• Air Cleaning Technology
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• v.17 no.4 s.67
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• pp.39-57
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• 2004

첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2003.05a
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• pp.87-90
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• 2003

It has been well known that the major feature of compressible flow fields might be different depending on their formation processes. The objectives of the present study is to investigates the effect of jet development on the time history of supersonic jet flow field, accompanying nonequilibrium condensation. Especially, the behaviors of Mach disk diameter and location in a supersonic moist air jet are presented in terms of nozzle pressure ratio and initial relative humidity. The relative humidity of moist air is controlled at the nozzle supply, and the nozzle pressure ratio is varied to obtain the moderately underexpanded flows at the exit of the nozzle, installed in an indraft wind tunnel. It is found that at the same pressure ratio the Mach disk diameter increases with the initial relative humidity, while moves further upstream. Furthermore, the values of Mach disk diameter and location for increasing pressure ratio show larger than those for increasing.

• Journal of the Korean Solar Energy Society
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• v.31 no.6
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• pp.40-48
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• 2011

과냉 촉진을 위한 새로운 열교환기(HESC)가 생활공간의 냉난방을 위한 공기-물 열펌프의 성능계수 향상을 위해 본 연구에서 개발되었으며 그 효과를 실험적으로 분석하였다. 이 열교환기(HESC)는 여러 단계의 셀과 튜브로 구성되어 있으며, 열펌프 시스템의 응축기와 증발기 사이에 장착되었다. 실험 조건으로, 외기온은 $7^{\circ}C$에서 $-17^{\circ}C$, 입구 물 온도는 $7{\sim}10^{\circ}C$ 그리고 제 2열전달매체로서 물의 질량 유동율은 시간당 100에서 $300{\ell}$로 변화를 주었다. 본 실험에서 이 열교환기가 장착된 열펌프의 압축기에서의 냉매 입 출구 사이의 온도 차이는 열교환기가 장착되지 않은 열펌프보다 $15^{\circ}C$ 높았다. 이에 따라 이 열교환기가 장착된 열펌프 시스템은 외기온 $-10^{\circ}C$에서 COP가 0.8 증가하였다. 따라서 이 공기-물 열펌프 시스템은 최근 한국에서 실용화되고 있는 고비용이 요구되는 지열 열펌프 시스템을 대체하여 생활공간을 위한 냉난방 시스템으로서 중요한 역할을 할 수 있을 것으로 사료된다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.3
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• pp.599-604
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• 2008

An experimental study has been performed to investigate the air-side capacity and pressure drop of the fin-tube heat exchanger for a fan coil unit under a cooling condition. The experimental data of five kinds of slit fin-tube heat exchangers were measured using an air-enthalpy calorimeter and a constant temperature water bath. Cooling capacities at the air and water rating flow rates were larger at the lower inlet water temperature. With increasing the water flow rate, the cooling capacity increased at the constant rate. Under the lower inlet water temperature, since the condensate was generated more on the fin-tube surface, the air-side pressure drop of the heat exchanger was larger.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.10
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• pp.1990-1997
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• 1992

The characteristic of supersonic flow with condensation along a wavy wall of small amplitude in channel is investigated through the direct marching method of characteristics. The very complex problem that may appear where the overlapping of the same family characteristics occurs, can be satisfactorily solved by means of the modified method suggested by Zucrow. In the present study for the case of supersonic moist air flow, the dependency of location of formation and reflection of oblique shock wave generated by the wavy wall, and the distributions of flow properties, on the relative humidity and temperature at the entrance of wavy wall is clarified by plots of streamline, ios-Mach umber and ios-flow properties. Also, it is confirmed that the wavy wall plays an important key role in the formation of oblique shock wave, and that the effect of condensation on the flow field appears apparently.

• Transactions of the Korean Society of Mechanical Engineers
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• v.15 no.5
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• pp.1763-1773
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• 1991

본 연구에서는 포화수증기와 공기의 혼합기내에서 분무수적으로의 열 및 질량 전달률을 계산하기 위하여 수적의 부분혼합모형과 비혼합모형에 대하여 수적내 과도온 도분포의 해석해를 적용성이 보장되면서도 계산상의 어려움이 수반되지 않는 형태로 구하기 위하여 수적내부의 열전도해석에 있어서 적분법을 적용하였다. 적분법으로 얻어지는 과도온도분포의 해는 유한차의 다항식으로 표시되어 비혼합모형인 경우 각시 간 구간의 경계에서의 온도분포가 연속성을 유지하면서 물성치들의 온도에 대한 종속 성이 쉽게 고려되고 계산도 용이한 형태이다. 본 보에서 제시하는 해석결과의 적용 성을 조사하기 위하여 완전혼합모형을 포함하는 세가지 수적모형들에 대한 계산결과들 로부터 얻어진 시간변화에 따른 수적의 무차원 체적평균온도변동을 유효한 실험결과들 과 비교, 검토하였으며, 부분혼합모형에 대하여 혼합기의 압력, 수적의 초기온도, 혼 합기 속에 포함되어 있는 수증기의 체적분율, 수적의 초기크기, 수적의 초기속도 및 분사각도가 주위혼합기로부터 수적으로 전달되는 열 및 질량전달에 미치는 영향을 조] 사하고 도출된 대표적인 검토 결과를 제시하였다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.10
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• pp.2675-2685
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• 1994

A study has been conducted to provide the experimental information for the velocity and temperature profiles of steam-air mixutre and to investigate their roles on the film condensation with wavy interface. Saturated gas mixture of steam-air was made to flow through the nearly horizontal$(4.1^{\circ})$ square duct of 0.1m width and 1.56m length at atmospheric pressure, and was condensated on the bottom cold plate. The air mass fraction in the gas mixture was changed from zero(W =0, pure steam) to one(W =1, pure air), and the bulk velocity was varied from 2 to 4 m/s. Water film was injected concurrently to investigate the effect of wavy interface on the condensation. The velocity and temperature profiles were measured by LDA system and thermocouples along the three parameters ; air mass fraction, mixture velocity and film flow rate. The profiles moved toward the interface with increasing steam mass fraction, mixture velocity and film flow rate. The Prandtl and Schmidt numbers were near one in the present experimental range, however there was no complete similarity between the velocity and temperature profiles of gas mixture. And the heat transfer characteristics and interfacial structure were coupled with each other.

• The KSFM Journal of Fluid Machinery
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• v.19 no.4
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• pp.29-34
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• 2016

In this study, the experimental investigation of air-cooled condensation in slightly inclined circular tubes with and without fins has been conducted. In order to assess the effects of the essential parameters, variable air velocities and steam mass flow rates were given to the test section. The heat transfer performance of air-cooled condensation were dominantly affected by the air velocity, however, the increase of the steam mass flow rate gave relatively weaker effects to total heat transfer capability. And in the experimental cases with the finned tube, the total heat transfer rate of the finned tube was significantly larger than that of the flat tube. From those results, it can be confirmed that the most important parameter for air-cooled condensation heat transfer is the convective heat transfer characteristics of air. Therefore, for the well-designed long-term cooling passive safety system, the consideration of the optimal design of the fin geometry is needed, and the experimental and numerical validations of the heat transfer capability of the finned tube would be required.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.1
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• pp.61-66
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• 2012

In this study, to find the effect of nonequilibrium condensation on the oscillation of the terminating shock wave in transonic flows, an NACA0014 airfoil flow with nonequilibrium condensation is analyzed using the total variation diminishing (TVD) numerical scheme. Transonic free stream Mach numbers of 0.81-0.87 are tested with variations in the stagnation relative humidity. For the same free stream Mach number and attack angle of ${\alpha}=0^{\circ}$, an increase in the stagnation relative humidity attenuates the strength of the terminating shock and reduces the oscillation of the terminating shock wave. Furthermore, for the same stagnation relative humidity, the larger the free stream Mach number becomes, the shorter the period of the oscillation shock wave is. The excursion distance of the oscillation shock increases with the free stream Mach numbers for the same stagnation relative humidity. Finally, it is found that for the same shock location, the strength of the oscillating shock facing upstream is stronger than that facing downstream.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.3
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• pp.1003-1010
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• 2013

In this study, a simulation program was developed, which predicts the performance of cold-air forced circulation type air cooled showcase. The showcase has an excellent display effect in addition to preserving the grocery. In the program, the compressor was analyzed using performance data supplied by the manufacturer and the capillary tube pressure drop was analyzed using a homogeneous model. The evaporator and condenser were analyzed by dividing the heat exchangers into small elements, where energy balance and appropriate heat transfer correlations were used. A showcase model with two 3/4 HP compressors, capillary tubes of 1.6 mm inner diameter, a fin-and-tube evaporator and condenser was tested, and the results are compared with the predicted values. It is shown that both evaporation and condensation temperatures are adequately predicted by the program.