• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.831-832
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• 2010

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2008.10a
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• pp.264-265
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• 2008

• Proceedings of the Optical Society of Korea Conference
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• 2001.08a
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• pp.290-291
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• 2001

• Polymer Science and Technology
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• v.6 no.5
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• pp.518-528
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• 1995

• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• Membrane Journal
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• v.14 no.2
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• pp.149-156
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• 2004

This work focused on the degradation of natural organic matter (NOM) present in lake water using a combined pkotocatalysisimicrofiltration (MF) process. The system performances were investigated in terms of organic removal efficiency and membrane permeability. The addition of iron oxide particles (IOP) into the photocatalytic membrane reactor improved initial NOM removal by sorption, but during photocatalysis the removal efficiency was reversed, probably due to the scattering of UV light by IOP. The modification of TiO$_2$ surfaces by IOP deposition was conducted to enhance the photocatalytic NOM removal efficiency. A minimal amount of Impregnation of IOP on TiO$_2$ surfaces was required to prevent the light scattering effect as well. The coating of MF membranes with IOP helped to improve the NOM removal efficiency while sorbing NOM by IOP. Regardless of tile operating conditions and particles addition examined, no significant fouling was occurring at a flux of 15 L/$m^2$-h during entire MF operation.

• Analytical Science and Technology
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• v.25 no.4
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• pp.223-229
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• 2012

Analytical signal from ICP was compensated by the light scattering of sample aerosols. Reference scattering signal was generated by a He-Ne or diode laser, monitored for the amount of aerosol producing and used for the compensation of analytical signals. The result showed that significant improvement in precision could be achieved for the short-term signal (within 1 minute) from 3.4% to 0.9% RSD in signal and 14.9% to 4.2% for the long-term (10 minutes) for Be, Pb and Co. This method is very useful not only for the pulse type but for continuous type signals especially when a nebulizer is unstable. To improve long-term precision, higher stability is required in the scattering cell and detector as well as the reduction of noise from the line between a nebulizer and plasma.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.327-327
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• 2010

디스플레이 및 반도체 산업이 발전함에 따라 회로의 선폭이 점차 줄어들고 있으며, 이에 따라서 대표적인 오염원이 되는 오염입자의 임계 직경(critical diameter) 또한 작아지고 있다. 현재 반도체 및 디스플레이 산업에서 사용되는 측정방법은 레이저를 이용하여 공정 후 표면에 남아 있는 오염입자를 측정하는 ex-situ 방법이 주를 이루고 있다. Ex-situ 방법을 이용한 오염입자의 제어는 웨이퍼 전체를 측정할 수 없을 뿐만 아니라 실시간 측정이 불가능하기 때문에 공정 모니터링 장비로 사용이 어려우며 오염입자와 공정 간의 상관관계 파악에도 많은 제약이 따르게 된다. 이에 따라 저압에서 in-situ 방법을 이용한 실시간 오염입자 측정 기술 개발이 요구되고 있다. 본 연구에서는 저압 환경에서 실시간으로 입자를 모니터링 할 수 있는 장비를 입자의 광산란 원리를 이용하여 개발하였다. 빛이 입자에 조사되면 크게 산란 및 흡수현상이 일어나게 되는데, 이 때 발생하는 산란광은 입자의 크기와 관계가 있으며 Mie 이론으로 널리 알려져 있다. 현재 이를 이용한 연구가 국내 및 국외에서 진행되고 있다. 수 백 nm 대의 입자를 측정하기 위해서는 빛의 강도가일정 수준 이상 되어야 하며, 이를 측정할 수 있는 수신부의 감도 또한 중요하다. 본 연구에서는 빛의 직경을 100 um 이하까지 집속할 수 있는 광학계를 상용 프로그램을 이용하여 설계하였으며, 강도가 약한 산란광 측정을 위하여 노이즈 제거 필터링 기술 등이 적용된 수신부 센서를 개발하여 전체 시스템에 적용하였다. 교정은 상압과 저압에서 수행 하였으며 약 5%의 측정효율로 최소 300 nm 이하의 입자까지 측정이 가능함을 확인 하였다. 또한, 타사의 실시간 입자 측정 센서와의 비교 실험을 통하여 성능평가를 수행하였다. 기존 광산란 방식 센서보다 높은 성능의 센서를 개발하기 위하여 추후 연구를 진행할 계획이며, 약 200 nm 이하의 입자까지 측정이 가능할 것으로 기대된다.

• Membrane Journal
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• v.12 no.2
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• pp.97-106
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• 2002

Small angle light scattering (SALS) and field emission scanning electron microscope (FE-SEM) have been used to investigate the light scattering patterns with time evolved during water vapor quenching (relative humidity of 53 (${\pm}3)%$ at $26^{\circ}C$ of polysulfone (PSf)/NMP/Alcohol and chlorinated poly(vinyl chloride) (CPVC)/THF/Alcohol, respective1y. Time dependence of the position of the light scattering maximum was observed at PSf dope solutions, confirming spinodal decomposition (SD), while CPVC dope solutions showed a decreased scattered light intensity with an increased q-value, indicating nucleation & growth (NG). For the each system, domain growth rate in the intermediate and late stage of phase separation decreased with increasing the number of carbon of alcohol used as additive (non-solvent). Also, in the early stage for SD, the scattering intensity with time was in accordance with Cahn's linear theory of spinodal decomposition, regardless of types of non-solvent additive. Also, the size scales obtained by SALS were mutually compared to domain sizes gained by FE-SEM measurement. These observations of scattering pattern were much clearly observed for the 20PSf/70NMP/10n-butanol (w/w%) and agreed with the theoretical predictions for scattering patterns of each stage like the early, the intermediate, and the late stage of SD type phase separation. As the scattering maximum was observed at the larger angles (larger q) in the order of n-butanol > n-propanol > methanol > no alcohol, the pore size of final morphology decreased.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.47-48
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• 2006

A roughness measuring system which comprises an integrating sphere and a stabilized laser has been fabricated with the aim of measuring the roughness correction value which is necessary in gauge block measurement by optical interferometry. To calibrate the system, a Newton's ring interferometer has been introduced. The method how to calibrate the roughness measurement system has been described.