• Electrical & Electronic Materials
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• v.35 no.3
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• pp.4-14
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• 2022

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.2
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• pp.267-280
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• 1992

This paper describes a numerical analysis of the light scattering patterns of roughness profiles. This analysis was based upon the light scattering theory developed by Beckmann. In the analysis, the roughness profile was regarded as a profile whose irregularities depend on the production process and the shape of cutting tool. Generally, waviness of an actual surface seriously distorts the scattered pattern of roughness profile. In order to avoid the effects of waviness of actual surfaces, several theoretically calculated scattering patterns, instead of actual scattering patterns, were used to analyze the scattering patterns of typical engineering roughness profiles. The characteristics of the light scattering patterns for five model surfaces were studied.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1083-1086
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• 2005

Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses $Ar^+$ laser as an illumination source, and a highly sensitive photomultiplier tube (PMT) for detecting scattered light from defects. Unlike with conventional measurement system, our system has ability to measure scattered light pattern from wide range of scattering angles with changeable incidence condition. It is shown that our developed system is effective to discriminate the types and sizes of defects from basic experimental results using a microscatch and a PSL sphere.

• The Journal of the Korea institute of electronic communication sciences
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• v.7 no.3
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• pp.579-583
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• 2012

We have designed the small particle detection system. The scatteing effect of light was used to detect small particle. The fabricated system consisted of laser diode, lens, pin hole, and photo detector. The aperture, lens, and photo detector were optimized to improve the performance of detection system. The fabricated detection system detected the scattered light by small particle entering into detection system and its response time was fast.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 1998.11a
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• pp.583-587
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• 1998

본 논문에서는 대형 탱커선의 의무 장비인 유배출 감시 장비 (Oil Discharge Monitoring Equipment)를 위한 유분 농도계의 설계에 대하여 연구하였다. ODME는 국제해사기구 (IMO)에서 일정 ton 이상의 대형 선박에 의무적으로 설치하도록 규정하고 있으며 이는 날로 심각해지는 해양 오염을 방지하는데 목적이 있다. ODME의 구성 요소는 중앙 제어 장치, 유분 농도계, 유량계, 선속계, Sampling System, 배출 제어 장치로 이루어져 있으며 이중 가장 중요한 것은 유분 농도계이다. 이는 선박에서 배출되는 물에 포함된 유 성분을 ppm 단위로 계측하는 것이다. 이를 위한 탁도 측정 방법에는 여러 가지가 있지만, 본 연구에서는 선박에서 사용이 용이한 광산란 방식과 방폭성을 가지는 광섬유를 이용하여 탁도를 측정하는 유분 농도계를 설계하였으며 아울러 이에 대한 탁도 계산 알고리즘에 대하여 고찰하였다. 측정의 정밀도는 0-999ppm 범위에서 $\pm$5%의 오차 이내로 측정이 가능함을 보였다. 이는 IMO의 규격 ($\pm$10%의 오차)에 만족하는 수치이다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.9
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• pp.1796-1804
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• 1992

Profiles of soot volume fraction, average diameter and particle number density have been measured using a light scattering and extinction technique in a coannular propane diffusion flame at atmosperic pressure. Temperature profiles were also obtained using a thermocouple technique. Measurements show that soot is first observed to form low in the flame in an annular region inside the main reaction zone. At higher locations this annular region widen until entire flame is observed to contain particles. Soot volume fraction and particle diameter profiles peak some 1mm on the fuel side of peak temperature and increase with height to oxidation region. Number density of the flame core drop steeply from formation region to growth region and relatively invariant to some height and decay out at flame tip.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.424-424
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• 2011

금속 나노 입자는 국소 표면 플라즈몬(Localized Surface Plasmon, LSP)이 여기 되며 이의 국부 환경 변화에 대한 민감한 의존성으로 인하여 생화학적 센서로의 응용이 크게 주목 받고 있다. LSP는 금속 나노 입자의 재료, 모양, 크기 그리고 주변 환경 변화에 민감하게 의존한다는 것이 알려져 있다. 금속 나노 입자를 소자로 응용하기 위해서는 일반적으로 기판을 사용하게 되며 이때 기판의 재료적 특성이 LSP에 서로 다른 영향을 준다. 기판은 재료의 광학적인 특성에 따라 유전체, 반도체 그리고 금속으로 분류할 수 있다. 유전체와 반도체 기판과는 다르게, 금속 기판은 표면의 자유전자가 금속 나노 입자에 구속된 자유전자와 반응하여 추가적인 플라즈몬모드를 형성한다. 이번 연구에서는 금속 기판 위에 지름이 100 nm인 콜로이드 금을 분산시킨 후 광산란 신호를 검출하고 금속 기판이 LSP에 미치는 영향을 하부금속 금속층 물질 및 두께의 함수로 하여 분석하였다. 또한, 콜로이드 금 주변의 굴절률 변화에 대한 반응도를 분석하여 센서로서 특성을 평가하였다.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.560-564
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• 2005

We used the polarized light scattering spectroscopy(PLSS) to get selectively the particle size information on a surface in optically diffuse material, and we analyzed the experimental results by Mie scattering theory. We found that the PLSS was the proper method fer getting the surface information in optically diffuse material. This method is able to be used in biotechlology area for diagnostics.

• Korean Journal of Optics and Photonics
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• v.3 no.3
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• pp.167-171
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• 1992

We present the static and dynamic light scattering results of the salt induced restructured colloidal silica aggregates. We also report the results from the transmission electron micrographs which confirms the individual sizes of the particles and the local structure of the ramified aggregates. The fractal dimensions of the restructuring silica aggregates are considerably different with in-situ light scattering measurements. The measured fractal dimensions, $D_{F}$, is 2.21 for the 0.5 wt.% concentration of the salt induced Ludox-AM. The Rayleigh linewidth for 0.1 wt.% concentration of Ludox-AM is discussed.

• Journal of Convergence for Information Technology
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• v.11 no.8
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• pp.92-99
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• 2021

Light-scattering fine particulate matter monitors can measure particulate matter (PM) concentrations in every second and can be designed in a portable size. They can measure the concentrations of various PM sizes (PM_1.0, PM_2.5, PM_4.0 and PM₁₀) with a single sensor. They measure the number and size of particulate matters and convert them to weight per volume (concentration). These devices show a large error for asian dust. This paper proposes a scheme that compensates the PM_2.5 concenstration error for asian dust by multiple linear regression machine learning in light-scattering PM monitors. This scheme can be effective with only two or three types of PM sizes. The experimental results compare a beta-ray PM monitor of national institute of environmental research and a light-scattering PM monitor during a month. The correlation coefficient (R²) of theses two devices was 0.927 without asian dust, but it was 0.763 due to asian dust during the entire experimental period and improved to 0.944 by the proposed machine learning.