• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1485-1487
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• 2000

A variety of target configurations in sputtering process have been proposed to deposit various structures of thin film alloys and compound films. In this study, we presented the comparative experimental results regarding to the characterization of properties of Cu-Ni thin films deposited by using a magnetron co-sputtering method, as a function of target configurations; one is using a single target with varying the area of Ni chips attached on the Cu target and another is using a dual-type target with two targets of Ni and Cu separated each other. Structural(d-spacing, crystal orientation, crystallite size, cross-sectional morphology) and electrical(resistivity) properties of deposited films are characterized and compared as a function of target configurations as well as deposition conditions.

• Journal of the Korean Society of Safety
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• v.8 no.4
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• pp.231-235
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• 1993

광석으로부터 생산된 금속의 양은 문명이 시작되고 부터 1750년대까지 전세계에서 약 2500만ton정도가 생산되었다고 추정되고 있다. 그러나 Fig. 1에서 보이는 것처럼 1980년대에는 그 생산량이 1년 간에 약 5억8천만ton이 되었고, 실제로 10년 간에 약 58억ton이 소비되기에 이르렀다. 그러나 금속자원은 무한히 있는 것이 아니고, 채굴기술에도 한계가 있기 때문에 머지않아 금속자원은 고갈해 버릴 것이다. 금속자원이 앞으로 어느 정도 기간까지 채굴이 가능할까 하는 것은 납이 22년, 아연이 41년, 구리가 53년, 철, 알루미늄이 230년 정도라고 추정되고 있다. 새로운 거대한 광맥이라도 발견된다면 이런 DATA는 다소 바뀔 수도 있겠으나, 앞으로 발전도상국들의 적극적인 경제활동으로 이러한 금속자원은 더욱 많이 사용될 것이며, 따라서 이와 같은 예상은 더욱 단축될 것이다.(중략)

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.13-14
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• 2008

A high rate magnetron sputtering source (HRMSS) was employed to deposit thick copper films. The HRMSS was manufactured by changing the magnet size, arrangement, and field intensity. For the preparation of thick copper films, the copper sputtering conditions using HRMSS were characterized based on the deposition parameters such as discharge characteristics, I-V characteristics of the source, and change of deposition rate. The deposition rate of copper turned out to be more than 5 times than that of conventional magnetron sputtering source. Thick copper films having thickness of more than $20{\mu}m$ were prepared by using HRMSS. The morphology and orientation of the films were investigated by scanning electron microscopy and x-ray diffraction.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.05a
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• pp.4-4
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• 2003

Various Cu films were fabricated using sputtering and electroplating with and without additive, and their surface damages after annealing were investigated. After annealing at 43SoC, the difference between damage morphologies of the films was observed. In some films stress-induced grooves along the grain boundaries were observed, while in the others voids at the grain boundary triple junctions were observed. It was also observed that the stress-induced groove was formed along the high energy grain boundaries. It was found out that the difference of the morphologies of surface damages in Cu films depends on not process type but grain boundary characteristics. To explain the morphological difference of surface damages, a simple parameter considering the contributions of grain structures and grain boundary characteristics to surface and grain boundary diffusions is suggested. The effective grain boundary area, which is a function of grain size, film thickness and the fraction of high energy grain boundaries, played a key role in the morphological difference.

• Journal of Korean Society of Environmental Engineers
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• v.37 no.3
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• pp.191-196
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• 2015

In this study, physico-chemical properties and heavy metal contents of sediment samples were determined to characterize the current pollution levels of the sediments. Ignition loss of the samples obtained from outside of the harbor was relatively lower than that from the samples obtained inside of the harbor. Heavy metal pollution was not serious except Ni. Concentrations of Ni for J1, J3, and J4 exceeded 16 mg/kg. Thus, these areas were classified as lowest effect level according to Ontario sediment quality guidelines. Evaluation of sediments pollution using $I_{geo}$ and R resulted as non-pollution for all considered metals, which indicated that no outer pollutants entered in the Jeju outport harbor. However, drastic increase of Cu concentrations was observed. Its concentration obviously increased toward the inside of the outport harbor. Therefore, careful attention and plan for the protection and remediation of sediments is required to maintain the cleanness of the Jeju outport harbor.

• The Korean Journal of Ecology
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• v.26 no.3
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• pp.91-96
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• 2003

To monitor the heavy metal exposure conditions of Feral Pigeons Columba livia, we collected them at commercial area, industrial area, park area and resident area in Seoul. In feathers, iron concentrations were significantly different among habitats(ANOVA, p<0.05), and were the highest at park area. Manganese concentrations were relatively higher at industrial and park area than other areas(ANOVA, p<0.05). In case of copper levels were the significantly highest at park area(ANOVA, p<0.05). Zinc, lead and cadmium had no difference among habitats. Correlation between livers and feathers concentrations were highly significant to copper(r²=0.983, p<0.01) and cadmium(r²=0.632, p<0.01), but iron, zinc, manganese and lead were not significantly different.

• Environmental Analysis Health and Toxicology
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• v.24 no.3
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• pp.241-249
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• 2009

Heavy metal contaminants on the aquatic environment are of interest because they can have severe effects on economy and public health. Recently, the studies for monitoring of heavy metals try to do on aquatic system to assess safety and health of ecosystem by heavy metals. Thus, biological responses were investigated on Korean fairy shrimp Branchinella kugenumaensis exposed to cadmium (Cd) or copper (Cu) for long-periods (30 days). The survival rate decreased significantly (p<0.05) on B. kugenumaensis exposed to Cd and Cu at all concentrations. Especially, the highest decrease was observed at the relatively high concentration of Cd and Cu (p<0.01) and the response by Cd exposure was at dose-dependent. The growth rates were also decreased significantly (p<0.05) on B. kugenumaensis exposed to Cd and Cu for at all concentrations. Then, the reproduction rate, numbering cyst, was decreased significantly (p<0.01) on B. kugenumaensis after Cd or Cu exposures. Long exposure of the relatively high concentration Cd and Cu can have severe effects on the reproduction, while exposures of Cd and Cu can not have effects on sex ratios of B. kugenumaensis. Additionally, asymmetric telson deformity was only observed after Cd exposure. Therefore, these results suggest that B. kugenumaensis is a sensitive bio-indicator of heavy metal exposure and these biological responses of B. kugenumaensis give important information for long-term monitoring on aquatic ecosystem.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.443-443
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• 2014

CIS 박막을 제조하기 위한 방법으로 셀렌화(selenization)방식, MOCVD방식, 동시진공증발(co-evaporation)방식, 전착(electrodeposition)방식 등이 있으나, 이러한 방식을 이용하여 CuInSe2 박막을 제조하는 경우 어떤 방법으로든 다원화합물의 조성 및 결정성을 조절하기가 매우 어려운 단점이 있었다. 기판의 온도를 일정 온도로 유지하도록 하고, 증발원을 가열하여 이에 내포된 물질(이원화합물 또는 단일원소)을 증발시켜 기판에 증착이 이루어지도록 하거나, 기판의 온도를 승온시키고 구리 이원화합물을 내포한 증발원을 가열해 물질을 증발시켜 기판에 증착이 이루어지도록 하는 방법으로 기판에 박막이 형성되도록 한다. 기판의 대면적화로 인해 균일한 박막의 형성이 어려워지고 있으며, 이중 15% 이상의 고효율을 보인 방법은 3-stage process를 이용한 동시진공증발방식으로, Cu, In, Ga, Se 등의 각 원소를 동시에 진공 증발시키면서 조성을 조절하여 태양전지에 적절한 전기적, 광학적 특성을 가지는 Cu(In,Ga)Se2 (CIGS)박막을 증착시키는 방법이다. 일반적으로, 실험실에서 연구되고 있는 장비의 구조는 증발원이 아래에 장착되어서 상향 증착되는 방식이다. 본 연구에서 사용된 장비는 하향 증발원이 측면에 장착되어서 하향 증착되는 방식으로 구성하였다. 증착되는 면방향으로, 적외선온도계(pyrometer)가 설치된 시창(viewport)의 오염 등으로 인하여, 지속적인 공정이 이루어지기 힘든 점을 개선하여 증착기판의 후면에 적외선 온도계를 설치하여 기판의 온도변화를 감지하여 공정에 반영할 수 있도록 하였다. 본 연구에서는 하향식 진공 증발원, 기판후면 온도모니터링모듈 등을 개발 장착하여, CIGS 박막을 제조하였으며, 버퍼층은 moving 스퍼터링법으로 ZnS를 증착하였고, 투명전극층은 PLD(Pulsed Laser Deposition)를 이용하여 제조하였다. 가장 높은 광변환효율을 보인 Al/ZnO/CdS/Mo/SLG박막시료는 유효면적 $0.45cm^2$에 광변환효율 15.65 %, Jsc : $33.59mA/cm^2$, Voc : 0.64 V, FF : 73.09 %를 얻을 수 있었으며, CdS를 ZnS로 대체한 Al/ZnO/ZnS/Mo/SLG박막시료는 유효면적 $0.45cm^2$에 광변환효율 12.45 %, Jsc : $33.62mA/cm^2$, Voc : 0.59 V, FF : 62.35 %를 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.299-299
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• 2008

초전도 응용기기 개발을 위해 필수적인 초전도 박막선재는 길이방향으로 임계전류밀도가 균일한 것이 요구되고 있다. 전체 길이에 대해 가장 임계전류 밀도가 낮은 지점에서 선재의 특성이 제한되기 때문이다. 한편 초전도 박막선재의 경우 높은 임계전류 밀도와 함께 과전류 등의 사고발생시를 고려하여 안정화재를 반드시 초전도층 위에 구성하여야 한다. 고가의 은(Ag)을 두껍게 증착할 수 없으므로 보통은 구리도금 또는 솔더링으로 안정화재를 덧댄다. 본 연구에서는 초전도 박막선재의 대전류화와 길이방향의 전류 균일성 향상, 안정화 특성 항상 등의 목적으로 초전도 박막선재간 확산 접합을 시도하였다. 초전도 박막선재 제조 후 안정화재인 은을 증착 후 따로 구리도금이나 솔더링 없이 선재 2가닥을 서로 포개어서 열처리를 하였다. 이때 선재간의 충분한 확산접합을 위하여 선재를 둥근 SUS 디스크에 감고 외부에 다시 SUS판재로 감아서 열처리 도중 압력을 가하였다. 아울러 포개는 방법도 초전도층의 위치에 따라 3 가지로 하였으며 열처리 후 임계전류를 측정하였다. 각 선재한 가닥에 대한 임계전류는 77K에서 50~60 A 정도의 임계전류를 나타내었으며 선재를 접합한 경우 90~120A의 특성을 나타내었으며 특히 초전도층이 설마주보는 형태에서 가장 높은 임계전류 특성을 나타내었다.

• Journal of the Microelectronics and Packaging Society
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• v.20 no.4
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• pp.13-16
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• 2013

A lot of various researches have been going on to use heat spreader for LED module. Nano porous aluminum anodic oxide (AAO) applied LED, which is produced from anodization, is easy and economically advantageous. Convensional LED module is consist of aluminum/adhesive/copper circuit. The polymer adhesive in this module is used as heat spreader. However the thermal emission of LED component is degraded because of low heat conductivity of polymer and also reliability of LED component is reduced. Therefore, AAO in this work was applied to heat spreader of LED module which has higher heat conductivity compare to polymer. Bonding strength between AAO and copper circuit was improved with Ti/Cu seed layer by copper sputtering process (DBC) before the bonding. And this copper circuit has been fabricated by electro plating method. Peel strength of AAO and copper circuit in this work showed range between 1.18~1.45 kgf/cm with anodizing process which is very suitable for high power LED application.