• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.24-24
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• 1998

반도체장비를 포함하는 초고진공장비의 園훌化가 급속히 그리고 절실히 요구되고 있는 것이 현실정이다. 當面해서 실현할 국산진공장비의 대상은 廣範圍하다. 즉, 각종 진공 pump ( (rotary, dry, diffusion, cryo, ion, turbo melecular pump), 진공 chamber, 진공 line, gate valve 를 위 시 한 진공 V머ve, flange, gasket, fl않d야lU, mainpulater 퉁 진공 部品이 다. 진공계 의 핵심 은 適切하고 優良한 진공재료의 선태파 사용이다. 진공장비는 사용자가 원하는 진공도를 원하 는 시간 동안 륨空度를 유지해 주어야 한다. 진공재료 선태의 기준사항은:(1) 기체의 透過성 (2) 薰했훌 (3) 혔體放出특성 - -outgassing과 degassing- (4) 機械的 량훌度 (5) 온도 의존성 (6) 化學톡성 (7) 加I성 및 鎔接 성 (8) 課電특성 (9) 磁氣특성 (10) 高速함子 및 放射線 특성 (11) 經濟성 및 調達생 둥이 다. 우량한 초고진공계재료는 풍부하게 개발되어 왔고, 또 新材料들이 개발되고 있다. 여기에서는 주로 초고진공 내지는 극고진공계의 構造材料, 機能材料, 部品材料 일반파 몇가지 신재료의 특 성에 관해서 記述한다. M Mild SteeHSAE, 1112, 1010, 1020, 1022, etc)., S Stainless SteeHAlSI, 304, 304L, 310, 316, 321, 347): 구조재료, chamber, fl하1ges A Aluminum과 Alloys (1060, 1100, 2014, 4032, 6(뻐1): 구조재료, chamber, flanges, gaskets A AI, Al 떠loy는 SS에 代替하는 역 할올 시 작하고 있다. C Copper, Copper Alloys(C11$\alpha$)0, C26800, C61400, Cl7200): 내장인자, gasket, cryopanel, tubing T Titanium, Ziriconium, Haf띠um 및 Alloys: 특히 Ti은 10n pump 용 getter material 이 외 에 U UHV,XHV용 chamber계로서 관심올 끌고 있다. N Nickel, Nickel Alloys (200, 204, 211, monel, nichrome): 부식 방지 , 전자장치 , 자기 장치 귀 금속(Ag, Au, Pt, Pd, Rh, Ir, Os, Ru): 보조부품, gasket, filament, coating, thermocouple, 접 합부위 T TiC, SiC, zrC, HfC, TaC 둥의 탄화물과, BN, TiN, AlN 동의 질화물, 붕화물이 둥장하고 었 다. 유리: Soda Lime, Borosilicate, Potash Soda Lead: View Port, Chamber envelope C Ceramics: AlZ03, BeO, MgO, zrOz, SiOz, MgOzSiOz, 3Alz032SiOz, Z$textsc{k}$hSiOz S상N4: e electrical, thermal insulators, crucibles, boats, single crystals, sepctr려 windows 저자는 최근 저자들이 발견한 Zr-Ti-Cu-Ni-Be amorphous alloys coated cham뾰r가 radiation p proof로 이용될 수 있는 사실을 점검하고 었다 .. Z.Y. Hua 들은 Cs3Sb를 새로운 photocathode 재료로 보고하고 있다.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.166-166
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• 1998

반도체 공정에서 기존보다 큰 30cm 웨이퍼훌 이용하기 위해서 기존의 ECR, Helicon, ICP, 등 공정용 고 밀도 플라즈마 원들의 대면적화에 대한 연구가 세계적으로 진행되고 있다 현 상황에서는 평판형 안테 나룰 이용한 TCP가 대면적용 폴라즈마 원의 가장 유력한 후보로 여겨지고 있다 TCP롤 대면적화 하는 데 있어서 중요한 문제점으로는 대면적에서의 큰 안테나 인되턴스로 인한 임피던스 정합과 대면적에서 의 유전울질의 기계적 강도이다. 앓은 유전물질올 사용힐 수 있도록 대면적 TCP 플라즈마 원올 실계 저l작하였고 이차원 가열이론올 이용한 TCPRP code 률 이용하여 안테나의 반경옳 결정하였디 안테나의 인덕턴스 값올 줄이기 위해서는 주m수는 13.56MHz 보다 낮은 4-5MHz 부근에서 작동하는 RF 파워룰 선택하였다 이 파워 서플라이는 보통 사용되는 50n 흩력 입묘$\mid$던스훌 갖는 형태가 Of니라 LC 공진현상 올 이용하여 부하에 파워률 전달하는 형태이다 .. TCP 장치에 사용할 수 있도록 파워 서플라이 흩력 단에 안테나와 직혈로 가변 콘덴서를 달아서 임11I던스 정합올 힐 수 있게 하였다 안테나에 직훌로 달Of줌으 로써 안테니의 인덕턴스훌 훌여주는 효과훌 얻올 수 있다 안테나에 흐르는 전류룰 측정하기 위해서 사 각형 루프로 전류 픽업 코일을 만들었고 진공상태에서 RF 파워률 인가하고 안테나의 전류와 전압을 측정하여 픽업 코일걸과훌 조정하였다. 발생기체로는 헬륨올 사용하였고 1-100mTorr 의 압력범위에서 실험을 하였다 플라즈마롤 빌샘시키고 파워를 증가 시킴에 따라 E-H mode transition 현상이 관찰되었고 그 때의 임계 전류 값을 측정하였다. 압력이 낮올수록 모드 변화가 일어나는 전류의 값이 작았다 임계 전류는 압력에 대해서 선형적인 특성을 보였다 이는 압력이 낮을수록 유도걸힘이 더 잘 된다는 것을 의미한다 1 1 mTorr에서는 H-mode에서 안테나의 전류가 파워훌 증가시킴에 따라 계속 증가하였으니, 압력이 올라 갈수록 조금씩 증가하는 정도가 줄어들고. 100mTorr에서는 포화된 값을 나타냈다 H-mode로 넘어간 후 에는 파워가 증가황에 따라 안테나의 임피던스 값이 모든 압력영역에서 줄어드는 경황을 보였고, 이는 플라즈마의 인덕턴스에 의해서 안테나의 인덕턴스 기 감소되기 때문이다, 파워가 증가할수록 안테U오} 플라즈마 루프사이의 상호걸합이 증가하는 걸로 해석힐 수 있다 안테나의 인되턴스 변화보다는 저항.성 분의 변화가 컸다 하지만 전체 임피던스로 볼 때 저항성분이 상대적으로 작기 때문에 인덕턴스의 감소 가 더 큰 영향을 미치는 걸로 볼 수 있다. 하지만 플라즈마로의 파워 전달에는 저항성분만이 영향올 미 치므로 저항성분의 큰 변화는 파워가 많이 전달될올 의미한다 피워전달 효율을 계산해 본 결과 수 r mTorr 부근이 80-90% 정도의 높은 효율올 보였고 5mTorr 일 때가 가장 좋았다.

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.301-311
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• 2012

Discharge property of plasma jet devices is investigated for the application to the doping processes of crystalline solar cells and others. Current-voltage characteristics are shown as the typical normal-glow discharge in the various gas pressure of plasma jets, such as in the atmospheric plasma jets of Ar-discharge, in the ambient pressure of atmospheric discharge, and in the ambient Ar-pressure of Ar-discharge. The discharge voltage of atmospheric plasma jet is required as low as about 2.5 kV while the operation voltage of low pressure below 200 Torr is low as about 1 kV in the discharge of atmospheric and Ar plasma jets. With a single channel plasma jet, the irradiated plasma current on the doped silicon wafer is obtained high as the range of 10~50 mA. The temperature increasement of wafer is normally about $200^{\circ}C$. In the result of silicon wafers doped by phosphoric acid with irradiating the plasma jets, the doping profiles of phosphorus atoms shows the possibility of plasma jet doping on solar cells.

• Journal of Animal Environmental Science
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• v.18 no.1
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• pp.25-34
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• 2012

Noxious gases with malodorous substance concentrations in each stages of pig buildings were determined at a typical 400sow-scale farm to improve piggery environment. Using IAQ-300 and pDR-1000AN, continuous records for the concentration of $NH_3$, CO, $CO_2$, $NO_2$, $SO_2$, $H_2S$, $O_2$, and along with temperature, humidity, dust concentrates from individual pig pens were collected to analyze every 6 hours' condition of indoor environment for 24 hours' period. In most pig houses, the air quality at noon was good, while at night (00:00~06:00), air composition became noxious in all buildings. The order of buildings' air quality for 24 hrs was pregnant > farrowing > nursery > growing > finishing. The cause of air quality differences was presumed to be the differences of stocking density, defecating amount and the length of exposure time of slurry in indoors. In conclusion, well-designed building structure, proper control of stocking density, quick removal of excreta from pig pens and continuous ventilation are prerequisites to improve pig housing environment.

• Journal of the Korean Society of Food Culture
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• v.17 no.5
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• pp.535-542
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• 2002

The volatile compounds of Myungtae (Alaska pollack) sikhae obtained by simultaneous steam distillation and extraction(SDE) apparatus were separated by gas chromatography(GC) and gas chromatography mass spectrometry(GC/MS). The totals of 155 volatile flavor components was identified in traditional Kyungsangdo Myungtae (Alaska pollack) sikhae, respectively. ${\alpha}$-Zingihirene(11.03%) (E)-di-2-propenyl disulfide(7.95%) ${\beta}$-cironellol(6.02%), methyl allyl disulfide(3.58%), cryptone(3.39%), camphene(3.23%), pentanol(3.21%), penadecanal(2.66%) and ${\beta}$-phellandrene(2.06%) were contained as the main compounds of Myungtae shikae. The fraction obtained from sikhae were tested for electron donating ability, angiotensin converting enzyme and xanthine oxidase inhibitory activity. There was no electron donating abilities$(SC_{50})$ of hexane and water fraction. On the other hand, the abilities of ethylacetate fraction and butanol fraction showed $310.64\;{\mu}g/mL,\;1096.49\;{\mu}g/mL$, respectively. Angiotensin converting enzyme inhibitory activities$(IC_{50})$ of ethylacetate fraction and butanol fraction were 1.623 mg/mL, 1.303 mg/mL, respectively. Xanthine oxidase inhibitory activities$(IC_{50})$ of ethylacetate fraction and butanol fraction were 3.591 mg/mL, 2.083 mg/mL, respectively.

• Korean Journal of Food Science and Technology
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• v.13 no.1
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• pp.30-36
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• 1981

Neutral lipids of the total lipid extracted from 4 representative varieties of barley grown in Korea and their corresponding malt were studied. Total lipids of barley and malt were solvent extracted with chloroform:methanol:water (1.0 : 1.0 : 0.9, v/v), The total lipids were fractionated into neutral and polar lipids by silicic acid column chromatography, and neutral lipids fraction was separated by thin layer chromatography and quantitated by TLC scanner. The fatty acid compositions was determined by gas liquid chromatography. The average content of total lipid in the 4 barleys and their malts were 3.3 and 2.9%, and average of neutral lipids content in the barley and malt lipids were 73.8 and 68.5%, respectively. Among the neutral lipids, triglycerides and free fatty acids were the major components, and triglycerides content decreased and free fatty acids content increased during malting. Sterol esters, free sterols, 1,3-and 1,2-diglycerides were the minor components of the neutral lipids, and contents of those components showed increasing tendency during malting. The major fatty acid composition of the total lipids were linoleic, palmitic and oleic acids, and in general, the malts had lower amounts of unsautrated fatty acids and high amounts of saturated fatty acids. Fatty acid composition of neutral lipids was of almost the same pattern as that of the total lipids.

• Korean Journal of Food Science and Technology
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• v.13 no.1
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• pp.37-42
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• 1981

Polar lipids of the total lipid extracted from 4 representative varieties of barley grown in Korea and their corresponding malt were studied. The average content of glycolipids and phospholipids in barley were 8.9 and 17.3% and their average content of malt were 12.3 and 19.2%, respectively. Among the glycoliplds of the barley, digalactosyl diglycerides and monogalactosyl diglycerides were the major components, and the malts showed somewhat lower amounts of those components. Steryl glycosides and cerebrosides were the minor components of the glycolipids, and malts of the barley showed somewhat increased amounts of those components. Phosphatidyl cholines, lysophosphatidyl cholines, diphosphatidyl glycerols, and phosphatidyl ethanolamines were the major components of the phospholipids for the barley and represented 85 to 90% of the total phospholipids. The malts had lower amounts of phosphatidyl cholines and the lyso analog, and higher amounts of phosphatidyl ethnolamines and diphosphatidyl glycerols. The fatty acid composition in the glycolipids and phospholipids were similar to the pattern in those of the neutral lipids. But glycolipids and phospholipids fractions contained a higher percent of linoleic and palmitic acid than other lipid fractions, respectively.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.3 no.4
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• pp.309-317
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• 2005

A study on the separation of $^{99}Tc,\;^{94}Nb,\;^{55}Fe,\;^{90}Sr\;and\;^{59/63}Ni$ in various radioactive wastes discharged from nuclear power plants has been performed for a use in their quantification which is indispensible for the evaluation of the radionuclide inventory Ni was recovered along with Ca, Mg, Al, Cr, Ti, Mn, Ce, Na, K, and Cu through the sequential separation procedure of Re(as a surrogate of $^{99}Tc$), Nb, Fe and Sr by anion exchange and Sr-Spec extraction chromatography. In this research, chemical separation of Ni from the co-existing elements was investigated by cation exchange and Ni-Spec extraction chromatography. Precipitation behaviour of Ni and the co-existing elements with dimethylglyoxime(DMG) was investigated in ammonium $citrate/ethanol-H_2O$ and tartaric $acid/acetone-H_2O$ in order to purify separated Ni fractions and to prepare $^{59/63}Ni$ source for the radioactivity measurement using a gas proportional counter. Recovery of Ni separated through ion exchange chromatographic separation procedure was $92.1\%$ with relative standard deviation of $0.9\%$. In addition, recovery of Ni with DMG in the tartaric $acid/acetone-H_2O$ was $85.6\%$ with relative standard deviation of $1.9\%$.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.3 no.4
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• pp.301-307
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• 2005

The morphology of the high burnup $UO_2$ spent fuel, which was oxidized and annealed in a PIA (Post Irradiation Annealing) apparatus, has been observed. The high burnup fuel irradiated in Ulchin Unit 2, average rod burnup 57,000 MWd/tU, was transported to the KAERI's PIEF. The test specimen was used with about 200 mg of the spent $UO_2$ fuel fragment of the local burnup 65,000 MWd/tU. This specimen was annealed at $1400^{\circ}C$ for 4hrs after the oxidation for 3hrs to grain boundary using the PIA apparatus in a hot-cell. In order to oxidize the grain boundary, the oxidation temperature increased up to $500^{\circ}C$ and held for 3hrs in the mixed gas (60 ml He and 100 ml STD-air) atmosphere. The amount of 85Kr during the whole test process was measured to know the fission gas release behavior using the online system of a beta counter and a gamma counter. The detailed micro-structure was observed by a SEM to confirm the change of the fuel morphology after this test. As the annealing temperature increased, the fission products were observed to move to the grain surface and grain boundary of the $UO_2$ matrix. This specimen was re-structured through the reduction process, and the grain sizes were distributed from 5 to $10\;{\mu}m$.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.2 no.3
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• pp.165-174
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• 2004

In order to simultaneously vitrify the ion exchange resin(IER) and combustible dry active waste(DAW) generated from Korean nuclear power plants, a vitrification pilot test was conducted using an induction cold crucible melter(CCM) . The energy necessary for startup of the glass using a Ti-ring was evaluated as about 290 kWh. The power supplied from a high frequency generator to melt the glass properly was ranged from 160 to 190 kW without any interruption. When the mixture of the IER and DAW was fed into the CCM, the concentration of CO was lowered up to 1/40 compared to feeding the IER solely. It may be caused by the DAW which can produce about 1.8 times higher heat compared to the IER. When the swelling phenomenon occurred in the glass melt, the concentration of $NO_2$, oxidizing gas, was higher than NO, reducing gas. Total feed amounts of the IER and DAW were 368 and 751 kg, respectively. And then, about 74 of volume reduction factor was achieved.