• Title/Summary/Keyword: 노광량

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A new analysis on the bleaching mechanism and the catalysis of exposure in holographic diffraction grating fabricated with silver salt (은염 홀로그래픽 회절격자의 제작에서 표백과 노광량의 촉매작용에 관한 새로운 해석)

  • Yun, Byeong-Ho;Kim, Nam
    • Korean Journal of Optics and Photonics
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    • v.7 no.4
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    • pp.314-321
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    • 1996
  • In this paper, the chemical process of each step in fabricating the holographic phase diffraction grating with silver salt sensitive materials has been studied in detail. A new analysis of the bleaching methods have been made through the study. The result shows that among the types of bleaching methods, the reversal bleach can not be reacted chemically. And the experiments about the chemical reactions, the characteristics of the reaction products and the refractive modulation types by the bleaching methods have been done to prove the theory. It is investigated that the exposure acts as the catalyst of developing reaction and affects the developing reaction time conspicuously. At the optimum developing reaction times, which could be taken from the experiments, the holographic diffraction gratings with high diffraction efficiency over 70% could be obtained in the range of the exposure quantity 50~350 [$\mu$J/ $\textrm{cm}^2$]. From the experiments about the correlation of the chemical processing conditions of the composition of developers, the exposure, and the developing reaction time, it has proved that the enhancement of the diffraction efficiency is impossible in the limited exposure energy and conventional constant chemical reaction time.

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A Study on the Measurement of Dill and Mack Model Parameters of a Photoresist (포토레지스트의 Dill 및 Mack 모델 파라미터 측정에 관한 연구)

  • Park, Seungtae;Kwon, Haehyuck;Park, Jong-Rak
    • Korean Journal of Optics and Photonics
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    • v.33 no.6
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    • pp.324-330
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    • 2022
  • We measured the Dill and Mack model parameters that determine the exposure and development characteristics of photoresists, respectively. First, photoresist samples were prepared while altering the exposure dose, and changes in transmittance were measured. Analyzing these results, the Dill model parameters A, B, and C were determined. In particular, the exact solution of the Dill model equation was used to determine the C parameter. In addition, changes in thickness were measured as a function of development time for different exposure doses, and the Mack model parameters Rmin, Rmax, a, and n were determined using the results. We also determined parameter values for the reduced Mack model that uses only three parameters, Rmin, Rmax, and n. The root mean square error between the model predictions and the measured values for the photoresist thickness was found to increase slightly compared to the case using the original Mack model with four parameters.

Dynamic characteristics and diffraction efficiency of reflection grating in photopolymer (Photopolymer를 이용한 반사형 회절격자의 효율 및 동적특성 분석)

  • Choi, Yoon-Sun;Yoon, Byeong-Ho;Kim, Nam
    • Korean Journal of Optics and Photonics
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    • v.9 no.5
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    • pp.315-320
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    • 1998
  • The characteristics and structures of photopolymer are analyzed in this paper, which recently have various applications in optical information processing and optical memory, Especially, Du Pont's photopolymer OmniDex 706 reflection film is used in many experiments of different exposures and incident angles, and analyzed by the diffraction pattern generated by glass plate's reflection beam. With the dark reaction of the monomer in photopolymerization, dynamic parameters are considered due to the variation of exposure time and diffusion time delay after exposure. The performance of diffraction efficiency is improved by 10%, when an exposure time is 6.25 sec, and a diffusion time delay is 2 minute.

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Nano-master fabrication for photonic crystal waveguides (광결정 도파로용 나노 마스터 제작)

  • 최춘기;한상필;정명영
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.288-292
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    • 2003
  • The fabrication of silicon nano-master with pillar structures using E-beam lithography and ICP etching was investigated for application of 2-dimensional polymer photonic crystal waveguides with air hole structures. Pillar structures with square, hexagon, dodecagon and circle were successfully fabricated. The diameters and structures of fabricated pillars were measured by CD-SEM and SPM-AFM. It was found that the optimal dose for complete circle pillar structures was 432 $\mu$C/$\textrm{cm}^2$.

Changes in Transpiration Rates and Growth of Cucumber and Tomato Scions and Rootstocks Grown Under Different Light Intensity Conditions in a Closed Transplant Production System (식물공장형육묘시스템 내 광량에 따른 오이와 토마토 접수 및 대목의 증발산량 및 생육 변화)

  • Park, Seon Woo;An, Sewoong;Kwack, Yurina
    • Journal of Bio-Environment Control
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    • v.29 no.4
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    • pp.399-405
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    • 2020
  • Recently, it is difficult to produce uniform scions and rootstocks with high quality in a greenhouse due to weather extremes. The closed transplant production system is useful for producing scions and rootstocks with desirable morphological characteristics by environment control regardless of weather outside. In this study, we investigated transpiration rates and growth of cucumber and tomato scions and rootstocks grown under different light intensity conditions for precise irrigation control in a closed transplant production system. Hanging system to measure continuously the weight of plug tray consisting of seedlings and substrate with load-cell was installed in each growing bed. Using this system, we confirmed initial wilting point of cucumber and tomato seedlings, and conducted subirrigation when moisture content of substrate was not below 50%. The irrigation time of cucumber scions and rootstocks were 7 and 6 days after sowing, respectively. In tomato scions and rootstocks grown under PPF (photosynthetic photon flux) 300 μmol·m-2·s-1, the irrigation time were 5, 8, 11, and 13 days after sowing. Increasing light intensity increased transpiration rates and differences of transpiration rates by light intensity was higher in tomato seedlings. The growth of cucumber and tomato seedlings was promoted by increasing light intensity, especially, hypocotyl elongation and stem thickening was affected by light intensity. Cumulative transpiration rate of plug tray in cucumber and tomato seedlings was increased by increasing light intensity, and daily transpiration rate per seedling was regressed by 1st-order linear equation with high correlation coefficient. Estimation of transpiration rates by weighing continuously plug tray of vegetable seedlings can be useful to control more accurately irrigation schedule in a closed transplant production system.

Development of photosensitive dielectric paste for micro-via formation (마이크로 비아 형성을 위한 감광성 유전체 페이스트의 개발)

  • Park, Seong-Dae;Yoo, Myong-Jae;Cho, Hyun-Min;Lim, Jin-Kyu;Park, Jong-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.240-244
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    • 2003
  • 후막 리소그라피 기술은 기판 위에 감광성 페이스트를 도포한 후 자외선과 패턴마스크를 사용하는 광식각(photolithography) 방법을 이용하여 세부 패턴을 형성시키는 기술이다, 이 기술은 후막기술로서는 높은 해상도인 선폭 $30{\mu}m$ 이하의 미세도선을 구현할 수 있어, 후막기술을 이용한 고주파 모듈의 제조에 있어서 새로운 대안으로 주목받고 있다. 본 연구에서는 알루미나 기판 상에 수십 ${\mu}m$ 이하의 마이크로 비아를 가지는 유전체 층을 형성시킬 수 있는 저온소결용 감광성 유전체 페이스트를 개발하였다. 저온소결용 유전체 파우더와 폴리머, 모노머, 광개시제 등의 양을 조절하여 마이크로 비아를 형성할 수 있는 최적 페이스트 조성을 연구하였으며, 노광량 및 현상시간과 같은 공정변수가 마이크로 비아의 해상도에 미치는 영향을 평가하였다. 알루미나 기판에 전면 프린팅 한 후 건조, 노광, 현상, 소성 과정을 거쳐 소결전 $37{\mu}m$, 소결후 $49{\mu}m$의 해상도를 가지는 마이크로 비아를 형성할 수 있었다.

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The influence of preparation condition on optical property of sol-gel derived hybrid organic-inorganic silica glass thin films (제작조건에 따른 졸-겔 복합 실리카 박막의 광학적 성질 변화)

  • 정재완
    • Korean Journal of Optics and Photonics
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    • v.11 no.4
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    • pp.255-260
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    • 2000
  • We report that the crack-free organic-inorganic hybrid silica thin films were fabricated by sol-gel process using organometallic compounds as a precursor and that we have established very reproducible fabrication condition with systematic investigation of thickness and refractive index variations for various control parameters, such as, coating type, coating speed, chemical composition, prebake and postbake temperature. Additionally, we measured and compared the change of optical property with the UV exposure dose for three different kinds of photoinitiators. Furthermore, the fabrication of Ix4 MMI optical power splitter using the sol-gel thin film provides the possibility of various applications to the optical waveguide devices. vices.

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The Study on the control of Pattern Linewidth for the Step and Repeat Projection Imaging (스텝 엔드 리피트 설영로광방식의 미세형상 선폭조절에 관한 연구)

  • 황영모;한맥형
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.22 no.4
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    • pp.39-43
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    • 1985
  • The charcterization of optical lithography on the step and repeat projection system is studied. Parameters that influence optical lithography were analyzed and the experiment was performed on the mask of $\pm$ 5rm, the surface flatness. From the experiment, the relationship between linewidth diviation on defocus and linewidth shift on exposure of the small features is obtained. Conditions maintaining good uniformity of small features from these relation-ships is presented.

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