• 제목/요약/키워드: 공정감시

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Data-based On-line Diagnosis Using Multivariate Statistical Techniques (다변량 통계기법을 활용한 데이터기반 실시간 진단)

  • Cho, Hyun-Woo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.1
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    • pp.538-543
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    • 2016
  • For a good product quality and plant safety, it is necessary to implement the on-line monitoring and diagnosis schemes of industrial processes. Combined with monitoring systems, reliable diagnosis schemes seek to find assignable causes of the process variables responsible for faults or special events in processes. This study deals with the real-time diagnosis of complicated industrial processes from the intelligent use of multivariate statistical techniques. The presented diagnosis scheme consists of a classification-based diagnosis using nonlinear representation and filtering of process data. A case study based on the simulation data was conducted, and the diagnosis results were obtained using different diagnosis schemes. In addition, the choice of future estimation methods was evaluated. The results showed that the performance of the presented scheme outperformed the other schemes.

Modeling of Plasma Etching by Using Neural Network and Optical Emission Spectroscopy (광방사분광기와 신경망을 이용한 플라즈마 식각공정 모델링)

  • Kwon, Min-Ji;Kim, Byung-Whan
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1807-1808
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    • 2007
  • 본 연구에서는 반도체 플라즈마 공정감시와 제어에 응용될 수 있는 모델을 제안한다. 본 모델은 광반사분광기(OES)정보와 신경망을 이용해서 개발하였으며, OES의 차수를 줄이기 위해 주인자 분석을 세 종류의 분산 (100, 99, 98%)에 대해서 적용하였다. 모델의 예측성능은 유전자 알고리즘을 이용하여 최적화하였다. 제안하는 모델링 방식은 MERIE를 이용한 Oxide 식각공정에 적용하였으며, 개발된 모델은 발표된 이전의 모델에 비해 증진된 예측성능을 보였다.

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A Study on Manufacturing Process Control and Monitoring System for Heat-Shrink-Tube Cutting Machine (열 수축 튜브 자동 절단 장치를 위한 공정제어 및 감시 시스템에 관한 연구)

  • Kim, Hyoung-Seok;Lee, Byung-Ryong;Yun, Ho-Young
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.12
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    • pp.1140-1145
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    • 2008
  • In conventional cutting system of Heat-Shrink-Tube, workers operate cutting system after considering about length and quantity of heat-shrink-tube. So, not only work time and production cost is increased but also material is wasted because the data that workers have to consider is so much. In this paper, an effective cutting system of heat-shrink-tube was developed to reduce production cost, work time and waste of material. The cutting system consists of a supervisory computer installed inside a control room, a on-site computer installed on the work area, and a PLC system. In the developed system, a supervisory computer send work order to the on-site computer using LAN and the on-site computer operates the cutting system of the heatshrink-tube after it makes an array production order. Also, the on-site computer reports information to the supervisory computer when an accident happened.