• 제목/요약/키워드: 나노정밀도

검색결과 725건 처리시간 0.027초

AFM-based nanofabrication with Femtosecond pulse laser radiation (원자간력 현미경(AFM)과 펨토초 펄스 레이저를 이용한 나노 형상 가공)

  • Kim Seung-Chul;Kim Seung-Woo
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.149-150
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    • 2006
  • We describe a novel method of scanning probe nanofabrication using a AFM(atomic force microscopy) tip with assistance of Femtosecond laser pulses to enhance fabrication capability. Illumination of the AFM tip with ultra-short light pulses induces a strong electric field between the tip and the metal surface, which allows removing metal atoms from the surface by means of field evaporation. Quantum simulation reveals that the field evaporation is triggered even en air when the induced electric field reaches the level of a few volts per angstrom, which is low enough to avoid unwanted thermal damages on most metal surfaces. For experimental validation, a Ti: sapphire Femtosecond pulse laser with 10 fs pulse duration at 800 nm center wavelength was used with a tip coated with gold to fabricate nanostructures on a thin film gold surface. Experimental results demonstrate that fine structures with critical dimensions less than ${\sim}10nm$ can be successfully made with precise control of the repetition rate of Femtosecond laser pulses.

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A Study on the Method of Residual Stress Relaxation during Wire Drawing and Evaluation of Residual Stress Using Nano Indentation Test (신선 시 선재의 잔류응력 완화 방법에 관한 연구 및 나노 압입 시험을 이용한 잔류응력 평가)

  • Ko Dae-Cheol;Hwang Won-Ho;Lee Sang-Kon;Kim Byung-Min
    • Journal of the Korean Society for Precision Engineering
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    • 제23권5호
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    • pp.162-169
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    • 2006
  • Steel cord which is used as reinforcement in car tires is produced by wet-drawing process. Recently the quality improvement of the steel cord product is demanded by the tire market. After cold drawing process, produced residual stresses have a harmful effect on the durability of the wire and become the cause which decreases the quality of the product. Therefore, to improve the quality of the steel cord product, the research regarding the method of residual stress relaxation is necessary. To evaluate the quality of the cold drawn wire, it is very important to measure the residual stress, because the residual stress decides a variety of the quality level which is demanded in the cold drawn wire. The aim of this study is to propose residual stress relaxation method in the drawn wire using FE-analysis. The validity of the analysis results was verified by Nano indentation test.

Study on High Speed Laser Cutting of Rigid Flexible Printed Circuit Board by using UV Laser with Nano-second Pulse Width (자외선 나노초 펄스 레이저를 이용한 경연성(Rigid Flexible) 인쇄전자회로기판(Printed Circuit Board) 고속 절단에 관한 연구)

  • Bae, Han-Sung;Park, Hee-Chun;Ryu, Kwang-Hyun;Nam, Gi-Jung
    • Journal of the Korean Society for Precision Engineering
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    • 제27권2호
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    • pp.20-24
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    • 2010
  • High speed cutting processes of rigid flexible printed circuit board by making use of high power UV laser with nano-second pulse width have been proposed and investigated experimentally. Also robust laser cutting system has been designed and developed in order to obtain a good cutting quality of rigid and flexible PCB with multi-layers (2-6 layers). Power controller module developed for ourselves is adapted to control the laser output power in the range less than 1%. The systems show the good performance of cutting speed, cutting width and cutting accuracy, respectively. Especially we have confirmed that the short circuit problem due to the carbonized contamination occurred in cross section of multi-layers by thermal effect of high power laser has been improved largely by using multi-pass cutting process with low power and high speed.

Determination of Deformation Behavior of Coating Layer on Electronic galvanized Sheet Steel using Nano-indentation and FEM (나노 인덴테이션 실험과 유한요소해석을 이용한 전기아연도금강판의 코팅층 체적 거동 결정)

  • Ko, Young-Ho;Lee, Jung-Min;Kim, Byung-Min
    • Journal of the Korean Society for Precision Engineering
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    • 제22권10호
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    • pp.186-194
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    • 2005
  • This study was designed to investigate the mechanical properties of the coating layer on electronic galvanized sheet steel as a part of the ongoing research on the coated steel. Those properties were determined using nano-indentation, the finite element method, and artificial neural networks. First and foremost, the load-displacement curve (the loading-unloading curve) of coatings was derived from a nano-indentation test by CSM (continuous stiffness measurement) and was used to measure the elastic modulus and hardness of the coating layer. The properties derived were applied in FE simulations of a nano-indentation test, and the analytical results were compared with the experimental result. A numerical model for FE simulations was established for the coating layer and the substrate separately. Finally, to determine the mechanical properties of the coating, such as the stress-strain curve, functional equations of loading and unloading curves were introduced and computed using the neural networks method. The results show errors within $5\%$ in comparison with the load-displacement measured by a nano-indentation test.

Design of Spindle Motor-chuck System for Ultra High Resolution (나노급 정밀 구동을 위한 스핀들 모터-척 시스템 설계)

  • Kim, Kyung-Ho;Kim, Ha-Yong;Shin, Bu-Hyun
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • 제19권6호
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    • pp.614-619
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    • 2009
  • The STW(servo track writing) system which is the process of writing servo signals on disks before assembling in drives uses the spindle motor-chuck mechanism to realize low cost because the spindle motor-chuck mechanism has merit which can simultaneously write multi-disk by piling up disks in hub. Therefore, when the spindle motor-chuck mechanism of horizontal type operates in high rotation speed it is necessary to reduce the effect of RRO(repeatable run-out) and NRRO(non-repeatable run-out) to achieve the high precision accuracy of nano-meter level during the STW process. In this paper, we analyzed that the slip in assembly surfaces can be caused by the mechanical tolerance and clamping force in hub-chuck mechanism and can affect NRRO performance. We designed springs for centering and clamping considering centrifugal force by the rotation speed and assembly condition. The experimental result showed NRRO performance improves about 30 % than case of weak clamping force. The result shows that the optimal design of the spindle motor-chuck mechanism can effectively reduce the effect of NRRO and RRO in STW process.

Comparison of Electromagnetic-wave Shielding Effect in Glass Fiber Reinforced Nano Composites (유리섬유강화 나노 복합재료의 전자기파 차폐효과 비교)

  • Jung Woo-Kyun;Won Myung-Sik;Ahn Sung-Hoon
    • Journal of the Korean Society for Precision Engineering
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    • 제22권10호
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    • pp.121-128
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    • 2005
  • The research on electromagnetic shielding has been advanced for military applications as well as for commercial products. Utilizing the reflective properties and absorptive properties of shielding material, the replied signal measured at the rear surface or at the signal source can be minimized. The shielding effect was obtained from materials having special absorptive properties and structural characteristics such as stacking sequence. Recently researchers studied the electromagnetic properties of nano size particles. In this research {glass fiber}/{epoxy}/{nano particle} composites(GFR-Nano composites) was fabricated using various nano particles, and their properties in electromagnetic shielding were compared. For the visual observation of the nano composite materials, SEM(Scanning Electron Microscope) and TEM(Transmission Electron Microscope) were used. For the measurement of electromagnetic shielding, HP8719ES S-parameter Vector Network Analyser System was used on the frequency range of 8 GHz${\~}$12GHz. Among the nano particles, carbon black and Multi-Walled Carbon Nano-Tube (MWCNT) revealed outstanding electromagnetic shielding. Although silver nano particles (flake and powder) were expected to have effective electromagnetic shielding due to their excellent electric conductivities, test results showed little shielding characteristics.

Selective Growth of Freestanding Carbon Nanotubes Using Plasma-Enhanced Chemical Vapor Deposition (플라즈마 기상 화학 증착법을 이용한 탄소나노튜브의 선택적 수직성장 기술)

  • Bang, Yun-Young;Chang, Won-Seok
    • Journal of the Korean Society for Precision Engineering
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    • 제24권6호
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    • pp.113-120
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    • 2007
  • Chemical vapor deposition (CVD) is one of the various synthesis methods that have been employed for carbon nanotube (CNT) growth. In particular, Ren et al reported that large areas of vertically aligned multi-wall carbon nanotubes could be grown using a direct current (dc) PECVD system. The synthesis of CNT requires a metal catalyst layer, etchant gas, and a carbon source. In this work, the substrates consists of Si wafers with Ni-deposited film. Ammonia $NH_3$) and acetylene ($C_2H_2$) were used as the etchant gases and carbon source, respectively. Pretreated conditions had an influence on vertical growth and density of CNTs. And patterned growth of CNTs could be achieved by lithographical defining the Ni catalyst prior to growth. The length of single CNT was increased as niclel dot size increased, but the growth rate was reduced when nickel dot size was more than 200 nm due to the synthesis of several CNTs on single Ni dot. The morphology of the carbon nanotubes by TEM showed that vertical CNTs were multi-wall and tip-type growth mode structure in which a Ni cap was at the end of the CNT.

A Study on the Electrical Characterization of Top-down Fabricated Si Nanowire ISFET (Top-down 방식으로 제작한 실리콘 나노와이어 ISFET 의 전기적 특성)

  • Kim, Sungman;Cho, Younghak;Lee, Junhyung;Rho, Jihyoung;Lee, Daesung
    • Journal of the Korean Society for Precision Engineering
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    • 제30권1호
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    • pp.128-133
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    • 2013
  • Si Nanowire (Si-NW) arrays were fabricated by top-down method. A relatively simple method is suggested to fabricate suspended silicon nanowire arrays. This method allows for the production of suspended silicon nanowire arrays using anisotropic wet etching and conventional MEMS method of SOI (Silicon-On-Insulator) wafer. The dimensions of the fabricated nanowire arrays with the proposed method were evaluated and their effects on the Field Effect Transistor (FET) characteristics were discussed. Current-voltage (I-V) characteristics of the device with nanowire arrays were measured using a probe station and a semiconductor analyzer. The electrical properties of the device were characterized through leakage current, dielectric property, and threshold voltage. The results implied that the electrical characteristics of the fabricated device show the potential of being ion-selective field effect transistors (ISFETs) sensors.

Nano Force Metrology and Standards (나노 힘 측정 및 표준)

  • Kim M.S.;Park Y.K.;Choi J.H.;Kim J.H.;Kang D.I.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.59-62
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    • 2005
  • Small force measurements ranging from 1 pN to $100{\mu}N$, we call it Nano Force, become the questions of common interests of biomechanics, nanomechanics, material researches, and so on. However, unfortunately, quantitative and accurate force measurements have not been taken so far. This is because there ,are no traceable force standards and a calibration scheme. This paper introduces a quantitative force metrology, which provides traceable link to SI (International Systems of Units). We realize SI traceable force ranging from 1 nN to $100{\mu}N$ using an electrostatic balance and disseminate it through transfer standards, which are self-sensing cantilevers that have integrated piezoresistive strain gages. We have been built a prototype electrostatic balance and Nano Force Calibrator (NFC), which is an AFM cantilever calibration system. As a first experiment, we calibrated normal spring constants of commercial AFM cantilevers using NFC. Calibration results show that the spring constants of them are quite differ from each other and nominal values provided by a manufacturer (up to 240% deviation).

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A study on stress-strain relation measurement for micro scale UV-curable polymer structure (UV-경화 폴리머 마이크로 구조물의 응력-변형률 관계 측정에 관한 연구)

  • Jeong S.J.;Kim J.H.;Lee H.J.;Park S.H.;Yang D.Y.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.492-497
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    • 2005
  • In this study, we propose an advanced nanoindentaion test, Nano Pillar Compression Test (NPCT) to measure a stress-strain relation for micro scale polymer structures. Firstly, FEM analysis is performed to research behavior of micro polymer pillars in several specimen aspect ratios and different friction conditions between specimen and tip. Based on the FEM results, micro scale UV-curable polymer pillars are fabricated on a substrate by Nano Stereo Lithography (NSL). To measure their mechanical properties, uniaxial compression test is performed using nanoindentation apparatus with flat-ended diamond tip. In addition, the dependency of compression properties on loading condition and specimen size are discussed.

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