• Applied Chemistry for Engineering
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• v.31 no.5
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• pp.539-544
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• 2020

A three-dimensional (3D) porous polyaniline (PANI) film was fabricated by a combined photo-and soft-lithography technique based on a large-area nanopillar array, followed by a controlled chemical dilute polymerization. The as-obtained 3D PANI film consisted of hierarchically interconnected PANI nanofibers, resulting in a 3D hierarchical nanoweb film with a large surface and open porous structure. Using electrochemical measurements, the resulting 3D PANI film was demonstrated as a flexible pH sensor electrode, exhibiting a high sensitivity of 60.3 mV/pH, which is close to the ideal Nernstian behavior. In addition, the 3D PANI electrode showed a fast response time of 10 s, good repeatability, and good selectivity. When the 3D PANI electrode was measured under a mechanically bent state, the electrode exhibited a high sensitivity of 60.4 mV/pH, demonstrating flexible pH sensor performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.58-58
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• 2009

Uniformity related issues in chemical mechanical polishing (CMP) are within wafer non-uniformity (WIWNU), wafer to wafer non-uniformity (WTWNU), planarity and dishing/erosion. Here, the WIWNU that originates from spatial distribution of independent variables such as temperature, sliding distance, down force and material removal rate (MRR) during CMP, relies to spatial dependency. Among various sources of spatial irregularity, hardness and modulus of pad and surface roughness in sources for pad uniformity are great, especially. So, we investigated the spatial variation of pad surface characteristics using pad measuring system (PMS) and roughness measuring system. Reduced peak height ($R_{pk}$) of roughness parameter shows a strong correlation with the removal rate, and the distribution of relative sliding distance onwafer during polishing has an effect on the variation of $R_{pk}$ and WIWNU. Also, the results of pad wear profile thorough developed pad profiler well coincides with the kinematical simulation of conditioning, and it can contribute for the enhancement of WIWNU in CMP process.

• Journal of Power System Engineering
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• v.19 no.6
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• pp.75-81
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• 2015

A deposited metal specimen of ER2594 which is a super duplex steel welding wire used to investigate the effect of sigma(${\sigma}$) phase on electrochemical corrosion characteristics was prepared by gas tungsten arc welding. Aging treatment was conducted for the specimen at the temperature range of $700^{\circ}C$ to $900^{\circ}C$ for 5 to 300 minutes after annealing at $1050^{\circ}C$. Corrosion current density has decreased a little with an increase of aging time over 60 minutes at $700^{\circ}C$ to $900^{\circ}C$ and the uniform corrosion of deposited metal had more influence on the precipitation of ferrite than the precipitation of sigma phase. Therefore, the precipitation of sigma phase did not have much effect on the uniform corrosion. Pitting potential representing pitting corrosion has shown decreasing tendency as the precipitation of sigma phase increased. The degree of sensitization representing intergranular corrosion has shown increasing tendency as the precipitation of sigma phase increased at $700^{\circ}C$ to $800^{\circ}C$, while it has decreased at $900^{\circ}C$ for 60 to 300 minutes.

• Applied Chemistry for Engineering
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• v.10 no.6
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• pp.902-906
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• 1999

Electrically conducting composite films were prepared by a vapor phase in situ polymerization of pyrrole in the methyl cellulose film containing a copper(II) perchlorate. Methylcellulose had high affinity to pyrrole and was used as a matrix polymer. Conducting polypyrrole was embedded in the methylcellulose film forming a conducting network and the conductivity of the composite films ranged $10^{-1}$ to $10^{-7}S/cm$. The conductivities of conducting composite films were dependent on the nature of the matrix polymers, concentration of oxidant and polymerization time. In situ polymerization of pyrrole was observed in the matrix polymer and confirmed by UV-vis spectra. From the results of the thermogravimetric analysis, the chemical oxidative polymerization of pyrrole in the matrix polymers did not give any negative effects on the thermal stability of the composite films. Electron micrograph of composites indicated good penetration of PPy in the matrix polymer. DMA suggested a certain degree of incompatibility of the polypyrrole in the composites.

• Journal of IKEEE
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• v.23 no.4
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• pp.1175-1181
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• 2019

In this paper, we have studied the chemical mechanical polishing(CMP) characteristics of mixed abrasive silica slurry(MAS) retreated by adding of manganese oxide(MnO₂) abrasives within 1:10 diluted silica slurry. A slurry designed for optimal performance should produce high removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The polishing performances of MnO₂ abrasive-added MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared to original silica slurry in the view-point of high removal rate and low non-uniformity. Therefore, our proposed MnO₂-MAS can be useful to save on the high cost of slurry consumption since we used a 1:10 diluted silica slurry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.543-543
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• 2008

반도체 집적회로의 제조 공정 중 CMP 공정이 필수 핵심기술이 되었다. 이처럼 CMP 공정 기술이 다층 배선 구조의 광역 평탄화를 위해서는 매우 효과적이지만 기계적인 연마패드와 화학적인 식각 작용을 하는 슬러리를 이용하여 연마가 진행되므로 공정 결함이 문제시되어 왔다. 그 중에서도, 소모자재의 비용이 CMP 공정비용의 70% 이상을 차지하는 제조단가가 높다는 단점이 있다. 특히 고가의 슬러리가 차지하는 비중이 40% 이상을 넘고 있어, 슬러리 원액의 소모량을 줄이기 위한 연구들이 현재 활발히 연구 중에 있다. 본 논문에서는 새로운 혼합 연마제 슬러리에 대한 CMP 특성을 통해 기존에 상용화된 슬러리의 CMP 특성과 비교 고찰하여 MAS의 우수성을 입증하고, 최적화된 공정기술 연구의 기반으로 활용하고자 실리카 슬러리에 $MnO_2$ 연마제를 혼합하여 연마특성을 비교분석하였고, AFM, EDX, XRD, TEM분석을 통해 그 가능성을 알아보았다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.258-258
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• 2007

KNN계 세라믹스는 $400^{\circ}C$ 이상의 높은 큐리온도와 압전특성을 가져 Pb대체용 소재로 각광을 받고 있고 많은 연구들이 진행중이다. 하지만 potassium의 수분과의 반응성이 강하고 녹는점이 낮아 소결시 K2O의 휘발로 인해 화학양론적인 정확도를 맞추기가 어려운 단점을 가지고 있다. 이러한 단점을 보완하기 위하여 Hot pressing, Hot forging, SPS등 여러 가지 방법을 이용한 연구가 보고되었다. 본 연구에서는 낮은 소결밀도를 향상시키기 위하여 성형압과 성형방법을 달리하여 성형밀도에 따른 소결 밀도와 압전 특성 변화에 대하여 관찰하였다. 넓은 범위의 성형밀도를 얻기 위하여 낮은 성형압을 가할 수 있는 기계적으로 작동하는 press와 높은 성형밀도를 가할 수 있는 유압식 press를 사용하였고, 양산성을 고려하여 일반적인 세라믹 제조공정을 이용하였다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.6
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• pp.649-656
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• 2011

A model for the numerical simulation of lithium-ion batteries (LIBs) is developed for use in battery cell design, with a view to improving the performances of such batteries. The model uses Newman-type electrochemical and transfer $theories^{(1,2)}$ to describe the behavior of the lithium-ion cell, together with the Levenberg-Marquardt optimization scheme to estimate the performance or design parameters in nonlinear problems. The mathematical model can provide an insight into the mechanism of LIB behavior during the charging/discharging process, and can therefore help to predict cell performance. Furthermore, by means of least-squares fitting to experimental discharge curves measured at room temperature, we were able to obtain the values of transport and kinetic parameters that are usually difficult to measure. By comparing the calculated data with the life-test discharge curves (SB LiMotive cell), we found that the capacity fade is strongly dependent on the decrease in the reaction area of active materials in the anode and cathode, as well as on the electrolyte diffusivity.

• Applied Chemistry for Engineering
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• v.17 no.2
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• pp.217-222
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• 2006

Polyimides have been investigated extensively and used widely over the past three decades because of their high performance properties such as excellent thermal, mechanical, and electrical properties. Polyimides are difficult to be processed because of the aromatic moieties, imide group, and insoluble nature in most organic solvents. The soluble polyimides were synthesized from 2,2,-bis(3-amino-4-hydroxyphenyl) hexafluoropropane (BAPAF) and 3,3,-diamino-4,4-dihydroxybyphenyl (HAB) as aromatic diamines and 4,4-(hexafluoroisopropylidene)diphthalic dianhydride (6FDA), pyromellitic dianhydride (PMDA), 4,4-oxydiphthalic dianhydride (OPDA), 3,3,4,4-benzophenone tetracarboxylic dianhydride (BTDA) and 3,3,4,4-diphenylsulfone tetracarboxylic dianhydride (DSDA) as aromatic dianhydrides. The polyimides were characterized by NMR, FR-IR, TGA and the dielectric constant of the obtained polyimides was calculated from storage of electro-capacity. A novel photosensitive polyimide was synthesized by the reaction of polyimide, containing hydroxyl group and methacryloyl chloride using triethylamine. The good micro-pattern was obtained with photosensitive polyimide from the photolithographic technique.

• Journal of Hydrogen and New Energy
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• v.18 no.4
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• pp.391-398
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• 2007

The covalently cross-linked sulfonated polyetheretherketone (CL-SPEEK) membrane was prepared by four-step synthesis of sulfonation-sulfochlorination, partial reduction, lithiation, and cross-linking, and its electrochemical and mechanical properties were investigated for water electrolysis application. The prepared ion exchange membranes showed good electrochemical and mechanical properties; proton conductivity of 0.116 S/cm at $80^{\circ}C$, water uptake of 44.6%, ion exchange capacity of 1.75 meq/g-dry-memb., tensile strength of 64.25 MPa and elongation of 61.11%. The membrane electrode assembly (MEA) with homemade membranes were prepared by non-equilibrium impregnation-reduction (I-R) method. Especially, the electrochemical surface area (ESA) and roughness factor of CL-SPEEK electrolyte by cyclic voltammetry method were 23.46 $m^2/g$ and 307.3 $cm^2-Pt/cm^2$, respectively. The prepared MEA was used in the unit cell of water electrolysis and the cell voltage was 1.81 V at 1 A/$cm^2$ and $80^{\circ}C$, with platinum loadings of 1.31 mg/$cm^2$.