• Design & Manufacturing
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• 제13권1호
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• pp.13-18
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• 2019

The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.

• 한국정밀공학회지
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• 제23권1호
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• pp.97-104
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• 2006

ELID(Electrolytic In-process Dressing) grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP(Magnetic Assisted Polishing) has been used as polishing method due to its high polishing efficiency and to its resulting in a superior surface quality. This study is describing an effective fabrication method combining ELID and MAP of nano-precision mirror grinding for glass-lens molding mould. It also presents some techniques for achieving the nanometer roughness of the hard metals, such as WC-Co, which are extensively used in precision tooling material.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국내학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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• pp.1024-1030
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• 1993

In manufacturing press die with free surface, grinding operation is an important post process for surface finish and dimensional accuracy. With the advancement of NC technology. surface grinding operation is increasingly replaced by the gantry type manipulator. As the mechanics for grinding operation is different from machining operation, conventional CAM system for machining operation is hard to apply. In this. paper, we develop a five-axis CAM system by which an efficient gantry trajectory can be planned and verified. The developed system consists of four conceptual modules; namely CAD, PROCESS. CAM, and ANALYSIS. In the CAD module, the machined surface is represented by CL-data or surface modeler, and process parameters are specified by the PROCESS module. Then, the CAM module generates a series of grinding paths based on the grinding mechanics together with process databases for tool spaces and grinding conditions. The generated paths are verified via ANALYSIS module. Validation via real experiments is left for further study.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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• pp.1312-1315
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• 1996

Polishing work for a curved surface die demands simple and repetitive operations and requires much time while it also demands high precision. Therefore it is operated by skilled worker in handiwork. But workers avoid polishing work gradually because of the poor environments such as dust and noise. In order to reduce the polishing time and to alleviate the problem of shortage of skilled workers, researches for automation of polishing have been pursued in the developed countries such as Japan. In this research we develop a polishing robot with 2 degrees of freedom motion and pneumatic system, and attach it to machining center with 3 degrees of freedom to form an automatic polishing system which keeps the polishing tool vertically on the surface of die and maintains constant pneumatic pressure. The developed polishing robot is controlled by real time sliding mode control using DSP(digital signal processor). A synchronization between machining center and polishing robot is accomplished by using M code of machining center. A performance experiment for polishing work is executed by the developed polishing robot.

• 한국공작기계학회논문집
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• 제11권1호
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• pp.38-44
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• 2002

In manufacturing die and mold, polishing: is important as it takes as much as 50% of the production cost. In this research, an attachable type polishing device to a WC machining center was developed. experiments were done with a special1y designed rotation type polishing device. Also an ultra-sonic (vibration type) waving device was introduced to acquire finer surface finishes. From the constructed data base based on the experimental results, it is shown that optimal polishing conditions are generated by the combined use of the rotation type tool and the vibration type tool.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.937-941
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• 1997

Utomatic finishing process requires the development of high efficient and precision abrasive machining method for die and molds. This study describes the evaluation of the finishing characteristics, such as sufrace roughness, topography and material removal depth, of the electrolytic chemical mixed abrasive machining method. Experimental setup is composed of 3 axis machining center, a newly developed finishing attachment with constant pressure, electrode and electrolytic bath. Finally, we achieved a successful result that surface roughness is 0.01 .mu. m Ra and material removal depth is 145 .mu. m after 100 times repeat-finishing using electrolytic (0.8A,30V) mixed abrasive (#400 CBN, #320 Sic) machining method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.519-523
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• 1996

The polishing tool unit is developed which can be attached on the machining center and automatic polishing system for die and mold is also established. So, experiments are carried out under the several polishing conditions. The polishing properties of automatic polishing operation such as surface roughness, stock removal and maximum profile valley depth are obtained and analyzed quantitatively for each polishing tool. The purpose of this study is to construct an expert system for optimal condition of die and mold automatic polishing using the knowledge base that is obtained in the polishing experiments and, to verify the feasibility of the expert system through the experiments. Using this expert system, unskilled operators will be able to obtain the knowledge and experience of an expert.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.97-101
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• 1995

This paper describes a new surface finishing process which uses magnetic abrasive polishing. This is applied to automatic finishing of die & mold surface. Nowadays, most of die & mold meanufaturing procedures have been automated by the introduction of NC machine tool and CAD/CAM system. But the surface finishing of die & mold must be done by hand work of well-skilled workers. Though many attempts were tried in the past 15 years to eliminate this hand work, the automatic finishing of die & mold surface with 3D curvature has not been achieved yet. New magnetic abrasive finishing process is thought as one of the possible methods for the automation of 3D surface finishing. In order to improve the grindability of the method, ultra-high speed and 5-axis machining was introduce. The magnetic abrasive polishing which has adopted these methods was confirmend to improve the efficiencyof die & mold surface finishing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.98-102
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• 1994

There are many difficulties in automatic polishing for die & mold surfaces. Even though the process has been studied in the past 15 years, it has not been achieved yet, but by the process of actual hand work of well-skilled workers. A new magentic assisted polishing process, which is one of the potential method for automation of surface finishing has been studied in the past 10 years by colleagues. The process has many merits, but on the other hand also has demerits, one being low efficiency of gridability by comparision with grinding wheel polish. Therefore, some attempts were tried to improve the grindability by adopting electropolishing, ultra-high speed milling, 5-axis controlled machine etc... most recently by collegues. This study also aims to improve the efficiency of polishing by introducing the easily-polished shape surface milling method equalizing the tool feed per tooth to the pick feed. This milling method was experimentally confirmed to have sufficient grindability to polish milled surface (with 10 .mu. mRmax surface roughness) into mirror surface (with 0.4 .mu. mRmax surface roughness).

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2005년도 춘계학술발표논문집
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• pp.55-57
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• 2005

기존의 장신구 은제품은 무르고 주조공정 특유의 미세한 표면결함을 가져서 착웅 중 쉽게 변색되는 문제가 있었다. 본 연구에서는 내식성을 향상시키기 위해 $92.5\%Ag-6.5\%Cu-1\%Zn$의 삼원계 은합금을 기초 소재로 해서 반지장신구를 상정하여 기존의 주조공정으로 대략의 형태를 만들고 금형과 유압프레스로 성형 가압시켜서 적극적으로 주조 시에 발생한 미세기공을 제거하고 결정립을 미세화하여 표면경도와 밀도를 향상시켰다. 선반가공과 미세연마를 실시하여 내식성이 향상된 표면과 기존 주조공정에 비해 3배 이상 향상된 경도를 가져서 스프링백 효과에 의해 귀보석을 세팅할 수 있는 개선된 텐션형 은장신구 공정을 개발하였고 이때의 최적 성형 정도를 확인하였다.