• Title/Summary/Keyword: 공정메커니즘

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Selective Oxidation of Hydrogen Sulfide Containing Ammonia and Water Using Fe2O3/SiO2 Catalyst (Fe2O3/SiO2 촉매 상에서 물과 암모니아가 함께 존재하는 황화수소의 선택적 산화 반응)

  • Kim, Moon-Il;Lee, Gu-Hwa;Chun, Sung-Woo;Park, Dae-Won
    • Korean Chemical Engineering Research
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    • v.50 no.3
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    • pp.398-402
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    • 2012
  • The catalytic performance of some metal oxides in the vapor phase selective oxidation of $H_2S$ in the stream containing ammonia and water was investigated. Among the catalysts tested $Fe_2O_3/SiO_2$ was the most promising catalyst for practical application. It showed higher than 90% $H_2S$ conversion and very small amount of $SO_2$ emission over a temperature range of $240{\sim}280^{\circ}C$. The effects of reaction temperature, $O_2/H_2S$ ratio, amount of ammonia and water vapor on the catalytic activity of $Fe_2O_3/SiO_2$ were discussed to better understand the reaction mechanism. The $H_2S$ conversion showed a maximum at $260^{\circ}C$ and it decreased with increasing temperature over $280^{\circ}C$. With an increase of $O_2/H_2S$ ratio from 0.5 to 4, the conversion was slightly increased, but the selectivity to elemental sulfur was remarkably decreased. The increase of ammonia amount favored the conversion and the selectivity to elemental sulfur with a decrease in $SO_2$ production. The presence of water vapor decreased both the activity and the selectivity to sulfur, but increased the ATS selectivity.

2D/3D Visual Optical Inspection System for Quad Chip (Quad Chip 외관 불량 검사를 위한 2D/3D 광학 시스템)

  • Han, Chang Ho;Lee, Sangjoon;Park, Chul-Geon;Lee, Ji Yeon;Ryu, Young-Kee;Ko, Kuk Won
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.1
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    • pp.684-692
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    • 2016
  • In the manufacturing process of the LQFP/TQFP (Low-profile Quad Flat Package/Thin Quad Flat Package), the requirement of a 3 dimensional inspection is increasing rapidly and a 3D inspection of the shape of a chip has become an important report of quality control. This study developed a 3 dimensional measurement system based on PMP (Phase Measuring Profilometry) for an inspection of the LQFP/TQFP chip and image processing algorithms. The defects of the LQFP/TQFP chip were classified according to the dimensions. The 2 dimensional optical system was designed by the dorm illumination to achieve constant light distribution, In the 3 dimensional optical system, PZT was used for moving 90 degree in phase. The problem of 2 ambiguity was solved from the measured moir? pattern using the ambiguity elimination algorithm that finds the point of ambiguity and refines the phase value. The proposed 3D measurement system was evaluated experimentally.

Dechlorination/Solidification of LiCl Waste by Using a Synthetic Inorganic Composite with Different Compositions (합성무기복합체 조성변화에 따른 모의 LiCl 염폐기물의 탈염소화/고형화)

  • Kim, Na-Young;Cho, In Hak;Park, Hwan-Seo;Ahn, Do-Hee
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.14 no.3
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    • pp.211-221
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    • 2016
  • Waste salt generated from a pyro-processing for the recovery of uranium and transuranic elements has high volatility at vitrification temperature and low compatibility in conventional waste glasses. For this reason, KAERI (Korea Atomic Energy Research Institute) suggested a new method to de-chlorinate waste salt by using an inorganic composite named SAP ($SiO_2-Al_2O_3-P_2O_5$). In this study, the de-chlorination behavior of waste salt and the microstructure of consolidated form were examined by adding $B_2O_3$ and $Fe_2O_3$ to the original SAP composition. De-chlorination behavior of metal chloride waste was slightly changed with given compositions, compared with that of original SAP. In the consolidated forms, the phase separation between Si-rich phase and P-rich phase decreases with the amount of $Al_2O_3$ or $B_2O_3$ as a connecting agent between Si and P-rich phase. The results of PCT (Product Consistency Test) indicated that the leach-resistance of consolidated forms out of reference composition was lowered, even though the leach-resistance was higher than that of EA (Environmental Assessment) glass. From these results, it could be inferred that the change in the content of Al or B in U-SAP affected the microstructure and leach-resistance of consolidated form. Further studies related with correlation between composition and characteristics of wasteform are required for a better understanding.

Etching properties of $Na_{0.5}K_{0.5}NbO_2$ thin film using inductively coupled plasma (유도결합 플라즈마를 이용한 $Na_{0.5}K_{0.5}NbO_2$ 박막의 식각 특성)

  • Kim, Gwan-Ha;Kim, Kyoung-Tae;Kim, Jong-Gyu;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.116-116
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    • 2007
  • 21 세기에 접어들면서 인터넷을 통한 정보 통신의 발달과 개인 휴대용 이동 통신기기의 활발한 보급에 따라 휴대형 전자기기들의 소형화와 고성능화로 나아가고 있다. 이러한 전자기기에 사용될 IC의 내장 메모리 또한 집적화 및 고속화, 저 전력화가 이루어져야 한다. 이러한 전자기기들에 필수적인 압전 세라믹스 부품 중 압전 부저 및 기타 음향 부품등을 각종 전자기기와 무선 전화기에 채택함으로써 압전 부품에 대한 수요와 생산이 계속 증가할 것으로 전망된다. 이처럼 압전 세라믹스를 이용한 그 응용 범위는 대단히 방대하며, 현재 모든 압전 부품들은 PZT 계열 재료로 만들어지고 있고, 차후 모두 비납계열 재료로 대체될 것이 확실시된다. Pb의 환경오염은 이미 오래전부터 큰 문제점으로 인식되고 있었으며 그 일례로 미국의 캘리포니아 주에서는 1986년부터 약 800종의 유해물질, 그 중에서도 Pb 사용을 300ppm 이하로 규제하는 Proposition 65를 제정하여 실행하고 있다. 그리고 2003년 2월에 EU (European Union) 에서 발표한 전자산업에 관한 규제 사항중 하나인 위험물질 사용에 관한 지칭 (Restriction of Hazardous Substance, RoHS) 에 의하면, 2006 년 7월부터 전기 전자 제품에 있어서 위험 물질인 Pb을 포함한 중금속 물질(카드늄, 수은, 6가 크롬, 브롬계 난연재)의 사용을 금지한다고 발표하였다. 비록 전자세라믹 부품에 함유된 Pb는 예외 사항으로 두었지만 대체 가능한 물질이 개발되면 전자세라믹 부품에서도 Pb의 사용을 금지한다고 규정하였다. 더욱이 일본은 2005 년부터 Pb 사용을 금지시켰다. 이와 같이 Pb가 환경에 미치는 영향 때문에 비납계 강유전 물질 및 압전 세라믹스 재료에 대한 연구가 전 세계적으로 활발히 진행되고 있다. 본 연구에서는 비납계 강유전체의 patterning을 위해서, NKN 박막을 고밀도 플라즈마원인 ICP를 이용하여 식각 mechanism을 연구하고, 식각변수에 따른 식각 공정을 최적화에 대하여 연구하였다. 가스 혼합비에 따라 식각 할때 700 W의 RF 전력과 - 150 V의 직류 바이어스 전압을 인가하였고, 공정 압력은 2 Pa, 기판 온도는 $23^{\circ}C$로 고정하였다. 식각 속도는 Tencor사의 Alpha-step 500을 이용하여 측정되었으며 식각 시 NKN 박막 표면과 라디칼과의 화학적인 반응을 분석하고 식각 메커니즘을 규명하기 위하여 XPS(x-ray photoelectron spectroscopy)를 사용하였다.

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Characteristics of carbon dioxide separation using amine functionalized carbon (아민기 개질 탄소를 이용한 이산화탄소 분리 특성)

  • Cha, Wang Seog;Lim, Byeong Jun;Kim, Jun Su;Lee, Sung Youn;Park, Tae Jun;Jang, Hyun Tae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.4
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    • pp.17-24
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    • 2021
  • The development of a new sorbent for carbon dioxide depends on several factors, such as fast adsorption/absorption velocity, hydrophobicity, and lower regeneration temperature than commercial sorbent. In this study, aminosilane grafted activated carbon was synthesized to capture CO2. Methyltrimethoxysilane (MTMS) and 3-aminopropyl-triethoxysilane (APTES) were used as the grafting precursor of the amine functional group. The APTES grafting activated carbon showed higher sorption property than MTMS used one. The characteristics of the separation mechanism of carbon dioxide were examined by measuring the adsorption capacity according to temperature and carbon dioxide partial pressure. The absorption capacity of carbon dioxide was similar to amine grafting activated carbon and activated carbon at 25℃, but amine-grafted activated carbon was higher at 75℃. The amine functional group-grafted activated carbon showed higher absorption capacity than activated carbon with a 1% carbon dioxide partial pressure. Aminosilane grafting of activated carbon was chemically absorbed but also showed the characteristics of physical adsorption. The reforming activated carbon with an amine functional group grafted solid absorption/adsorption sorbent would significantly impact the material engineering industry and carbon dioxide adsorption process. The functionalized sorbent is a high-performance composite material. The developed sorbent may have applications in other industrial processes of absorption/adsorption and separation.

Adsorption Characteristics of Methyl Orange on Ginkgo Shell-Based Activated Carbon (은행 껍질 기반 활성탄의 메틸오렌지 흡착 특성)

  • Lee, Jeong Moon;Lee, Eun Ji;Shim, Wang Geun
    • Applied Chemistry for Engineering
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    • v.33 no.6
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    • pp.636-645
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    • 2022
  • In this study, we investigated the adsorption characteristics of methyl orange (MO), an anionic dye, on ginkgo shell-based activated carbon (AC). For this purpose, ACs (GS-1, GS-2, and GS-4) with different textural properties were prepared using ginkgo shells and potassium hydroxide (KOH), a representative chemical activating agent. The correlation between the textural characteristics of AC prepared and the mixing ratio of KOH was investigated using nitrogen adsorption/desorption isotherms. The MO adsorption equilibrium experiment on the prepared ACs was conducted under different pH (pH 3~11) and temperature (298~318 K) conditions, and the results were investigated by Langmuir, Freundlich, Sips and temperature-dependent Sips equations. The feasibility of the MO adsorption treatment process of the prepared AC was also investigated using the dimensionless Langmuir separation factor. The heterogeneous adsorption properties of MO for the prepared AC examined using the adsorption energy distribution function (AED) were closely related to the system temperature and textural characteristics of AC. The kinetic results of the batch adsorption performed at different temperatures can be satisfactorily explained by the homogeneous surface diffusion model (HSDM), which takes into account the external mass transfer, intraparticle diffusion, and active site adsorption. The relationship between the activation energy value obtained by the Arrhenius plot and the adsorption energy distribution function value was also investigated. In addition, the adsorption process mechanism of MO on the prepared AC was evaluated using Biot number.

Ultrasonic Immersion-steam Cleaning and High Temperature Drying Process for Removing Cutting Oil on Titanium Turning Scraps (타이타늄 터닝 스크랩 내 절삭유 제거를 위한 초음파 침지-스팀 및 고온 건조 공정)

  • Chae, Jikwang;Yoo, Suhwan;Oh, Jung-Min;Lim, Jae-Won
    • Resources Recycling
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    • v.30 no.1
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    • pp.60-65
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    • 2021
  • The recycling of titanium turning scraps requires the removal of cutting oil and other contaminants remaining on the surface. In this study, an experiment was conducted in which titanium scraps were cleaned by a combination of ultrasonic immersion-steam cleaning and subsequent drying at high temperature. To determine the removal mechanism of cutting oil, the contact angle between titanium surface and cutting oil was measured. The result confirmed the optimum condition of the immersion solution of the titanium turning scraps. In the case of immersion cleaning of Na4P2O7 aqueous solution, the degree of carbon removed in the cutting oil was the highest at 50℃, and it was confirmed that the carbon content obtained from the combination of steam cleaning and ultrasonic immersion-steam cleaning was lower than that from steam cleaning after ultrasonic immersion. The oxidation and decomposition behaviors of cutting oil were investigated using Thermogravimetric analysis (TGA) and the result was applied in the high temperature drying process. From the results of the high temperature drying tests, it was concluded that 200℃ is the optimal drying temperature.

Degradation of Triclosan by the Photolysis, the Fenton, and the Hybrid Reaction with Fe$^{2+}$ and UV : A Comparative Study (광반응, 펜톤, 그리고 Fe$^{2+}$와 UV의 조합반응을 이용한 Triclosan의 분해 : 공정 비교 연구)

  • Son, Hyun-Seok;Zoh, Kyung-Duk
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.5
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    • pp.517-523
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    • 2008
  • The degradation mechanism of Triclosan(TCS), which is a potent broad-spectrum antimicrobial agent and has been considered as an emerging pollutant, was investigated in the Fenton and the hybrid reaction with Fe$^{2+}$ and UV-C. The results show that the Fe$^{2+}$ is oxidized to 30% by $H_2O_2$, 28% by UV-C, and 15% by UV-A for 10 min. The degradation rate of TCS for beginning time(10 min) was higher in UV-C only reaction than that in hybrid reaction, which of the order was inverted according to the lapse of reaction time. The effect of methanol was the greatest in Fenton reaction, in which the degradation rate of TCS decreased from 90% to 5% by the addition of methanol. Chloride, ionic intermediate, was produced to 77% for 150 min of hybrid reaction(Fe$^{2+}$ + UV-C), which was the greatest. In case with methanol, the generation rate of chloride for 15 min was ignorable in all reactions($\leq$2%) but the hybrid reaction with Fe$^{2+}$ and UV-C(12%). Additionally, the removal rate of TOC in each reaction was estimated as the followed orders; Fe$^{2+}$ + UV-C > Fe$^{2+}$ + $H_2O_2$ > Fe$^{2+}$ + UV-A > UV-C > UV-A. However, the Fenton reaction was almost stopped after 90 min because the reaction between Fe$^{2+}$ and $H_2O_2$ cannot be kept on without adding the oxidant. The phenomena was not observed in the hybrid reaction. In view of generating chloride, the reductive degradation of TCS may be in the hybrid reaction with Fe$^{2+}$ and UV-C, which is favorable to mineralize halogenated organic compounds such as TCS. Consequently, the hybrid process with Fe$^{2+}$ and UV-C may be considered as the alternative treatment method for TCS.

Understanding the Electrical Property of Si-doped β-Ga2O3 via Thermal Annealing Process (열처리 공정을 이용한 Si-doped β-Ga2O3 박막의 전기적 특성의 이해)

  • Lee, Gyeongryul;Park, Ryubin;Chung, Roy Byung Kyu
    • Journal of the Microelectronics and Packaging Society
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    • v.27 no.4
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    • pp.19-24
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    • 2020
  • In this work, the electrical property of Si-doped β-Ga2O3 was investigated via a post-growth annealing process. The Ga2O3 samples were annealed under air (O-rich) or N2 (O-deficient) ambient at 800~1,200℃ for 30 mins. There was no correlation between the crystalline quality and the electrical conductivity of the films within the experimental conditions explored in this work. However, it was observed the air ambient led to severe degradation of the film's electrical conductivity while N2-annealed samples exhibited improvement in both the carrier concentration and Hall mobility measured at room temperature. Interestingly, the x-ray photoemission spectroscopy (XPS) revealed that both annealing conditions resulted in higher concentration of oxygen vacancy (VO). Although it was a slight increase for the air-annealed sample, high resistivity of the film strongly suggests that VO cannot be a shallow donor in β-Ga2O3. Therefore, the enhancement of the electrical conductivity of N2-annealed samples must be originated from something other than VO. One possibility is the activation of Si. The XPS analysis of N2-annealed samples showed increasing relative peak area of Si 2p associated with SiOx with increasing annealing temperature from 800 to 1,200℃. However, it was unclear whether or not this SiOx was responsible for the improvement as the electrical conductivity quickly degraded above 1,000℃ even under N2 ambient. Furthermore, XPS suggested the concentration of Si actually increased near the surface as opposed to the shift of the binding energy of Si from its initial chemical state to SiOx state. This study illustrates the electrical changes induced by a post-growth thermal annealing process can be utilized to probe the chemical and electrical states of vacancies and dopants for better understanding of the electrical property of Si-doped β-Ga2O3.

Water Digital Twin for High-tech Electronics Industrial Wastewater Treatment System (I): e-ASM Development and Digital Simulation Implementation (첨단 전자산업 폐수처리시설의 Water Digital Twin(I): e-ASM 모델 개발과 Digital Simulation 구현)

  • Shim, Yerim;Lee, Nahui;Jeong, Chanhyeok;Heo, SungKu;Kim, SangYoon;Nam, KiJeon;Yoo, ChangKyoo
    • Clean Technology
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    • v.28 no.1
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    • pp.63-78
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    • 2022
  • Electronics industrial wastewater treatment facilities release organic wastewaters containing high concentrations of organic pollutants and more than 20 toxic non-biodegradable pollutants. One of the major challenges of the fourth industrial revolution era for the electronics industry is how to treat electronics industrial wastewater efficiently. Therefore, it is necessary to develop an electronics industrial wastewater modeling technique that can evaluate the removal efficiency of organic pollutants, such as chemical oxygen demand (COD), total nitrogen (TN), total phosphorous (TP), and tetramethylammonium hydroxide (TMAH), by digital twinning an electronics industrial organic wastewater treatment facility in a cyber physical system (CPS). In this study, an electronics industrial wastewater activated sludge model (e-ASM) was developed based on the theoretical reaction rates for the removal mechanisms of electronics industrial wastewater considering the growth and decay of micro-organisms. The developed e-ASM can model complex biological removal mechanisms, such as the inhibition of nitrification micro-organisms by non-biodegradable organic pollutants including TMAH, as well as the oxidation, nitrification, and denitrification processes. The proposed e-ASM can be implemented as a Water Digital Twin for real electronics industrial wastewater treatment systems and be utilized for process modeling, effluent quality prediction, process selection, and design efficiency across varying influent characteristics on a CPS.