• Title/Summary/Keyword: 다중 전극

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정전구동 방식의 연동형 마이크로펌프의 제작

  • Hong, Pyo-Hwan;Jeong, Dong-Geon;Gong, Dae-Yeong;Pyo, Dae-Seung;Lee, Jong-Hyeon;Lee, Dong-In;Jo, Chan-Seop;Kim, Bong-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.448-448
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    • 2013
  • 최근 생물학적 분석 기구에서 시료를 처리, 분리, 검출, 샘플링 또는 분석하기 위해 사용되는 마이크로펌프(Micropump)에 대한 관심이 높아지고 있다. 또한 전자소자의 성능과 신뢰성의 증진을 위한 전자소자의 열 문제를 해결하기 위해 냉각장치로 마이크로 펌프가 적용되기도 한다. 그 외에도 마이크로펌프는 다양한 분야에 응용이 가능하다. 마이크로펌프는 작동 방식에 따라 압전형, 공압형, 열공압형, 연동형 등의 여러 종류로 분류되고 있다. 그중에서도 최근에는 연동형 마이크로 펌프의 개발이 각광받고 있다. 기존의 연동형 펌프들은 다중 챔버를 가지고 있으며, 각각의 챔버 내에서 Dead volume이 많이 발생할 뿐만 아니라 이상적인 연동운동과는 차이가 많이 나는 문제점을 가지고 있다. 또한 압전방식과 열공압방식은 느린 응답성으로 인해 효율적인 유체 이동이 어렵다. 본 논문에서는 이상적인 연동운동을 구현하기 위하여 기존의 연동형 펌프의 단점을 보완하고, 하나의 챔버에 다중전극 구조를 가지는 정전기력방식의 연동형 펌프를 개발하였다. 정전기력방식으로 펌프를 구동함으로써, 저전력으로 펌프구동이 가능하며, 하나의 챔버에 다중전극을 설치함으로써 이상적인 연동운동을 재현하였다. 그리고 Dead volume을 최소화 하였다. 또한, 빠른 반응속도로 인해 효율적인 유체 이동을 실현시킬 수 있었다. 본 연구에서 제안된 마이크로 펌프의 구성은 크게 챔버, 박막, Inlet/outlet hole으로 구성되었다. 챔버는 Si-wafer에 wet etching 공정으로 제작 하였고 그 위에 알루미늄 박막을 200 nm 증착시켰다. 챔버는 가로 32 mm, 세로 5 mm, 깊이는 $15{\mu}m$, 부피는 $200{\mu}l$으로 제작되었다. 박막은 폴리이미드(polyimide)를 사용하여 $3{\mu}m$의 두께로 제작 되었으며, 폴리이미드 박막 사이에는 200 nm 두께의 4개의 알루미늄 박막 전극을 삽입시켰다. 삽입된 4개의 전극에 개별적인 전기신호를 보냄으로써 연동운동이 가능하다. Inlet/outlet hole은 직경 2 mm의 크기로 제작되었으며, 튜브를 연결하여 유체가 흐를 수 있는 체널을 형성하였다. 제작된 마이크로 펌프의 구동전압은 115 V이며, 인가되는 주파수를 1 Hz~100 KHz까지 변화시켜 유량을 측정하였다. 작동 유체는 공기이며, 유량측정은 튜브 내에 물방울을 삽입하여 시간에 따른 이동거리를 관측하였다. 측정결과 2.2 KHz에서 2.4 mm/min의 가장 높은 유량을 확인할 수 있었다. 본 연구를 통해 제안된 연동형 마이크로펌프는 이상적인 연동운동이 가능함으로써 기존의 연동형 방식의 문제점을 보완하였으며, 생명과학, 의학, 화학 등의 분야에서 적용이 가능하리라 기대된다.

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Micromachined DNA Manipulation Device Using Circular Multi-Electrodes (원형 다중전극을 이용한 DNA 조작소자)

  • Moon, Sang-Jun;Yun, Jae-Young;Lee, Seung-S.;Nam, Hong-Kil;Chi, Yeun-Tae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.7
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    • pp.1071-1075
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    • 2003
  • In this paper, we present a DNA manipulation device in the reaction chamber, which consists of a center electrode and circular outer electrodes of a reaction unit. The charged bio-molecules, DNA, are manipulated by the charge of the electrode in reaction unit. Controlling the induced dynamic electric field between the center electrode and the outer electrodes, concentration / repulsion / manipulation of bio-molecules are enabled at a periphery of electrode. Concentration of the fluorescent DNA at the center electrode is observed by applying +2V. Subsequently, applying -2V, the concentrated DNA is repelled rapidly from the center electrode, which makes dispersion completely in 0.5second. Furthermore, repeated applying +1V/-1V every 5 seconds at each outer electrode, we can circulate the DNA. We also investigate a micro-heater and sensor for DNA manipulation and reaction temperature. The coefficient of heat-resistance and heater temperature characteristic is 0.0043 and 100$^{\circ}C$/sec, respectively.

Magnetohydrodynamic (MHD) Micromixer Using Multi-Vortical Flow (다중 와류 유동을 이용한 자기유체역학 (MHD) 마이크로 믹서)

  • Yang, Won-Seok;Kim, Dong-Sung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.34 no.1
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    • pp.53-59
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    • 2010
  • In this paper, we propose a novel chaotic micromixer of which mixing mechanism is based upon magnetohydrodynamic (MHD) multi-vortical flow generation in a simple straight microchannel. In the microchannel of the micromixer has electrodes patterned on two side walls and bottom wall. Lorentz forces are variously induced by changing applied voltages at the patterned electrodes in order to pump and mix conductive fluids in the microchannel. Three-dimensional computational fluid dynamics simulations were conduced to characterize mixing behaviors inside the MHD micromixer. The mixing efficiencies were also evaluated for the various flow conditions.

MDOF Ionic-Polymer-Metal-Composite Actuators with Selectively Grown Multiple Electrodes (선택적으로 성장 시킨 다중 전극판을 갖는 다자유 IPMC 작동기)

  • Jeon, Jin-Han;Oh, Il-Kwon
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2008.04a
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    • pp.294-298
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    • 2008
  • The ionic polymer-metal composite actuators with selectively grown multiple electrodes were developed to mimic the swimming locomotion of a fish. The developed method is based on combining electroplating with the electroless chemical reduction using the patterned mask. The advantages of this fabrication method are that the initial compositing between the polymer and platinum particles can be assured by the chemical reduction method, and the thickness of each electrode can be controlled easily and rapidly by electroplating. By using the fabricated actuator with a multiple degree of freedom, the oscillatory wave of the flexible membrane actuator was generated and a twisting motion was also realized to verify the possibility of mimicking the fish-like locomotion. The frequency response function was analyzed to investigate the natural frequency and the damping factor by a mechanical shaker and direct electrical excitation through the swept-sine method. Present results show that this novel method can be a promising technique to easily pattern each of multiple electrodes and to implement the biomimetic motion of the polymer actuators with good mechanical bending performance.

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The fabrication and the analysis on a communication device for bilateral (양방향 통신 장치 제작 및 분석)

  • You, Il-hyun
    • Journal of Convergence for Information Technology
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    • v.8 no.2
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    • pp.83-90
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    • 2018
  • We have studied the optimal conditions for design and development on the communication device for a bilateral, and it's electrodes for transmitting electric signal are constructed on the $36^{\circ}$ rotated $LiTaO_3$ substrate by evaporating Al-Cu(W 30%) alloy. At first, we manufactured three kind of samples using this method, and selected two samples as similar with frequency, ripple and passband characteristics, and then we connect two samples by series in order to make bilateral devices. As results, we obtained that the electrode structure has better characteristics then the others, when it's width of reflector and electrode are $1{\lambda}/4$, $1{\lambda}/12$ respectively, and it's frequency is approximately 190.3MHz. Near future, I hope to help the manufacture for communication devices for the multi-channel and the duplex filter.

Dopamine determination using a biosensor based on multiwall carbon nanotubes paste and burley tobacco-peroxidase (담배 잎-peroxidase와 다중벽 탄소 나노튜브를 이용한 dopamine의 정량)

  • Kwon, Hyoshik;Jeon, Byong-Suk;Pak, Yongnam
    • Analytical Science and Technology
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    • v.28 no.2
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    • pp.98-105
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    • 2015
  • The development of an enzymatic biosensor for dopamine determination based on multiwall carbon nanotubes (MWCNTs) and peroxidase obtained from the crude extract of burley tobacco (Nicotiana tabacum L.) was proposed. Peroxidase catalyzes the oxidation of dopamine to dopamine quinone. The influence on the response of analytical parameters of biosensors such as enzyme concentration, dopamine concentration, pH, and phosphate buffer solution concentration were investigated. The analytical parameters obtained, including sensitivity, linearity, and stability, were investigated. The proposed method for dopamine determination presented good selectivity even in the presence of uric acid and ascorbic acid. The sensor presented a higher response for dopamine in 0.010 M phosphate buffer at pH 6.50, with an applied potential of -0.15 V. The detection limit of the electrode was 2.7×10−6 M (S/N = 3) and the relative standard deviation of the measurements, which were repeated 10 times using 5.0×10−2 M dopamine, was 1.3%.

Electrode Fabrication of MWCNT-PDMS Strain Sensors by Wet-etching (습식 식각을 이용한 MWCNT-PMDS 변형율 센서 전극 생성에 관한 연구)

  • Jung, La-Hee;Hwang, Hui-Yun
    • Composites Research
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    • v.34 no.6
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    • pp.387-393
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    • 2021
  • This paper investigated the electrical properties of multiwall carbon nanotube reinforced polydimethylsiloxane (CNT-PDMS) strain sensors with copper electrodes on the wet-etched surface. MWCNT-PDMS strain sensors were fabricated according to the wt% of MWCNT. Surfaces on the electrode area were wet-etched with various etching duration and silver epoxy adhesives were spread on the wet-etched surface. Finally, we attached the copper electrodes to the MWCNT-PMDS strain sensors. We checked the electric conductivities by the two-probe method and sensing characteristics under the cyclic loading. We observed the electric conductivity of MWCNT-PDMS strain sensors increased sharply and the scattering of the measured data decreased when the surface of the electrode area was wet-etched. Initial resistances of MWCNT-PDMS strain sensors were inversely proportion to wt% of MWCNT and the etching duration. However, the resistance changing rates under 30% strain increased as wt% of MWCNT and the etching duration increased. Decreasing rate of the electric resistance change after 100 repetitions was smaller when wt% of MWCNT was larger and the etching duration was short. This was due to the low initial resistance of the MWCNT-PMDS strain sensors by the wet-etching.

Development of Bioelectric Signal Sensor System using Band Type ECG (밴드형 심전도 생체신호 전극시스템의 구현)

  • Kang Sung-Chul;Kim Gi-Ryon;Kim Kwang-Nyeon;Jung Dong-Keun;Kim Min-Sung;Jeong Do-Wun;Jeon Gye-Rok
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2006.05a
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    • pp.1023-1026
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    • 2006
  • There are some cases in trouble with monitoring emergency patient by existing electrode sensor in measuring instrument in home and hospital etc. And there are problem to measure because of coming down electrode in emergency car or vessel of shaking and fat, humidity of patient. In this study, it has designed band-type for patient to put on the breast easily and go around anywhere freely putting band electrode on his body. Gold has used as electrode material in this electrocardiogram because of its excellent electronic resistance peculiarity and no trouble with skin. And it is able to monitor multi-body-signal by additional design of periphery temperature. There are good results of body signal transmission in the breast or the rib, and get a little body signal in abdomen. We get a result it is better case of gold than usual electrode on signal detection, and know usual electrode was disposable, but we have more correct result from gold electrode sensor, being semi-permanent ana. great contact ability even if movement.

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Effects of the Graphene Oxide on Glucose Oxidase Immobilization Capabilities and Sensitivities of Carbon Nanotube-based Glucose Biosensor Electrodes (그래핀 옥사이드가 탄소나노튜브기반 바이오센서 전극의 포도당 산화효소 담지능및 민감도에 미치는 영향)

  • Park, Mi-Seon;Kim, Do Young;Jung, Min-Jung;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.26 no.1
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    • pp.47-52
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    • 2015
  • To improve both the GOD immobilization capability and sensitivity of MWCNTs-based biosensor electrode, the electrode was prepared by adding different quantities of GO. The addition of GO increased hydrophilicity and the surface free energy of electrodes for glucose sensing as well as the dispersion of MWCNTs. In addition, the GOD immobilization capability was enhanced and the sensitivity was improved up to $121{\mu}A\;mM^{-1}$ even though having a high $K_m$ value (0.105) when adding 0.05 g GO to 0.05 g MWCNTs. These experimental results were attributed to the fact that the improvement in dispersion stability for MWCNTs, hydrophilicity, and surface free energy of electrode surface due to the addition of GO affected GOD immobilization capability.

A Study on the Development of a Novel Pressure Sensor based on Nano Carbon Piezoresistive Composite by Using 3D Printing (3D 프린팅을 활용한 탄소 나노 튜브 전왜성 복합소재 기반 압력 센서 개발 연구)

  • Kim, Sung Yong;Kang, Inpil
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.41 no.3
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    • pp.187-192
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    • 2017
  • This paper presents an ongoing study to develop a novel pressure sensor by means of a Nano Carbon Piezoresistive Composite (NCPC). The sensor was fabricated using the 3D printing process. We designed a miniaturized cantilever-type sensor electrode to improve the pressure sensing performance and utilized a 3D printer to build a small-sized body. The sensor electrode was made of 2 wt% MWCNT/epoxy piezoresistive nano-composite, and the sensor body was encapsulated with a pipe plug cap for easy installation to any pressure system. The piezoresistivity responses of the sensor were converted into stable voltage outputs by using a signal processing system, which is similar to a conventional foil strain gauge. We evaluated the pressure-sensing performances using a pressure calibrator in the lab environment. The 3D-printed cantilever electrode pressure sensor showed linear voltage outputs of up to 16,500 KPa, which is a 200% improvement in the pressure sensing range when compared with the bulk-type electrode used in our previous work.