• Journal of the Microelectronics and Packaging Society
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• v.31 no.1
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• pp.43-48
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• 2024

The discovery of a two-dimensional electron gas (2DEG) at the interface of LaAlO₃ (LAO) and SrTiO₃ (STO) substrates has sparked significant interest, providing a foundation for cutting-edge research in electronic devices based on complex oxide heterostructures. However, conventional methods for producing LAO thin films, typically employing techniques like pulsed laser deposition (PLD) within physical vapor deposition (PVD), are associated with high costs and challenges in precisely controlling the La and Al composition within LAO. In this study, we adopted a cost-effective alternative approach-solution-based processing-to fabricate LAO thin films and investigated their electrical properties. By adjusting the concentration of the precursor solution, we varied the thickness of LAO films from 2 to 65 nm and determined the sheet resistance and carrier density for each thickness. After vacuum annealing, the sheet resistance of the conductive channel ranged from 0.015 to 0.020 Ω·s^-1, indicating that electron conduction occurs not only at the LAO/STO interface but also into the STO bulk region, consistent with previous studies. These findings demonstrate the successful formation and control of 2DEG through solution-based processing, offering the potential to reduce process costs and broaden the scope of applications in electronic device manufacturing.

• The Journal of Korean Society for Radiation Therapy
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• v.32
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• pp.31-39
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• 2020

Purpose: The aims of this study were to compare the superficial dose with Optically Stimulated Luminescence Dosimeter(OSLD) measurement and Treatment Planning System(TPS) calculation for 6MV-Flattening Filter Free(FFF) energy using HalcyonTM and TrueBeamTM. Materials and methods: Phantom study was performed using the CT images of human phantom. In the treatment planning system, the Planning Target Volume(PTV) was contoured which is similar to Glottic cancer. Furthermore, Point(M), Point(R), and Point(L) were contoured at the iso-center of head and neck region and 5mm bolus was applied to the body contour. Each treatment plans using 6MV-FFF energy from HalcyonTM and TrueBeamTM with static Intensity Modulated Radiation Therapy(IMRT) and Volumetric Modulated Arc Therapy(VMAT) were established with eclipse. To reproduce the same position as the TPS, OSLDs were placed at the iso-center point and 5mm bolus was applied to compare the error rate after the dose delivery. Result: The results of the study using human phantom are as follows. In case of HalcyonTM, the mean absolute error rates of the point dose using the treatment planning system and the dose measured by OSLD were 1.7%±1.2% for VMAT and 4.0±2.8% for IMRT. Also TrueBeamTM was identified as 2.4±0.4% and 8.6±1.8% respectively for VMAT and IMRT. Conclusion: Through the results of this study, TrueBeamTM confirmed that the average error rate was 2.4 times higher for VMAT and 3.6 times higher for IMRT than HalcyonTM. Therefore, based on the results of this study, If we need a more accurate dose assessment for the superficial dose, It is expected that using HalcyonTM would be better than TrueBeamTM.

• Membrane Journal
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• v.22 no.2
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• pp.113-119
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• 2012

$YBaCo_2O_{5+{\delta}}$ oxide was synthesized by solid state reaction and a typical dense membrane has been prepared using as-prepared powder by unilateral pressing and sintering at $1,180^{\circ}C$. The $YBaCo_2O_{5+{\delta}}$ membraneswas analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM). XRD analysis showed the double layered perovskite structure was observed over $1,150^{\circ}C$ without impurities. Oxygen permeation was measured in the temperature range from 750 to $950^{\circ}C$ according to oxygen partial pressure difference between feed and permeation side. The oxygen permeation flux increased with increasing temperature and oxygen partial pressure and the maximum oxygen flux of $YBaCo_2O_{5+{\delta}}$ membrane with 1.0 mm thickness was about 0.15 mL/$cm^2{\cdot}min$ at $950^{\circ}C$ and $PO_2$ = 0.42 atm. The activation energy for oxygen permeation decreased with decreasing oxygen partial pressure to be 76.0 kJ/mol at the condition of $PO_2$ = 0.21 atm.

• Journal of the Korean Chemical Society
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• v.29 no.4
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• pp.426-436
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• 1985

Preparative and kinetic photochemical reactions of several benzanilides were studied. Several substituted benzanilides were synthesized by acylation of substituted anilines with substituted benzoyl chlorides. While benzanilide gave a photo-Fries type reaction product, 2-chlorobenzaniline, 2-bromobenzanilide, and 2-methoxybenzanilide gave a photocyclization reaction product, phenanthridone. Since 8-chlorophenanthridone was obtained from 2,2'-dichlorobenzanilide, the carbonyl phenyl is the excited site. Quantum yield of photocyclization of 2-chlorobenzanilide, 2'-chlorobenzanilide, and 2-methoxybenzanilide were obtained. 2-Chlorobenzanilide was photocyclized effectively and 2'-chlorobenzanilide ineffectively. Since the oxygen present in the reaction medium retarded the photocyclization reaction of 2-chlorobenzanilide, the triplet state of 2-chlorobenzanilide is involved. The mechanism of the photocyclization of 2-chlorobenzanilide is suggested: $\pi-complex$ between carbonyl phenyl and N-phenyl was formed from the triplet state of 2-chlorobenzanilide; neighbour phenyl (N-phenyl) assists for leaving of chlorine from carbonyl phenyl to make an intermediate, cyclized conjugated radical, because electron donating group on the N-phenyl ring accelerated the reaction; hydrogen detachment from the intermediate is obviously not a rate determined step because there was no isotope effect on the rate of photocyclization. The photocyclization reaction rate of 2-methoxybenzanilide was faster in the presence of oxygen than in the absence of oxygen. Thus, the singlet excited state of 2-methoxybenzanilide is involved in the reaction. Probably, the intermediate, methoxyhydro-phenanthridone is oxidized by oxygen in the medium to give phenanthridone.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.134-134
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• 2015

최근 액체 플라즈마에 대한 주된 이슈는 방전에 의해 발생하는 히드록실라디칼(OH-)과 버블이다. 액체 플라즈마를 이용한 다양한 응용분야에서는 히드록실라디칼에 주목하고 있다. 액체 플라즈마는 그래핀 파생물의 용액 친화도 향상을 위해 이용될 수 있다. 흑연이 포함된 과산화수소(H2O2) 용액에서 전기적인 방전으로 만들어진 히드록실라디칼로 그래핀 파생물의 용액 친화도를 향상시킨다. 이는 잠재적인 프린팅(printing) 기술 발전에 기대된다. 그리고 이 라디칼은 폐수에서 발암성의 트라이클로로아세트산(CCl3COOH)을 탈 염소하고 분해하는 역할을 하여 액체 플라즈마가 새로운 수처리 기술로 부상되고 있다. 또한 인체에서는 살균 작용을 하는 것 뿐만 아니라 단백질 고리를 끊는 역할을 하여 전립선 수술과 같은 인체수술에 적용될 수 있다. 최근 액체 플라즈마를 이용한 돼지 각막 임상수술에서 레이저와 필적할 정도로 매우 정밀하게 수술된 연구결과가 발표되어 인체 각막수술 적용에 기대된다. 이처럼 액체 플라즈마를 이용한 대부분의 응용분야에서 히드록실라디칼의 역할이 중요하다. 액체 플라즈마의 또 다른 이슈인 버블은 2가지의 역할을 한다. 첫 번째로 방전소스의 역할이다. 액체 속에 담긴 얇은 전극에 전압을 인가하면 전극 주변에서 강한 전기장의 발생으로 줄열(joule heating)에 의해 버블이 생성된다. 전극에서 버블이 생성되었을 때, 서로 다른 유전율을 가진 두 물질로 나누어진다. (버블 안은 공기로 상대 유전율 ${\varepsilon}r{\fallingdotseq}=1$, 용액은 ${\varepsilon}r{\fallingdotseq}=80$이다.) 시스템에 인가된 전압이 항복 전압(breakdown voltage)을 넘어서면 유전율이 상대적으로 낮은 버블내부에 강한 전기장이 걸리게 되어 방전이 일어난다. 만약 버블이 존재하지 않는다면 방전을 위해서 매우 높은 전압이 필요하다. 따라서 버블은 플라즈마 방전의 소스역할을 한다. 두번째로 버블은 전극의 부식을 방지하는 역할을 한다. 전극 부식은 주로 전기분해로 인한 산화반응에 의해 발생하는데 버블을 전극에 오래 머무르게 하면 부식을 방지할 수 있다. 이처럼 액체 플라즈마 시스템에서 버블의 역할들은 상당히 중요하다. 일반적으로 버블은 시스템에 인가하는 전원, 전극 극성 그리고 전압크기에 따라 거동이 달라진다. 시스템에 AC파워를 인가하면 버블은 주파수가 높을수록 전극에서 떨어지는 속도가 빨라지는 특성을 보인다. 핀 전극 극성이 음극일 때는 양극일 때보다 버블이 더 잘 생성된다. 또한 인가전압크기에 따라 거동이 달라지며 시스템에 같은 전압을 인가하여도 크기가 항상 같지 않고, 거동도 일관성을 보이지 않은 랜덤적인 모습을 보인다. 본 연구에서는 이 랜덤적인 버블의 거동을 정리하고 응용분야에서 중요하게 여기는 히드록실라디칼 생성에 대해 공부하기 위해 염류 용액(saline solution)에 핀(pin)-면(plane) 전극 구조를 설치하여 10Hz 주파수(1% duty cycle)를 가진 0-600V 구형펄스로 실험하였다. 실험을 통한 결과로서 랜덤적인 버블의 거동을 전극에서 버블이 떨어지는 속도와 플라즈마 특성에 따라 슈팅모드(shooting mode)와 유지모드(keeping mode) 2가지 모드로 분류하였다. 슈팅모드에서는 버블이 핀 전극에서 성장하지 못하고 빠른 속도로 떨어지는 모드로 플라즈마 방전이 잘 이루어지지 않는다. 반면 유지모드에서는 버블이 핀 전극에서 떨어지지 않고 지속적으로 성장한다. 이 모드에서는 펄스 시간 동안 하나의 버블로 연속적인 방전이 가능하다. 방전이 일어날 때 발생하는 히드록실라디칼의 생성은 버블 내부의 쉬스와 관련이 있다. 이 라디칼을 만들기 위해서는 높은 에너지가 요구되기 때문에 버블 내부의 쉬스(sheath)에서 만들어진다. 펄스 동안 쉬스는 주로 핀 전극 주변에서 유지되며 히드록실라디칼은 이곳에서 주로 만들어진다. 따라서 버블과 함께 쉬스도 성장하는 버블유지모드에서 슈팅모드보다 히드록실라디칼이 더 많이 생성된다.

• Food Science and Preservation
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• v.11 no.3
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• pp.417-423
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• 2004

Botanical antimicrobial agent-grapefruit seed extract mixture (BAAG) have an unknown compounds which exhibit the antibiotic activities aganist microorganisms including bacteria and fungi. We have examined the effects of BAAG on the physiological function of Botrytis cinerea which was isolated from necrotic lesions of decayed fruits and vegetables such as cucumbers, grapes, tomatoes, and red peppers during storage. In the results of enzymatic activities related to the energetic metabolism there was no inhibitory effect of BAAG on the activities of several enzymes in vitro including glucose 6-phosphate dehydrogenase and malate dehydrogenase, while there was inhibitory effect of BAAG on the activities of hexokinase and succinate dehydrogenase. O-nitrophenyl-$\beta$-D-galactopyranoside(ONPG), the artificial substrate of $\beta$-galactosidase was hydrolyzed in the presence of BAAG, indicating that the membrane was pertubated by the BAAG. From the results we suggested that the antibiotic activity of BAAG is due to the change of membrane permeability of the cell. BAAG was fractionated and purified by silica gel and sephadex column chromatography. Among active fractions two peaks were identified as naringin and limonin when they were analyzed by by NMR and Fast atomic bombardment.

• Journal of the Korean Ceramic Society
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• v.39 no.10
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• pp.912-918
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• 2002

Ni-Mn-Co-Fe oxide thick films were coated on an alumina substrate by screening printing technique. The microstructure and electrical properties of the thick films, as a function of composition and sintering temperature, were investigated. The components of the NTC thick films sintered at 1150${\circ}C$ were distributed homogeneously. On the other hand, in the case of the NTC thick films sintered at 1200 and 1250${\circ}C$, Co element was distributed homogeneously, but Ni, Mn and Fe elements were distributed heterogeneously, resulting in the formation of Ni rich and Mn-Fe rich regions. All the thick film NTC thermistors prepared showed a linear relationship between log resistance (log R) and the reciprocal of absolute temperature (1/T), indicative of NTC characteristics. At a given NiO and $Mn_3O_4$ content, the resistance, B constant and activation energy of $(Ni_{1.0}Mn_{1.0}Co_{1-x}Fe_x)O_4$ (0.25${\le}$x${\le}$0.75) and $(Ni_{0.75}Mn_{1.25}Co_{1-x}Fe_x)O_4$ (0.25${\le}$x${\le}$0.75) thermistors increased with increasing $Fe_2O_3$ content.

• Membrane Journal
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• v.28 no.1
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• pp.75-82
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• 2018

Forward osmosis (FO) desalination system has been highlighted to improve the energy efficiency and drive down the carbon footprint of current reverse osmosis (RO) desalination technology. To improve the trade-off between water flux and salt rejection of thin film composite (TFC) desalination membrane, thin film nanocomposite membranes (TFN), in which nanomaterials as a filler are embeded within a polymeric matrix, are being explored to tailor the separation performance and add new functionality to membranes for water purification applications. The objective of this article is to develop a graphene nanocomposite membrane with high performance of water selective permeability (high water flux, high salt rejection, and low reverse solute diffusion) as a next-generation FO desalination membrane. For advances in fabrication of graphene oxide (GO) membranes, layer-by-layer (LBL) technique was used to control the desirable structure, alignment, and chemical functionality that can lead to ultrahigh-permeability membranes due to highly selective transport of water molecules. In this study, the GO nanocomposite membrane fabricated by LBL dip coating method showed high water flux ($J_w/{\Delta}{\pi}=2.51LMH/bar$), water selectivity ($J_w/J_s=8.3L/g$), and salt rejection (99.5%) as well as high stability in aqueous solution and under FO operation condition.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.148-148
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• 1999

다이아몬드에 버금가는 높은 경도뿐만 아니라 높은 화학적 안정성 및 열전도성 등 우수한 물리화학적 특성을 가진 입방정 질화붕소(cubic Boron Nitride)는 마찰.마모, 전자, 광학 등의 여러 분야에서의 산업적 응용이 크게 기대되는 자료이다. 특히 탄화물형성원소에 대해 안정하여 철계금속의 가공을 위한 공구재료로의 응용 또한 기대되는 재료이다. 특히 탄화물형성원소에 대해 안정하여 철계금속의 가공을 위한 공구재료로의 응용 또한 크게 기대된다. 이 때문에 각종의 PVD, CVD 공정을 이용하여 c-BN 박막의 합성에 대한 연구가 광범위하게 진행되어 많은 성공사례들이 보고되고 있다. 그러나 이러한 c-BN 박막의 유용성에도 불구하고 아직 실제적인 응용이 이루어지지 못한 것은 증착직후 급격한 박리현상을 보이는 c-BN 박막의 밀착력문제때문이다. 본 연구에서는 평행자기장을 부가한 ME-ARE(Magnetically Enhanced Activated Reactive Evaporation)법을 이용하여 c-BN 박막을 합성하고, 합성된 c-BN 박막의 밀착력에 미치는 공정인자의 영향을 규명하여, 급격한 박리현상을 보이는 c-BN 박막의 밀착력 향상을 위한 최적 공정을 도출하고자 하였다. BN 박막 합성은 전자총에 의해 증발된 보론과 (질소+아르곤) 플라즈마의 활성화반응증착(activated reactive evaporation)에 의해 이루어졌다. 기존의 ARE장치와 달리 열음극(hot cathode)과 양극(anode)사이에 평행자기장을 부여하여 플라즈마를 증대시켜 반응효율을 높혔다. 합성실험용 모재로는 p-type으로 도핑된 (100) Si웨이퍼를 30$\times$40 mm크기로 절단 후, 100%로 희석된 완충불산용액에 10분간 침적하여 표면의 산화층을 제거한후 사용하였다. c-BN 박막을 얻기 위한 주요공정변수는 기판바이어스 전압, discharge 전류, Ar/N가스유량비이었다. 증착공정 인자들을 변화시켜 다양한 조건에서 c-BN 박막의 합성하여 밀착력 변화를 조사하였다. 합성된 박막의 결정성 분석을 FTIR을 이용하였으며, Bn 박막의 상 및 미세구조관찰을 위해 투과전자현미경(TEM;Philips EM400T) 분석을 병행하였고, 박막의 기계적 물성 평가를 위해 미소경도를 측정하였다. 증착된 c-BN 박막은 3~10 GPa의 큰 잔류응력으로 인해 증착직후 급격한 박리현상을 보였다. 이의 개선을 위해 증착중 기판바이어스 제어 및 후열처리를 통해 밀착력을 수~수백배 향상시킬 수 있었다. c-BN 박막의 합성을 위해서는 증착중인 박막표면으로 큰 에너지를 갖는 이온의 충돌이 필요하기 때문에 기판 바이어스가 요구되는데, c-BN의 합성단계를 핵생성 단계와 성장 단계로 구분하여 인가한 기판바이어스를 달리하였다. 이 결과 그림 1에서 나타낸 것처럼 c-BN 박막의 핵생성에 필요한 기판바이어스의 50% 정도만을 인가하였을 때 잔류응력은 크게 경감되었으며, 밀착력이 크게 향상되었다.

• Clean Technology
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• v.18 no.3
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• pp.325-328
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• 2012

The condensation reaction of 9,9'-bis(4-hydroxyphenyl)fluorene with epichlorohydrin to prepare 9,9'-bis[4(glycidyloxy) phenyl]fluorene (2), an important building block for fluorene-containing epoxy polymers, has been studied. The reaction is found to be quite sensitive to several experimental conditions such as reaction temperature and time, added amount of epichlorohydrin, the presence of catalysts and the use of co-solvent. Several conditions for obtaining the best yield in the reaction are: the reaction temperature is below 373 K and the reaction time is shorter than 1.5 h, and the ammonium salts act as a catalyst. Also, the use of ternary solvent (toluene, DMSO, water) has been proved to be crucial to maintain the reaction temperature and for an easy purification. Thus, the reaction proceeds in an environment-friendly manner where the use of reactants and the production of chemical wastes is minimized.