저항이 낮고, 저항의 온도변화 계수(TCR)가 크며 신호 대 잡음 특성이 우수한 반면 산소(oxygen) phase가 다양하여 갓 증착된 상태의 박막은 재현성이 떨어지는 단점이 있다. 본 연구에서는 기존의 V 타겟을 사용한 VOx 박막을 증착하는 방법을 개선하여 ZnO 나노박막을 중간에 삽입하여 저항 특성을 조절할 뿐만 아니라 열처리에 의해 TCR 값을 향상시키고, VO2 phase 가 주로 나타나는 박막 증착 및 공정 방법을 소개한다. RF sputtering 장비를 이용하여 산소와 아르곤 가스의 혼합비를 4.5로 하였으며, VOx 증착 시 플라즈마 Power는 150 W 로 하여 상온에서 증착하였다. 갓 증착된 VOx 다층박막의 XRD 스펙트럼은 V2O5 피크가 주된 상을 이루고 있었으며, 산소열처리에 의해 VO2 상이 주로 나타남을 알 수 있었다. TCR 값은 갓 증착된 샘플에서 -0.13%/K의 값을 얻었으며, $300^{\circ}C$에서 50분간 열처리 후 -3.37%/K 으로 급격히 향상됨을 알 수 있었다. 저항은 열처리 후 약 100 kohm으로 낮아져 검출소자를 위한 조건에 적합한 특성을 얻을 수 있었다. 또한 산소열처리의 온도 및 시간에 따라 TCR 및 표면 거칠기 특성을 조사하였으며, 최적의 열처리 조건을 얻고자 하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.20-20
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• 2010

반도체 공정 등에서 10-6~10-8 Torr의 고진공 환경을 제공하기 위하여 사용되는 고진공 터보분자펌프 (Turbomolecular Pump, TMP)는 다층의 회전깃을 갖는 로터를 회전시켜 분자를 배출시키는 방식을 사용하는 진공펌프이다. 또한 최근에는 디스플레이 및 반도체 공정에서 높은 진공도뿐만 아니라, 높은 배기속도를 요구하는 추세에 따라, 터보 펌프와 드래그 펌프부분을 동시에 가지고 있어 상대적으로 작동 진공도 영역이 넓은 복합 분자펌프(Compound Turbomolecular Pump, CMP)의 활용도가 넓어지고 있다. 이러한 분자펌프가 장시간의 고속회전에 적합하도록 비접촉 방식인 자기부상 방식의 적용이 최근 거의 표준화되어 있다. 자기베어링 시스템은 전자기력을 이용하여 자성체인 회전축을 부상지지 함으로써 비접촉 고속 회전이 가능하여 윤활이 용이하지 않은 진공 환경 등 가혹한 환경에 적합하며, 터보분자펌프는 자기베어링이 가장 널리 사용되고 있는 분야이기도 하다. 자기베어링 시스템의 설계는 크게 하드웨어와 소프트웨어로 나누어질 수 있는데, 하드웨어의 경우 전체 로터 시스템의 특성을 고려하여 설계되어야 하며, 주로 자기베어링 코어와 코일, 변위센서 및 전력 증폭 시스템 등의 기전적인 요소들이 이루어져 있다. 하드웨어 설계와 함께 제어시스템의 설계도 매우 중요하며, 이는 자기베어링 시스템이 불안정한 특성을 갖는 개루프계를 갖고 있으므로 안정화를 위한 능동제어 시스템이 필수적이며 진동제어 등 여러 가지 기능이 요구되기 때문이다. 본 논문에서는 이러한 자기부상형 고진공 복합분자펌프의 제어를 위한 선형제어시스템의 구성을 실제 시스템의 적용을 통하여 설명하였다. 각 제어기는 DSP 를 이용한 디지털 제어시스템으로 구성되었으며, 2, 500 l/s 급의 복합 분자펌프 시작품에 적용하여 10,000 rpm까지의 기본성능시험을 수행하였다.

• Journal of the Korean Magnetics Society
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• v.8 no.6
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• pp.357-361
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• 1998

For CoZr/Ag/CoCr trilayered films deposited by DC and FR magnetron sputtering method, ferromagentic resonance experiments have been used to investigate the dependence of the exchange coupling between CoZr and CoCr layers separated by Ag layer on the thickness of the Ag layer. The coupling strength K increases with increasing Ag thickness up to 10 $\AA$ with a maximum value of 748 Oe, but oscillates with increasing Ag thickness in the range from 20 to 100 $\AA$. The coupling strength is positive for all samples. Hence, it seems that the exchange coupling between CoZr and CoCr layers separated by Ag layer is ferromagnetic.

• Journal of the Korean Magnetics Society
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• v.25 no.5
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• pp.149-155
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• 2015

The ECR (Electron Cyclotron Resonance) Ar ion milling was manufactured to fabricate the device of thin film. The ECR ion milling system applied to the device etching operated by a power of 600W, a frequency of 2.45 GHz, and a wavelength of 12.24 cm and transferred by a designed waveguide. In order to match one resonant frequency, a magnetic field of 908 G was applied to a cavity inside of ECR. The Ar gas intruded into a cavity and created the discharged ion beam. The surface of target material was etched by the ion beam having an acceleration voltage of 1000 V. The formed devices with a width of $1{\mu}m{\sim}9{\mu}m$ on the GMR-SV (Giant magnetoresistance-spin valve) multilayer after three major processes such as photo lithography, ion milling, and electrode fabrication were observed by the optical microscope.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.402-409
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• 2019

Patients with dementia or elderly patients who can not move at all by themselves are at a high risk of falls and bedsore due to lack of caregivers. In this paper, to solve this problem, we propose an algorithm to determine the patient's lying postures by discriminating the main body parts such as head, shoulders, and hips based on the pressure intensity sensed at regular intervals. A smart mat with a lattice structure in which a pressure sensor is arranged so that the body part can be discriminated irrespective of the physical characteristics has been implemented. It consists of two modules of $7{\times}7$ array size. Each module consists of 49 FSR-406 sensors and independently senses pressure. For each module, the body part corresponding to the upper body or the lower body is sequentially discriminated by using a pressure distribution such as a cumulative pressure sum using a filter. The proposed algorithm can identify five lying positions by examining the inclusion relationship between body parts belonging to layer-1 such as head, shoulder, and hip area.

• Nuclear Engineering and Technology
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• v.25 no.1
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• pp.154-165
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• 1993

A stochastic method using continuous time Markov process is presented to model the one-dimensional convective nuclide transport in geologic media, which have usually heterogeneous feature in physical/geochemical parameters such as velocity, dispersion coefficient, and retardation factor resulting poor description by conventional deterministic advection-dispersion model. The primary desired quantities from a stochastic model are the mean values and variance of the state variables as a function of time. The time-dependent probability distributions of nuclides are presented for each discretized compartment given the volumetric groundwater flux and the intensity of transition. Since this model is discrete in medium space, physical/geochemical parameters which affect nuclide transport can be easily incorporated for the heterogeneous media as well as remarkably layered media having spatially varied parameters. Even though the Markov process model developed in this study was shown to be sensitive to the number of discretized compartments showing numerical dispersion as the number of compartments are increased, this could be easily calibrated by comparing with the analytical deterministic model.

• Journal of the Korean Institute of Landscape Architecture
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• v.38 no.1
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• pp.129-136
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• 2010

This study was initiated to investigate thatch accumulation in several turfgrasses grown under two soil systems. The 45 centimeter deep USGA system was constructed with rootzone, intermediate and drainage layers. The mono-layer system, however, was made with only a 30cm rootzone layer. Turfgrasses used in the study were comprised of 3 varieties from Korean lawngrass of Warm-Season Grass(WSG) and 3 blends and 3 mixtures from Cool-Season Grass(CSG). A total of 9 turfgrass treatments were replicated three times in RCBD in both systems. Cultural practices for the research plot followed a typical maintenance program for highly managed turf. Treatment differences for thatch accumulation were observed among the turfgrasses in both soil systems. Thatch under the USGA system was 9% greater than under the mono-layer system due to its more favorable conditions for turf growth. Higher thatch depth was found with Korean lawngrass, 34~87% in the USGA system and 16~75% in the mono-layer system when compared with CSG. Among WSG, the Joongji variety was the highest in thatch layer under both the USGA and mono-layer systems. Kentucky bluegrass(KB) was the greatest among CSG, since it is a rhizomatous-type in growth habit, resulting in faster production of organic matter over bunch-type of tall fescue and perennial ryegrass. Proper depth in the thatch layer was known to be beneficial by enhancing the resiliency and wear tolerance of the turf in athletic fields. Thus, KB was considered to be a very excellent turfgrass in terms of turf quality, environmental performance, physical properties and soccer player safety. However, disadvantages such as poor water-holding properties, more inclined to injury from environmental stresses and severe diseases and insect injury were also expected where thatch was excessively accumulated. Therefore, these results demonstrate that more frequent measures for controlling thatch such as vertical mowing, topdressing or coring should be employed for soccer fields with Korean lawngrass and KB over other turfgrasses.

• Journal of the Korean Institute of Landscape Architecture
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• v.43 no.4
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• pp.62-74
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• 2015

This study was carried out to provide examples of planting methods for the construction of street green spaces with abundant greenery by analyzing road type, surrounding land use and planting structures in street green spaces on Port Island, Kobe, Japan. Port Island_(total area: 826ha) is a marine cultural city located in Japan's first artificial island with facilities of urban function and port facilities. The study site was designated at 11 plots of $55{\sim}285m^2$ on Port Island, and topography structure styles were divided into four types with mounding style, slope style, slope and flat style, flat style according to the adjacent roads width. The area adjacent to the middle roads with high levels of noise and pollution set up the mounding style, slope style, slope and flat style of multi-layer structures using topographic properties. The area adjacent to small roads focused on a green strip with shrubs on a flat style. Surrounding land-uses include a public institution, housing complex, and a commercial building. The planting concept was a buffer and landspace function in case of the middle road_(lane 4) while the small road_(lane 2) was a landspace function. Planting species were diverse with Liquidambe formosana, Cinnamomum camphora, Sapium sebiferum, Cedrela sinensis, Laeocarpus sylvestris var. ellipticus, Ginkgo biloba, Prunus serrulata var. spontanea, Zelkova serrata, Quercus glauca, Juniperus chinensis, Magnolia kobus, Rhododendron spp., Camellia japonica, Abelia mosanensis, etc. Planting density was 0.02~0.08(0.04) individual/$m^2$ at the canopy layer, 0.02~0.08(0.04) individual/$m^2$ at the understory layer. Ratio of green coverage was 40.0~173.7(93.0)% at the canopy layer, 2.1~79.8(34.9)% at the understory layer and 17.9~64.2(32.9)% at the shrub layer. $Gr{\ddot{u}}volumenzahl$ was $1.43{\sim}6.67(4.13)m^3/m^2$ at the canopy layer, $0.02{\sim}2.01(0.85)m^3/m^2$ at the understory layer and $0.14{\sim}0.58(0.26)m^3/m^2$ at the shrub layer. The ratio of green coverage of street green space on Port Island was higher than that of Seoul, and particularly, the ratio of green coverage and $gr{\ddot{u}}volumenzahl$ at the shrub layer differed, compared to the main street green space in Korea. The result of this study may be applicable to other coastal reclaimed cities in terms of setting methods for street greenery considering the topography structure, planting structure and planting function.

• Korean Journal of School Psychology
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• v.17 no.3
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• pp.401-419
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• 2020

The purpose of this study was to validate the Korean Implementation Fidelity Checklist of Tier 1 School-Wide Positive Behavior Support (KIFC-T1) for use in the Korean educational system. Tier 1 support, which is universal supports, within a multi-tiered, school-wide positive behavior support (SWPBS) model, aims to provide support to and prevent problem behaviors among all students in a school. The initial KIFC-T1 consisted of 48 items and 11 factors and was developed based on a literature review. Its content was validated by experts. The validated KIFC-T1 was introduced to 185 special school teachers who had experience implementing SWPBS and who used the instrument to assess the degree to which their schools had implemented Tier 1 support. Based on their responses, the construct validity of the KIFC-T1 was examined using factor, item, and internal consistency reliability analyses. The concurrent validity of the tool was examined using the PBS Evaluation Tool, School Climate Questionnaire, School Discipline Practice Scale, and PBS Effectiveness Scale. The analyses revealed that KIFC-T1 had a stable five-factor structure with 35 items, had good reliability (Cronbach's α=.956, each factor's Cronbach's α=.834-.951), and its results were statistically significantly correlated with those of the PBS Evaluation Tool, School Discipline Practice Scale, and the PBS Effectiveness Scale. However the KIFC-T1's results were not statistically significantly correlated with the results of the School Climate Questionnaire. These results suggest that KIFC-T1 is a reliable and valid tool for assessing the fidelity of universal support implementations.

• Korean Journal of Materials Research
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• v.11 no.8
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• pp.671-678
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• 2001

All solid-state thin film micro supercapacitor, which consists of $RuO_2$/LiPON/$RuO_2$ multi layer structure, was fabricated on Pt/Ti/Si substrate using a $RuO_2$ electrode. Bottom $RuO_2$ electrode was grown by dc reactive sputtering system with increasing $O_2/[Ar+O_2]$ ratio at room temperature, and a LiPON electrolyte film was subsequently deposited on the bottom $RuO_2$ electrode at pure nitrogen ambient by rf reactive sputtering system. Room temperature charge-discharge measurements based on a symmetric $RuO_2$/LiPON/$RuO_2$ structure clearly demonstrates the cyclibility dependence on the microstructure of the $RuO_2$ electrode. Using both glancing angle x-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the microstructure of the $RuO_2$ electrode was dependent on the oxygen flow ratio. In addition, x- ray photoelectron spectroscopy(XPS) examination shows that the Ru-O binding energy is affected by increasing oxygen flow ratio. Furthermore, TEM and AES depth profile analysis after cycling demonstrates that the interface layer formed by interfacial reaction between LiPON and $RuO_2$ act as a main factor in the degradation of the cyclibility of the thin film micro-supercapacitor.