• Title/Summary/Keyword: 공융점

Search Result 12, Processing Time 0.029 seconds

Epitaxial Growth of Nickel Silicide $(NiSi_2)$ in Vacuum Deposited Nickel and Gold Films on (III) Silicon Single Crystals (규소(III) 단 결정에 진공 증착한 닉켈과 금 박막에서 $NiSi_2$의 적층성장)

  • 윤기현;이희수
    • Journal of the Korean Ceramic Society
    • /
    • v.13 no.3
    • /
    • pp.55-62
    • /
    • 1976
  • 순수한 닉켈과 금 박막을 (III)규소 단 결정위에 진공 증착시켰다. Ni/Au/Si나 Au/Ni/Si시료를 진공중에서 약 55$0^{\circ}C$로 가열하였을 때 육방정 혹은 변형된 육방정의 미소 결정들이 규소 기질위에 형성되었다. 이들 미소 결정들의 형성과정 및 조성은 X-선 회절법, scanning electron microscopy 및 scanning Auger microprobe 법을 사용하여 결정하였다. 이들 미소 결정은 NiSi2임이 확인되었다. Ni/Au/Si 시료에서는 Au-Si 공융점(37$0^{\circ}C$) 이상으로 온도가 증가됨에 따라 닉켈과 규소가 Au-Si 공융체 속으로 이동한 후 반응하여 NiSi2를 형성하였다. Au/Ni/Si 시료에 있어서의 Au-Si 공융체 형성은 닉켈 박막에 있는 바늘구멍형의 표면 결함과 관련 지을 수 있겠다. 금이 닉켈 박막의 grain boundary를 통하여 Ni/Si 계면으로 확산되어 그 계면을 습윤시킨 다음 Au-Si 공융체를 형성하였다. 이런 Au-Si 공용체는 닉켈과 규소 원자에 대한 높은 확산 매질로서 작용하여 NiSi2 형성을 촉진시켰다. 표면에 평행한 (III)규소면 위의 NiSi2 미소 결정은 유사한 육방정으로 나타났으며, 경사진 미소결정은 부등변 사변형과 유사하였다. Auger 스펙트럼 및 Ni, Au 및 Si에 대한 내층조성(indepth Composition Profiles)은 NiSi2 미소 결정이 Au-Si 공융체의 matrix에 미소 부분으로 나타났음을 보여주었다.

  • PDF

A Study on the Heat and Mass Transfer Characteristics of Vacuum Freeze Drying Process for Porous Media (다공성 물길의 진공동결건조과정에서 얼 및 물질전달 특성에 관한 연구)

  • c. s. song
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.25 no.6
    • /
    • pp.1341-1352
    • /
    • 2001
  • Vacuum freeze drying process by which frozen water in a drying material is removed sublimation under vacuum condition, is now applied to various industrial field such as the manufacturing and packaging of pharmaceuticals in pharmaceutical industry, the drying of bio- products in bio-technology industry, the treatment of various quality food stuff in food technology, and so on. The Knowledge about the heat and mass transfer characteristics related with the vacuum freeze drying process is crucial to improve the efficiency of the process as well as the quality of dried products. In spite of increasing needs for understanding of the process, the research efforts in this fields are still insufficient. In this paper, a numerical code that can predict primary drying in a vial is developed based on the finite volume method with a moving grid system. The calculation program can handle the axis- symmetric and multi-dimensional characteristics of heat and mass transfer of the vial freeze drying process. To demonstrated the usefulness of the present analysis, a practical freeze drying of skim Milk solution in a vial is simulated and various calculation results are presented.

  • PDF

Design and Fabrication of MEMS Condenser Microphone Using Wafer Bonding Technology (기판접합기술을 이용한 MEMS 컨덴서 마이크로폰의 설계와 제작)

  • Kwon, Hyu-Sang;Lee, Kwang-Cheol
    • Transactions of the Korean Society for Noise and Vibration Engineering
    • /
    • v.16 no.12 s.117
    • /
    • pp.1272-1278
    • /
    • 2006
  • This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{\times}2.5mm$, 0.5${\mu}m$ thick low stress silicon nitride membrane, $2mm{\times}2mm$ Au/Ni/Cr membrane electrode, and 3${\mu}m$ thick Au/Sn layer. The backplate chip has $2mm{\times}2mm$, 150${\mu}m$ thick single crystal silicon rigid backplate, $1.8mm{\times}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{\sim}60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${\mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

Wafer-Level Package of RF MEMS Switch using Au/Sn Eutectic Bonding and Glass Dry Etch (금/주석 공융점 접합과 유리 기판의 건식 식각을 이용한 고주파 MEMS 스위치의 기판 단위 실장)

  • Kang, Sung-Chan;Jang, Yeon-Su;Kim, Hyeon-Cheol;Chun, Kuk-Jin
    • Journal of Sensor Science and Technology
    • /
    • v.20 no.1
    • /
    • pp.58-63
    • /
    • 2011
  • A low loss radio frequency(RF) micro electro mechanical systems(MEMS) switch driven by a low actuation voltage was designed for the development of a new RF MEMS switch. The RF MEMS switch should be encapsulated. The glass cap and fabricated RF MEMS switch were assembled by the Au/Sn eutectic bonding principle for wafer-level packaging. The through-vias on the glass substrate was made by the glass dry etching and Au electroplating process. The packaged RF MEMS switch had an actuation voltage of 12.5 V, an insertion loss below 0.25 dB, a return loss above 16.6 dB, and an isolation value above 41.4 dB at 6 GHz.

An Influence of Corium Composition Variations on a Spontaneous Steam Explosion in Severe Accidents in a Nuclear Reactor (원자로 노심용융물의 성분비 변화가 증기폭발에 미치는 영향)

  • Kim, Jong-Hwan;Park, Ik-Kyu;Hong, Seong-Wan;Min, Beong-Tae;Song, Jin-Ho;Kim, Hee-Dong
    • Proceedings of the KSME Conference
    • /
    • 2004.04a
    • /
    • pp.2041-2046
    • /
    • 2004
  • Recently series of steam explosion experiments have been performed in the TROI facility to identify the influence of corium compositions on the occurrence of a spontaneous steam explosion varying corium melt composition. The compositions of the corium were 0 : 100, 50 : 50, 70 : 30, 80 : 20 and 87 : 13 at weight percent of $UO_2$ to $ZrO_2$, and the mass of the corium was about 10kg. Corium melt at 0 : 100 weight percent (pure zirconia) caused a strong spontaneous steam explosion, and melt at 70 : 30 weight percent(eutectic corium) led to a weak steam spike, while melts at other compositions did not result in spontaneous steam explosions, when they came into contact with 67cm deep water pool at room temperature. It seems that the explosivity of pure zirconia is stronger than that of corium at other compositions and a steam explosion is not likely to occur with corium melts at non-eutectic compositions which are included in mushy zone region.

  • PDF

Influence of Ceramide III on the Structure of a Phospholipid Lamellar Liquid Crystalline Phase Hydrated in Glycerin : Structural and Thermal Behaviors (Glycerin에 수화된 인지질 라멜라 액정상의 구조에 미치는 Ceramide 3의 영향 : 구조적 및 열적거동)

  • Jeong, Kwan-Young;Lee, Dong-Kyu
    • Applied Chemistry for Engineering
    • /
    • v.21 no.6
    • /
    • pp.603-609
    • /
    • 2010
  • This paper aims to investigate the lyotropic behaviors of DSPC and CER3 when they are swollen by GLY as a solvent. The analyses were carried out on DSC, XRDs, PM, and Cryo-SEM. CER3 which has its high crystallinity and structural similarity with DSPC was well arranged up to 7.0 wt% in comparison to 20 wt% DSPC without any separation, but it was separated from the liquid crystalline (LC) phase to form another crystalline phase with the expression of its characteristic peak in XRDs and eutectic thermal behavior in DSC. Introducing CER3, two types of patterns were shown in XRD spectra; one is SPP expressed in a normal LC and another is LPP expressed in human skin SC. Therefore, it was confirmed that the incorporation of CER3 makes LC structure more similar to human skin. In Cryo-SEM study, it was shown that CER3 makes LC structure thicker and denser.

바이오 센서 응용을 위한 Tree-like 실리콘 나노와이어의 표면성장 및 특성파악

  • An, Chi-Seong;Kulkarni, Atul;Kim, Ho-Jung;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.08a
    • /
    • pp.346-346
    • /
    • 2011
  • 실리콘 나노와이어는 높은 표면적으로 인해 뛰어난 감지 능력을 가지는 재료 중 하나로 다양한 센서 응용 분야에 사용되고 있다. 이를 제작하는 방법에는 Micro Electro Mechanical Systems (MEMS) 공정을 이용한 Top-down 방식과 Vapor-Liquid-Solid (VLS) 공정을 이용한 Bottom-up 방식이 널리 사용되고 있다. 특히 Plasma-Enhanced Chemical Vapor Deposition(PECVD)와 Au 촉매를 이용한 Bottom-up 방식은 수십 나노미터 이하의 실리콘 나노와이어를 간단한 변수 조절을 통해 성장시킬 수 있다. 또한 Au/Si의 공융점인 363$^{\circ}C$보다 낮은 온도에서 $SiH_4$를 분해시킬 수 있어 열적 효과로 인한 손실을 줄일 수 있는 장점을 지니고 있다. 하지만 PECVD를 이용한 실리콘 나노와이어 성장은 VLS 공정을 통해 표면으로부터 수직으로 성장하게 되는데 이는 센서 응용을 위한 전극 사이의 수평 연결 어려움을 지니고 있다. 따라서 이를 피하기 위한 표면 성장된 실리콘 나노와이어가 요구된다. 본 연구에서는 PECVD VLS 공정을 이용하여 $HAuCl_4$를 촉매로 이용한 표면 성장된 Tree-like 실리콘 나노와이어를 성장시켰다. 공정가스로는 $SiH_4$와 이를 분해시키기 위해 Ar 플라즈마를 사용 하였고 웨이퍼 표면에 HAuCl4를 분사하고 고진공 상태에서 챔버 기판을 370$^{\circ}C$까지 가열한 후 플라즈마 파워(W) 및 공정 압력(mTorr)을 변수로 두어 실험을 진행하였다. 기존의 보고된 연구와 달리 환원된 금 입자 대신 $HAuCl_4$용액을 그대로 사용하였는데 이는 표면 조도(Surface roughness)를 가지는 Au 박막 상태로 존재하게 된다. 이 중 마루(Asperite) 부분에 PECVD로부터 발생된 실리콘 나노 입자가 상대적으로 높은 확률로 흡착하게 되어 실리콘 나노와이어의 표면성장을 유도하게 된다. 성장된 실리콘 나노와이어는 SEM과 EDS를 이용하여 직경, 길이 및 화학적 성분을 측정하였다. 직경은 약 100 nm, 길이는 약 10 ${\mu}m$ 정도로 나타났으며 Tree-like 실리콘 나노와이어가 성장되었다. 향후 전극이 형성된 기판위에 이를 직접 성장시킴으로써 이 물질의 I-V 특성을 파악 할 것이며 이는 센서 응용 분야에 도움이 될 것으로 기대된다.

  • PDF

Studies of Solid-Liquid Phase Equilibria for Mixtures of N-vinyl-2-pyrrolidone+2-pyrrolidone and Growth Rate of N-vinyl-2-pyrrolidone Crystal Using Melt Crystallization (N-vinyl-2-pyrrolidone과 2-pyrrolidone 혼합물의 고-액 상평형 및 용융결정화를 이용한 N-vinyl-2-pyrrolidone의 결정성장속도 연구)

  • Kim, Sun Hyung;Seo, Myoung Do;Tak, Moon Seon;Kim, Woo Sik;Yang, Dae Ryuk;Kang, Jeong Won
    • Korean Chemical Engineering Research
    • /
    • v.51 no.5
    • /
    • pp.587-590
    • /
    • 2013
  • Solid-liquid equilibria for mixtures composed of n-vinyl-2-pyrrolidone (NVP) and 2-pyrrolidone were measured as a basic study for the melt crystallization process to remove 2-pyrrolidone as impurity included in NVP. A differential scanning calorimeter (DSC) and a crystallizer were used and the experimental results obtained from two methods were similar. The mixture showed a eutectic system which has a single composition at the minimum melting temperature. Calculation results from simple thermodynamic equations were found in general agreements with present data. To determine the growth rate of NVP crystal which is important for the design of crystallization process, thicknesses of the crystal were measured with the time using a layer melt crystallizer. The growth rates increased as cooling temperatures decreased. Heat transfer coefficient correlated from present data was found to successfully describe the crystal growth behavior.

A Solid-state 27Al MAS and 3QMAS NMR Study of Basaltic and Phonolitic Silicate Glasses (현무암과 포놀라이트 비정질 규산염의 원자구조 차이에 대한 고상핵자기 공명 분광분석 연구)

  • Park, Sun Young;Lee, Sung Keun
    • Journal of the Mineralogical Society of Korea
    • /
    • v.28 no.1
    • /
    • pp.61-69
    • /
    • 2015
  • While the macroscopic properties and eruption style of basaltic and phonolitic melts are different, the microscopic origins including atomic structures are not well understood. Here we report the atomic structure differences of glass in diopside-anorthite eutectic composition (basaltic glass) and phonolitic glass using high-resolution 1D and 2D solid-state Nuclear Magnetic Resonance (NMR). The $^{27}Al$ MAS NMR spectra for basaltic glass and phonolitic glass show that the full width at half maximum (FWHM) of Al for basaltic glass is about twice than phonolitic glass, suggesting the topological disorder of basaltic magma is larger than that of phonolitic magma. The $^{27}Al$ 3QMAS NMR spectra for basaltic glass and phonolite glass show much improved resolution than the 1D MAS NMR, resolving Al and Al. Approximately 3.3% of Al is observed for basaltic glass, demonstrating the configurational disorder of basaltic magma is larger than phonolitic magma. This result confirms that the topological disorder of Al in basaltic glass is larger than that of phonolitic glass. The observed structural differences between basaltic glass and phonolitic glass can provide an atomistic origin for change of the macroscopic properties with composition including viscosity.

Phase Behavior Study of Fatty Acid Potassium Cream Soaps (지방산 칼륨 Cream Soaps 의 상거동 연구)

  • Noh, Min Joo;Yeo, Hye Lim;Lee, Ji Hyun;Park, Myeong Sam;Lee, Jun Bae;Yoon, Moung Seok
    • Journal of the Society of Cosmetic Scientists of Korea
    • /
    • v.48 no.1
    • /
    • pp.55-64
    • /
    • 2022
  • The potassium cream soap with fatty acid called cleaning foam has a crystal gel structure, and unlike an emulsion system, it is weak to shear stress and shows characteristics that are easily separated under high temperature storage conditions. The crystal gel structure of cleansing foams is significantly influenced by the nature and proportion of fatty acids, degree of neutralization, and the nature and proportion of polyols. In order to investigate the effect of these parameters on the crystal gel structure, a ternary system consisting of water/KOH/fatty acid was investigated in this study. The investigation of differential scanning calorimeter (DSC) revealed that the eutectic point was found at the ratio of myristic acid (MA) : stearic acid (SA) = 3 : 1 and ternary systems were the most stable at the eutectic point. However, the increase in fatty acid content had little effect on stability. On the basis of viscosity and polarized optical microscopy (POM) measurements, the optimum degree of neutralization was found to be about 75%. The system was stable when the melting point (Tm) of the ternary system was higher than the storage temperature and the crystal phase was transferred to lamellar gel phase, but the increase in fatty acid content had little effect on stability. The addition of polyols to the ternary system played an important role in changing the Tm and causing phase transition. The structure of the cleansing foams were confirmed through cryogenic scanning electron microscope (Cryo-SEM), small and wide angle X-ray scattering (SAXS and WAXS) analysis. Since butylene glycol (BG), propylene glycol (PG), and dipropylene glycol (DPG) lowered the Tm and hindered the lamellar gel formation, they were unsuitable for the formation of stable cleansing foam. In contrast, glycerin, PEG-400, and sorbitol increased the Tm, and facilitated the formation of lamellar gel phase, which led to a stable ternary system. Glycerin was found to be the most optimal agent to prepare a cleansing foam with enhanced stability.