• Title/Summary/Keyword: 나노정밀도

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The Surface Treatment Effect for Nanoimprint Lithography using Vapor Deposition of Silane Coupling Agent (나노임프린트 공정에서 실란커플링제 기상증착을 이용한 표면처리 효과)

  • Lee, Dong-Il;kim, Ki-Don;Jeong, Jun-Ho;Lee, Eung-Sug;Choi, Dae-Geun
    • Korean Chemical Engineering Research
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    • v.45 no.2
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    • pp.149-154
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    • 2007
  • Nanoimprint lithography (NIL) is useful technique because of its low cost and high throughput capability for the fabrication of sub-micrometer patterns which has potential applications in micro-optics, magnetic memory devices, bio sensors, and photonic crystals. Usually, a chemical surface treatment of the stamp is needed to ensure a clean release after imprinting and to protect the expensive original master against contamination. Meanwhile, adhesion promoter between resin and substrate is also important in the nanoscale pattern. In this work, we have investigated the effect of surface treatment using silane coupling agent as release layer and adhesion promoter for UV-Nanoimprint lithography. Uniform SAM (self-assembled monolayer) could be fabricated by vapor deposition method. Vapor phase process eliminates the use of organic solvents and greatly simplifies the handling of the sample. It was also proven that 3-acryloxypropyl methyl dichlorosilane (APMDS) could strongly improve the adhesion force between resin and substrate compared with common planarization layer such as DUV-30J or oxygen plasma treatment.

Preparation of PVdF/GO Composite Nanofibrous Flat Membrane and its Permeation Characteristics in Activated Sludge (PVdF/GO 복합 나노섬유 평막의 제조 및 활성슬러지 내 투과특성)

  • Won, In Hye;Jang, Wongi;Chung, Kun Yong;Byun, Hongsik
    • Membrane Journal
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    • v.25 no.1
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    • pp.67-74
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    • 2015
  • In this study the nanofiber was prepared by electrospinning method with polyvinylidene fluoride (PVdF) and a completely dispersed solution of graphene oxide (GO) in the mixed solvent of dimethylformamide (DMF) and acetone. The $0.4{\mu}m$ pore size microfiltration flat membrane was made by increasing layers of the PVdF/GO composite nanofiber. Also, transmembrane pressure (TMP) was measured in order to evaluate fouling of the PVdF/GO composite membrane which was introduced GO reducing biological fouling with the intrinsic antibacterial characteristics. The permeate experiments were carried out simultaneously for the PVdF/GO and commercialized CPVC (chlorinated polyvinyl chloride) flat membranes with $0.01m^2$ effective area in the activated sludge solution of MLSS 4,500 mg/L. TMP of PVdF/GO membrane decreased up to 79% lower than that of CPVC for $10L/m^2{\cdot}h$ permeate flux without air supply. Also, for the case of run/stop operational mode, TMP of PVdF/GO membrane decreased up to 69% lower than that of CPVC for $10L/m^2{\cdot}h$.

Surface Patterning and Characterization of Food Packaging Films Using Femtosecond Laser (펨토초 레이저를 이용한 식품포장 필름의 표면 패터닝 및 특성)

  • Youngjin Cho
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.29 no.2
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    • pp.111-118
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    • 2023
  • In this study, the feasibility of laser patterning on the surface of food packaging polymer film was confirmed, and the surface patterning process conditions of femtosecond laser were established. In addition, it was proved that the surface properties of the film can be changed and controlled through the fabrication of various patterned films on the surface of food packaging films such as HDPE, PP, and PET. Various patterned surfaces, including large-scale circular patterns induced by a single femtosecond laser pulse, roughness patterns achieved by overlapping single pulses by 30%, straight line patterns, roughness patterns obtained by overlapping straight line patterns, and grid patterns formed by intersecting straight line patterns were fabricated. The characteristics of the patterned HDPE, PP, and PET films, based on the surface pattern structure and size, were analyzed using SEM, AFM, and contact angle measurements. Compared to the surface of each control film without femtosecond laser patterning, the contact angles of the surfaces of large-area circular patterning HDPE and PP films, large-area roughness patterning HDPE and PP films by overlapping 30% of single pulses, and large-area roughness patterning PET film by overlapping rectilinear patterning were in the range of 27.1-37.5 degree. This indicated that the HDPE, PP, and PET films became more hydrophilic after patterning. On the other hand, the HDPE film patterned with a large-scale grid pattern exhibited a contact angle of 120.4 degree, indicating that the HDPE film became more hydrophobic after patterning. Therefore, films that have been changed to hydrophilic surfaces through patterning can be used in anti-fouling applications where proteins, cells, viruses, and other food materials do not adhere or are easily detached. In addition, if a superhydrophobic surface of 150 degrees or more is fabricated through more precise lattice patterning in the future, it will be possible to use it for superhydrophobic surface applications such as self-cleaning.

Electrical Properties of Two-dimensional Electron Gas at the Interface of LaAlO3/SrTiO3 by a Solution-based Process (용액 공정을 통해 제조된 LaAlO3/SrTiO3 계면에서의 이차원 전자 가스의 전기적 특성)

  • Kyunghee Ryu;Sanghyeok Ryou;Hyeonji Cho;Hyunsoo Ahn;Jong Hoon Jung;Hyungwoo Lee;Jung-Woo Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.31 no.1
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    • pp.43-48
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    • 2024
  • The discovery of a two-dimensional electron gas (2DEG) at the interface of LaAlO3 (LAO) and SrTiO3 (STO) substrates has sparked significant interest, providing a foundation for cutting-edge research in electronic devices based on complex oxide heterostructures. However, conventional methods for producing LAO thin films, typically employing techniques like pulsed laser deposition (PLD) within physical vapor deposition (PVD), are associated with high costs and challenges in precisely controlling the La and Al composition within LAO. In this study, we adopted a cost-effective alternative approach-solution-based processing-to fabricate LAO thin films and investigated their electrical properties. By adjusting the concentration of the precursor solution, we varied the thickness of LAO films from 2 to 65 nm and determined the sheet resistance and carrier density for each thickness. After vacuum annealing, the sheet resistance of the conductive channel ranged from 0.015 to 0.020 Ω·s-1, indicating that electron conduction occurs not only at the LAO/STO interface but also into the STO bulk region, consistent with previous studies. These findings demonstrate the successful formation and control of 2DEG through solution-based processing, offering the potential to reduce process costs and broaden the scope of applications in electronic device manufacturing.

Development of single walled-carbon nanotubes based pH sensor using ultra-precision spray method (초정밀 스프레이 방법을 이용한 단일벽 탄소나노튜브 pH센서 개발)

  • Kwon, Jae-Hong;Lee, Kyong-Soo;Lee, Yun-Hi;Ju, Byeong-Kwon
    • Journal of Sensor Science and Technology
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    • v.15 no.2
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    • pp.127-133
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    • 2006
  • Recent studies demonstrated the ability of carbon nanotube (CNT) to promote electron transfer reactions of important compounds and to impart higher stability onto electrochemical sensors. CNT-based sensors measured by hydroxyl radical concentration or pH value suggest great promise for biosensors. This paper describes a new method for fabricating a very simple and inexpensive pH sensor compose of single walled-carbon nanotubes (SW-CNTs) using an ultra-precision spray. CNT-based sensor shows pH sensitivity in buffer solution at different pH range. Our experimental results show the sensor responses to pH buffer solution and the conductance of depends on the pH values. These results support application possibility of SW-CNTs based pH sensor for mass production.

Drinking Water Treatment of Surface Water Using Microfiltration-Nanofiltration Processes (정밀여과 및 나노여과 공정을 이용한 지표수의 상수처리)

  • Lee, Sung-Woo;Kim, Chung-Han;Kwak, Dong-Heui
    • Journal of Korean Society of Water and Wastewater
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    • v.14 no.3
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    • pp.224-230
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    • 2000
  • Membrane processes are capable of removing much materials from water. The removal or rejection characteristics of a membrane is usually depend upon the nominal pore size or MWCO(molecular weight cut off). A membrane with a smaller nominal pore size or MWCO should be capable of removing smaller contaminants from water. A series of experiments was performed to investigate the separation characteristics of membrane processes which consisted of microfiltration(MF) and nanofiltration(NF). To evaluate removal efficiencies of some pollutants such as the consumption of $KMnO_4$, THMFP, NH3-N, Fe, Mn, and pesticides, source water sampled from the Kum river was treated by the those membrane processes. Also, the results of experiments were compared with those of conventional water treatment processes. By two types of the membrane process, total removal efficiency of $KMnO_4$ consumed, THMEP, and $NH_3-N$ were 91.0%, 84.3%, and 85.5%, respectively and those processes were efficient in pesticides removal as well. Most of the effluents satisfied the Korean standard of drinking water quality continuously in the experimental periods. However, NF was needed for producing the safe drinking water in case of treating the raw water contaminated with Mn since removal efficiency of MF was not high enough. On the basis of the experimental results, it was suggested that NF could be applied to remove not only $NH_3-N$ but THMFP even without pre-chlorination.

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유비쿼터스 기술의 군 활용방안 연구

  • 이윤희
    • Review of KIISC
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    • v.14 no.1
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    • pp.46-55
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    • 2004
  • 21세기에는 정보기술의 혁명적 발전과 함께 전쟁양상이 파격적으로 변화될 것으로 예측되며, 전력체계의 특성이 근본적으로 변화됨과 더불어 전쟁 패러다임이 획기적으로 변하고 있다. 특히, 정보과학기술을 이용한 정밀감시, 통제, 타격 복합체계의 구축이 군사력 발전의 근간이 되고 있으며, 앞으로 디지털, 인터넷, 생명공학, 나노기술 등을 복합적으로 활용하는 것이 전력체계의 중심 축이 될 것이다. 특히 전쟁 수행 방식 및 수단의 변혁과 군사패러다임의 보편적 변화추세에 능동적으로 대비하기 위하여 유선과 무선 그리고 근거리 무선 사이에 이음매 없는 통신망이 실현됨으로써 누구든지 어디서나 네트워크로부터 자신이 필요한 정보를 얻을 수 있는 유비쿼터스 컴퓨팅을 민간분야에 활용하여 스마트 흠과 물류에 적용한 사례를 살펴보았다. 유비쿼터스 컴퓨팅과 네트워크 기술은 21세기 변화될 형태의 전쟁을 수행하기 위해 국방 분야 적용이 필수적이며, 이를 통해 전술적인 감지$.$추적 능력의 차대 및 고도화된 전술 정보의 실시간 교환$.$공유, 전술부대의 커뮤니티 파워증대 효과를 가져 올 수 있다. 따라서 유비쿼터스 국방(u-Defense) 시대로 가기 위해 개발하여 적용 가능한 핵심 분야인 내장형 모바일 ad-hoc 네트워크 프로토콜, 무선 센서 네트워크, RFID(Radio Frequency Identification)를 활용한 유비쿼터스 군수지원 등을 제시하였다. 이러한 유비쿼터스 국방을 위하여 우선 비용 측면과 민간분야에 비해 훨씬 강화된 정보 보호 및 무기체계간 상호인증 환경을 고려해야 하며, 국방 정보화에 전력증강차원의 과감한 투자가 요구된다. 또한, 저 비용 고효율의 군사력을 구축해야할 것이며, 첨단 정보체계 건설을 주도할 수 있는 정보 인력을 양성하여, 장기적으로 종합적인 발전계획을 수립하고 국방 정보 체계를 효율적으로 구축하면 군 전력향상에 획기적으로 기여할 수 있을 것이다.

A Novel KOH Wet Etching Technique for Ultrafine Nanostructure Formation (초정밀 나노구조물 형성을 위한 새로운 KOH 습식각 기술)

  • Kang, Chan-Min;Park, Jung-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.2
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    • pp.156-161
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    • 2011
  • The present study introduces a novel wet etching technique for nanostructure fabrications which usually requires low surface roughness. Using the current method, acquired profiles were smooth even in the nanoscale, which cannot be easily achieved with conventional wet or dry etching methods. As one of the most popular single crystal silicon etchant, potassium hydroxide (KOH) solution was used as a base solvent and two additives, antimony trioxide (Sb2O3) and ethyl alcohol were employed in. Four experimental parameters, concentrations of KOH, Sb2O3, and ethyl alcohol and temperature were optimized at 60 wt.%, 0.003 wt.%, 10 v/v%, and $23^{\circ}C$, respectively. Effects of additives in KOH solution were investigated on the profiles in both (110) and (111) planes of single crystal silicon wafer. The preliminary results show that additives play a critical role to decrease etch rate significantly down to ~2 nm/min resulting in smooth side wall profiles on (111) plane and enhanced surface roughness.

Structure analysis of ultra precision nano-scale machine for mold processing (금형가공을 위한 초정밀 나노가공기의 구조해석)

  • Baek, Seung-Yub;Kim, Seon-Yong
    • Design & Manufacturing
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    • v.1 no.1
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    • pp.51-56
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    • 2007
  • As various manufacturing technology of optical glass is developed, the aspheric lenses are supplied to many fields. Electronic or measuring instruments equipped with aspheric lens have recently been used since aspheric lens is more effective than spheric one. However, it is still difficult manufacture glass lens because of high cost and the short life of core. The demands of the aspheric glass lenses increase since it is difficult to obtain the desirable performance in the plastic lens. For the mass production of aspheric lens, specific molds with precisely machined cores should be prepared. In order to obtain competitiveness in the field of industrial manufacturing, a reduction in the development period for the batch machining of products is required. It is essential to analyze the stress distribution and deformations of machining system which is used for manufacturing the aspheric lens using FEM software ANSYS. Finite element simulations have been performed in order to study the influence of machining system which is developed in this study on structures. It is very important to understand the structural behavior of machining system. This paper investigated the static analysis and dynamic analysis of machining system for aspheric lens to predict the damage due to loading.

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Preparation and Properties of Membranes for the Application of Desalting, Refining and Concentrating for Dye Processing (염료의 탈염/정제/농축처리용 분리막의 제조 및 특성평가)

  • Nam Sang-Yong;Jang Jae-Young;Chung Youn-Suk;Lee Young-Moo
    • Membrane Journal
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    • v.16 no.3
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    • pp.213-220
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    • 2006
  • Microfiltration and Nanofiltration membrane were prepared and properties of the membrane system were studied for the application of desaltingfrefiningiconcentrating process of dye production. The membrane system improved the quality of dye produce and productivity was enhanced due to reduction of processing steps and material cost. Membrane and pressure type membrane element in various dye concentration for using desaltingirefiningiconcentrating of dye processing were investigated.