• Korean Journal of Materials Research
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• v.24 no.8
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• pp.413-416
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• 2014

The effects of an addition of CNT on the sensing properties of nano ZnO:CNT-based gas sensors were studied for $H_2S$ gas. The nano ZnO sensing materials were grown by a hydrothermal reaction method. The nano ZnO:CNT was prepared by ball-milling method. The weight range of the CNT addition on the ZnO surface was from 0 to 10%. The nano ZnO:CNT gas sensors were fabricated by a screen-printing method on alumina substrates. The structural and morphological properties of the ZnO:CNT sensing materials were investigated by XRD, EDS, and SEM. The XRD patterns revealed that nano ZnO:CNT powders with a wurtzite structure were grown with (1 0 0), (0 0 2), and (1 0 1) dominant peaks. The size of the ZnO was about 210 nm, as confirmed by SEM images. The sensitivity of the nano ZnO:CNT-based sensors was measured for 5 ppm of $H_2S$ gas at room temperature by comparing the resistance in air with that in target gases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.40-41
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• 2007

$SnO_2$ nanowires are used at the nanoscale level for the electrical transduction of the gas interaction with these sensing materials. We report on a study of high sensitivity and fast NOx gas sensor. We focused on improving the response time and refresh time by growth nanowires on the trench structure of Si substrate as air path. To improve refresh time we applied the trench structure with depth of $10\;{\mu}m$ by the inductively coupled plasma reactive ion etching(ICP-RIE). The fabricated device was measured at temperature of $200{\sim}300^{\circ}C$. The sensor exhibit ultra-fast and reversible electrical response (t90% ~4 s for response and ~3 s for recovery).

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.278.2-278.2
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• 2013

그래핀은 우수한 전기적, 기계적, 광학적 특성들로 인하여 전자소자, 센서, 에너지 재료 등으로의 응용이 가능하다고 알려진 단 원자층의 탄소나노재료이다. 특히 그래핀을 전자소자로 응용하기 위해서는 캐리어 농도, 전하 이동도, 밴드갭 등의 전기적 특성을 향상시키거나 제어하는 것이 요구되며, 에너지 소재로의 응용을 위해서는 높은 전기전도도와 함께 기능화를 통한 촉매작용을 부여하여 효율을 향상시키는 것이 요구된다. 일반적으로 화학적 도핑은 그래핀의 전기적 특성을 제어하는 효율적인 방법으로 알려져 있다. 화학적 도핑의 방법으로 질소, 수소, 산소 등 다양한 이종원소를 열처리 또는 플라즈마 처리함으로써 그래핀을 구성하는 탄소원자를 이종원자로 치환하거나 흡착시켜 기능화 처리된 그래핀을 얻는 방법들이 제시되었다. 이중 플라즈마를 이용한 도핑방법은 저온에서 처리가 가능하고, 처리시간, 공정압력, 인가전압 등 플라즈마 변수를 변경하여 도핑정도를 비교적 수월하게 제어할 수 있다는 장점을 가지고 있다. 본 연구에서는 열화학기상증착법으로 합성된 그래핀을 직류 플라즈마로 처리함으로써 효율적인질소도핑 조건을 도출하고자 하였다. 그래핀의 합성은 200 nm 두께의 니켈 박막이 증착된 몰리브덴 호일을 사용하였으며, 원료가스로는 메탄을 사용하였다. 그래핀의 질소 도핑은 평행 평판형 직류 플라즈마 장치를 이용하여 암모니아($NH_3$) 플라즈마로 처리하였으며, 플라즈마 파워와 처리시간을 변수로 최적의 도핑조건 도출 및 도핑 정도를 제어하였다. 그래핀의 질소 도핑 정도는 라만 스펙트럼의 G밴드의 위치와 반치폭(Full width at half maximum; FWHM)의 변화를 통해 확인하였다. NH3 플라즈마 처리 후 G밴드의 위치가 장파장 방향으로 이동하며, 반치폭은 감소하는 것을 통해 그래핀의 질소도핑을 확인하였다.

• Journal of the Semiconductor & Display Technology
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• v.17 no.1
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• pp.54-61
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• 2018

In this study, two aspects were analyzed about the robot for removal of explosive devices. First, the cost analyses were performed to provide a reasonable solution for the acquirement of the system. It is processed by an engineering estimate method and the process was consisted of two ways : a system development expense and a mass production unit price. In additions, the resultant cost analyses were compared between the cases excluding and including a mines detection system. As results, in the case of the acquirement of the robot system for removal of explosive devices, it is recommended that the performance by improving the mines detection ability should be considered preferentially rather than the cost because the material cost for the mines detection system is negligible compared to the whole system cost. Second, as a way for improving the system performance by the mine detection function, the carbon nanotube (CNT) based sensor technology was studied in terms of sensitivity and simple productivity with presenting its preliminary experimental results. The detection electrodes were formed by a photolithography method using a photosensitive CNT paste. As results, this method was shown as a scalable and expandable technology for the excellent mines detection sensors.

• Journal of the Semiconductor & Display Technology
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• v.16 no.3
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• pp.31-35
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• 2017

We have fabricated flexible and stretchable pressure sensors using silver nanowires (AgNWs) and analyzed their electric responses. AgNWs are spray coated directly onto uncured polydimethylsiloxane (PDMS) such that AgNWs penetrate into the uncured PDMS, enhancing the adhesion properties of AgNWs. However, the single-layered AgNW sensor exhibits unstable electric response and low pressure sensitivity. To tackle it, we have coated a conductive polymer, poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) onto the AgNW layer. Such a hybrid bilayer sensor ensures a stable electric response because the over-coating layer of PEDOT:PSS effectively suppresses the protrusion of AgNWs from PDMS during release. To enhance the sensitivity further, we have also fabricated a stacked bilayer AgNW sensor. However, its electric response varies depending sensitively on the initial overlap pressure.

• Journal of the Korean institute of surface engineering
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• v.54 no.4
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• pp.194-199
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• 2021

In this study, rebar corrosion detection sensor was fabricated using multi-walled carbon nanotubes (MWCNTs). MWCNTs were pre-treated in the acid electrolytes to attach the carboxylic acid to the surface of MWCNTs. The fabricated sensor was attached on the surface of rebar and it detected the corrosion of steel using LCR meter with variation of capacitance. The surface morphology and electrical properties were characterized using scanning electron microscope (SEM) and electrical test equipment, respectively. To verify the corrosion detection characteristics, comparison experiment using plastic bar was performed. Moreover, mechanism of corrosion detection sensor was discussed.

• Korean Journal of Materials Research
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• v.32 no.6
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• pp.307-312
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• 2022

Metal halide perovskite (MHP) nanocrystals (NCs) have emerged as promising materials for various optoelectronic applications including photovoltaics, light-emitting devices, and photodetectors because of their high absorption coefficient, high diffusion length, and photoluminescence quantum yield. However, understanding the morphological evolution of the MHP NCs as well as their controlled assembly into optoelectronic devices is still challenging and will require further investigation of the colloidal chemistry. In this study, we found that the amount of n-octylamine (the capping agent) plays a crucial role in inducing further growth of the MHP NCs into one-dimensional nanowires during the aging process. In addition, we demonstrate that the dielectrophoresis process can permit self-alignment of the MHP nanowires with uniform distribution and orientation on interdigitated electrodes. A strong light-matter interaction in the MHP NWs array was observed under UV illumination, indicating the photo-induced activation of their luminescence and electrical current in the self-aligned MHP nanowire arrays.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.2
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• pp.129-133
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• 2022

This paper describes why we must use graphene materials for solar cells and biosensors. It has been superior in several properties such as super-thin film, higher tensile strength, high current density, high thermal conductivity, and high mobility. Therefore, graphene is one of the emerging advanced materials because of its applicability in various electronic device applications. We investigated the requirements of graphene materials for the application of solar cells and biosensors. In addition, we discussed the research trends such as transducers in biosensors and transparent electrodes in solar cells. The research on graphene materials and their application will be beneficial and helpful for the near future.

• Proceedings of the Korea Information Processing Society Conference
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• 2022.05a
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• pp.477-480
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• 2022

반도체 성능 향상으로 신호를 전달하는 회로의 단위가 마이크로 미터에서 나노미터로 미세화되어 선폭(linewidth)이 점점 좁아지고 있다. 이러한 변화는 검출해야 할 불량의 크기가 작아지고, 정상 공정상태와 비정상 공정상태의 차이도 상대적으로 감소되어, 공정오차 및 공정조건의 허용범위가 축소되었음을 의미한다. 따라서 검출해야 할 이상징후 탐지가 더욱 어렵게 되어, 높은 정밀도와 해상도를 갖는 검사공정이 요구되고 있다. 이러한 이유로, 미세 공정변화를 파악할 수 있는 신규 검사 및 계측 공정이 추가되어 TAT(Turn-around Time)가 증가하게 되었고, 웨이퍼가 가공되어 완제품까지 도달하는데 필요한 공정시간이 증가하여 제조원가 상승의 원인으로 작용한다. 본 논문에서는 웨이퍼의 검계측 데이터가 아닌, 제조공정 과정에서 발생하는 다양한 센서 및 장비 데이터를 기반으로 웨이퍼 제조 결과가 양품인지 그렇지 않으면 불량인지 구별할 수 있는 가상계측 모델을 제안한다. 기계학습의 여러 알고리즘 중에서 다양한 장점을 갖는 XGBoost 알고리즘을 이용하여 예측모델을 구축하였고, 데이터 전처리(data-preprocessing), 주요변수 추출(feature selection), 모델 구축(model design), 모델 평가(model evaluation)의 순서로 연구를 수행하였다. 결과적으로 약 94% 이상의 정확성을 갖는 모형을 구축하는데 성공하였으나 더욱 높은 정확성을 확보하기 위해서는 반도체 공정과 관련된 Domain Knowledge 를 반영한 모델구축과 같은 추가적인 연구가 필요하다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.6
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• pp.556-562
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• 2023

This paper presents the development and market trends of nano biosensors. These biosensors must possess high sensitivity and selectivity to effectively detect diseases. Presently, many research groups are focusing on the field-effect transistor aspect of nano biosensors, which can identify diseases such as Down syndrome, bladder cancer, breast cancer, and numerous other cancers, utilizing graphene and transition metal dichalcogenide materials. In the case of in-vitro diagnostics, the use of nano biosensors has been rapidly growing since the onset of the COVID-19 pandemic. This paper also discusses market trends and the outlook for both national and international enterprises engaged in the nano biosensor field. Nano biosensors are expected to play a beneficial and significant role soon, contributing to the early diagnosis of diseases and subsequently improving patient outcomes.