• Journal of the Microelectronics and Packaging Society
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• v.28 no.3
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• pp.33-38
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• 2021

Recently, rollable and foldable displays are attracting great attention in the flexible display market due to their excellent form factor. To predict and prevent the mechanical failure of the display panels, it is essential to accurately understand the mechanical properties of brittle SiN_x thin films, which have been used as an insulating film in flexible displays. In this study, tensile properties of the ~130 nm- and ~320 nm-thick SiN_x thin films were successfully measured by coating a ~190 nm-thick organic nano-support-layer (PMMA, PS, P3HT) on the fragile SiN_x thin films and stretching the films as a bilayer state. Young's modulus values of the ~130 nm and ~320 nm SiN_x thin films fabricated through the controlled chamber pressure and deposition power (A: 1250 mTorr, 450 W/B: 1000 mTorr, 600 W/C: 750 mTorr, 700 W) were calculated as A: 76.6±3.5, B: 85.8±4.6, C: 117.4±6.5 GPa and A: 100.1±12.9, B: 117.9±9.7, C: 159.6 GPa, respectively. As a result, Young's modulus of ~320 nm SiN_x thin films fabricated through the same deposition condition increased compared to the ~130 nm SiN_x thin films. The tensile testing method using the organic nano-support-layer was effective in the precise measurement of the mechanical properties of the brittle thin films. The method developed in this study can contribute to the robust design of the rollable and foldable displays by enabling quantitative measurement of mechanical properties of fragile thin films for flexible displays.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.131-131
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• 2016

기원전 5000년 이집트에서부터 시작된 도금은 시간이 지남에 따라 점점 발전하여, 1900년대에 들어 전기를 이용한 도금공정이 개발되었고, 현재 뿌리산업으로써 각종 제조업에 널리 이용되고 있다. 도금 공정은 금속을 부식으로부터 보호하고, 제품의 심미성과 기능성, 생산성 등을 높이기 위해 주로 이용된다. 전주도금 공정은 완벽하게 동일한 형태의 생산품을 다량으로 제작 할 수 있기 때문에, 그 높은 생산성으로 주목 받고 있다. 특히, 나노/마이크로 크기의 정밀 소자 등을 가공하는 차세대 기술인 LIGA공정과 접목이 가능하다는 장점이 있다. 몰드를 이용하여 복제하는 방식인 전주 도금은 도금공정이 끝난 후 몰드와 완성된 제품을 분리해내는 추가공정이 필연적으로 발생하게 되는데, 둘 사이의 접착력을 낮추기 위하여 몰드의 표면에 이형박리제를 도포하게 된다. 이형박리제로는 전기가 잘 흐르면서 접착력이 낮은 이산화 셀렌이나 중크롬산이 주로 이용되지만, 원활한 박리를 위해서는 그 두께가 30 um 이상 확보되어야 하기 때문에 정밀한 미세구조 전주도금이 어렵다는 문제점이 있다. 또한 이와 같은 화학 약품들은 매우 유독하기 때문에 추가적인 폐수 처리 공정이 필요하며, 작업자의 안전을 위협하고 심각한 환경 오염을 초래한다는 추가적인 문제가 발생한다. 따라서, 매우 얇고 친 환경적이며 안전한 전주도금 이형박리제에 대한 연구가 요구되고 있다. 본 연구에서는 전주도금 몰드로 사용한 구리의 표면에 TCVD를 이용하여 단일 층 그래핀을 성장시킨 후, 그래핀이 코팅된 몰드에 구리를 전주도금하여 박리하였다. 박리 후 그래핀은 몰드에 손상 없이 남아있는 것을 Raman microscopy를 통해서 확인하였고, 몰드와 그래핀 사이의 접착력 (약 $0.71J/m^2$)에 비해 그래핀과 전주도금 샘플간에 낮은 접착력 (약 $0.52J/m^2$)을 갖는 것을 확인하였다. 이와 같이 낮은 접착력을 통해 박리 시 표면구조의 손상 없이 정밀한 구조의 미세 패턴구조를 형성할 수 있었다. 전주도금을 이용한 전극 형성과 고분자와의 융합을 통해 유연기판을 제작하여 bending 실험을 진행하였다. $90^{\circ}$의 bending 각도로 10000회 이하에서는 저항의 변화가 없었고, LED chip을 mounting한 후 곡률반경 4.5 mm까지 bending을 진행하여도 이상 없이 LED가 발광하는 것을 확인하였다. 위와 같은 전주도금 공정을 이용하여 고집적 전자기기, 광학기기, 센서기기 등의 다양한 어플리케이션의 부품제조에 활용될 수 있을 것으로 기대한다.

• Membrane Journal
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• v.24 no.5
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• pp.409-415
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• 2014

This study is aimed to separate propylene and propane using membrane process instead of NCC(Naphtha Cracking Center) $C_3$ splitter. Membrane process is a low energy consumption and eco-friendly process while $C_3$ splitter requires high energy consumption in petrochemical processes. In this study, high performance facilitated transport membrane (FTM) is used for propylene/propane separation. FTM module was prepared on top of porous polyetherimide hollow fiber using PVP/$AgBF_4$/TCNQ. We developed simulation program predicting the membrane separation properties under operation conditions. Separation properties of FTM module for propylene and propane were obtained from the simulation program based on the pure gas permeation data. Based on these results, it is predicted that an one-stage membrane process provides 99.5% of propylene at permeate side from a binary gas mixture of 95/5 vol% $C_3H_6$ / vol% $C_3H_8$ supplied as a feed gas.

• Membrane Journal
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• v.28 no.1
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• pp.1-20
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• 2018

Fresh water is an important resource for humans, and pressure-driven membrane technology has been widely known as an energy-efficient method to obtain water resource. However, membrane fouling phenomenon, which is one of the major issue during operation, deteriorates membrane permeability. These fouling is usually affected by interaction between surface of membrane and various foulants, therefore, modification of membrane's surface is one of the methods to improve fouling-resistance. This review focuses on the method to modify surface of pressure-driven membranes such as microfiltration (MF), ultrafiltration (UF), nanofiltration (NF), and reverse osmosis (RO). Specifically, there are two different surface modification methods: (1) adsorption and coating as the physical modification methods, (2) cross-linker, free radical polymerization (FRP), atom transfer radical polymerization (ATRP), plasma/UV-induced polymerization as the chemical modification methods. This review introduces the physico - chemical surface modification methods reported in recent papers and suggests research directions for membrane separation which can increase membrane fouling resistance.

• Journal of Korean Ophthalmic Optics Society
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• v.10 no.3
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• pp.193-203
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• 2005

Highly c-axis oriented nanocrystalline ZnO thin films on silica glass substrates were prepared by spin coating-pyrolysis process with a zinc naphthenate precursor. Only the XRD intensity peak of (002) phase was observed for all samples. With an increase in heat treatment temperature, the peak intensity of (002) phase increases. No significant aggregation of particle was present. From scanning probe microscopy analyses, three-dimensional grain growth, which was thought to be due to inhomogeneous substrate surface and c-axis oriented grain growth of the ZnO phase, was independent on heal-treatment temperature. Highly homogeneous surface of the highly-oriented ZnO film was observed at $800^{\circ}C$. All the films exhibited a high transmittance (above 80%) in visible region except film heat treated at $1000^{\circ}C$, and showed a sharp fundamental absorption edge at about $0.38{\sim}0.40{\mu}m$. The estimated energy band gap for all the films were within the range previously reported for films and single crystal. ZnO films, consisting of densely packed grains with smooth surface morphology were obtained by heat treatment at $600^{\circ}C{\sim}800^{\circ}C$, expected to be ideal for practical application, such as transparent conductive film and optical device.

• Journal of Energy Engineering
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• v.20 no.2
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• pp.103-108
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• 2011

$Li_2MnSiO_4$/C was synthesized by solid state reaction and solution synthesis with sucrose for carbon source. The X-ray diffraction patterns of solid state reaction indicates small amount of impurities. By FE-SEM and HR-TEM, solution synthesis comprised several tens of nanometer comparing to 500~600 nm of $Li_2MnSiO_4$/C prepared by solid state reaction. The $Li_2MnSiO_4$/C prepared by solution synthesis show better electrochemical performance than solid state reaction. The first charge-discharge capacity are 236, 189 mAh/g respectively by solution synthesis. But its cycle performance was poor as yet and its capacity retention was 62% after 10 cycles.

• Korean Chemical Engineering Research
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• v.54 no.3
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• pp.410-418
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• 2016

In this study, we prepared electrically conducting composites using epoxy resin of diglycidyl ether of bisphenol A (DGEBA) as a matrix, triethylenetetramine (TETA) as a hardener and nickel powder or multi-walled carbon nanotubes (MWCNTs) grafted with $-NH_2$ groups (MWCNT-$NH_2$) as electrically conducting fillers. Electrical conductivity of composite films were measured by coating on the slide glass with a doctor blade. We measured modification reactions of MWCNT and reaction of MWCNT-$NH_2$ with DGEBA epoxy resin by fourier transform infrared spectrometer (FTIR), thermogravimetric analyzer (TGA) and elemental analyzer (EA). Morphology of composites was investigated by scanning electron microscope (SEM) and sheet resistances of composites were measured by 4-point probe. We found $(9.87{\pm}1.09){\times}10^4{\Omega}/sq$ of sheet resistance for epoxy composite containing both 40 wt% nickel powder and 0.5 wt% of MWCNT-$NH_2$ as fillers, equivalent to epoxy composite containing 53.3 wt% nickel powder only as a filler.

• Korean Chemical Engineering Research
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• v.53 no.1
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• pp.78-82
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• 2015

Hollow silica particles were prepared using sodium silicate and organic templates. Polystyrene latex (PSL) particles produced by dispersion polymerization were used as organic templates. PSL particles ranged from $1{\mu}m$ to $3{\mu}m$ in diameter were synthesized by adjusting the amount of 2,2'-azobisisobutyronitrile (AIBN). The PSL/$SiO_2$ core-shell particles were prepared by coating of silica nanoparticles originated from sodium silicate using sol-gel method. The organic templates were removed by the organic solvent, tetrahydrofuran (THF). Morphology of hollow silica particles was investigated with respect to types of the reaction medium and pH during the process. By changing the solvent from ethanol to water, hollow silica particles were successfully formed. Hollow silica particles with the uniform shell thickness were produced at low pH as well. The reflectivity of the as-prepared silica particles was measured in the range of the wavelength of UV and visible light. Hollow silica particles showed much better reflective properties than the commercial light reflector, Insuladd.

• Applied Chemistry for Engineering
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• v.29 no.5
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• pp.533-540
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• 2018

Graphene has been reported to be an excellent lubricant additive that reduces friction and wear when coated on the surface of various materials or when dispersed in lubricants as an atomic thin material with the low surface energy. In this study, alkyl functionalized graphene oxide (FGO) nanosheets for oil-based lubricant additives were prepared by using three types of alkyl chloride chemicals (butyl chloride, octyl chloride, and tetradecyl chloride). The chemical and structural properties of the synthesized FGOs were analyzed by Fourier transform infrared (FT-IR), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), Raman spectroscopy, scanning electron microscope (SEM), and transmission electron microscope (TEM). The synthesized FGOs were dispersed at 0.02 wt% in PAO-0W40 oil and its tribological characteristics were investigated using a high frequency friction/wear tester. The friction coefficient and the wear track width of poly alpha olefin (PAO) oil added with FGO-14 were tested by a ball-on-disk method, and the measured results were reduced by ~5.88 and ~3.8%, respectively compared with those of the conventional PAO oil. Thus, it was found that the wear resistance of PAO oil was improved. In this study, we demonstrated the successful functionalization of GO as well as the improvement of dispersion stability and tribological characteristics of FGOs based on various alkyl chain lengths.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.5
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• pp.471-478
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• 2010

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different from the corresponding bulk properties and thus there has been a strong need for the development of a reliable test method to measure the mechanical properties of a thin film. We have developed an alternative and convenient test method to overcome the limitations of previous membrane deflection experiment and uniaxial tensile test by adopting a white light interferometer having sub-nanometer out-of-plane displacement resolution. The freestanding aluminium specimens are tested to verity the effectiveness of the test method developed and get the tensile properties. The specimens are 0.5 rum wide, $1{\mu}m$ thick and fabricated through MEMS processes including sputtering. 1 to 5 specimens are fabricated on Si dies. The membrane deflection experiments are carried out by using a homemade tester consisted of a motor-driven loading tip, a load cell, and 6 DOF alignment stages. The test system is compact enough to set it up beneath a commercial white light interferometric microscope. The white light fringes are utilized to align a specimen with the tester. The Young's modulus and yield point stress of the aluminium film are 62 GPa and 247 MPa, respectively.