• Journal of the Korean institute of surface engineering
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• v.35 no.6
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• pp.415-421
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• 2002

Ti-Si-N coating layers were codeposited on silicon wafer substrates by a DC reactive magnetron sputtering technique using separate titanium and silicon targets in $N_2$/Ar gas mixtures. The oxidation behavior of Ti-Si-N coating layers containing 4.0 at.%, 10.0 at.%, and 27.3 at.% Si was investigated at temperatures ranging from 600 to $960^{\circ}C$. The coating layers containing 4.0 at.% Si became fast oxidized from $600^{\circ}C$ while the coating layers containing 10.0 at.% Si had oxidation resistance up to $800^{\circ}C$. It was concluded that an increase in Si content to a level of 10.0 at.% led to the formation of finer TiN grains and a uniformly distributed amorphous Si3N4 phase along grain boundaries, which acted as efficient diffusion barriers against oxidation. However, the coating layers containing 27.3 at.% Si showed relatively low oxidation resistance compared with those containing 10.0 at.% Si. This phenomenon would be explained by the existence of free Si which was not nitrified in the coating layers containing 27.3 at.% Si.

• Korean Journal of Materials Research
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• v.4 no.2
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• pp.166-176
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• 1994

Ni base superalloys are composed of solid sohltion hardening elements(Co, Cr. Mo. W and so on) and $\gamma '$ precipitation hardening elements(A1, Ti, Nb, Ta and so on). To Improve the mechanical properties and oxidation resistanre of superalloys, rare earth elements(%r, Hf, Y and so on) are added to the inner substrate, or are used as coating materials. Their pffects on the growth rate and adhes~on of oxide are changed according to the kinds of oxides such as $AI_2O_3$ and $Cr_2O_3$. The effect of yttrium on the oxidation rate, grain size of oxide, internal structure, and crack resistance was investigated for two kinds of Ni-base superalloys. One in AF'115 superalloy containing Hf and the other is MA6000 superalloy containing $Y_2O_3$. They werr owid~zed at high temperature after yttrium surface modification using ion coater. Yttrium coating on the AF115 and MA6000 superalloys results in a marked change in the growth of the inner oxide. For AF115 superalloy, the degree of gram boundary segregation of $Cr_2O_3$, and prefer en^ tial oxidation of Hf are decreased, and the shape of inner oxidation layer was changed from triangle to plate type. For MA6000 superalloy, $Cr_2O_3$ oxide scale was transformed as outer oxidation layer of CrZOI and inner oxidation layer of $Cr_2O_3$.

• Korean Journal of Materials Research
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• v.6 no.7
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• pp.742-751
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• 1996

Ti-48Al(at.%) specimens were coated with Al-21Ti-23Cr(at.%) film by RF magnetron sputtering. Ti-48Al specimen coated at 200, 0.8Pa and 573K showed the best oxidation resistance property in the isothermal oxidation test. Al-21Ti-23Cr film was amophous after depostion, but crystallized and fromed a protective ${Al}_{2}{O}_{3}$ layer on the surface during oxidation. Ti-48Al specimens coated at 573K have been sassessed by isothermal oxidation test for 100 hours at 1073K, 1173K and 1273K. The mass gain curves showed that parabolic stage continued at al tested temperature range in isothermal oxidation test, and the excellent oxidation resistance is attriutable to the formation of a protective ${Al}_{2}{O}_{3}$ layer on the surface of Al-21Ti-23Cr film. After oxidation test at 1273K, the matrix of Al-21Ti-23Cr film had transformed into TiAlCr phase due to the depletion of Al during oxidation and the diffusion of Ti from the substrate, and the extent of mass gain of the specimen increased compared with that of specimens tested at lower temperature.