• Title/Summary/Keyword: 나노 개구

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FDTD Simulation of Integrated Nano-probe Slide (나노 탐침 슬라이드에 대한 FDTD 시뮬레이션)

  • 채규민;이현호;임상엽;박승한
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.07a
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    • pp.184-185
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    • 2003
  • 근접장 광학 현미경에 사용되는 다양한 탐침 중 가장 널리 사용되는 근접장 탐침은 잡아끌거나 식각하는 방식으로 첨단부를 뽀족하게 한 후 수십 내지 수백 나노미터 직경의 개구 만을 남겨두고 금속 코팅한 광섬유 탐침이다. 하지만 이렇게 제작되는 광섬유 탐침에는 뽀족한 기하학적인 모양과 깨지기 쉬운 재질 특성으로 인하여 내구성이 떨어지고 작은 개구 각도로 인하여 광 전달율이 매우낮으며 탐침을 근접장 영역에 진입시킨 후 시료와 탐침 간의 거리를 유지시키기 위해서 매우 복잡한 거리 유지 장치가 필요하다는 단점들이 있다. (중략)

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Nano-size Patterning with a High Transmission C-shaped Aperture (고 투과 C 형 개구를 이용한 나노 크기 패턴 구현)

  • Park, Sin-Jeung;Kim, Yong-Woo;Lee, Eung-Man;Hahn, Jae-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.11
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    • pp.108-115
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    • 2007
  • We have designed a high transmission C-shaped aperture using finite differential time domain (FDTD) technique. The C-shaped aperture was fabricated in the aluminum thin film on a glass substrate using a focused ion beam (FIB) milling. Nano-size patterning was demonstrated with a vacuum contact device to keep tight contact between the Al mask and the photoresist. Using 405 nm laser, we recorded a 50 nm-size dot pattern on the photoresist with the aperture and analyzed the spot size dependent on the dose illuminated on the aperture.

Nano-Aperture Grating Structure Design in Ultra-High Frequency Range Based on the GA and the ON/OFF Method (GA 및 ON/OFF 방법 기반의 초고주파수 영역의 나노개구 격자의 구조설계)

  • Song, Sung-Moon;Yoo, Jeong-Hoon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.7
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    • pp.739-744
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    • 2012
  • The genetic algorithm (GA) is regarded as one of the best ways for determining a global solution. Because it does not require calculating the design sensitivity differently from the ordinary gradient-based method, it is appropriate for the design problem in the ultra-high frequency range; the ordinary gradient-based method has difficulty in calculating the sensitivity in this range. This paper deals with nano-aperture grating topology optimization based on the GA and the ON/OFF method. The objective of this study is to maximize the transmittance in the measuring area. The simulation and optimization processes are carried out by using the commercial package COMSOL associated with Matlab programming. The final optimal design gives around 21% performance improvement, compared with the initial model.

Nanoaperture Design in Visible Frequency Range Using Genetic Algorithm and ON/OFF Method Based Topology Optimization Scheme (유전알고리즘 및 ON/OFF 방법을 이용한 가시광선 영역의 나노개구 형상의 위상최적설계)

  • Shin, Hyun Do;Yoo, Jeonghoon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.12
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    • pp.1513-1519
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    • 2013
  • A genetic algorithm (GA) is an optimization technique based on natural evolution theory to find the global optimal solution. Unlike the gradient-based method, it can design nanoscale structures in the electric field because it does not require sensitivity calculation. This research intends to design a nanoaperture with an unprecedented shape by the topology optimization scheme based on the GA and ON/OFF method in the visible frequency range. This research mainly aims to maximize the transmission rate at a measuring area located 10nm under the exit plane and to minimize the electric distribution at other locations. The finite element analysis (FEA) and optimization process are performed by using the commercial package COMSOL combined with the Matlab programming. The final results of the optimized model are analyzed by a comparison of the electric field intensity and the spot size of near field with those of the initial model.

Resonant Transmission of a Rectangular Waveguide Probe with H-type Small Aperture (H-형태 소형 개구를 가진 직사각형 도파관 탐침의 공진 투과)

  • Ko, Ji-Hwan;Cho, Young-Ki
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.24 no.12
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    • pp.1198-1204
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    • 2013
  • As a microwave near field probe for near field scanning optical microscope(NSOM) system, H-shaped(ridge type) small aperture is proposed and its performances from the viewpoints of the transmission efficiency(transmission cross section) and spatial confinement(beam spot size) are compared with those of the previous narrow rectangular aperture type. While the transmission efficiencies are comparable to each other for the two structures, the transmitted beam spot size for the proposed H-shaped aperture is much smaller than that for the previous rectangular aperture. This strong point of the H-shaped aperture is expected to significantly improve near-field optical applications such as optical data storage, nanolithography and nanomicroscopy. It is also observed that the transmission efficiency can be improved if the coupling aperture is implemented in the type of the transmission cavity.

Fabrication of Nano-slide Integrated Nano-probe for Near-field Optical Measurement (근접장 측정을 위한 나노 슬라이드 결합 나노 탐침의 제작)

  • 임상엽;최문구;박승한
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.124-125
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    • 2002
  • 근접장 광학 탐침은 근접장 광학 현미경의 핵심요소이다. 매우 다양한 탐침이 제작되어 사용되고 있지만 이 가운데에서 실제로 널리 사용되는 근접장 탐침은 잡아끌거나 식각하는 방식으로 첨단부를 뽀족하게 한 후 수십 내지 수백 나노미터 직경의 개구 만을 남겨두고 금속 코팅한 광섬유 탐침이다. 그러나 광섬유 근접장 탐침은 잘 알려져 있는 몇가지 단점이 있다. 우선 20~30$^{\circ}$ 의 각도로 뽀족해지는 기하학적인 모양과, 깨지기 쉬운 유리 재질로 제작된 데 기인하여 내구성이 떨어진다. (중략)

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Design of a High-Transmission C-Shaped Nano-Aperture in a Perfectly Electric Conductor Film (완전도체 박막에서 고 투과율 C형 나노 개구 설계)

  • Park Sin-Jeung;Hahn Jae-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.6 s.183
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    • pp.160-165
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    • 2006
  • We have designed a high-transmission nano aperture in a perfect electric conductor film with the incident beam of 532 nm wavelength. The aperture basically has a C-shape and is known to produce a bright spot nearby the aperture in small size less than diffraction limit. The bright spot is strongly coupled with the local plasmon excited through the aperture hole. The characteristics of transmission and peak power of the aperture output were calculated using finite differential time domain (FDTD) technique, and the geometry of the aperture was determined to get a maximum transmission and peak power. To find the effect of the surface plasmon induced near by the aperture, we calculated the variations of the transmittance and the beam sizes by changing the size of the input beam irradiated on the aperture.