• Title/Summary/Keyword: 다이아몬드 선삭

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LED Beam Shaping and Fabrication of Optical Components for LED-Based Fingerprint Imager (LED 빔조형에 의한 초소형 이미징 장치의 제조 기술)

  • Joo, Jae-Young;Song, Sang-Bin;Park, Sun-Sub;Lee, Sun-Kyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.10
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    • pp.1189-1193
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    • 2012
  • The Miniaturized Fingerprint Imager (MFI) is a slim optical mouse that can be used as an input device for application to wireless portable personnel communication devices such as smartphones. In this study, we have fabricated key optical components of an MFI, including the illumination optical components and imaging lens. An LED beam-shaping lens consisting of an aspheric lens and a Fresnel facet was successfully machined using a diamond turning machine (DTM). A customized V-shaped groove for beam path banding was fabricated by the bulk micromachining of silicon that was coated with aluminum using the shadow effect in thermal evaporation. The imaging lens and arrayed multilevel Fresnel lenses were fabricated by electron beam lithography and FAB etching, respectively. The proposed optical components are extremely compact and have high optical efficiency; therefore, they are applicable to ultraslim optical systems.