• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.9
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• pp.4015-4021
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• 2011

The purpose of this study is to investigate the effect of compositional ratio of additives, such as potassium ferrocyanide, aminoacetic acid (=glycine) and 2,2'-dipyridyl, on the physical properties of copper layer deposited by environment-friendly electroless plating reaction. The highest plating rate of copper layer, $9.5mg{\cdot}cm^{-2}{\cdot}hr^{-1}$, was obtained at 20 mg/L of potassium ferrocyanide and 0.01 mol/L of aminoacetic acid, which coincided with the change in the hardness of the copper layer. In the additives used in this study, potassium ferrocyanide was considered to improve the plating rate, aminoacetic acid increased the hardness value of deposited films and 2,2'-dipyridyl enhanced the brightness of copper deposited films.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.387.2-387.2
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• 2014

최근 이동통신 LED 에너지 자동차 산업분야에서 제품의 고기능화 고성능화를 위한 신소재 개발 및 친환경적인 신공정 개발에 있어, PI 또는 PET와 같은 유연성 소재 위에 선택적 패턴 도금 기술, 고기능성 나노/복합 도금 등이 주목 받고 있다. 또한 전 세계적으로 유해물질의 수 출입 규제 움직임이 강력하게 제기되고 있다. 본 연구에서는 유연성 소재인 PET 위에 친환경적 방법으로 구리를 선택적으로 도금하기 위한 실험을 진행하였다. 준비된 PET 필름 위에 Ag paste를 Screen Printing법을 이용하여 Ag 전극을 패턴하고, 그 위에 무전해 도금방식을 이용하여 Ni과 Cu가 도금 되도록 하였다. Ni 무전해 도금은 pH6.5, 65도에서 시행되었으며, Cu 무전해 도금은 환경규제물질인 포름알데히드 대신에 차아인산나트륨을 사용하여 70도에서, 중성근처의 pH 농도(pH7과 pH8)에서 시행되었다. 이들 다층 박막에 대해 X-ray diffraction (XRD), SEM (Scanning Electron Microscope), XPS (X-ray Photoelectron Spectroscopy) 등을 이용하여 물리-화학적/전기적 특성들을 이용하여 조사 분석하였다.

• Korean Journal of Materials Research
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• v.6 no.1
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• pp.124-129
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• 1996

TiN 기판상에 CVD와 무전해 도금을 이용하여 구리막을 성장시킬 때 여러 가지 전처리에 따른 증착 양상의 변화에 관하여 조사하였다. Cu(hfac)2를 선재(precursor)로 사용하여 CVD 증착을 실시할 때 각 전처리에 따른 TiN상의 구리막의 덮힘성(coverage)향상은 Pd-HF 활성화 처리>>HF dip> RF remote plasma의 순이었다. 특히 Pd-HF 활성화 처리를 해줄 경우 거의 완전한 연속막을 얻을수 있었으며 scotch tape peel test 결과 매우 양호한 부착특성을 보였으나, 이에 비해 전처리를 해주지 않은 경우에는 오랜 시간이 경과되어도 연속막으로 성장하지 못하고 섬모양의 큰 결정립을 이룰 뿐이었다. 이러한 차이는 Pd-HF 활성화 처리에 의해 표면에 미세하게 형성된 Pd층이 구리의 핵생성과 부착특성을 크게 향상시켰기 때문인 것으로 사료되며 이러한 효과는 무전해 도금의 경우에도 마찬가지였다. 그리고 기판과 증착온도에 따른 선택성을 보면 35$0^{\circ}C$이하에서는 pd-HF 활성화 처리에 의해서 SiO2에 대하여 TiN으로의 선택성을 가지나 그 이상의 온도에서는 선택성이 상실되었다.

• Journal of the Microelectronics and Packaging Society
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• v.11 no.2 s.31
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• pp.11-16
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• 2004

Electronic devices are getting smaller due to integration of electronic chip, and heat generated in electronic devices can cause loss of performance and/or reliability of the devices. In this research, metals such as gold, nickel and copper are plated onto a porous membrane by electroless plating method to make an efficient micro-heatsinks. Electroless plating includes sensitization and activation steps in pre-treatment steps. A polycarbonate(PC) membrane was sensitizied, activated and deposited in each metal solution for plating. Among manufactured microfibrils, heat transfer and radiation properties of Ni-microfibril with high surface area were more effective than those of $Au^-$ and Cu-microfibril.

• Korean Journal of Materials Research
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• v.4 no.2
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• pp.187-193
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• 1994

무전해 동도금액에서의 각종 안정제, 촉진제등의 첨가제에 따른 영향을 고찰하였다. 욕의 기본성분은 황산구리 10g/1, EDTA-2Na 40g/1, 포르말린 3ml/1, pH조절용 수산화나트륨 용액으로 조성하였고, 안정제, 도금촉진제 및 계면활성제의 첨가에 따른 분극곡선을 검토하여 도금욕의 경향을 검토한뒤 농도변화에 따른 도금속도를 측정하여 최적조건을 구하였다. 안정제는 $\alpha$, $\alpha$'-dipyridy1과 NaSCN을 혼합 사용하는 것이 좋았으며 촉진제로는 pyridine이 계면활성제로는 PEG 4000이 좋았다. 첨가량은 5mg/1이하의 미량이었으며 이후 첨가량이 증가함에 따라 증가함에 따라 도금속도는 직선적으로 감소하였다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.16 no.4
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• pp.759-764
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• 2012

Copper Pillar Tin Bump (CPTB) was investigated for high density chip interconnect technology development, which was prepared by electroplating and electro-less plating methods. Copper pillar tin bumps that have $100{\mu}m$ pitch were introduced with fabrication process using a KM-1250 dry film photoresist (DFR), with copper electroplating for Copper Pillar Bump (CPB) formation firstly, and then tin electro-less plating on it for control oxidation. Electric resistivity and mechanical shear strength measurements were introduced to characterize the oxidation effects and bonding process as a function of thermo-compression. Electrical resistivity increased with increasing oxidation thickness, and shear strength had maximum value with $330^{\circ}C$ and 500 N at thermo-compression process. Through the simulation work, it was proved that the CPTB decreased in its size of conduction area as time passes, however it was largely affected by the copper oxidation.

• Polymer(Korea)
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• v.25 no.2
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• pp.302-310
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• 2001

Cu/PET film composites were prepared by electroless copper plating method. In order to improve adhesion between electroless Cu plated layer and polyester (PET) film, the effect of pretreatment conditions such as etching method and mixed catalyst composition, and accelerator was investigated. Compared to NaOH etching medium, PET film was more finely etched by HCl solution, resulting in an improvement in adhesion between Cu layer and PET film. However, there were no significant differences in electromagnetic interference shielding effectiveness as a function of etching medium. The surface morphology of Cu plated PET film revealed that Pd/Sn colloidal particles became more evenly distributed in the smaller size by increasing the molar ratio of PdCl$_2$ : SnCl$_2$ from 1 : 4 to 1 : 16. With increasing the molar ratio of mixed catalyst, the adhesion and the shielding effectiveness of Cu plated PET film were increased. Furthermore, HCl was turned out to be a better accelerator than NaOH in order to enhance the activity of the mixed PdCl$_2$/SnCl$_2$ catalyst, which facilitated the formation of more uniform copper deposit on the PET film.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2002.05a
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• pp.29-30
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• 2002

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2000.05a
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• pp.60-60
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• 2000

• 한국전기화학회:학술대회논문집
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• 2000.10a
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• pp.20-20
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• 2000