• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.12
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• pp.1108-1115
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• 2015

In this study, correlation equations were arranged about mass flow rates of oxygen and volume flow rates of helium using a mouthpiece method. The mouthpiece method can reduce examination cost by using similar empirical formula. Instead of liquid oxygen, in the mouthpiece method, gas helium can be measured in order to determine the leakage amount of liquid oxygen conveniently. Experiment was conducted and compared to understand leakage amount relation between the helium and the oxygen for prototype item under a room and a cryogenic temperature conditions. The leakage volume flow rate [$A.m{\ell}/s$] of the helium was 174 times higher than mass flow rate [g/s] of the oxygen leakage at liquid state. The derived correlation equations were verified using data from the National Institute of Standards and Technology (NIST).

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.169-169
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• 2011

진공펌프의 성능을 나타내는 여러 파라미터가 있지만 가장 중요한 성능지표는 역시 배기속도라고 할 수 있다. 배기속도는 물리적으로 체적유량(volume flow rate, L/s 또는 m3/hr) 즉 단위시간당 펌프 흡기구에 들어오는 기체의 체적을 가리킨다. 펌프 흡기구 단면을 지나가는 체적을 직접 측정하는 것은 거의 불가능하므로 진공 전문가들은 흡기구로 들어가는 기체 유량(flow rate, mbar${\cdot}$L/s 또는 Pa${\cdot}$m3/s)과 흡기구 압력(mbar 또는 Pa)을 측정한 후 유량을 압력으로 나누어 주는 방식으로 배기속도를 측정한다. 유량은 표면 기체 방출을 고려하더라도 실용적인 측면에서 보면 위치에 상관없이 불변하는 값으로 볼 수 있어서 유량을 어떻게 정밀하게 잴 것인가 하는 방법만 있으면 편리한 위치에서 측정하면 된다. 반면에 압력을 정밀하게 측정하는 방식은 확립되어 있지만 막상 어디서 측정하는 것이 옳은가 하는 것은 의외로 쉽지 않다. 펌프의 배기속도를 측정하는 상황을 몇 가지로 가정해 보면, 규격에 입각한 표준용기에 달아 정식으로 재는 것, 게이지가 부착된 마구리판을 달고 간이로 재는 것, 펌프가 사용되고 있는 시스템 현장에서 재는 것이 있을 수 있고 펌프가 달려 있는 상태도 직접 용기에 달거나, 도관 또는 어댑터 및 밸브를 통해 달리는 경우가 있다. 앞에서 펌프 배기속도 계산 시 사용하는 흡기구 압력이란 엄밀히 말하면 흡기구를 바라보는 방향으로 가해지는 압력을 말하는데 이는 진공 게이지를 펌프 흡기구 면에서 상류를 향하도록 놓을 때 얻을 수 있는 값으로 막상 실행하는 것은 어렵다. 표준용기의 구조는 진공 게이지를 특정 위치에 달 때 마치 흡기구 면에 놓인 게이지처럼 흡기구 압력을 정확하게 측정할 수 있도록 고안된 것이지만 때에 따라서는 여러 변형된 측정 방식을 사용할 수밖에 없는 상황이 만들어지므로 어떤 보정을 거치면 올바른 배기속도 값을 구할 수 있는지 살펴볼 필요가 있다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.4
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• pp.309-316
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• 2015

Numerical analysis and experimental verification of a thermal liquid mass flow meter (LMFM) were performed. The configuration of the LMFM was the same as a gas mass flow meter (GMFM), but the opposite results in temperature difference between upstream and downstream thermistors occurred. In the case of the gas, the convection depending on the flow of thermal mass was small and comparable to the conduction through the sensor tube wall. The temperature difference was proportional to the mass flow rate due to their interaction. For the liquid flow, the convection overwhelmed the wall conduction because of the large flow of thermal mass caused by high density. The temperature difference in this case was inversely proportional to the mass flow rate. The tube diameter and heater wiring width are important design parameters, and the optimized sensor can be used to measure and control the infinitesimal liquid flow rate.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.10a
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• pp.121-125
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• 2004

The effectiveness of the pogo suppression device (PSD) installed at the piping system simulating the fuel supply lines of the rocket engines was investigated. The system response defined as the ratio of the flow rate to the pressure in the main tube was obtained for various PSD gas volumes $(0,\;0.5,\;1,\;2\times10^{-6}\;m^3)$. Existence of a gas volume in the PSD reduced the system resonance frequency. With a larger gas volume, the resonance frequency became lower, but only slightly, though the fluctuations of the main tube pressure and the flow rate damped down considerably

• 전기의세계
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• v.42 no.11
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• pp.14-18
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• 1993

마이크로 모터는 미소기계장치에서 중요한 actuator가 될 수 있음은 물론 자체로도 여러가지 응용을 생각할 수 있다. 여컨대 밀폐시킨 캡슐내에 마이크로모터를 제작하고 그 회전수를 조절함으로써 통로를 지나는 기체나 액체증의 유량을 조절하는 미세유량조절기를 제작할 수 있을 것이다.

• Journal of the Korean Society of Propulsion Engineers
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• v.13 no.3
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• pp.50-57
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• 2009

A gas mechanical pulsator is developed for the study of combustion instabilities in various combustors such as LRE combustor. First, it shows that the mass flow rates and the perturbation frequencies can be successively controlled by the inlet pressure and the rotating speed of a rotating disk with many holes. Second, the device is used as an acoustic amplification source as a substitute for the speaker in the previous acoustic tests and its results show almost the same resonant frequency and damping characteristics compared with the previous results. In conclusion, the result shows that it can be used as a substitute for a speaker in the studies of LRE combustion instabilities, which has a flow and no limitation of amplification, and a device for making a perturbation source in gas flow.

• Korean Chemical Engineering Research
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• v.48 no.5
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• pp.556-560
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• 2010

An atmospheric surface modification using plasma treatment method was applied to butadiene rubber to improve its adhesion strength by plate type reactor. In order to investigate the optimum reaction condition of plasma treatment, type of reaction gas(nitrogen, argon, oxygen, air), gas flow rate(30~100 mL/min), treated time(0~30 s) and primer modification method(GMA, 2-HEMA) were examined in a plate type plasma reactor. The results of the surface modification with respect to the treatment procedure was characterized by using SEM and ATR-FTIR. As the gas flow rate and treated time increases the contact angle decreases. The greatest adhesion strength was achieved at optimum condition such as flow rate of 60 mL/min, treated time 5 s and modification primer containing 2-HEMA for air. Due to the atmospheric surface modification using plate plasma method consequently reduced the wettability of butadiene rubber and resulted in the improvement of the adhesion.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.481-487
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• 2009

To control the diameter size of the carbon nanofilaments (CNFs), SF6 was incorporated in the source gases ($C_2H_2/H_2$) during the initial deposition stage. The source gases and $SF_6$ were manipulated as the cyclic on/off modulation of $C_2H_2/H_2/SF_6$ flow in a thermal chemical vapor deposition system. The characteristics of the CNFs formation on the substrate were investigated according to the different cyclic modulation processes and the substrate temperatures. By $SF_6\;+\;H_2$ flow injection during the cycling etching interval time, the diameter size of CNFs was extremely decreased. The cause for the decrease in the diameter size of the individual CNFs by the cyclic on/off modulation process of $C_2H_2/H_2/SF_6$ flow was discussed in association with the slightly enhanced etching ability by the incorporation of $SF_6$.

• Journal of the Korean Vacuum Society
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• v.6 no.3
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• pp.282-286
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• 1997

Reactive ion etching (RIE) characteristics of InP in the $Cl_2$/ CH_4/H_2$ discharges was investigated, as a function of the rf power, substrate temperature and gas composition. It was observed that the etch rate increased as the rf power, sample temperature and/or $Cl_2$ gas concentration increased. Etch rate of about 0.9$\mu\textrm{m}$/min was obtained at the optimum condition of 150W rf power, $180^{\circ}C$ substrate temperature and $10Cl_2$ /$5CH_4/85H_2$ gas ratio. Polymer formation was completely suppressed by adding $Cl_2$ to the $CH_4$ /$H_2$ discharges.

• Journal of the Korean Chemical Society
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• v.38 no.2
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• pp.151-159
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• 1994

The portable gas chromatography system was developed which was consisted of ambient vapor sampler(AVS), short capillary column(3 m long, 0.32 mm i.d. GC(SCCGC), photoionization detector (PID) and vacuum pump which was operated at subambient pressure. The seletion of capillary column was based on the theoretical calculation from Golay equation. The pressure ratio of column inlet and outlet appropriated between 1.03 and 1.2 in the system. The available column flow were 0.87∼4.63 ml/min at the pressure ratios. The AVS consisted of three concentric tubes and enables rapid, repetitive introduction of vapor samples directly into capillary column and showed good reproducibility. The subambient column outlet pressure with PID resulted in a significant increase in the optimum column flow, permitting rapid analysis. The baseline separation of m-xylene and o-xylene was able to within 40 second with the system. Parameters affecting the column resolving power were sampling duration, column length and diameter, and the pressure ratio. Effects of these parameters were investigated using bezene derivative compounds.