• Journal of the Microelectronics and Packaging Society
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• v.19 no.2
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• pp.67-72
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• 2012

In recent days, the wire width of IC is narrowed and the degree of integration of IC is increased to obtain the higher capacity of the devices in electronic industry. And then the surface quality of FCCL(Flexible Copper Clad Laminate) became increasingly important. Surface defects on FCCL are bump, scratch, dent and so on. In particular, bumps cause low reliability of the products. Even though there are bumps on the surface, if leveling characteristic of plating solution is good, it does not develop significant bump. In this study, the leveling characteristics of additives are investigated. The objective of study is to improve the leveling characteristic and reduce the surface step through additives and plating conditions. The additives in the electrodeposition bath are critical to obtain flat surface and free of defects. In order to form flat copper surface, accelerator, suppressor and leveler are added to the stock solution. The reason for the addition of leveler is planarization surface and inhibition of the formation of micro-bump. Levelers (SO(Safranin O), MV(Methylene Violet), AB(Alcian Blue), JGB(Janus Green B), DB(Diazine Black) and PVP(Polyvinyl Pyrrolidone) are used in copper plating solution to enhance the morphology of electroplated copper. In this study, the nucleation and growth behavior of copper with variation of additives are studied. The leveling characteristics are analyzed on artificially fabricated Ni bumps.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.309-309
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• 2011

알루미늄 합금은 경량성과 우수한 가공성, 내식성 등의 특성을 지니고 있고 구리나 아연, 마그네슘, 실리콘 등과 쉽게 합금화 가능하다. 또한 알루미늄과 그 합금은 자동차, 항공기, 건축물, 레저 그리고 가전용품의 재료로도 널리 사용되고 있다. 특히 Al에 Si을 소량 첨가하게 되면 내식성과 반사율이 향상되는 것으로 알려져 있다. 본 연구에서는 마그네트론 스퍼터링으로 Al, Al-Si 박막을 코팅하여 박막의 미세구조와 가시광선의 반사율을 관찰하였다. 시편은 Si wafer를 사용하였으며 알코올과 아세톤으로 각각 10분간 초음파 세척한 후 진공장비에 장착하여 Ar 분위기에서 glow discharge로 in-situ cleaning을 약 30분간 실시하였다. 시편청정이 끝나면 ~10-6 Torr 까지 진공배기를 실시하고 Ar 가스를 주입하여 2.5 mTorr로 진공도를 유지하면서 박막 코팅을 실시하였다. 기판-타겟의 거리는 12 cm로 고정 하였고 0.7, 1.5, 2.0 kW의 스퍼터링 파워와 외부 자기장의 변화에 따라 실험을 실시하였다. 순수한 Al 박막의 경우 외부 자기장 변화가 박막조직 변화에 영향을 주었으나 Si이 함유된 Al 합금 박막에서는 외부 자기장의 효과보다는 스퍼터링 전원의 세기가 박막 조직을 변화시키는 주된 공정변수였다. 박막의 반사율은 Si이 함유된 박막이 순수한 Al 박막보다 높았으며 스퍼터링 전원 세기가 증가할수록 반사율이 증가하는 경향성을 보였다. 이것은 Si을 Al에 첨가하여 스퍼터링 전원 세기를 최적화하는 것만으로도 치밀한 조직의 박막을 코팅할 수 있으며 높은 반사율을 갖는 박막을 코팅할 수 있음을 의미한다.

• Electrical & Electronic Materials
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• v.9 no.7
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• pp.727-732
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• 1996

In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.141-141
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• 2012

고종횡비 10:1 비아를 Si wafer 상에 형성하기 위해 $7{\mu}m$ 직경의 마스크로 포토작업하여 Cr층을 100nm 스퍼터링하여 PR(photo resistor) 대신의 에칭 barrier 막으로 사용하였다. 얼라인, 노광, 현상을 거쳐 Cr에칭, PR 제거후 ICP(inductively coupled plasma) 공정으로 Si deep etching하여 via 직경 $10.16{\mu}m$, 깊이 $102.5{\mu}m$의 고종횡비 비아를 형성하였다. 구리필링도금을 위해서 필수적인 seed layer는 단층 또는 다층의 금속막을 스퍼터링 법으로 형성하였다. 형성된 seed layer 단면을 FE-SEM(Field emission scanning electron microscope)으로 관찰하여 내부에 seed 층의 형성 유무를 확인하였다.

• Resources Recycling
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• v.30 no.3
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• pp.18-29
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• 2021

Platinum group metals (PGMs) are used in a wide range of application fields such as catalysts, electronic devices, electrodes, electrical devices, fuel cells and high temperature materials due to their excellent electrical and thermal conductivity as well as chemical resistivity. Platinum group elements are generally associated with nickel-copper sulfides in magmatic rocks. Depending on the relative concentrations of the PGMs, they are produced either as the primary products or as by-products of the nickel and copper. However, PGMs natural resource deposits are strictly limited in countries such as South Africa and Russia. The annual supply of PGMs is only under 500 t. Considering the limited supply of PGMs, there will be a noticeable increase in the supply risk associated with PGMs in the near future. Therefore, it is extremely important to recover PGMs from secondary resources such as spent catalysts. This paper reviews on overview of PGMs extraction and recycling processes.

• Korean Journal of Environment and Ecology
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• v.20 no.4
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• pp.400-406
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• 2006

To investigate the incidence of the road-kill of amphibians and reptiles in Songgye valley, Woraksan National Park, a survey of Songgye valley was conducted from January, 2003 to December, 2005. Before the investigation, the survey area was divided into 50 sites at 300m intervals. As a result, road-kill by vehicles were confirmed to affect 40% of the amphibians and 68.3% of the reptiles among the total species in the Woraksan National Park. The most affected species was Rana dybowskii, with a frequency of 94.9% among the total number of road-killed Individuals. The highest road-kill rate occurred between April to May, every year. Therefore, it is necessary to construct an eco-bridge and to perform the continuous ecological monitoring for the conservation of R. dybowskii including other species.

• Resources Recycling
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• v.25 no.3
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• pp.37-42
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• 2016

Highly efficient and environmentally friendly mechanical process was developed for the higher recovery rate and productivity in the recycling of waste jelly-filled communication cables. Only the simplest mechanical method was designed and built for a continuous process, further proved experimentally along with the addition of several parts such as brush-type rollers and scrappers. In this process, the recovery rate and productivity were 98% and 55 Kg/hr respectively. This process is thought to be simple but highly advanced method for the commercialization of green process.

• Journal of Food Hygiene and Safety
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• v.36 no.3
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• pp.239-247
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• 2021

In order to confirm the impact of the Positive List System (PLS) being applied to all agricultural products from January 1, 2019, we analyzed 28,693 points of inspection-related data on agricultural products distributed in Gyeonggi-do from 2018 to 2020. The ratio of cases exceeding the standard for the total inspection performance was 1.0% in 2018, 1.2% in 2019, and 1.2% in 2020. Out of the 114 cases exceeding the standard in 2019, 55 were applied on a Maximum Residue Limit (MRL) of 0.01 mg/kg, and out of the 115 cases exceeding the standard in 2020, 66 were applied on a MRL of 0.01 mg/kg. To improve this, it seems necessary to manage unintentional pollution, conventional use for unregistered crops, and illegal pesticides. Fluquinconazole detection resulted from unintentional contamination, and diazinon, chlorothalonil, and methabenzthiazuron detection resulted from conventional use in unregistered crops. Chinomethionat is a pesticide component that was discarded in the past and its current use has been attributed to the smuggling of pesticides. This study and future monitoring data can be used as reference data for system supplementation and on-site management reinforcement.

• Korean Journal of Materials Research
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• v.10 no.1
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• pp.77-82
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• 2000

A surface of polytetrafluoroethylene(PTFE) was modified with changing ion doses by 1 keV $Ar^+$ ion irradiation and Cu films having thickness $5000\;{\AA}$ were deposited on the modified PTFE. The SEM study showed that the surface texture of modified PTFE was in the form of cones whose height increased depending on ion doses. Through XPS spectra, it was found that the intensity of F ls peaks decreased with ion doses by preferential sputtering of F atoms and the C-C and / or C-F chains were formed by the crosslinking in the newly unstable chains. Cu films were deposited uniformly along the filaments formed on the modified PTFE. In x-ray diffraction (XRD) spectra of deposited Cu films on modified PTFE, a preferred orientation along (111) and (200) planes was found and the peak intensity of (111) plane increased as surface roughness of modified PTFE increased. The resistivity of Cu films was changed from $2.7{\mu}{\Omega}cm$ of unmodified PTFE to $4.3{\mu}{\Omega}cm$ of modified PTFE at ion dose of $1{\times}10^{16}/\textrm{cm}^2$ and the abrupt increase of resistivity in the modified PTFE at ion dose of $1{\times}10^{17}/\textrm{cm}^2$ was due to being cut off the film which resulted from the increased surface roughness.

• Proceedings of the Acoustical Society of Korea Conference
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• autumn
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• pp.111-114
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• 2000

지금까지 한국의 종소리가 긴 여운을 남기는 까닭은 서양 종과 달리 종의 하대 부분이 오목하여 종소리가 종 내부에 갇혀서 밖으로 빠져 나오지 못하고 오랫동안 휘돌아 치기 때문이라고 알려져 왔다 그러나 본 논문에서는 공기의 흐름을 차단하는 실험을 통해 긴 여운의 원리가 잘못 해석되고 있음을 밝히고자한다. 에밀레종은 구리판이 둥글게 말려져 있는 구조이고, 종의 하대로 갈수록 그 직경이 줄어든다. 이러한 둥근 링에서의 진동소리는 타종 부위의 상하좌우의 탄력운동에 의해 고유한 기본저음의 소리가 발생한다. 특히 진동은 당좌부위에서 하대방향으로 전달되어 공기 중으로 전파되는데, 하대로 갈수록 직경이 줄어들어서 하대의 둥근 링을 잡아주는 역할을 하기 때문에, 하대에서의 진동이 오래 동안 지속될 수 있다는 사실을 분명히 입증하였다.